Clamp

Abstract

The embodiment of the utility model provides a clamp, which comprises a straight handle part, a clamping part and a clamping part, the straight handle part comprises two clamping arms which are arranged in parallel, and the first ends of the two clamping arms are connected with each other to form a connecting end; the second ends, far away from the connecting end, of the two clamping arms are opened to form free ends; a clamping part is arranged at the free end of each clamping arm; a spacing area with an adjustable distance is arranged between the two clamping parts; by adjusting the distance of the interval area between the two clamping parts, the clamping parts can stretch into the graphite piece, and the graphite piece is clamped and taken out.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, in particular to a clamp. BACKGROUND

[0002] In the common horizontal epitaxial furnace, graphite pieces for adjusting the reaction gas flow field and temperature field are arranged on both sides of the graphite tray. In the epitaxial growth process, the reaction gas flows to the graphite tray through the flow guide groove at the center position of the graphite piece, and the reaction gas will form a deposit on the inner surface of the graphite piece, thereby causing a series of adverse effects.

[0003] When the deposit is formed on the inner surface of the graphite piece, the graphite piece needs to be disassembled and replaced. At present, the common way of disassembling the graphite piece is that the staff puts his hand into the flow guide groove of the graphite piece to take out the graphite piece. However, since the hand directly contacts the graphite piece during disassembly, there is a risk of contaminating the graphite piece, and at the same time, it is difficult to directly put the hand into the flow guide groove, and there is a risk of dropping the graphite piece. SUMMARY

[0004] The purpose of the embodiment of the utility model is to provide a clamp to avoid the pollution caused by the direct contact of the hand with the graphite piece and the dropping of the graphite piece, and to reduce the difficulty of maintenance operation. The specific technical scheme is as follows:

[0005] The utility model provides a clamp, the clamp includes: straight handle part, including two parallelly arranged clamping arms, the first end of the two clamping arms is connected with each other, and is formed into a connecting end, the second end of the two clamping arms is open and is formed into a free end away from the connecting end,

[0006] Each clamping arm is provided with a clamping part at the free end, and the two clamping parts have a distance-adjustable spacing region therebetween, and the distance between the spacing region of the two clamping parts is adjusted to enable the clamping part to extend into the graphite piece, clamp and take out the graphite piece.

[0007] In some embodiments of the utility model, each clamping part has a clamping plane, and the two clamping planes have the distance-adjustable spacing region therebetween, and the two clamping planes can be attached to the inner side wall of the graphite piece when extending into the graphite piece.

[0008] In some embodiments of the utility model, the clamp further comprises at least one elastic element, the elastic element is arranged between the two clamping planes, and the two ends of the elastic element for releasing elastic deformation are connected with the two clamping planes respectively, and the free end after displacement is reset.

[0009] In some embodiments of the utility model, the elastic element is a spring.

[0010] The clamp further comprises a driving part, wherein the driving part comprises a driving lead wire, one end of the driving lead wire is connected with the part of the elastic element used for storing elastic force;

[0011] By pulling the driving lead wire, the two ends of the elastic element connected with the two clamping planes drive the two clamping planes to move towards each other at the same time, so as to adjust the distance between the two clamping planes.

[0012] In some embodiments of the utility model, one of the clamping arms is provided with a track through slot penetrating the clamping arm on the side away from the clamping part, the track through slot extends along the direction from the connecting end to the free end; the other clamping arm is provided with a plurality of positioning holes penetrating the clamping arm; the positioning holes are correspondingly arranged with the track through slot;

[0013] The driving part further comprises a driving pull rod, the driving pull rod comprises a handle part and a straight rod part; the straight rod part is fixedly connected with one end of the driving lead wire away from the elastic element; the straight rod part penetrates the track through slot and can move along the extension direction of the track through slot; the straight rod part can penetrate the positioning hole;

[0014] By inserting the straight rod part into different positioning holes, the elastic element can maintain different deformation states, so as to adjust the distance of the interval region between the two clamping parts.

[0015] In some embodiments of the utility model, the clamping plane is provided with a friction pad on the side away from the interval region, and the friction pad can be attached to the inner side wall of the graphite piece when the two clamping planes extend into the graphite piece.

[0016] In some embodiments of the utility model, the clamping plane is provided with a clamping baffle on the end away from the connecting end, the clamping baffle extends along the vertical direction away from the clamping plane, and the side of the clamping baffle close to the connecting end can be attached to the first outer side wall of the graphite piece when the two clamping planes extend into the graphite piece, so as to drive the graphite piece to move.

[0017] In some embodiments of the utility model, the clamping plane is provided with a limiting baffle on the end close to the connecting end, the limiting baffle extends along the vertical direction away from the clamping plane, and the side of the limiting baffle away from the connecting end can be attached to the second outer side wall of the graphite piece opposite to the first outer side wall when the two clamping planes extend into the graphite piece, so as to limit the movement of the graphite piece.

[0018] In some embodiments of the utility model, the stepped structure is arranged between the clamping part and the clamping arm, so that the distance between the two clamping planes is greater than the distance between the two clamping arms.

[0019] In some embodiments of the utility model, the material of the clamp is Teflon.

[0020] Beneficial effects:

[0021] The utility model discloses a kind of clamps, the straight handle of the clamp is composed of two parallel spaced clamping arms, and one end of the two clamping arms is formed as a connecting end, and the other end is formed as a free end. When the clamping arm is subjected to external force towards the spacing area direction, the free end of each clamping arm can be displaced towards the spacing area between the two clamping arms. At the same time, a clamping part is provided at the free end of each clamping arm, and when the free end is displaced towards the spacing area, the clamping part can also be displaced towards the spacing area.

[0022] In use, the staff presses the two clamping arms of straight handle, so that the clamping part is displaced towards each other. At this time, the distance of spacing area between the two clamping parts is reduced, and the clamping part can be inserted into the flow guide groove of graphite piece. After the clamping part is inserted into the flow guide groove, the staff stops pressing, and under the action of the elastic force of the clamp itself, the clamping arm resets, so that each clamping part can be attached to the inner side wall of the flow guide groove. At this time, the staff drags the clamp, and under the action of friction between the clamping part and graphite piece, the graphite piece is taken out of the epitaxial furnace.

[0023] In the process of disassembling and assembling graphite piece, the staff uses the clamp to clamp the graphite piece, which avoids the pollution caused by direct contact of hand with graphite piece and the risk of graphite piece falling caused by hand operation, and clamping by the clamp effectively reduces the difficulty of maintenance operation.

[0024] Of course, implementing any product of the utility model does not necessarily need to achieve all the advantages described above. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can also be obtained by those skilled in the art according to these drawings.

[0026] Figure 1 It is a structure schematic view when graphite piece is located in epitaxial furnace.

[0027] Figure 2 It is a structure schematic view when graphite piece is combined graphite piece and located in epitaxial furnace.

[0028] Figure 3 For Figure 1 The structure schematic diagram of the graphite piece is deposited in the middle and upper stream;

[0029] Figure 4 The structure schematic diagram of the clamp is provided in the utility model;

[0030] Figure 5 For Figure 4 The structure schematic diagram of the clamp is provided in the utility model;

[0031] Figure 6 For Figure 3 The structure schematic diagram of the clamp is provided in the utility model;

[0032] Figure 7 For Figure 4 The structure schematic diagram of the clamp is provided in the utility model;

[0033] Figure 8 For Figure 7 The structure schematic diagram of the clamp is provided in the utility model;

[0034] Figure 9 For Figure 8 The structure schematic diagram of the clamp is provided in the utility model;

[0035] Figure 10 For Figure 4 The structure schematic diagram of the clamp is provided in the utility model;

[0036] Figure 11 For Figure 8 The structure schematic diagram of the clamp is provided in the utility model;

[0037] Figure 12 The structure schematic diagram of the clamp is provided in the utility model;

[0038] Figure 13 For Figure 12 The structure schematic diagram of the clamp is provided in the utility model;

[0039] Figure 14 For Figure 4 The structure schematic diagram of the clamp is provided in the utility model.

[0040] Reference signs:

[0041] Straight handle part 1, clamping arm 11, connecting end 111, free end 112, track through slot 113, positioning hole 114;

[0042] Clamping part 2, clamping plane 21, friction pad 211, clamping baffle 22, limiting baffle 23, step structure 24, elastic element 3;

[0043] Driving part 4, driving lead 41, driving pull rod 42, handle part 421, straight rod part 422;

[0044] graphite piece 5, first outer sidewall 51, second outer sidewall 52, flow guide groove 53, deposit 54, upstream graphite piece 55, downstream graphite piece 56, downstream support 561, graphite tray 57, gas flow channel 58;

[0045] sample inlet door 61, exhaust door 62, total length of clamp H. DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art based on the present application belong to the scope of protection of the present application.

[0047] In the process of epitaxial process of wafers, for example, Figure 1 and Figure 2 As shown, Figure 1 is a structural schematic view of the graphite piece in the epitaxial furnace; Figure 2 is a structural schematic view of the graphite piece as a combined graphite piece and located in the epitaxial furnace. The reaction gas enters the inside of the furnace body through the sample inlet door 61 and flows into the gas flow channel 58 in the epitaxial furnace. When the reaction gas flows to the outlet of the gas flow channel 58 on the side of the sample inlet door 61, the reaction gas enters the flow guide groove 53 at the middle position of the upstream graphite piece 55 clamped at the outlet of the gas flow channel 58, and flows to the graphite tray 57 through the flow guide groove 53, and is deposited on the surface of the wafer substrate placed on the graphite tray 57. The remaining reaction gas flows to the gas flow channel 58 on the side of the exhaust door 62 through the flow guide groove 53 at the middle position of the downstream graphite piece 56. The downstream support 561 for supporting the downstream graphite piece 56 is arranged below the downstream graphite piece 56.

[0048] However, referring to Figure 3 , Figure 3 is Figure 1 a structural schematic view of the deposition of the reaction gas in the upstream graphite piece in . In the process of flow of the reaction gas, the reaction gas is deposited in the flow guide groove 53 at the middle position of the graphite piece 5, so that the deposit 54 is accumulated inside the flow guide groove 53 of the graphite piece 5. At this time, the graphite piece 5 needs to be disassembled and replaced.

[0049] Currently, the method for disassembling the graphite piece 5 is that a worker inserts hands into the flow guide groove 53 of the graphite piece 5 to take out the graphite piece 5. Since the distance between the sample inlet door 61 and the exhaust door 62 of the epitaxial furnace is 80 cm, and the width of the flow guide groove 53 is 20-30 cm, the worker is required to have a long arm and a small palm. During the operation, since the hand needs to be inserted from the exhaust door 62 to the gas passage near the side of the sample inlet door 61 to take the graphite piece 5, the disassembly operation is inconvenient. Meanwhile, the disassembly mode of directly contacting the graphite piece 5 with hands has the risk of contaminating the graphite piece 5, and the unstable hand grasping may cause the graphite piece 5 to fall.

[0050] To solve the above technical problems, the utility model provides a kind of clamp, as shown in Figure 4 and Figure 5 , Figure 4 structure schematic view of the clamp provided by the utility model is shown in Figure 1; Figure 5 structure schematic view of another view of the clamp shown in Figure 4 . The clamp comprises: straight handle part 1, including two parallel clamping arms 11, the first end of two clamping arms 11 is connected to each other, forming a connecting end 111; the second end of two clamping arms 11 is open away from the connecting end 111, forming a free end 112; each clamping arm 11 is provided with clamping part 2 at the free end 112; two clamping parts 2 have a distance-adjustable interval region; by adjusting the distance between the interval region of two clamping parts 2, so that the clamping part 2 can be inserted into the graphite piece 5, and the graphite piece 5 is clamped and taken out.

[0051] In the embodiment, the straight handle part 1 of the clamp is composed of two parallel and spaced clamping arms 11, and one end of the two clamping arms 11 forms a connecting end 111, and the other end forms a free end 112. When the clamping arm 11 is subjected to an external force in the direction of the interval region, the free end 112 of each clamping arm can be displaced towards the interval region between the two clamping arms. At the same time, the clamping part 2 is provided at the free end 112 of each clamping arm, and when the free end 112 is displaced towards the interval region, the clamping part 2 can also be displaced towards the interval region.

[0052] Specifically, during use, the worker can press the two clamping arms 11 of the straight handle part 1, so that the clamping parts 2 are displaced towards each other. As shown in Figure 6 , Figure 6 structure schematic view of the clamp shown in Figure 3 when the clamping parts are displaced towards each other. The distance between the interval region of two clamping parts 2 is reduced, and the clamping part 2 can be inserted into the flow guide groove 53 of the graphite piece 5. At this time, the worker inserts the clamp into the epitaxial furnace from the exhaust door 62, so that the clamping part 2 can be inserted into the flow guide groove 53 of the graphite piece 5. As shown in Figure 7 , Figure 7 structure schematic view of the clamp shown in Figure 4The structure diagram of the clamp when clamping the graphite piece is shown. When the clamping part 2 is inserted into the flow guide groove 53, the worker stops pressing, and under the action of the self elasticity of the clamp, the clamping arm 11 resets, so that each clamping part 2 can be attached to the inner side wall of the flow guide groove 53. At this time, the worker drags the clamp, and under the action of the friction between the clamping part 2 and the graphite piece 5, the graphite piece is taken out of the epitaxial furnace from the side of the exhaust door 62. Referring to Figure 1 and Figure 2 , the inlet size of the airflow passage 58 on the side of the exhaust door 62 can allow the graphite piece 5 to pass through.

[0053] In the process of disassembling and assembling the graphite piece 5, the worker clamps the graphite piece 5 by using the clamp, which avoids the pollution caused by the direct contact of the hand with the graphite piece 5 and the risk of the graphite piece 5 falling due to the operation of the hand, and the clamp clamping effectively reduces the difficulty of the maintenance operation. The clamp with the adjustable distance of the interval region between the clamping parts 2 can adapt to the smaller width of the flow guide groove 53, thereby reducing the requirements on the worker.

[0054] Specifically, referring to Figure 1 , Figure 2 and Figure 4 , the total length H of the clamp is 40cm-100cm, and the preferred length is 50cm. In the use process, when the total length H of the clamp is smaller than the distance between the exhaust door 62 and the upstream graphite piece 55, the worker can stretch the arm into the epitaxial furnace to make the clamping part 2 of the clamp enter the inside of the flow guide groove 53 of the upstream graphite piece 55. Since the worker clamps the upstream graphite piece 55 by using the clamp, the pollution caused by the direct contact of the hand with the graphite piece 5 and the risk of the graphite piece 5 falling due to the operation of the hand are avoided, and the clamp clamping effectively reduces the difficulty of the maintenance operation. The clamp with the adjustable distance of the interval region between the clamping parts 2 can adapt to the smaller width of the flow guide groove 53, thereby reducing the requirements on the worker.

[0055] In the actual use process, the sizes of the parts in the clamp can be adjusted as needed, as long as the clamping effect on the graphite piece 5 can be achieved.

[0056] In some embodiments of the utility model, as shown in Figure 8 and Figure 9 , Figure 8 as shown in the sectional view of Figure 7 ; Figure 9 as shown in the enlarged view of the one side of the clamping part in Figure 9 . Each clamping part 2 has one clamping plane 21, and the distance of the interval region between the two clamping planes 21 is adjustable; under the condition of entering the inside of the graphite piece 5, the two clamping planes 21 can be attached to the inner side wall of the graphite piece 5.

[0057] In the embodiment, the clamping part 2 of the clamp has a clamping plane 21, and the clamping plane 21 is tightly fitted with the inner wall of the graphite piece 5, so that the clamping effect of the clamp on the graphite piece 5 is effectively increased.

[0058] In some embodiments of the utility model, as shown in Figure 9 , the clamp further comprises at least one elastic element 3, the elastic element 3 is arranged between the two clamping planes 21, and the two ends of the elastic element 3 for releasing elastic deformation are connected with the two clamping planes 21 respectively, so as to reset the free end 112 after displacement.

[0059] In the embodiment, the elastic element 3 is arranged between the two clamping planes 21. In the use process, the worker presses the clamping arm 11, the clamping plane 21 is displaced towards each other, so that the elastic element 3 is deformed. At this time, the elastic element 3 is deformed and accumulates elastic potential energy. When the clamping part 2 extends into the inner part of the flow guide groove 53 of the graphite piece 5, the worker stops applying external force. At this time, the elastic element 3 releases the elastic potential energy and restores the original length. Under the action of the elastic element 3 and the elastic force of the clamp itself, the free end 112 is reset, so that the clamping plane 21 is tightly attached to the flow guide groove 53, thereby forming a clamping action on the graphite piece 5.

[0060] In some embodiments of the utility model, as shown in Figure 5 , Figure 10 and Figure 11 , as shown in Figure 10 , as shown in Figure 4 , as shown in the sectional view; Figure 11 , as shown in Figure 8 , the driving part one side of the local enlarged view in the elastic element 3 is a spring; the clamp further comprises a driving part 4, the driving part 4 includes a driving lead 41, one end of the driving lead 41 is connected with the part of the elastic element 3 for storing elastic force; by pulling the driving lead 41, the two ends of the elastic element 3 connected with the two clamping planes 21 drive the two clamping planes 21 to displace towards each other simultaneously, so as to adjust the distance between the two clamping planes 21.

[0061] In the embodiment, the clamp pulls the elastic element 3 through the driving part 4, so that the elastic element 3 is deformed, and the two ends of the elastic element 3 connected with the two clamping planes 21 displace towards each other, thereby driving the two clamping planes 21 to displace towards each other. When the clamping part 2 extends into the flow guide groove 53, the external force of the driving part 4 on the elastic element 3 is removed, so that the two clamping planes 21 are reset, and the graphite piece 5 is clamped.

[0062] Specifically, the worker pulls the driving lead 41, so that the part of the elastic element 3 for storing elastic force is deformed along the tension direction. At this time, the two clamping planes 21 displace towards each other under the pulling of the elastic element 3, so that the clamp is deformed as shown in Figure 6The worker releases the driving lead wire 41 when the clamping part 2 extends into the flow guide groove 53 of the graphite piece 5, so that the elastic element 3 restores the original length.

[0063] When the clamping part 2 extends into the flow guide groove 53 of the graphite piece 5, the worker releases the driving lead wire 41, so that the elastic element 3 restores the original length. At this time, the two clamping planes 21 reset under the action of the elastic element 3 and the spring force of the clamp itself, so that the clamping planes 21 are tightly attached to the flow guide groove 53, thereby forming a clamping action on the graphite piece 5.

[0064] In some embodiments of the utility model, as shown in Figure 5 , Figure 10 and Figure 11 , one of the clamping arms 11 is provided with a track through groove 113 penetrating the clamping arm 11 on the side away from the clamping part 2, the track through groove 113 extends along the connecting end 111 towards the free end 112; the other clamping arm 11 is provided with a plurality of positioning holes 114 penetrating the clamping arm 11; the positioning holes 114 are correspondingly arranged with the track through groove 113; the driving part 4 further comprises a driving pull rod 42, the driving pull rod 42 comprises a handle part 421 and a straight rod part 422; the straight rod part 422 is fixedly connected with one end of the driving lead wire 41 away from the elastic element 3; the straight rod part 422 penetrates the track through groove 113 and can move along the extension direction of the track through groove 113; the straight rod part 422 can penetrate the positioning hole 114; by inserting the straight rod part 422 into different positioning holes 114, the elastic element 3 can maintain different deformation states, so as to adjust the distance of the interval region between the two clamping parts 2.

[0065] In this embodiment, the one end of the driving lead wire 41 away from the elastic element 3 is connected with the driving pull rod 42, so that the elastic element 3 can be deformed by pulling the driving pull rod 42, thereby driving the two clamping planes 21 to move towards each other.

[0066] Specifically, referring to Figure 5 , the worker holds the handle part 421 of the driving pull rod 42 and pulls along the track through groove 113 towards the connecting end 111, the straight rod part 422 of the driving pull rod 42 drives the driving lead wire 41, thereby pulling the elastic element 3, so that the part of the elastic element 3 storing the elastic force deforms along the pulling direction. At this time, the two clamping planes 21 move towards each other under the pulling of the elastic element 3, so that the clamp deforms to the state as shown in Figure 6 . The worker presses the driving pull rod 42 to insert the straight rod part 422 into the positioning hole 114, and extends the deformed clamp into the flow guide groove of the graphite piece 5.

[0067] When the clamping part 2 extends into the flow guide groove 53 of the graphite piece 5, the worker pulls the handle part 421 or pushes the straight rod part 422 inserted into the positioning hole 114, so that the driving pull rod 42 is pulled out of the positioning hole 114 and moves along the track through groove 113 to the direction of the free end 112 under the elastic force of the elastic element 3, so that the elastic element 3 restores the original length. At this time, the two clamping planes 21 are reset under the elastic force of the elastic element 3 and the elastic force of the clamp itself, so that the clamping planes 21 are tightly attached to the flow guide groove 53, thereby forming a clamping effect on the graphite piece 5. Since the track through groove 113 can limit the movement direction of the driving pull rod 42, the driving pull rod 42 is prevented from being pulled out of the clamp during the pulling-out process and damaging various equipment in the external extension furnace.

[0068] As shown in Figure 5 , the number of positioning holes 114 can be 8, and the spacing is 2mm, so that the deformation of the elastic element 3 caused by the driving pull rod 42 can drive the two clamping planes 21 to move towards each other, and the clamping part 2 of the deformed clamp can extend into the inside of the flow guide groove 53. In actual use, the number of positioning holes 114 and the spacing therebetween can be adjusted according to actual needs. When the spacing between the positioning holes 114 is large, the gap between the adjacent positioning holes 114 can be effectively improved to prevent the positioning holes 114 from being invalid, thereby increasing the service life of the clamp.

[0069] In some embodiments of the utility model, as shown in Figure 12 and Figure 13 , the structure diagram when the clamping plane is provided with a friction pad is shown in Figure 12 ; Figure 13 is Figure 12 a local enlarged view of one side of the clamping part in . The side of the clamping plane 21 away from the spacing area is provided with a friction pad 211. When the two clamping planes 21 extend into the graphite piece 5, the friction pad 211 can be attached to the inner side wall of the graphite piece 5.

[0070] In the embodiment, the friction pad 211 is arranged on the side of the clamping plane 21 away from the spacing area. When the two clamping planes 21 extend into the flow guide groove 53 of the graphite piece 5, the friction pad 211 is attached to the flow guide groove 53, so that the friction between the clamp and the graphite piece 5 is increased, thereby improving the clamping effect of the clamp on the graphite piece 5.

[0071] In some embodiments of the application, as shown in Figure 9 and Figure 14 , the structure diagram when the clamping plane is provided with a friction pad is shown in Figure 14 ; Figure 4The local enlarged view of one side of the middle clamping part. The clamping flat 21 is provided with a clamping baffle 22 at the end away from the connecting end 111, the clamping baffle 22 extends in the vertical direction away from the clamping flat 21, and in the case that the two clamping flats 21 extend into the graphite piece 5, the side of the clamping baffle 22 close to the connecting end 111 can be attached to the first outer side wall 51 of the graphite piece 5 to drive the graphite piece 5 to move. The clamping flat 21 is provided with a limiting baffle 23 at the end close to the connecting end 111, the limiting baffle 23 extends in the vertical direction away from the clamping flat 21, and in the case that the two clamping flats 21 extend into the graphite piece 5, the side of the limiting baffle 23 away from the connecting end 111 can be attached to the second outer side wall 52 opposite to the first outer side wall 51 of the graphite piece 5 to limit the movement of the graphite piece 5.

[0072] In the embodiment, when the clamping part 2 extends into the flow guide groove 53 of the graphite piece 5, the graphite piece 5 is located between the limiting baffle 23 and the clamping baffle 22. Referring to Figure 9 , the side of the clamping baffle 22 close to the connecting end 111 is attached to the first outer side wall 51 of the graphite piece 5, and the side of the limiting baffle 23 away from the connecting end 111 is attached to the second outer side wall 52 of the graphite piece 5, the graphite piece 5 is dragged by the clamping baffle 22 to make the graphite piece 5 out of the airflow channel 58. The limiting baffle 23 is used to prevent the graphite piece 5 from sliding on the clamping arm 11.

[0073] Specifically, in the disassembly process, the downstream graphite piece 56 is taken out from the exhaust door 62, and then the upstream graphite piece is taken out from the exhaust door 56. When the downstream graphite piece 56 is disassembled, the side of the limiting baffle 23 close to the connecting end 111 is attached to the first outer side wall 51 of the downstream graphite piece 56. At this time, the worker drags the clamp, and under the drag of the limiting baffle 23, the downstream graphite piece 56 is out of the airflow channel 58.

[0074] When the upstream graphite piece 55 is disassembled, the side of the clamping baffle 22 close to the connecting end 111 is attached to the first outer side wall 51, and the side of the limiting baffle 23 away from the connecting end 111 is attached to the second outer side wall 52. At this time, the worker drags the clamp, and under the drag of the clamping baffle 22, the upstream graphite piece 55 is out of the airflow channel 58.

[0075] In some embodiments of the utility model, as shown in Figure 4 and Figure 5 , the clamping part 2 and the clamping arm 11 have a stepped structure 24, so that the distance between the two clamping flats 21 is greater than the distance between the two clamping arms 11.

[0076] In the embodiment, since the stepped structure 24 exists between the clamping part 2 and the clamping arm, the distance between the two clamping planes 21 is greater than the distance between the two clamping arms 11, so that when the clamping part 2 extends into the flow guide groove 53 of the graphite piece 5, the clamping plane 21 is more closely attached to the inner side wall of the graphite piece 5.

[0077] In some embodiments of the utility model, the material of the clamp is Teflon (polytetrafluoroethylene). Using Teflon as the clamp material can effectively avoid the situation that the clamp falls off dust and debris during clamping, causing pollution of the graphite piece 5.

[0078] In actual production, other materials can be selected as the plate material of the clamp, as long as the clamp does not fall off dust and debris during clamping to pollute the graphite piece 5.

[0079] The above only describes the preferred embodiments of the utility model, and is not used to limit the protection scope of the utility model. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model is included in the protection scope of the utility model.

Claims

1. A clamp characterized in that, A device for clamping a graphite piece in an epitaxial furnace, comprising: a straight handle (1) including two parallel clamping arms (11) connected at their first ends to form a connecting end (111), and open at their second ends away from the connecting end (111) to form free ends (112); each of the clamping arms (11) is provided with a clamping portion (2) at the free end (112), and the two clamping portions (2) have a distance-adjustable spacing region therebetween; the distance between the two clamping portions (2) is adjusted so that the clamping portions (2) can extend into the graphite piece (5) to clamp and take out the graphite piece (5).

2. The clamp of claim 1, wherein each of the clamping portions (2) has a clamping plane (21), and the two clamping planes (21) have the distance-adjustable spacing region therebetween; the two clamping planes (21) can be attached to the inner side wall of the graphite piece (5) when extending into the graphite piece (5).

3. The clamp of claim 2, wherein the clamp further comprises at least one elastic element (3) disposed between the two clamping planes (21), and the elastic element (3) is used to release elastic deformation, and the two ends of the elastic element (3) are connected to the two clamping planes (21) respectively, and used to reset the free ends (112) after displacement.

4. The clamp of claim 3, wherein the elastic element (3) is a spring; the clamp further comprises a driving portion (4) including a driving lead (41), and one end of the driving lead (41) is connected to the elastic element (3) for storing elastic force; by pulling the driving lead (41), the two ends of the elastic element (3) connected to the two clamping planes (21) drive the two clamping planes (21) to move towards each other at the same time, so as to adjust the distance between the two clamping planes (21).

5. The clamp of claim 4, wherein one of the clamping arms (11) is provided with a track through slot (113) penetrating the clamping arm (11) on the side away from the clamping portion (2), and the track through slot (113) extends along the connecting end (111) towards the free end (112); the other clamping arm (11) is provided with a plurality of positioning holes (114) penetrating the clamping arm (11); the positioning holes (114) are correspondingly arranged with the track through slot (113); the driving portion (4) further comprises a driving pull rod (42) including a handle portion (421) and a straight rod portion (422); the straight rod portion (422) is fixedly connected to one end of the driving lead (41) away from the elastic element (3); the straight rod portion (422) penetrates the track through slot (113) and can move along the extension direction of the track through slot (113); and the straight rod portion (422) can penetrate the positioning holes (114). By inserting the straight rod part (422) into different positioning holes (114), the elastic element (3) maintains different deformation states to adjust the distance of the interval area between the two clamping parts (2).

6. The clamp of claim 2, wherein, The clamping plane (21) is provided with a friction pad (211) away from the interval area, and the two clamping planes (21) can be attached to the inner side wall of the graphite piece (5) when they extend into the graphite piece (5).

7. The clamp of claim 2, wherein, The clamping plane (21) is provided with a clamping baffle (22) away from the connecting end (111), and the clamping baffle (22) extends in a direction perpendicular to the clamping plane (21), and the clamping baffle (22) can be attached to the first outer side wall (51) of the graphite piece (5) when the two clamping planes (21) extend into the graphite piece (5), so as to drive the graphite piece (5) to move.

8. The clamp of claim 2 or 7, wherein, The clamping plane (21) is provided with a limiting baffle (23) near the connecting end (111), and the limiting baffle (23) extends in a direction perpendicular to the clamping plane (21), and the limiting baffle (23) can be attached to the second outer side wall (52) of the graphite piece (5) opposite to the first outer side wall (51) when the two clamping planes (21) extend into the graphite piece (5), so as to limit the movement of the graphite piece (5).

9. The clamp of claim 2, wherein, The clamping part (2) and the clamping arm (11) have a stepped structure (24) to make the distance between the two clamping planes (21) greater than the distance between the two clamping arms (11).

10. The clamp of claim 1, wherein, The material of the clamp is Teflon.

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