Filter element batch cleaning system

Abstract

The utility model discloses a filter element batch cleaning system which comprises a temporary storage tank, a liquid inlet of the temporary storage tank is provided with a liquid inlet pipeline communicated with the temporary storage tank, a liquid outlet of the temporary storage tank is provided with a cleaning pipeline and a liquid discharging pipeline which are communicated with the temporary storage tank, and the cleaning pipeline is sequentially provided with a cleaning pump, a first filter and a second filter. The first output ends of the first filter and the second filter are connected to a main pipeline, a flowmeter and a heater are sequentially arranged on the main pipeline, the output end of the main pipeline is communicated with a washing pipeline, the washing pipeline is connected with the water inlet ends of a group of filter elements, the water outlet ends of the filter elements are connected with a liquid return pipeline, and the other end of the liquid return pipeline is communicated with a liquid inlet pipeline. The full-automatic liquid medicine conveying and cleaning device has the advantages that full-automatic conveying and cleaning of liquid medicine are achieved, full-process automatic operation is achieved, and work intensity is reduced. In addition, after the liquid medicine is cleaned and conveyed or cleaned, the liquid medicine can be recycled into the temporary storage tank and stored for next use, so that repeated use is realized, the cost is reduced, and the utilization rate is increased.

Description

TECHNICAL FIELD

[0001] The utility model relates to the cleaning technical field, specifically, especially, a filter core batch cleaning system. BACKGROUND

[0002] In the polishing production process of semiconductor silicon wafer, the crystallization of silicon and silicon dioxide will be formed on the pipe wall of the pipeline for slurry recycling and reuse. These pipelines are often quite long (10-20 m).

[0003] After replacing the original slurry with KOH circulating flushing without disassembling the pipeline, the originally fluffy crystallization in the pipeline appears to be fused and hardened, and the cleaning effect is very poor.

[0004] Disassembling the pipeline and using HF immersion washing in the tank type component cleaning machine can clean the crystallization near the pipe opening, but the cleaning effect of the crystallization more than 2 m away from the pipe opening is very poor.

[0005] The current mainstream solution is to replace new pipelines. The PFA pipe material is not only expensive and has a long delivery time, but also a kind of unsustainable waste of high-quality resources.

[0006] For example, the authorized announcement No. CN118268328A discloses a device for cleaning the inner wall of a PFA pipeline and a control method thereof, which comprises a liquid inlet pipe, a flushing pipe and a liquid tank. The liquid inlet pipe and the flushing pipe are connected to the pipe joints at both ends of the PFA pipeline. The liquid tank is provided with a partition plate, which divides the liquid tank into a mixing chamber and a recovery chamber. A liquid return pipe is provided between the liquid inlet pipe and the recovery chamber, and a filter core is provided on the liquid return pipe. An liquid suction pipe is provided between the flushing pipe and the mixing chamber, and a diaphragm pump is provided between the liquid suction pipe and the flushing pipe. However, although this device realizes full-automatic cleaning of the slurry crystallization in the pipe material, it cannot guarantee the cleanliness of the cleaning, and special detection is required, resulting in increased cost. In addition, the device cannot clean in batches during cleaning, which has great limitations. UTILITY MODEL CONTENTS

[0007] The utility model aims to overcome the deficiencies in the prior art and provides a filter core batch cleaning system.

[0008] The utility model achieves the above-mentioned purpose through the following technical solutions:

[0009] A filter core batch cleaning system, comprising a temporary storage tank, a liquid inlet pipe connected to the liquid inlet of the temporary storage tank, a cleaning pipe and a liquid discharge pipe connected to the liquid outlet of the temporary storage tank, a cleaning pump, a first filter and a second filter arranged in sequence on the cleaning pipe, a first output end of the first filter and the second filter connected to a main pipe, a flow meter and a heater arranged in sequence on the main pipe, an output end of the main pipe connected to a water washing pipe, the water washing pipe connected to the water inlet of a group of filter cores, the water outlet of the filter cores connected to a liquid return pipe, the other end of the liquid return pipe connected to the liquid inlet pipe.

[0010] Preferably, a washing liquid branch pipe is connected to the second output end of the first filter and the second filter respectively, the other end of the washing liquid branch pipe connected to a washing liquid main pipe, the washing liquid main pipe further connected to the water washing pipe, a first control valve arranged on the washing liquid main pipe, the first control valve used to control the communication between the washing liquid main pipe and the water washing pipe.

[0011] Preferably, a third control valve is arranged on the main pipe, the third control valve located on the side of the heater away from the flow meter.

[0012] Preferably, a sampling tank connected to the liquid discharge pipe, a fourth control valve arranged at the water outlet of the cleaning pipe, the water outlet of the cleaning pipe located directly above the sampling tank.

[0013] Preferably, a fifth control valve arranged on the cleaning pipe, a sixth control valve arranged on the liquid discharge pipe, a first bypass pipe arranged between the output ends of the fifth control valve and the sixth control valve, a first regulating valve arranged on the first bypass pipe.

[0014] Preferably, a seventh control valve arranged on the cleaning pipe, the seventh control valve located between the cleaning pump and the first filter.

[0015] Preferably, a second bypass pipe arranged between the cleaning pump and the sixth control valve, a second regulating valve arranged on the second bypass pipe.

[0016] Preferably, a bypass pipe arranged between the second output end of the first filter and the second filter and the liquid discharge pipe, a third regulating valve arranged on each bypass pipe.

[0017] Preferably, two temporary storage tanks arranged in parallel on the cleaning pipe.

[0018] The beneficial effects of the present application mainly include:

[0019] 1. The device is designed with exquisite design and reasonable layout, and realizes full-automatic conveying and cleaning of the liquid medicine, full-automatic operation, no manual operation, greatly improves the work, and reduces the working strength. In addition, after the liquid medicine cleaning and conveying or cleaning are completed, it can be recycled to the temporary storage tank and stored for next use, so as to realize repeated use, reduce cost and improve use rate.

[0020] 2. The first filter and the second filter are arranged to filter the liquid medicine, avoid the existence of particles in the liquid medicine, cause damage to the wafer, and prolong the service life.

[0021] 3. The liquid medicine or cleaning liquid can be taken out through the sampling groove in real time, so as to detect the cleanliness or concentration of the liquid medicine in the sampling groove, so as to ensure the cleanliness of the liquid medicine, which can be directly taken out from the sampling groove, can greatly reduce the operation difficulty, greatly improve the convenience, and has wide applicability. BRIEF DESCRIPTION OF DRAWINGS

[0022] The technical scheme of the utility model will be further described below in combination with the drawings:

[0023] Fig. 1 : The structure schematic view of the preferred embodiment of the utility model;

[0024] Fig. 2 : The structure schematic view of the water washing pipeline, filter element and liquid return pipeline in the preferred embodiment of the utility model. DETAILED DESCRIPTION

[0025] The utility model will be described in detail below in combination with the specific implementation mode shown in the drawings. But these implementation modes are not limited to the utility model, and the conversion of structure, method or function made by the ordinary skilled in the art according to these implementation modes is included in the protection scope of the utility model.

[0026] In the description of the utility model, it should be explained that, unless otherwise explicitly specified and limited, the terms 'installation', 'connection', 'connection' should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or indirectly connected through the intermediate medium, it can be the communication inside two elements. For the ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific circumstances.

[0027] The utility model will be described in detail below in combination with the specific implementation mode shown in the drawings.

[0028] As Figs. 1-2As shown, the utility model discloses a kind of filter core batch cleaning system, including temporary storage tank third regulating valve 871 third regulating valve 87, in the preferred embodiment, two described temporary storage tank 1 are provided, the quantity of described temporary storage tank 1 can be adjusted according to actual demand, all belong to the protection scope of the utility model, not too much here Repetitive description.The inlet of the third regulating valve 871 third regulating valve 87 of temporary storage tank is equipped with the liquid inlet pipeline third regulating valve 872 third regulating valve 87 communicated therewith, the liquid inlet pipeline 2 can be made of one or several of acid-base liquid pipe, acidic liquid pipe, oxide liquid pipe, all belong to the protection scope of the utility model, not too much here Limit.

[0029] The outlet of the third regulating valve 871 third regulating valve 87 of temporary storage tank is equipped with the cleaning pipeline third regulating valve 873 third regulating valve 87 and liquid discharge pipeline third regulating valve 874 third regulating valve 87 communicated, the cleaning pipeline third regulating valve 873 third regulating valve 87 is equipped with cleaning pump third regulating valve 8731 third regulating valve 87, first filter third regulating valve 8732 third regulating valve 87 and second filter third regulating valve 8733 third regulating valve 87 in proper order, the first output end of first filter third regulating valve 8732 third regulating valve 87 and second filter third regulating valve 8733 third regulating valve 87 is connected to main pipeline third regulating valve 875 third regulating valve 87, the main pipeline third regulating valve 875 third regulating valve 87 is equipped with flowmeter third regulating valve 8751 third regulating valve 87 and heater third regulating valve 8752 third regulating valve 87 in proper order, the output end of main pipeline third regulating valve 875 third regulating valve 87 is communicated with water washing pipeline third regulating valve 876 third regulating valve 87, the water washing pipeline third regulating valve 876 third regulating valve 87 is connected with the water inlet end of a group of filter core third regulating valve 87100 third regulating valve 87, the water outlet end of filter core third regulating valve 87100 third regulating valve 87 is connected with liquid return pipeline third regulating valve 877 third regulating valve 87, the other end of liquid return pipeline third regulating valve 877 third regulating valve 87 is communicated with the liquid inlet pipeline third regulating valve 872 third regulating valve 87.In the preferred embodiment, as shown, Fig. 2 The number of filter core 100 is preferably 10, of course, can also be other quantities, can be adjusted according to actual demand, all belong to the protection scope of the utility model, not too much here Repetitive description.

[0030] The above design is ingenious, and the layout is reasonable. The device realizes automatic conveying and cleaning of liquid medicine, automatic operation throughout, without manual operation, greatly improving work and reducing work intensity. In addition, after liquid medicine cleaning, conveying or cleaning is completed, it can be recycled to the temporary storage tank 1 and stored for next use, so as to realize repeated use, reduce cost and improve utilization rate.

[0031] The second output end of the first filter third regulating valve 8732 and the second filter third regulating valve 8733 is respectively connected with a washing liquid branch pipe third regulating valve 8734, the other end of the washing liquid branch pipe third regulating valve 8734 is connected with a washing liquid main pipe third regulating valve 8735, the washing liquid main pipe third regulating valve 8735 is also connected with the water washing pipeline 6, and a first control valve third regulating valve 8736 is arranged on the washing liquid main pipe third regulating valve 8735, so as to control the communication between the washing liquid main pipe third regulating valve 8735 and the water washing pipeline.

[0032] The first filter third regulating valve 8732 and the second filter third regulating valve 8733 are arranged to filter the liquid medicine, so that the particles in the liquid medicine are avoided to damage the wafer and prolong the service life.

[0033] According to the filter core batch cleaning system of claim 2, a third control valve third regulating valve 8759 is further arranged on the main pipeline third regulating valve 875, and the third control valve third regulating valve 8759 is located on the side of the heater third regulating valve 8752 away from the flow meter third regulating valve 8751. A sampling groove third regulating valve 8741 is further arranged on the liquid discharge pipeline third regulating valve 874 and communicates with the liquid discharge pipeline third regulating valve 874. A fourth control valve third regulating valve 8742 is arranged at the water outlet of the cleaning pipeline third regulating valve 873, and the water outlet of the cleaning pipeline third regulating valve 873 is located directly above the sampling groove third regulating valve 8741. In this preferred embodiment, the liquid medicine or cleaning liquid can be taken out through the sampling groove 41, so that the cleanliness or concentration of the liquid medicine in the sampling groove can be detected, thereby ensuring the cleanliness of the liquid medicine. The sampling is directly taken out from the sampling groove, which can greatly reduce the operation difficulty, greatly improve the convenience, and has wide applicability.

[0034] The fifth control valve third regulating valve 8791 third regulating valve 87 and the sixth control valve third regulating valve 8781 third regulating valve 87 are provided with a first bypass pipeline third regulating valve 8782 third regulating valve 87 between the output ends, and the first bypass pipeline third regulating valve 8782 third regulating valve 87 is provided with a first regulating valve third regulating valve 8783 third regulating valve 87. The cleaning pipeline third regulating valve 873 third regulating valve 87 is also provided with a seventh control valve third regulating valve 8792 third regulating valve 87, and the seventh control valve third regulating valve 8792 third regulating valve 87 is located between the cleaning pump third regulating valve 8731 third regulating valve 87 and the first filter third regulating valve 8732 third regulating valve 87. The cleaning pump third regulating valve 8731 third regulating valve 87 and the sixth control valve third regulating valve 8781 third regulating valve 87 are also provided with a second bypass pipeline third regulating valve 8784 third regulating valve 87, and the second bypass pipeline third regulating valve 8784 third regulating valve 87 is provided with a second regulating valve third regulating valve 8785 third regulating valve 87. The first filter third regulating valve 8732 third regulating valve 87 and the second filter third regulating valve 8733 third regulating valve 87 are provided with a bypass pipeline third regulating valve 8786 third regulating valve 87 between the second output end and the liquid discharge pipeline third regulating valve 874 third regulating valve 87, and each bypass pipeline third regulating valve 8786 third regulating valve 87 is provided with a third regulating valve third regulating valve 8787 third regulating valve 87. The cleaning pipeline third regulating valve 873 third regulating valve 87 is provided with two temporary storage tanks third regulating valve 871 third regulating valve 87 in parallel. When the cleaning pump third regulating valve 8731 third regulating valve 87, the first filter third regulating valve 8732 third regulating valve 87, and the second filter third regulating valve 8733 third regulating valve 87 are damaged, only the corresponding regulating valve needs to be closed, which is simple and convenient to operate, greatly improving the work efficiency.

[0035] It should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be combined appropriately to form other embodiments that those skilled in the art can understand.

[0036] The series of detailed descriptions listed above are only specific descriptions for the feasible implementation manners of the present application, and are not used to limit the protection scope of the present application. Any equivalent implementation manners or changes made without departing from the spirit of the present application should be included in the protection scope of the present application.

Claims

1. Filter cartridge batch cleaning system comprising a temporary storage tank (1), characterized in that: The liquid inlet of the temporary storage tank (1) is provided with a liquid inlet pipeline (2) in communication therewith, the liquid outlet is provided with a cleaning pipeline (3) and a liquid discharge pipeline (4) in communication therewith, the cleaning pipeline (3) is sequentially provided with a cleaning pump (31), a first filter (32) and a second filter (33), the first output ends of the first filter (32) and the second filter (33) are connected to a main pipeline (5), the main pipeline (5) is sequentially provided with a flow meter (51) and a heater (52), the output end of the main pipeline (5) is in communication with a water washing pipeline (6), the water washing pipeline (6) is connected to the water inlet end of a group of filter cartridges (100), the water outlet end of the filter cartridge (100) is connected to a liquid return pipeline (7), the other end of the liquid return pipeline (7) is in communication with the liquid inlet pipeline (2).

2. The filter cartridge batch cleaning system of claim 1, wherein: The second output ends of the first filter (32) and the second filter (33) are respectively connected with a washing liquid branch pipeline (34), the other end of the washing liquid branch pipeline (34) is connected with a washing liquid main pipeline (35), the washing liquid main pipeline (35) is also connected with the water washing pipeline (6), the washing liquid main pipeline (35) is provided with a first control valve (36), the first control valve (36) is used to control the communication between the washing liquid main pipeline (35) and the water washing pipeline (6).

3. The filter cartridge batch cleaning system of claim 2, wherein: The main pipeline (5) is further provided with a third control valve (59), the third control valve (59) is located on the side of the heater (52) away from the flow meter (51).

4. The filter cartridge batch cleaning system of claim 3, wherein: The liquid discharge pipeline (4) is further provided with a sampling tank (41) in communication therewith, the water outlet of the cleaning pipeline (3) is provided with a fourth control valve (42), the water outlet of the cleaning pipeline (3) is located directly above the sampling tank (41).

5. The filter cartridge batch cleaning system of claim 3, wherein: The cleaning pipeline (3) is provided with a fifth control valve (91), the liquid discharge pipeline (4) is provided with a sixth control valve (81), the output ends of the fifth control valve (91) and the sixth control valve (81) are provided with a first bypass pipeline (82), the first bypass pipeline (82) is provided with a first regulating valve (83).

6. The filter cartridge batch cleaning system of claim 5, wherein: The cleaning pipeline (3) is further provided with a seventh control valve (92), the seventh control valve (92) is located between the cleaning pump (31) and the first filter (32).

7. The filter cartridge batch cleaning system of claim 6, wherein: The cleaning pump (31) and the sixth control valve (81) are further provided with a second bypass pipeline (84), the second bypass pipeline (84) is provided with a second regulating valve (85).

8. The filter cartridge batch cleaning system of claim 7, wherein: The second output ends of the first filter (32) and the second filter (33) are provided with bypass pipelines (86) between the second output ends and the liquid discharge pipeline (4), each of the bypass pipelines (86) is provided with a third regulating valve (87).

9. The filter cartridge batch cleaning system of claim 8, wherein: Two temporary storage tanks (1) are provided in parallel on the cleaning pipeline (3).

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