Carrier and horizontal furnace

Abstract

The utility model provides a carrier and a horizontal furnace. The carrier comprises a plurality of graphite plates, a plurality of heating pieces and a plurality of connecting pieces. The graphite plates are arranged in a stacked mode, a gap is formed between every two adjacent layers of graphite plates, a plurality of containing spaces are arranged on the side, facing the gap, of each graphite plate, and the containing spaces arranged on the same side of one graphite plate are arranged at intervals in the length direction of the graphite plate. The heating pieces are arranged in the gaps and are separated from the graphite plate, and the two heating pieces are arranged on the two opposite sides of each containing space in the length direction of the graphite plate respectively. And each connecting piece penetrates through the plurality of graphite plates and the plurality of heating pieces along the stacking direction of the graphite plates so as to fix the plurality of graphite plates and the plurality of heating pieces. The carrier can bear and heat the flaky material, the carrier is placed in the reaction cavity of the horizontal furnace, the distance between the heating piece and the flaky material is small, the heating speed of the flaky material is high, and the coating efficiency of the flaky material can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic material processing, in particular to a carrier and a horizontal furnace. BACKGROUND

[0002] The horizontal furnace has a vacuum reaction cavity, the center of the reaction cavity has a carrier, the carrier can carry a large amount of sheet-shaped materials, and the carrier can be used for coating film processing of the sheet-shaped materials carried by the carrier by providing heat and reaction gas to the reaction cavity.

[0003] In the related art, heating wires are arranged on the inner side wall of the horizontal furnace, and the heating wires generate heat after being electrified to provide heat for the reaction cavity. However, the heating wires have a certain distance from the center of the reaction cavity, so that there is a temperature difference between the inner side wall of the horizontal furnace and the carrier, thereby causing slow heating speed of the sheet-shaped materials and large heating hysteresis of the sheet-shaped materials. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the present application provides a carrier capable of directly heating sheet-shaped materials.

[0005] An embodiment of the present application provides a carrier, which comprises a plurality of graphite plates, a plurality of heating elements and a plurality of connecting elements. The plurality of graphite plates are arranged in layers, and each adjacent two layers of graphite plates have a gap. Each graphite plate is provided with a plurality of receiving spaces on one side facing the gap, and the plurality of receiving spaces provided on the same side of one graphite plate are spaced along the length direction of the graphite plate. The receiving spaces are used for accommodating sheet-shaped materials. The heating elements are arranged in the gaps and are spaced from the graphite plates. Each receiving space is provided with one heating element on each of the opposite sides along the length direction. Each connecting element penetrates the plurality of graphite plates and the plurality of heating elements along the stacking direction of the graphite plates to fix the plurality of graphite plates and the plurality of heating elements.

[0006] In some embodiments of the present application, each connecting element comprises a connecting rod and a plurality of stoppers. There is one stopper connected to the same connecting rod in each gap. The connecting rod extends along the stacking direction and penetrates the plurality of graphite plates and the plurality of heating elements along the stacking direction. The stopper comprises two spacers. The spacers are sleeved on the connecting rod, and the spacers are located between the heating elements and the graphite plates to space the graphite plates and the heating elements.

[0007] In some embodiments of the present application, the stopper further comprises a sleeve ring. There are two heating elements connected to the same connecting rod in each gap. The sleeve ring is sleeved on the connecting rod and located between the two heating elements. The spacers are located between the heating elements and the graphite plates to space the graphite plates and the heating elements.

[0008] In some embodiments of the present application, each heating element is electrically connected with a temperature sensing element, and the plurality of heating elements are electrically connected with a control element. The control element is used for controlling the working of the heating elements, and the temperature sensing element is used for detecting the temperature of the heating elements.

[0009] In some embodiments of the present application, the heating element is plate-shaped, and the heating element extends along the width direction of the graphite plate.

[0010] In some embodiments of the present application, the two connecting rods pass through the same heating element, and the two connecting rods are arranged along the width direction.

[0011] In some embodiments of the present application, the graphite plate is provided with a bearing surface on each of the opposite sides along the stacking direction, the bearing surface is spaced apart along the length direction by a plurality of limiting components, and the bearing surface is spaced apart along the length direction by a plurality of bearing positions, each limiting component and a bearing position form a receiving space.

[0012] In some embodiments of the present application, the limiting component includes a plurality of clamping points, the clamping point has a clamping groove, the clamping groove can accommodate the insertion of the sheet material, and the plurality of clamping points are arranged on the circumferential side of the bearing position to position the sheet material on the bearing position.

[0013] In some embodiments of the present application, the carrier further includes a plurality of first connecting blocks and a plurality of second connecting blocks, the first connecting blocks and the second connecting blocks are respectively arranged on opposite sides along the length direction, in each adjacent two layers of graphite plates, one graphite plate is electrically connected to the first connecting block, and the other graphite plate is electrically connected to the second connecting block, the plurality of first connecting blocks are sequentially electrically connected along the stacking direction, one of the first connecting blocks is provided with a first electrode hole, the plurality of second connecting blocks are sequentially electrically connected along the stacking direction, and one of the second connecting blocks is provided with a second electrode hole.

[0014] In some embodiments of the present application, a horizontal furnace includes the carrier in the previous embodiment, and the horizontal furnace has a reaction cavity capable of accommodating the carrier.

[0015] In some embodiments of the present application, the carrier connects the graphite plate and the heating element through the connecting piece, so that a gap is formed between each adjacent two graphite plates, and the heating element is spaced apart from the graphite plate, the heating element is located in the gap and outside the receiving space, so that the heating element does not interfere with the formation of the potential difference between each adjacent two graphite plates. The heating element in the gap can provide heat for the sheet material in the receiving space, and when each adjacent two graphite plates are electrically connected to radio frequency electricity with different current directions, a potential difference can be formed between each adjacent two graphite plates to discharge the sheet material in the receiving space. Heating and discharging at the same time can be used for coating the sheet material. Therefore, using such a carrier can carry and heat the sheet material, the carrier is placed in the reaction cavity of the horizontal furnace, the distance between the heating element and the sheet material is relatively short, the heating speed of the sheet material is relatively fast, and the coating efficiency of the sheet material is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope.

[0017] Figure 1 The schematic view of the structure of the carrier provided by an embodiment of the present application.

[0018] Figure 2 The schematic view of the structure of the carrier provided by an embodiment of the present application. Figure 1 The schematic view of the structure of the carrier provided by an embodiment of the present application.

[0019] Figure 3 The schematic view of the structure of the carrier provided by an embodiment of the present application. Figure 1 The schematic view of the structure of the carrier provided by an embodiment of the present application.

[0020] Figure 4 The schematic view of the structure of the carrier provided by an embodiment of the present application. Figure 3 The schematic view of the structure of the carrier provided by an embodiment of the present application.

[0021] Figure 5 The schematic view of the structure of the carrier provided by an embodiment of the present application. Figure 1 The schematic view of the structure of the carrier provided by an embodiment of the present application.

[0022] Figure 6 The schematic view of the structure of the carrier provided by an embodiment of the present application. Figure 1 The schematic view of the structure of the carrier provided by an embodiment of the present application.

[0023] Main element symbol explanation:

[0024] 100, carrier; 10, graphite plate; 101, gap; 102, bearing surface; 103, bearing position; 11, limiting assembly; 111, clamping point; 1111, clamping groove; 20, heating element; 30, connecting element; 31, connecting rod; 32, stop element; 321, gasket; 322, collar; 33, fastening nut; 40, first connecting block; 41, first electrode hole; 50, second connecting block; 51, second electrode hole; Z, stacking direction; X, length direction; Y, width direction. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0027] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another. Various features that are described in the context of separate embodiments can be combined with each other, where appropriate.

[0028] The horizontal furnace has a vacuum reaction cavity, and the center of the reaction cavity has a carrier capable of carrying a large amount of sheet materials. The sheet materials carried by the carrier can be coated by providing heat in the reaction cavity and providing reaction gas to the reaction cavity. In the related art, heating wires are arranged on the inner side wall of the horizontal furnace. The heating wires generate heat after being electrified, thereby providing heat for the reaction cavity. However, the heating wires are a certain distance away from the center of the reaction cavity, so that there is a temperature difference between the inner side wall of the horizontal furnace and the carrier, thereby causing the heating speed of the sheet materials to be relatively slow and the sheet materials to have a large heating hysteresis.

[0029] The embodiment of the present application provides a carrier. The carrier comprises a plurality of graphite plates, a plurality of heating pieces and a plurality of connecting pieces. The plurality of graphite plates are arranged in layers, and each adjacent two layers of graphite plates have a gap. Each graphite plate is provided with a plurality of accommodation spaces on one side of the gap. The plurality of accommodation spaces arranged on the same side of one graphite plate are spaced along the length direction of the graphite plate, and the accommodation spaces are used for accommodating sheet materials. The heating pieces are arranged in the gaps and are spaced from the graphite plates. Each accommodation space is provided with one heating piece on each of the opposite sides of the graphite plate along the length direction of the graphite plate. Each connecting piece penetrates the plurality of graphite plates and the plurality of heating pieces along the stacking direction of the graphite plates, so as to fix the plurality of graphite plates and the plurality of heating pieces.

[0030] In the embodiment of the present application, the carrier connects the graphite plates and the heating pieces through the connecting pieces, so that a gap is formed between each adjacent two graphite plates, and the heating pieces are arranged in the gaps and outside the accommodation spaces, so that the heating pieces do not hinder the formation of a potential difference between each adjacent two graphite plates. The heating pieces in the gaps can provide heat for the sheet materials in the accommodation spaces. When each adjacent two graphite plates are electrically connected to radio frequency electricity with different current directions, a potential difference can be formed between each adjacent two graphite plates, so as to discharge the sheet materials in the accommodation spaces. The heating and discharging are performed at the same time, so as to coat the sheet materials. Therefore, the carrier can be used to carry and heat the sheet materials. When the carrier is placed in the reaction cavity of the horizontal furnace, the distance between the heating pieces and the sheet materials is relatively short, the heating speed of the sheet materials is relatively fast, the sheet materials have a small hysteresis, and the coating efficiency of the sheet materials is improved.

[0031] Some embodiments of the present application will be described in detail below with reference to the accompanying drawings. The following embodiments and features in the embodiments can be combined with each other without conflict.

[0032] Please refer to Figure 1 The embodiment of the present application provides a horizontal furnace (not shown in the figure). The horizontal furnace comprises a carrier 100. The horizontal furnace has a reaction cavity capable of accommodating the carrier 100, so that the sheet materials carried by the carrier 100 can react in the reaction cavity.

[0033] In some embodiments, the reaction gas is introduced into the reaction cavity of the horizontal furnace, and the sheet material is provided with a high-temperature environment, so that the sheet material can be plated.

[0034] In some embodiments, the sheet material (not shown in the figure) can be a silicon wafer or a silicon carbide wafer used to make a battery sheet, or a wafer.

[0035] Referring to Figure 2 In some embodiments, the carrier 100 includes a plurality of graphite plates 10, a plurality of heating elements 20, and a plurality of connecting elements 30. The graphite plates 10 can carry and position the sheet material. The heating elements 20 are used to provide heat to the sheet material. The connecting elements 30 are used to connect the plurality of graphite plates 10 and the plurality of heating elements 20.

[0036] Referring to Figure 1 , Figure 3 and Figure 4 The plurality of graphite plates 10 are stacked to form a gap 101 between each adjacent two layers of graphite plates 10. Each graphite plate 10 is provided with a plurality of receiving spaces on one side facing the gap 101. The plurality of receiving spaces provided on the same side of one graphite plate 10 are spaced along the length direction X of the graphite plate 10. The receiving spaces are used to accommodate and position the sheet material, so that the silicon wafer is located between the two layers of graphite plates 10. Each adjacent two layers of graphite plates 10 are electrically connected to radio frequency currents with different current directions, so that a potential difference is formed between each adjacent two layers of graphite plates 10, and each adjacent two layers of graphite plates 10 can discharge to the sheet material in the gap 101.

[0037] The heating elements 20 are arranged in the gap 101. Each connecting element 30 penetrates the plurality of graphite plates 10 and the plurality of heating elements 20 along the stacking direction Z of the graphite plates 10 to fix the plurality of graphite plates 10 and the plurality of heating elements 20, so that the heating elements 20 are spaced apart from the graphite plates 10, and each receiving space is provided with one heating element 20 on each of the opposite sides along the length direction X of the graphite plate 10. In this way, the heating elements 20 do not hinder the formation of a potential difference between each adjacent two layers of graphite plates 10, that is, the heating elements 20 do not block the sheet material and do not affect the plating of the sheet material. In addition, compared with arranging the heating wires on the inner side wall of the horizontal furnace to heat the sheet material, the carrier 100 heats the sheet material so that the distance between the heating elements 20 and the sheet material is relatively short, so that the heating elements 20 can quickly heat the sheet material, and the sheet material has small hysteresis under heat, which is beneficial to improve the plating efficiency of the sheet material.

[0038] Referring to Figure 2In some embodiments, the heating member 20 is in a plate shape, and the heating member 20 extends along the width direction Y of the graphite plate 10, so that the heating member 20 located at the opposite sides of the receiving space along the length direction X of the graphite plate 10 can better heat the sheet material in the receiving space, the heating area is larger, the heating effect is better, the sheet material has small hysteresis under heating, and the film coating efficiency of the sheet material is improved.

[0039] Referring to Figures 3 to 5 In some embodiments, each connecting member 30 includes a connecting rod 31 and a plurality of stoppers 32. The connecting rod 31 extends along the stacking direction Z. There is one stopper 32 in each gap 101 connected to the same connecting rod 31, so as to separate two graphite plates 10 by the stopper 32, so that a gap 101 is formed between each two adjacent graphite plates 10. The connecting rod 31 is arranged in the plurality of graphite plates 10 and the plurality of heating members 20 along the stacking direction Z, so as to fix the positions of the plurality of graphite plates 10 and the plurality of heating members 20. The stopper 32 includes two spacers 321, the spacers 321 are sleeved on the connecting rod 31, and the spacers 321 are located between the heating member 20 and the graphite plate 10, so that the graphite plate 10 and the heating member 20 are arranged in a spaced manner.

[0040] In some embodiments, the stopper 32 further includes a sleeve ring 322, and the sleeve ring 322 is sleeved on the connecting rod 31. There are two heating members 20 in each gap 101 connected to the same connecting rod 31, so as to provide more heat for the sheet material in the receiving space in the gap 101, so as to heat the sheet material faster, and improve the film coating efficiency of the sheet material. The sleeve ring 322 is located between the two heating members 20, so that the two heating members 20 are arranged in a spaced manner.

[0041] In some embodiments, the connecting rod 31 is a ceramic rod. The sleeve ring 322 is a ceramic sleeve ring 322. The spacer 321 is a ceramic spacer 321. The connecting member 30 made of ceramic material is not conductive, and does not interfere with the potential difference between each two adjacent graphite plates 10.

[0042] Referring to Figure 5 In some embodiments, the length of the sleeve ring 322 along the stacking direction Z is greater than the length of the spacer 321 along the extending direction. Thus, among the two heating members 20 connected to the same connecting rod 31 in one gap 101, one heating member 20 is arranged close to one graphite plate 10, respectively.

[0043] Referring to Figure 2In some embodiments, two connecting rods 31 pass through the same heating element 20, and the two connecting rods 31 are arranged at intervals along the width direction Y of the graphite plate 10. The same heating element 20 is fixed to the graphite plate 10 by the two connecting rods 31, which can fix the two ends of the heating element 20 along the width direction Y of the graphite plate 10, and prevent the heating element 20 from moving relative to the graphite plate 10. A stopper 32 is connected to each connecting rod 31, so that the heating element 20 can be more stably arranged at intervals on the graphite plate 10.

[0044] Please refer to Figures 3 to 5 In some embodiments, the connecting member 30 further comprises two fastening nuts 33, which are respectively connected to the two ends of the connecting rod 31 along the stacking direction Z, so as to fix the plurality of graphite plates 10 and the plurality of heating elements 20 arranged along the stacking direction Z.

[0045] In some embodiments, the plurality of heating elements 20 are electrically connected to a control member (not shown in the figure), which is used to control the operation of the heating element 20. Each heating element 20 is electrically connected to a temperature sensing member (not shown in the figure), which is used to detect the temperature of the heating element 20. The control member can adjust the heating power of each heating element 20 according to the temperature detected by the temperature sensing member, so as to adjust the temperature of each heating element 20, so that the sheet-shaped material in the receiving space is properly heated, so as to prevent the sheet-shaped material in the receiving space from being heated too high or too low. In some embodiments, the temperature sensing member is a thermocouple.

[0046] In some embodiments, the heating element 20 is a ceramic heating plate, which can provide heat for the sheet-shaped material after being electrically connected to an electric current.

[0047] In some embodiments, the lead connected to the heating element 20 is connected to the tail of the horizontal furnace, passes through the vacuum electrode flange of the tail of the horizontal furnace to the outside of the reaction chamber, and is connected to ordinary alternating current, so that the heating element 20 provides electric energy, so that the heating element 20 can generate heat, so that the sheet-shaped material can quickly reach the temperature required for coating. The control member is located outside the reaction chamber, which is convenient for controlling the temperature of each heating element 20 and convenient for temperature control for each receiving space.

[0048] In some embodiments, the lead is a high-temperature resistant metal flexible wire, which is provided with a high-temperature fiber sleeve and a ceramic bead. The high-temperature fiber sleeve can better protect the metal flexible wire and improve the service life of the lead. The ceramic bead can play a warning role, which is convenient and fast to find the lead.

[0049] Please refer to Figure 1In some embodiments, the graphite plate 10 is provided with a bearing surface 102 on each of the opposite sides along the stacking direction Z. The bearing surface 102 is spaced apart from the bearing surface 102 along the length direction X of the graphite plate 10 by a plurality of limiting assemblies 11. The bearing surface 102 is spaced apart from the bearing surface 102 along the length direction X of the graphite plate 10 by a plurality of bearing positions 103. Each limiting assembly 11 and a bearing position 103 form a receiving space, i.e., a sheet material is positioned at a bearing position 103 by a limiting assembly 11.

[0050] In some embodiments, in addition to the graphite plates 10 at the topmost layer and the bottommost layer, each graphite plate 10 is provided with a bearing position 103 on each of the opposite sides along the stacking direction Z. Each bearing position 103 is provided with a heating element 20 on each of the opposite sides along the length direction X, and the bearing positions 103 on the opposite sides of the same graphite plate 10 along the stacking direction Z correspond to each other. After the carrier 100 carries a plurality of sheet materials, each of the sheet materials has a corresponding heating element 20 to provide heat, and the plurality of sheet materials can be heated at the same time, which is conducive to coating the plurality of sheet materials at the same time.

[0051] Please refer to Figure 6 In some embodiments, the limiting assembly 11 includes a plurality of clamping points 111. The plurality of clamping points 111 are arranged on the circumferential side of the bearing position 103. The clamping point 111 has a clamping groove 1111, and the depth of the clamping groove 1111 along the stacking direction Z is greater than the thickness of the sheet material. The clamping groove 1111 can accommodate the sheet material to be inserted to position the sheet material at the bearing position 103.

[0052] Please refer to Figure 1 In some embodiments, each limiting assembly 11 includes three clamping points 111. Two clamping points 111 are arranged on the opposite sides of the bearing position 103 along the length direction X of the graphite plate 10, and the other clamping point 111 is arranged on one side of the bearing position 103 along the width direction Y of the graphite plate 10. In this way, the sheet material can be inserted into the receiving space from the other side of the bearing position 103 along the width direction Y of the graphite plate 10.

[0053] In some embodiments, the carrier 100 further includes a plurality of first connecting blocks 40 and a plurality of second connecting blocks 50. The first connecting blocks 40 and the second connecting blocks 50 are arranged on the opposite sides along the length direction X of the graphite plate 10. In each adjacent two layers of graphite plates 10, one graphite plate 10 is electrically connected to the first connecting block 40, and the other graphite plate 10 is electrically connected to the second connecting block 50. The plurality of first connecting blocks 40 are sequentially electrically connected along the stacking direction Z, and one of the first connecting blocks 40 is provided with a first electrode hole 41. The plurality of second connecting blocks 50 are sequentially electrically connected along the stacking direction Z, and one of the second connecting blocks 50 is provided with a second electrode hole 51 (see Figure 3). The radio frequency electricity with different current directions is connected through the first electrode hole 41 and the second electrode hole 51, and the graphite plates 10 are connected with the radio frequency electricity with different current directions, so that the potential difference is formed between each two adjacent graphite plates 10, and the sheet material in the receiving space can be plated.

[0054] In addition, those skilled in the art should understand that the above-mentioned embodiments are only used to illustrate the present application, and are not used as a limitation to the present application, and as long as the above-mentioned embodiments are within the scope of the spirit of the present application, the appropriate changes and changes made to the above-mentioned embodiments are within the scope of the present application.

Claims

1. A carrier, characterized by, The utility model relates to a graphite plate carrier, including: a plurality of graphite plates, a plurality of the graphite plates are arranged in layers, each adjacent two layers of the graphite plates have a gap, each of the graphite plates is provided with a plurality of receiving spaces on one side of the gap, a plurality of the receiving spaces provided on the same side of one of the graphite plates are spaced along the length direction of the graphite plate, and the receiving spaces are used to accommodate sheet materials; a plurality of heating elements, the heating elements are arranged in the gap and are spaced apart from the graphite plates, and each of the receiving spaces is provided with one of the heating elements on opposite sides along the length direction; a plurality of connecting elements, each of the connecting elements penetrates a plurality of the graphite plates and a plurality of the heating elements along the stacking direction of the graphite plates to fix a plurality of the graphite plates and a plurality of the heating elements.

2. The vehicle of claim 1, wherein: Each of the connecting elements includes a connecting rod and a plurality of stoppers, the stoppers connected to the same connecting rod in each of the gaps are one, the connecting rod extends along the stacking direction, the connecting rod penetrates a plurality of the graphite plates and a plurality of the heating elements along the stacking direction, and the stopper includes two pads, the pads are sleeved on the connecting rod, and the pads are located between the heating elements and the graphite plates to space the graphite plates and the heating elements.

3. The carrier of claim 2, wherein: The stopper further includes a sleeve ring, the sleeve ring is sleeved on the connecting rod, the heating elements connected to the same connecting rod in each of the gaps are two, the sleeve ring is located between the two heating elements, and the pads are located between the heating elements and the graphite plates to space the graphite plates and the heating elements.

4. The carrier of claim 2, wherein: Each of the heating elements is electrically connected with a temperature sensor, a plurality of the heating elements are electrically connected with a control element, the control element is used to control the heating elements to work, and the temperature sensor is used to detect the temperature of the heating elements.

5. The carrier of any one of claims 2 to 4, wherein: The heating element is plate-shaped, and the heating element extends along the width direction of the graphite plate.

6. The carrier of claim 5, wherein: Two of the connecting rods penetrate the same heating element, and the two connecting rods are spaced apart along the width direction.

7. The vehicle of claim 1, wherein: The graphite plate is provided with a bearing surface on opposite sides along the stacking direction, the bearing surface is spaced apart along the length direction with a plurality of limiting assemblies, the bearing surface is spaced apart along the length direction with a plurality of bearing positions, and each of the limiting assemblies and one of the bearing positions enclose one of the receiving spaces.

8. The carrier of claim 7, wherein: The limiting assembly includes a plurality of clamping points, the clamping points have clamping grooves, the clamping grooves can accommodate the sheet materials to be inserted, a plurality of the clamping points are arranged on the circumferential side of the bearing position to position the sheet materials in the bearing position.

9. The vehicle of claim 1, wherein: The carrier further includes a plurality of first connecting blocks and a plurality of second connecting blocks, the first connecting blocks and the second connecting blocks are arranged on opposite sides along the length direction, in each adjacent two layers of the graphite plates, one of the graphite plates is electrically connected with the first connecting block, and the other of the graphite plates is electrically connected with the second connecting block, a plurality of the first connecting blocks are sequentially electrically connected along the stacking direction, one of the first connecting blocks is provided with a first electrode hole, a plurality of the second connecting blocks are sequentially electrically connected along the stacking direction, and one of the second connecting blocks is provided with a second electrode hole.

10. A horizontal furnace characterized by The horizontal furnace comprises a reaction cavity capable of accommodating the carrier.

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