Electronic grade chemical sampling system

Abstract

The application relates to an electronic-grade chemical sampling system. The electronic-grade chemical sampling system comprises a plurality of liquid storage modules, a power module, a box body, a plurality of sampling switches and a plurality of sampling pipelines. In actual use, the electronic-grade chemical sampling system is provided with a glove box structure sampling device with a purification module, the sampling switches are protected from pollution in the form of a shell with a glove panel, the sampling bottle is placed in the shell, and the sampling bottle is purified once in the sampling chamber during the process, the sampling operation is performed through the glove panel, and the sampling bottle with the sampled sample is taken out from the shell and purified again, so that the sampling switches in the shell are protected, the sampling process of the electronic-grade chemical is realized, and the liquid storage module is not polluted, that is, the raw materials in the liquid storage module are not polluted.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor production and processing, in particular to an electronic-grade chemical sampling system. BACKGROUND

[0002] In the production process of the semiconductor industry, metal impurities in the liquid chemicals used, and even metal impurities in the air, have a significant impact on the yield of semiconductor products; among them, the metal impurities in the liquid chemicals directly involved in the wafer or device manufacturing have the most significant impact on the semiconductor products. Therefore, generally speaking, wafer factories and chip processing plants have developed a series of stringent specifications for the liquid chemicals required for different products, so as to ensure that the yield of the products produced is not affected by metal impurities. With the continuous reduction of device line width, the impact of metal contamination in liquid chemicals on product yield is particularly prominent. Therefore, wafer factories and chip processing plants require the specifications of metal impurities in liquid chemicals to be as low as possible.

[0003] The monitoring of metal impurities in chemicals generally consists of three basic steps: sampling, sample pretreatment, and determination. A sampling device made of corrosion-resistant material-polytetrafluoroethylene (PFA) is used by chemical laboratory professionals to sample from the VMB (valve line box) port in the chemical distribution system, and then the sample is taken to a 10-level or higher clean room chemical laboratory for pretreatment. ICP-MS (inductively coupled plasma mass spectrometry) is used to measure and analyze the metal impurities in the chemicals.

[0004] Due to the low content and uneven distribution of the measured elements in the sample, especially environmental samples, which often fluctuate greatly over time and space, sufficient attention should be paid to the representativeness of the sample and the guarantee of a certain sample size.

[0005] In the existing chemical sampling system, the structure for the raw materials transported to the processing site of the processing plant through the processing total liquid supply pipe is connected with a section of sampling pipeline at the processing total liquid supply pipe, but the sampling pipeline and the processing total liquid supply pipeline are partially shared. If the sample is unqualified, it will cause contamination of the sampling pipeline, and further contamination of the raw materials. CONTENT OF THE INVENTION

[0006] Therefore, it is necessary to provide an electronic-grade chemical sampling system to solve the problem that in the existing chemical sampling system, the sampling pipeline and the processing total liquid supply pipeline are partially shared, and if the sample is unqualified, it will cause contamination of the raw materials.

[0007] An electronic-grade chemical sampling system for sampling the liquid supply module in the production process, the electronic-grade chemical sampling system comprising: a plurality of liquid storage modules, a power module, a box, a plurality of sampling switches, and a plurality of sampling pipelines.

[0008] The box comprises a shell, a glove panel, a purification module, and a sampling chamber with a first sampling door and a second sampling door, the shell is provided with an operation opening and a sampling opening, the glove panel is connected with the shell and covers the operation opening, the sampling chamber is arranged in the sampling opening and connected with the shell, the first sampling door is located outside the shell, the second sampling door is located inside the shell, and the purification module is used for purifying the sampling chamber.

[0009] A plurality of sampling switches are arranged in the shell, and the plurality of sampling switches, the plurality of sampling pipelines, and the plurality of liquid storage modules are one-to-one corresponding, the liquid storage modules, the power module, and the sampling switches are communicated in sequence through corresponding sampling pipelines, and the power module is used to make the liquid in the sampling pipeline flow from the liquid storage module to the sampling switch.

[0010] In an embodiment, the electronic-grade chemical sampling system further comprises a pressure regulating module, the pressure regulating module is communicated with the inside of the sampling chamber, and the pressure regulating module is used to regulate the air pressure in the sampling chamber.

[0011] In an embodiment, the pressure regulating module comprises a pressure gauge, a pressure regulating valve, and a gas source.

[0012] The pressure gauge is arranged in the shell and communicated with the inside of the sampling chamber, one end of the pressure regulating valve is communicated with the gas source, and the other end is communicated with the inside of the sampling chamber.

[0013] In an embodiment, the electronic-grade chemical sampling system further comprises a control panel, a purification switch, a sampling switch, and a valve switch.

[0014] The shell has a control opening, the control panel is connected with the shell and covers the control opening, and the purification switch, the sampling switch, the valve switch, and the pressure gauge are arranged in the control panel.

[0015] The purification switch is connected with the purification module and used to open or close the purification module.

[0016] The sampling switch is connected with the power module.

[0017] The valve switch is connected with the pressure regulating valve.

[0018] In an embodiment, the electronic-grade chemical sampling system further comprises a partition, the partition is located inside the shell and placed horizontally, the partition is located in the lower part of the sampling chamber, so that the upper part of the partition forms an operation space, and the lower part of the partition forms a storage space.

[0019] In an embodiment, the plurality of liquid storage modules comprises at least a first liquid storage tank, a second liquid storage tank, and a pure water liquid source, and the plurality of sampling switches comprises at least a first switch, a second switch, and a third switch.

[0020] The first liquid storage tank, the power module, and the first switch are sequentially connected through corresponding sampling pipelines.

[0021] The second liquid storage tank, the power module, and the second switch are sequentially connected through corresponding sampling pipelines.

[0022] The pure water liquid source is connected with the third switch through a corresponding sampling pipeline.

[0023] In an embodiment, the electronic-grade chemical sampling system comprises at least a first chemical liquid part and a second chemical liquid part.

[0024] One end of the first chemical liquid part is connected with an opening of the first liquid storage tank, and the other end is connected with a corresponding sampling pipeline.

[0025] One end of the second chemical liquid part is connected with an opening of the second liquid storage tank, and the other end is connected with a corresponding sampling pipeline.

[0026] In an embodiment, the purification module is a purification fan, which is arranged on the top of the shell and is connected with the inside of the sampling chamber.

[0027] In an embodiment, the box further comprises a waste liquid part, a first liquid discharge pipe, and a second liquid discharge pipe. The waste liquid part is arranged in the storage space. One end of the first liquid discharge pipe is arranged through the partition plate and extends into the operation space, and the other end is connected with the inside of the waste liquid part.

[0028] One end of the second liquid discharge pipe extends out of the shell, and the other end is connected with the inside of the waste liquid part.

[0029] In an embodiment, the electronic-grade chemical sampling system further comprises a plurality of three-way valves corresponding to the plurality of liquid storage modules. The three-way valves can connect the corresponding liquid storage modules, the corresponding liquid using modules, and the corresponding sampling switches, so that the electronic-grade chemical sampling system can sample during the process of supplying liquid from the liquid storage modules to the corresponding liquid using modules.

[0030] The electronic grade chemical sampling system described above, in actual use, first opens the first sampling door to place the sampling bottle in the sampling chamber, then closes the first sampling door, and purifies the sampling chamber through the purification module. Then operate in the shell through the glove panel, open the second sampling door, move the sampling bottle in the sampling chamber to the shell, close the second sampling door, then open the sampling switch corresponding to one of the liquid storage modules, and flow the corresponding sample liquid in the sampling pipeline from the liquid storage module to the sampling switch through the power module, so as to take the sample into the sampling bottle. After closing the sampling switch, open the second sampling door, place the sampling bottle containing the sample liquid in the sampling chamber, close the second sampling door, purify the sampling chamber through the purification module, then open the first sampling door from the outside of the shell, take out the sampling bottle from the sampling chamber, close the first sampling door, and complete the sampling. The sampling device with the glove box structure of the purification module protects the sampling switch from pollution through the form of the glove box. By placing the sampling bottle into the shell, the sampling chamber is purified once, and the sampling operation is performed through the glove panel. The sampling bottle with the sample is taken out of the shell again, so as to protect the sampling switch in the shell, realize the sampling process of the electronic grade chemical, and the process will not pollute the liquid storage module, that is, will not pollute the raw materials in the liquid storage module. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 The schematic diagram of the electronic grade chemical sampling system of an embodiment.

[0032] Figure 2 The enlarged view of the glove box. Figure 1

[0033] BRIEF DESCRIPTION OF DRAWINGS:

[0034] 100-electronic grade chemical sampling system;

[0035] 110-liquid storage module; 111-first liquid storage barrel; 112-second liquid storage barrel; 113-pure water liquid source;

[0036] 120-power module;

[0037] 130-box; 131-shell; 132-glove panel; 133-first sampling door; 134-sampling chamber; 135-operation space; 136-storage space; 137- partition;

[0038] 140-sampling switch;

[0039] 150-sampling pipeline;

[0040] 160-control panel; 161-purification switch; 162-sampling switch; 163-valve switch; 164-pressure gauge;​

[0041] 170 - tee. DETAILED DESCRIPTION

[0042] In order to make the above objectives, features and advantages of the present application more clear and comprehensible, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a number of different ways beyond the specific embodiments described herein and by one of ordinary skill in the art without departing from the spirit and scope of the present application, and it is therefore intended that all such variations be considered as falling within the scope of the present application. It should be understood that the use of "including", "comprising", or "having" and variations thereof herein are meant to encompass the items listed thereafter and equivalents thereof as well as additional items.

[0043] In the description of the present application, it should be understood that, if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0044] In addition, if the terms "first", "second" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features referred to. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0045] In the present application, unless otherwise explicitly specified and limited, if the terms "mounting", "connecting", "connecting", "fixing" and the like appear, these terms should be interpreted broadly. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] In the present application, unless specifically stated and limited otherwise, if there is a description of a first feature "on" or "under" a second feature, etc., it can mean that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "on", "above" and "over" the second feature can be that the first feature is directly above or obliquely above the second feature, or only means that the first feature is higher in horizontal height than the second feature. The first feature "under", "below" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only means that the first feature is lower in horizontal height than the second feature.

[0047] It should be noted that if an element is referred to as being "fixed to" or "set to" another element, it can be directly on the other element or there can be a mediating element. If an element is considered to be "connected" to another element, it can be directly connected to the other element or there can be a mediating element. If present, the terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used in the present application are only for illustrative purposes and do not represent the only implementation.

[0048] Referring to Figure 1 , Figure 1 A structural schematic diagram of an electronic grade chemical sampling system in an embodiment of the present application is shown. The electronic grade chemical sampling system provided by the embodiment of the present application is used for sampling a liquid supply module in a production process. The electronic grade chemical sampling system comprises a plurality of liquid storage modules, a power module 120, a box body 130, a plurality of sampling switches 140 and a plurality of sampling pipelines 150.

[0049] The electronic grade chemical sampling system described above, the plurality of sampling switches 140 are arranged in the shell 131, the plurality of sampling switches 140, the plurality of sampling pipelines 150 and the plurality of liquid storage modules correspond one by one, the liquid storage module, the power module 120 and the sampling switch 140 are sequentially communicated through the corresponding sampling pipeline 150, and the power module 120 is used to make the liquid in the sampling pipeline 150 flow from the liquid storage module to the sampling switch 140. The box body 130 comprises a shell 131, a glove panel 132, a purification module and a sampling chamber 134 with a first sampling door 133 and a second sampling door. The shell 131 is provided with an operation opening and a sampling opening. The glove panel 132 is connected with the shell 131 and covers the operation opening. The sampling chamber 134 is arranged in the sampling opening and connected with the shell 131. The first sampling door 133 is located outside the shell 131, and the second sampling door is located inside the shell 131. The purification module is used for purifying the sampling chamber 134.

[0050] Referring to Figure 1 and Figure 2In actual use, the electronic-grade chemical sampling system is used as follows. First, the first sampling door 133 is opened to place a sampling bottle in the sampling chamber 134, and then the first sampling door 133 is closed to purify the sampling chamber 134 by the purification module. Then, the glove panel 132 is operated in the shell 131 to open the second sampling door, move the sampling bottle in the sampling chamber to the shell 131, close the second sampling door, open the sampling switch 140 corresponding to one of the liquid storage modules, and flow the sample liquid in the sampling pipeline from the liquid storage module to the sampling switch 140 by the power module 120, so as to sample the sample liquid into the sampling bottle. After the sampling switch 140 is closed, the second sampling door is opened, the sampling bottle containing the sample liquid is placed in the sampling chamber 134, the second sampling door is closed, the sampling chamber 134 is purified by the purification module, and then the first sampling door 133 is opened from the outside of the shell 131 to take out the sampling bottle from the sampling chamber 134, and the first sampling door 133 is closed to complete the sampling.

[0051] The sampling device with the glove box structure of the purification module protects the sampling switch by the form of the shell with the glove panel, purifies the sampling chamber once during the process of placing the sampling bottle in the shell, purifies again when the sampling bottle containing the sample is taken out of the shell during the sampling operation by the glove panel, thereby protecting the sampling switch in the shell, realizing the sampling process of the electronic-grade chemical, and not polluting the liquid storage module, that is, not polluting the raw materials in the liquid storage module.

[0052] Specifically, the power module 120 can be a liquid pump, a gas pump or the like, which provides power for the liquid in the sampling pipeline 150 to flow.

[0053] In an embodiment, the electronic-grade chemical sampling system further comprises a pressure regulating module, which is in communication with the inside of the sampling chamber 134 and is used to regulate the air pressure in the sampling chamber 134.

[0054] In an embodiment, the pressure regulating module comprises a pressure gauge 164, a pressure regulating valve and a gas source.

[0055] The pressure gauge 164 is arranged in the shell 131 and is in communication with the inside of the sampling chamber 134, one end of the pressure regulating valve is in communication with the gas source, and the other end is in communication with the inside of the sampling chamber 134. The pressure in the sampling chamber 134 is adjusted by the pressure regulating valve. Specifically, the on-off of the gas source is controlled by the union ball valve to control the gas into the sampling chamber 134 to regulate the air pressure in the sampling chamber 134, and the pressure in the sampling chamber 134 is displayed by the pressure gauge 164 to ensure that the air pressure in the sampling chamber 134 reaches the required pressure.

[0056] In an embodiment, the electronic-grade chemical sampling system further comprises a control panel 160, a purifying switch 161, a sampling switch 162, and a valve switch 163. The housing 131 has a control opening, and the control panel 160 is connected to the housing 131 and covers the control opening. The purifying switch 161, the sampling switch 162, the valve switch 163, and a pressure gauge 164 are arranged on the control panel 160. The purifying switch 161 is connected to the purifying module and is used to open or close the purifying module. The sampling switch 162 is connected to the power module 120. The valve switch 163 is connected to the pressure regulating valve.

[0057] In this embodiment, the purifying of the sampling bin 134, the opening of the power system, and the adjustment of the opening degree of the pressure regulating valve are realized by setting multiple switches, so that multiple function switches can be integrated on the control panel 160, and the operation is facilitated.

[0058] Referring to Figure 1 and Figure 2 In an embodiment, the electronic-grade chemical sampling system further comprises a partition plate 137, which is arranged inside the housing 131 and is horizontally placed. The partition plate 137 is arranged at the lower part of the sampling bin 134, so that the upper part of the partition plate 137 forms an operation space 135, and the lower part of the partition plate 137 forms a storage space 136. The specific sampling operation is performed in the operation space 135 on the upper part of the partition plate 137, and the storage space 136 on the lower part of the partition plate 137 is used to place other articles.

[0059] Referring to Figure 1 and Figure 2 In an embodiment, the multiple liquid storage modules at least comprise a first liquid storage barrel 111, a second liquid storage barrel 112, and a pure water liquid source 113. The multiple sampling switches 140 at least comprise a first switch, a second switch, and a third switch. The first liquid storage barrel 111, the power module 120, and the first switch are sequentially connected through corresponding sampling pipelines 150. The second liquid storage barrel 112, the power module 120, and the second switch are sequentially connected through corresponding sampling pipelines 150. The pure water liquid source 113 is connected to the third switch through a corresponding sampling pipeline 150. Thus, at least two kinds of chemicals and pure water can be sampled.

[0060] Specifically, the pure water liquid source 113 comprises a water inlet and a water outlet.

[0061] In an embodiment, the electronic-grade chemical sampling system at least comprises a first chemical liquid part and a second chemical liquid part.

[0062] The first liquid preparation part is in communication with the opening of the first liquid storage barrel 111 at one end and in communication with the corresponding sampling pipeline 150 at the other end, so as to prepare the sample liquid of the first liquid outlet barrel. The second liquid preparation part is in communication with the opening of the second liquid storage barrel 112 at one end and in communication with the corresponding sampling pipeline 150 at the other end, so as to prepare the sample liquid of the second liquid outlet barrel.

[0063] In an embodiment, the purification module is a purification fan, which is arranged at the top of the shell 131 and in communication with the inside of the sampling chamber 134. The cleanliness of the sampling chamber 134 is up to thousands of levels. The top is connected with the factory exhaust outlet and the air inlet net, so as to ensure that the chemical waste gas is extracted in time.

[0064] In an embodiment, the box 130 further comprises a waste liquid part, a first liquid discharge pipe and a second liquid discharge pipe. The waste liquid part is arranged in the storage space 136. One end of the first liquid discharge pipe is arranged in the partition plate 137 and extends into the operation space, and the other end is in communication with the inside of the waste liquid part. One end of the second liquid discharge pipe extends out of the shell 131, and the other end is in communication with the inside of the waste liquid part.

[0065] In this embodiment, during sampling, the sampling switch 140 is first opened, and sampling is performed after flushing for 10 minutes. The waste liquid generated during the flushing process is discharged from the operation space to the waste liquid part through the first liquid discharge pipe, and then discharged from the second liquid discharge pipe to the waste liquid treatment device in the factory, so as to improve the purity of sampling.

[0066] Referring to Figure 1 and Figure 2 In an embodiment, the electronic-grade chemical sampling system further comprises a plurality of three-way valves 170 corresponding to the plurality of liquid storage modules. The three-way valves 170 can connect the corresponding liquid storage modules, the corresponding liquid use modules and the corresponding sampling switches 140, so that the electronic-grade chemical sampling system can sample during the liquid supply process of the liquid storage modules to the corresponding liquid use modules. The technical features of the above embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, but as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the description.

[0067] The above-described embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. An electronic-grade chemical sampling system for sampling liquid supply modules during production processes, characterized in that, The electronic-grade chemical sampling system includes: multiple liquid storage modules, a power module, a housing, multiple sampling switches, and multiple sampling pipelines; The enclosure includes: a shell, a glove panel, a purification module, and a sampling chamber with a first sampling door and a second sampling door. The shell has an operation opening and a sampling opening. The glove panel is connected to the shell and covers the operation opening. The sampling chamber passes through the sampling opening and is connected to the shell. The first sampling door is located outside the shell, and the second sampling door is located inside the shell. The purification module is used to purify the sampling chamber. Multiple sampling switches are disposed within the housing. The multiple sampling switches, multiple sampling pipelines, and multiple liquid storage modules correspond one-to-one. The liquid storage modules, the power module, and the sampling switches are sequentially connected through corresponding sampling pipelines. The power module is used to enable the liquid in the sampling pipeline to flow from the liquid storage module to the sampling switch.

2. The electronic-grade chemical sampling system according to claim 1, characterized in that, The electronic chemical sampling system also includes a pressure regulating module, which is connected to the interior of the sampling chamber and is used to regulate the air pressure inside the sampling chamber.

3. The electronic-grade chemical sampling system according to claim 2, characterized in that, The pressure regulating module includes a pressure gauge, a pressure regulating valve, and a gas source; The pressure gauge is installed in the housing and communicates with the interior of the sampling chamber. One end of the pressure regulating valve is connected to the gas source, and the other end is connected to the interior of the sampling chamber.

4. The electronic-grade chemical sampling system according to claim 3, characterized in that, The electronic chemical sampling system also includes a control panel, a purification switch, a sampling switch, and a valve switch; The housing has a control opening, and the control panel is connected to the housing and covers the control opening. The purification switch, sampling switch, valve switch and pressure gauge are all located on the control panel. The purification switch is connected to the purification module and is used to turn the purification module on or off. The sampling switch is connected to the power module; The valve switch is connected to the pressure regulating valve.

5. The electronic-grade chemical sampling system according to claim 1, characterized in that, The electronic-grade chemical sampling system further includes a partition located inside the housing and placed horizontally. The partition is located at the lower part of the sampling chamber, so that the upper part of the partition forms an operating space and the lower part of the partition forms a storage space.

6. The electronic-grade chemical sampling system according to claim 1, characterized in that, The multiple liquid storage modules include at least a first liquid storage tank, a second liquid storage tank, and a pure water source; the multiple sampling switches include at least a first switch, a second switch, and a third switch. The first liquid storage tank, the power module, and the first switch are connected sequentially through corresponding sampling pipelines; The second liquid storage tank, the power module, and the second switch are connected in sequence through corresponding sampling pipelines; The pure water source is connected to the third switch via a corresponding sampling pipeline.

7. The electronic-grade chemical sampling system according to claim 6, characterized in that, The electronic-grade chemical sampling system includes at least a first liquid preparation unit and a second liquid preparation unit; One end of the first liquid preparation section is connected to the opening of the first liquid storage tank, and the other end is connected to the corresponding sampling pipeline. One end of the second liquid-dissolving section is connected to the opening of the second liquid storage tank, and the other end is connected to the corresponding sampling pipeline.

8. The electronic-grade chemical sampling system according to claim 1, characterized in that, The purification module is a purification fan, which is located on the top of the housing and is connected to the inside of the sampling chamber.

9. The electronic-grade chemical sampling system according to claim 5, characterized in that, The housing also includes a waste liquid section, a first drain pipe, and a second drain pipe. The waste liquid section is located in the storage space. One end of the first drain pipe passes through the partition and extends into the operating space, while the other end communicates with the interior of the waste liquid section. One end of the second drain pipe extends out of the housing, and the other end communicates with the interior of the waste liquid section.

10. The electronic-grade chemical sampling system according to claim 1, characterized in that, The electronic-grade chemical sampling system also includes multiple T-junctions corresponding to multiple liquid storage modules. The T-junctions can connect the corresponding liquid storage module, the corresponding liquid use module, and the corresponding sampling switch, so that the electronic-grade chemical sampling system can take samples during the process of the liquid storage module supplying liquid to the corresponding liquid use module.

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