Sheet transfer trolley
By designing a sheet transfer vehicle with adjustable spacing inserts and movable support components, the problems of easy breakage and contamination inside holes during the transportation of TGV glass substrates were solved, achieving higher transportation safety and product quality.
Patent Information
- Application Number
- CN202423306818.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-12-31
AI Technical Summary
TGV glass substrates are easily damaged during transportation, and the holes are easily contaminated, affecting production stability and product performance.
A sheet transfer cart was designed, including adjustable-spacing inserts and movable supports for vertically inserting sheets, reducing friction and contaminant entry.
This effectively avoids sheet breakage and contamination inside the holes, improves safety and stability during transportation, and enhances product yield and quality.
Smart Images
Figure CN223618766U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor manufacturing, and more specifically, to a sheet transfer vehicle. Background Technology
[0002] As microelectronic devices enter the nanoscale era, integration levels have increased dramatically, and new packaging technologies have gradually become key to solving the demand for high integration. Through-Glass Via (TGV) copper plating technology, as an emerging packaging solution, has become an ideal three-dimensional integration technology due to its excellent dielectric properties and a coefficient of thermal expansion (CTE) close to that of silicon. Compared to traditional through-silicon via (TSV) technology, glass does not contain free charges, avoiding the problems commonly encountered with silicon in high-density packaging. Therefore, it has broad advantages in high-frequency, high-density applications. TGV technology not only improves packaging integration but also reduces process complexity and production costs, showing great promise in fields such as optical communication, radio frequency, microwave, and microelectromechanical systems (MEMS).
[0003] While TGV technology demonstrates significant potential in highly integrated packaging, it still faces several challenges in practical applications. First, the thinness of the TGV glass substrate makes it susceptible to breakage during transportation, impacting production stability. Second, the dense arrangement of apertures (50µm, 70µm, 100µm, etc.) in TGV designs makes the vias vulnerable to environmental contamination. Particularly during transportation and handling, dust and other impurities can easily enter the vias, causing contamination and affecting signal transmission quality and package reliability. Furthermore, due to the properties of glass, the accumulation of dust and dirt can lead to open circuits or short circuits in the TGV vias, affecting the final product performance.
[0004] In conclusion, despite the significant technological advantages of through-glass via (TGV) technology, issues such as fragile glass substrates and contamination within the vias remain during actual production and transportation. These defects not only increase the difficulty of production and quality control but may also affect the reliability of the packaging and the final product performance. Utility Model Content
[0005] The main objective of this invention is to provide a sheet transfer vehicle to solve the problems of easy breakage and contamination inside holes in the existing technology.
[0006] To achieve the above objectives, this utility model provides a sheet transfer vehicle, comprising: a vehicle body; at least one pair of insert plates, the pair of insert plates being arranged face-to-face on the vehicle body in a vertical direction, and slots arranged in a vertical direction being formed on the opposite surfaces of the pair of insert plates, the slots being used to insert sheets; and a support member, disposed on the vehicle body and located between the pair of insert plates, the support member being used to support the bottom of the sheet.
[0007] Furthermore, the insert plates are configured to be horizontally movable on the vehicle body to adjust the spacing between the pair of insert plates.
[0008] Furthermore, the vehicle body is provided with a horizontally extending groove, and the insert plate is mounted on the groove via a sliding component.
[0009] Furthermore, a plurality of spaced-apart support mounting portions are provided on the vehicle body in a horizontal direction, wherein there is at least one support and the support can be selectively mounted on one or more of the plurality of support mounting portions.
[0010] Furthermore, there is at least one support member, which is movably mounted on the vehicle body in the horizontal direction.
[0011] Furthermore, the support member is height-adjustable on the vehicle body.
[0012] Furthermore, a plurality of spaced-apart support mounting portions are provided on the vehicle body along the vertical direction, wherein there is at least one support, and the support can be selectively mounted on one or more of the plurality of support mounting portions.
[0013] Furthermore, the vehicle body is provided with multiple mounting strips, which are spaced apart in a vertical direction, and the support mounting part is disposed on the mounting strips.
[0014] Furthermore, the insert plate is in two pairs, and the two pairs of insert plates are arranged side by side on the vehicle body.
[0015] Furthermore, the sheet transfer cart includes pulleys, which are disposed at the bottom of the cart body.
[0016] By applying the technical solution of this utility model, the sheet transfer cart effectively avoids damage and contamination of the sheets during transportation by vertically inserting them into slots and supporting them on support members. Because the sheets are vertically inserted, friction and contact between products are reduced, and dust, debris, and other contaminants are effectively prevented from entering the pores of the sheets, thus preventing electrical defects in the glass substrate and semiconductor wafers caused by contamination. Simultaneously, the sheets are securely fixed in the slots, reducing collisions and scratches caused during handling, thereby improving product yield and quality. The technical solution of this utility model reduces the possibility of glass substrate breakage and pore contamination, improving safety and stability during transportation and loading.
[0017] In addition to the objectives, features, and advantages described above, this utility model has other objectives, features, and advantages. The present utility model will now be described in further detail with reference to the figures. Attached Figure Description
[0018] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:
[0019] Figure 1 A schematic diagram of the overall structure of an embodiment of the sheet transfer vehicle according to the present invention is shown;
[0020] Figure 2 It shows Figure 1 A top-view structural diagram of the sheet material transfer vehicle;
[0021] Figure 3 It shows Figure 1 A schematic diagram of the sheet transfer vehicle when loading rectangular sheets;
[0022] Figure 4 It shows Figure 1 A schematic diagram of the sheet transfer vehicle when loading circular sheets. Detailed Implementation
[0023] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.
[0024] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.
[0025] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate for the embodiments of the utility model described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.
[0026] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0027] This utility model provides a sheet transfer cart, including a cart body 10, at least one pair of insert plates 20, and a support member 30. The pair of insert plates 20 are arranged face-to-face on the cart body 10 in a vertical direction, and slots 21, also arranged in a vertical direction, are formed on the opposite surfaces of the pair of insert plates 20 for inserting sheets. The support member 30 is disposed on the cart body 10 between the pair of insert plates 20 and is used to support the bottom of the sheet.
[0028] By applying the technical solution of this utility model, the sheet transfer cart effectively avoids damage and contamination of the sheets during transportation by vertically inserting them into slots 21 and supporting them on support members 30. Because the sheets are vertically inserted, friction and contact between products are reduced, and dust, debris, and other contaminants are effectively prevented from entering the pores of the sheets, thus preventing electrical defects in the glass substrate and semiconductor wafers caused by contamination. Simultaneously, the sheets are securely fixed in the slots 21, reducing collisions and scratches during handling, thereby improving product yield and quality. The technical solution of this utility model reduces the possibility of glass substrate breakage and pore contamination, improving safety and stability during transportation and loading.
[0029] In a preferred embodiment, the insert plates 20 are horizontally movable on the vehicle body 10 to adjust the spacing between them. By adjusting the horizontal spacing of the insert plates 20, the spacing between them can be adjusted according to different sizes of sheets, thus achieving adaptation to different sheet sizes. This makes sheet loading more flexible and adaptable to various specifications of glass substrates and semiconductor wafers, improving the equipment's versatility and adaptability. Adjusting the spacing of the insert plates 20 ensures stable mounting of the sheets during transportation, avoiding product damage or defects caused by unstable mounting, thereby improving product yield and transportation safety.
[0030] In this embodiment, a more preferred embodiment provides a horizontally extending groove 11 on the vehicle body 10, and the insert plate 20 is mounted on the groove 11 via a sliding component. The insertion plate 20's mounting in the groove 11 via the sliding component allows for smooth and flexible adjustment along the horizontal axis, simplifying the adjustment process of the insertion plate 20 spacing and improving the accuracy and stability of the adjustment, facilitating rapid adaptation to sheets of different sizes. Optionally, the sliding component can be in the form of a roller or slider to further optimize the smoothness and durability of the adjustment.
[0031] In a preferred embodiment, the technical solution of this embodiment includes a plurality of spaced-apart support mounting portions 12 arranged horizontally on the vehicle body 10. At least one support 30 is provided, and the support 30 can be selectively mounted on one or more of the plurality of support mounting portions 12. By providing a plurality of spaced-apart support mounting portions 12 horizontally on the vehicle body 10, flexible selection of the position and number of support 30 is provided. This allows for the selection of a suitable support method based on the shape and support requirements of different types of sheet materials, thereby ensuring effective support of the sheet materials during transportation.
[0032] like Figure 3 As shown, for rectangular sheets, specifically TGV glass substrates, one support 30 can be installed at the center of the bottom of the rectangular sheet, or two support 30s can be evenly supported at the bottom to ensure the stability of the sheet during transportation.
[0033] like Figure 4 As shown, for circular sheets, specifically semiconductor wafers, two supports 30 can be installed at the bottom of the circular sheet's arc to evenly distribute the supporting force and prevent sheet deformation or displacement. This adjustable support design not only improves the safety of the sheet but also makes the transfer vehicle more adaptable and flexible in handling sheets of different sizes and shapes, avoiding damage to the sheet caused by improper support, and further improving turnover efficiency and product yield.
[0034] Preferably, there is at least one support member 30, which is movably mounted on the vehicle body 10 in the horizontal direction. This horizontal movability of the support member 30 provides another flexible support method, allowing the position of the support member 30 to be adjusted according to sheets of different shapes and sizes. This allows the position of the support member 30 to be adjusted according to the specific needs of the sheet, whether using a single support member 30 or multiple support members 30, to adapt to the support requirements of the sheet.
[0035] In this embodiment, as a preferred embodiment, the support member 30 is height-adjustable on the vehicle body 10. By making the support member 30 height-adjustable, the sheet transfer vehicle can adapt to sheets of different heights. The height adjustment function of the support member 30 can be flexibly adjusted according to the actual height requirements of the sheet, thereby providing optimal support for sheets of different sizes. For taller sheets, the support member 30 can be adjusted to a lower position to ensure the stability of the sheet; while for shorter sheets, the support member 30 can be adjusted to a higher position. This height-adjustable design further enhances the versatility of the sheet transfer vehicle, enabling it to handle sheets of various heights and sizes.
[0036] In a preferred embodiment, a plurality of spaced-apart support mounting portions 12 are provided vertically on the vehicle body 10, and at least one support 30 is provided. The support 30 can be selectively mounted on one or more of the plurality of support mounting portions 12. By providing a plurality of spaced-apart support mounting portions 12 vertically on the vehicle body 10 and setting the support 30 on mounting portions at different heights, reasonable adjustments can be made according to the size and height requirements of the sheet material. Users can select appropriate support mounting portion 12 positions according to the actual needs of the sheet material and install the support 30 on different mounting portions, thereby effectively supporting sheets of different sizes. For example, taller sheets can be installed on lower mounting portions, while smaller sheets can be installed on higher positions to provide appropriate support.
[0037] Optionally, the vehicle body 10 is provided with multiple mounting strips 13, which are spaced apart vertically, and the support mounting part 12 is disposed on the mounting strips 13. This allows the support 30 to be flexibly adjusted according to the size and height requirements of the sheet material. By selecting mounting strips 13 of different heights, the support 30 can be installed in appropriate positions to achieve optimal support for sheets of different sizes. For example, taller sheets can be installed on mounting strips 13 at higher positions, while smaller sheets can be installed on mounting strips 13 at lower positions.
[0038] Optionally, in this embodiment, the insert plates 20 are arranged in two pairs, side-by-side on the vehicle body 10. By arranging the two pairs of insert plates 20 side-by-side on the vehicle body 10, the sheet transfer vehicle can simultaneously accommodate two rows of sheets, thereby greatly improving the carrying efficiency of the transfer vehicle and enabling it to hold more sheets in a limited space, thus improving transportation efficiency. Due to the side-by-side arrangement of the insert plates 20, the sheets can be effectively separated and each row of sheets can be securely placed in the slots, avoiding friction or collision between the sheets and reducing the risk of damage during transportation.
[0039] Optionally, the sheet transfer cart includes pulleys 14, which are located at the bottom of the cart body 10. By installing pulleys 14 at the bottom of the sheet transfer cart, the cart becomes more flexible and convenient during transportation. The pulleys 14 allow the transfer cart to be easily pushed, pulled, and moved between different processes, reducing the difficulty and labor intensity of manual handling and improving work efficiency.
[0040] Optionally, the vehicle body 10 can be a frame structure, made of SUS304 stainless steel, with square steel measuring 20*20*1.5mm. The insert plate 20 can be made of PP material, and the four wheels are 2-inch silent and dustproof polyurethane wheels. The support component 30 can be a round rod, made of 22mm silicone, with an outer diameter of 16mm SUS.
[0041] Optionally, the number of slots 21 can be selected as needed, allowing each vehicle to carry 50 sheets of material.
[0042] The technical solution of this utility model can be used to adjust the effective size of TGV glass substrates 700*800 arbitrarily, and is compatible with 12-inch, 8-inch, and 6-inch semiconductor wafers for multiple functions.
[0043] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.
[0044] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.
[0045] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.
[0046] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A sheet material transfer vehicle, characterized in that, include: Vehicle body (10); At least one pair of insert plates (20) are arranged face to face on the vehicle body (10) in a vertical direction. The opposite surfaces of the pair of insert plates (20) are provided with slots (21) arranged in a vertical direction, and the slots (21) are used to insert sheets. A support member (30) is disposed on the vehicle body (10) between a pair of inserts (20) for supporting the bottom of the sheet.
2. The sheet transfer vehicle according to claim 1, characterized in that, The insert (20) is movably mounted on the vehicle body (10) in the horizontal direction to adjust the spacing between the pair of inserts (20).
3. The sheet transfer vehicle according to claim 2, characterized in that, The vehicle body (10) is provided with a horizontally extending groove (11), and the insert plate (20) is mounted on the groove (11) by a sliding component.
4. The sheet transfer vehicle according to claim 1, characterized in that, Multiple spaced support mounting portions (12) are provided on the vehicle body (10) in the horizontal direction. There is at least one support (30), and the support (30) can be selectively mounted on one or more of the multiple support mounting portions (12).
5. The sheet transfer vehicle according to claim 1, characterized in that, There is at least one support member (30), which is movably mounted on the vehicle body (10) in the horizontal direction.
6. The sheet transfer vehicle according to claim 1, characterized in that, The support member (30) is height-adjustable on the vehicle body (10).
7. The sheet transfer vehicle according to claim 6, characterized in that, Multiple spaced support mounting portions (12) are provided on the vehicle body (10) in a vertical direction. There is at least one support (30), and the support (30) can be selectively mounted on one or more of the multiple support mounting portions (12).
8. The sheet transfer vehicle according to claim 7, characterized in that, The vehicle body (10) is provided with a plurality of mounting strips (13), which are spaced apart in the vertical direction, and the support mounting part (12) is provided on the mounting strips (13).
9. The sheet transfer vehicle according to claim 1, characterized in that, The insert plate (20) consists of two pairs, which are arranged side by side on the vehicle body (10).
10. The sheet transfer vehicle according to claim 1, characterized in that, The sheet transfer cart includes pulleys (14) which are disposed at the bottom of the cart body (10).