Conveying mechanism and turnover device

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a conveying mechanism and a turnover device, and solves the problem that the conveying efficiency of a conveying mechanism on a bearing plate is low in the prior art. The conveying mechanism comprises a conveying frame, two or more transmission assemblies and a driving source assembly, the transmission assemblies and the driving source assembly are arranged on the conveying frame, the transmission assemblies are used for bearing and transporting the bearing plates, and the driving source assembly is connected with the transmission assemblies to drive the transmission assemblies to move. The bearing plate comprises two bearing faces which are oppositely arranged, and the two bearing faces can bear workpieces. The conveying frame can be turned over, and when the bearing plates are conveyed to the position between the two adjacent transmission assemblies, the transmission assemblies located below the bearing plates bear and transport the bearing plates. According to the conveying mechanism, the two adjacent transmission assemblies are used for bearing and transporting the bearing plates before overturning and after overturning correspondingly, the situation that the bearing plates are continuously transported after the overturned bearing plates are overturned to the original positions is not needed, and therefore the conveying efficiency of the conveying mechanism is improved.

Description

Technical Field

[0001] This disclosure relates to the fields of photovoltaic and semiconductor technology, and more specifically to a conveying mechanism and a flipping device. Background Technology

[0002] The photovoltaic industry's consolidation is not yet over; "involution" remains the overall state of the industry in recent years. Achieving technological leadership is a crucial path for companies to escape this "involution" and achieve further upward development. Copper electroplating technology can serve as a platform technology for N-type batteries, facilitating further upgrades of some battery types. Copper electroplating is a non-contact electrode metallization process that deposits copper onto a substrate metal surface using electrolysis to create copper grid lines, collecting charge carriers generated by the photovoltaic effect. Copper electroplating technology can reduce the cost and improve the performance of photovoltaic cells. However, the automation level of copper electroplating equipment is currently not mature enough.

[0003] Currently, in the copper electroplating process, to improve battery transport efficiency, a carrier plate is typically used to support the battery, and a conveyor mechanism is used to transport the carrier plate. However, the conveyor mechanism in this technology has low transport efficiency for the carrier plate, which in turn leads to low transport efficiency for the battery. Utility Model Content

[0004] In view of this, the present disclosure provides a conveying mechanism and a flipping device, which solves the problem of low conveying efficiency of the conveying mechanism for the carrier plate in the related art.

[0005] In a first aspect, embodiments of this disclosure provide a conveying mechanism configured to carry and transport a carrier plate, the carrier plate including a first carrier surface and a second carrier surface disposed opposite to each other, both the first carrier surface and the second carrier surface being capable of carrying workpieces; the conveying mechanism includes: a conveying frame having a receiving space; two or more sets of transmission components disposed in the receiving space and sequentially spaced along a first direction, the first direction being perpendicular to the central plane of the carrier plate; a drive source component disposed in the conveying frame and connected to the transmission components, such that the drive source component can drive the transmission components to move; wherein, when the carrier plate is conveyed between two adjacent sets of the transmission components, the transmission component located below the carrier plate carries and transports the carrier plate, wherein the conveying frame can be flipped so that the workpiece can be loaded and unloaded on the first carrier surface and the second carrier surface.

[0006] In some embodiments, the conveying frame includes: a first support plate connected to the transmission assembly and extending along a second direction; a second support plate connected to the transmission assembly, disposed opposite to the first support plate and extending along the second direction, wherein the receiving space is formed between the first support plate and the second support plate, wherein the second direction intersects the first direction; wherein the transmission assembly includes: two sets of sub-transmission assemblies disposed opposite to each other and respectively connected to the drive source assembly, one set of the sub-transmission assemblies being connected to the side of the first support plate facing the receiving space, and the other set of the sub-transmission assemblies being connected to the side of the second support plate facing the receiving space, wherein the two sets of sub-transmission assemblies are respectively capable of supporting both ends of the support plate.

[0007] In some embodiments, the conveying mechanism further includes: two or more drive shafts arranged sequentially along the first direction and extending along a third direction, wherein the drive shafts are connected to the drive source assembly and to two sets of the sub-drive assemblies of a set of the drive assembly, wherein the third direction intersects the first direction and the second direction respectively.

[0008] In some embodiments, the drive source assembly includes: a drive source connected to one of the drive shafts; wherein adjacent drive shafts are drive-connected to enable the drive source to drive one of the drive shafts to move, and one of the drive shafts drives the other drive shaft to move.

[0009] In some embodiments, the drive shaft is rotatably connected to the first support plate and the second support plate; wherein the sub-drive assembly includes: a drive wheel located at a first end of the first support plate or a first end of the second support plate and fitted onto the drive shaft; a driven wheel rotatably connected to a second end of the first support plate or a second end of the second support plate, wherein the first end and the second end of the first support plate are disposed opposite to each other along a second direction, and the first end and the second end of the second support plate are disposed opposite to each other along the second direction; and a conveyor belt fitted onto the drive wheel and the driven wheel located on the first support plate, or fitted onto the drive wheel and the driven wheel located on the second support plate, and configured to carry one end of the support plate.

[0010] In some embodiments, the conveying mechanism further includes: two or more transmission wheels, each sleeved on one or more transmission shafts, and the transmission wheels on two adjacent transmission shafts meshing, so that one transmission shaft can drive the adjacent other transmission shaft to move; the transmission wheels and the drive source are respectively disposed at both ends of the transmission shaft, and both are located outside the accommodating space.

[0011] In some embodiments, the conveying mechanism further includes: a plurality of pads extending along the second direction and connected to either the side of the first support plate facing the receiving space or the side of the second support plate facing the receiving space, the pads being capable of abutting against the side of the conveyor belt that carries the support plate and being configured to support the conveyor belt.

[0012] In some embodiments, the conveying mechanism further includes: one or more baffles extending along a second direction and connected to the side of the conveying frame facing the receiving space, and capable of abutting against the side of the support plate, wherein the second direction intersects the first direction.

[0013] In a second aspect, embodiments of this disclosure provide a flipping device, comprising: a conveying mechanism as described in the first aspect, configured to carry and transport a carrier plate; and a flipping assembly connected to the conveying mechanism and configured to flip the conveying mechanism.

[0014] In some embodiments, the rotation center line of the flipping component is located at the center of the conveying frame of the conveying mechanism, and the arrangement direction of the two or more sets of transmission components of the conveying mechanism and the transmission direction of the transmission components both intersect the rotation center line.

[0015] The conveying mechanism provided in this embodiment includes a conveying frame, two or more sets of transmission components and a drive source component. The transmission components and drive source components are both disposed on the conveying frame. The drive source component is connected to the transmission components to drive the transmission components to move. When the carrier plate is conveyed between two adjacent sets of transmission components, the conveying frame can be flipped, and the transmission component located below the carrier plate can carry and transport the carrier plate. This conveying mechanism uses two adjacent sets of transmission components to carry and transport the carrier plate before and after flipping, respectively, without having to flip the flipped carrier plate back to its original position before continuing to transport the carrier plate, thereby improving the conveying efficiency of the conveying mechanism. Attached Figure Description

[0016] Figure 1 The diagram shown is a structural schematic of a flipping device provided in an embodiment of this disclosure.

[0017] Figure 2 The image shown is a side view of a flipping device and a support plate provided in an embodiment of this disclosure.

[0018] Figure 3 The image shown is a side view of a conveying mechanism provided in an embodiment of this disclosure.

[0019] Figure 4 The image shown is a top view of a flipping device provided in an embodiment of this disclosure.

[0020] Figure 5 As shown Figure 4 A magnified view of a portion of the flipping device shown in region A.

[0021] Figure 6 As shown Figure 4 The enlarged view of the flipping device in region B.

[0022] Figure 7 As shown Figure 4 A magnified view of the flipping device in region C.

[0023] Figure 8 The image shown is a front view of a first support plate, a sub-transmission assembly, a pad, and a stop bar provided in an embodiment of this disclosure.

[0024] Figure label:

[0025] 1. Tilting device; 10. Conveying mechanism; 100. Transmission assembly; 110. Sub-transmission assembly; 1110. Driving wheel; 1120. Driven wheel; 1130. Conveyor belt; 200. Drive source assembly; 210. Drive source; 340. Conveying frame; 300. First support plate; 301. First end of the first support plate; 302. Second end of the first support plate; 400. Second support plate; 401. First end of the second support plate; 402. Second end of the second support plate; 500. Drive shaft; 600. Drive wheel; 700. Pad strip; 800. Stop strip; 900. Coupling; 1000. Connecting shaft; 2. Bearing plate; 21. First bearing surface; 22. Second bearing surface; 101. Accommodation space; X1. First direction; X2. Second direction; X3. Third direction; 20. Tilting assembly. Detailed Implementation

[0026] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0027] The specific structure of the conveying mechanism is described below with reference to an embodiment.

[0028] Figure 1 The diagram shown is a structural schematic of a flipping device provided in an embodiment of this disclosure. Figure 2 The image shown is a side view of a flipping device and a support plate provided according to an embodiment of this disclosure. Figure 1 and Figure 2As shown, the conveying mechanism 10 is configured to carry and transport the carrier plate 2. The carrier plate 2 includes a first carrier surface 21 and a second carrier surface 22 disposed opposite to each other, both of which can carry workpieces. The conveying mechanism 10 includes a conveying frame 340, two or more sets of transmission assemblies 100, and a drive source assembly 200. The conveying frame 340 has a receiving space 101, in which two or more sets of transmission assemblies 100 are disposed and spaced apart sequentially along a first direction X1, which is perpendicular to the center plane of the carrier plate 2. The drive source assembly 200 is disposed on the conveying frame 340 and connected to the transmission assemblies 100 so that the drive source assembly 200 can drive the transmission assemblies 100 to move. When the carrier plate 2 is conveyed between two adjacent sets of transmission assemblies 100, the transmission assembly 100 located below the carrier plate 2 carries and transports the carrier plate 2. The conveying frame 340 can be flipped so that workpieces can be loaded and unloaded onto the first carrier surface 21 and the second carrier surface 22.

[0029] The conveying mechanism 10 uses two adjacent sets of transmission components 100 to carry and transport the carrier plate 2 before and after flipping, respectively. Compared with the conveying mechanism of related technologies, it is not necessary to flip the carrier plate 2 back to its original position before continuing to transport the carrier plate 2, thereby improving the conveying efficiency of the conveying mechanism 10, which in turn improves the conveying efficiency of the conveying mechanism 10 for the workpiece and increases the production capacity of the equipment for processing the workpiece.

[0030] For example, the conveying mechanism 10 can be a conveyor belt, a linear module, or other transportation methods.

[0031] For example, the drive source component 200 may include two or more drive sources 210, which are connected one-to-one with two or more sets of transmission components 100, so that one drive source 210 can drive the corresponding set of transmission components 100 to move.

[0032] For example, the first bearing surface 21 and the second bearing surface 22 of the bearing plate 2 may both be provided with clamping members, and the workpiece is pressed against the first bearing surface 21 and the second bearing surface 22 of the bearing plate 2 by the clamping members to prevent the workpiece from falling off the bearing plate 2.

[0033] For example, the workpiece can be a silicon wafer, a solar panel, a glass substrate, or other products. The workpiece can be regularly arranged on the first bearing surface 21 and the second bearing surface 22 of the support plate 2.

[0034] For example, such as Figure 1 and Figure 2 As shown, the conveying mechanism 10 includes two sets of transmission assemblies 100 arranged sequentially along the first direction X1. Figure 2The structure within the dashed box represents a set of transmission assemblies 100. When the support plate 2 is conveyed between the two sets of transmission assemblies 100, the set of transmission assemblies 100 located below the support plate 2 carries and transports the support plate 2 to a preset position, where the workpiece is placed on the first bearing surface 21 of the support plate 2. The conveyor frame 340 is flipped, causing the transmission assembly 100, drive source assembly 200, and support plate 2 to flip, facilitating the placement of the workpiece on the second bearing surface 22 of the support plate 2. Subsequently, the other set of transmission assemblies 100 located below the support plate 2 carries and transports the support plate 2.

[0035] In some embodiments, such as Figure 1 and Figure 2 As shown, the conveying frame 340 includes a first support plate 300 and a second support plate 400. The first support plate 300 is connected to the transmission assembly 100 and extends along a second direction X2. The second support plate 400 is connected to the transmission assembly 100, is disposed opposite to the first support plate 300, and extends along the second direction X2. A receiving space 101 is formed between the first support plate 300 and the second support plate 400. The second direction X2 intersects the first direction X1. For example, the first direction X1 is a vertical direction, and the second direction X2 is perpendicular to the first direction X1.

[0036] The transmission assembly 100 includes two sets of sub-transmission assemblies 110 arranged opposite to each other, and the two sets of sub-transmission assemblies 110 are respectively connected to the drive source assembly 200. One set of sub-transmission assemblies 110 is connected to the side of the first support plate 300 facing the receiving space 101, and the other set of sub-transmission assemblies 110 is connected to the side of the second support plate 400 facing the receiving space 101. The two sets of sub-transmission assemblies 110 are respectively able to support both ends of the support plate 2, so as to improve the stability of the transmission assembly 100 in supporting and transporting the support plate 2.

[0037] For example, the drive source component 200 may include four drive sources 210, which are connected one-to-one with four sets of sub-transmission components 110, so that one drive source 210 can drive the corresponding set of sub-transmission components 110 to move.

[0038] In some embodiments, such as Figures 1 to 3 As shown, the conveying mechanism 10 also includes two or more drive shafts 500 arranged sequentially along the first direction X1. The drive shafts 500 extend along a third direction X3, are connected to the drive source assembly 200, and are connected to two sets of sub-drive assemblies 110 of a set of drive assemblies 100. The third direction X3 intersects the first direction X1 and the second direction X2 respectively. For example, the third direction X3 is perpendicular to the first direction X1 and the second direction X2 respectively.

[0039] A drive shaft 500 connects two sets of sub-drive assemblies 110 of a set of drive assemblies 100, enabling the two sets of sub-drive assemblies 110 to move synchronously. This allows the two sets of sub-drive assemblies 110 to transport the carrier plate 2 synchronously, preventing the carrier plate 2 from shifting during transport. Furthermore, it prevents the carrier plate 2 from failing to be accurately transported to the preset position due to shifting. If the carrier plate 2 fails to reach the preset position accurately, it will affect the accuracy of workpiece handling and may even lead to workpiece breakage.

[0040] In some embodiments, the drive source assembly 200 includes a drive source 210 connected to a drive shaft 500, and adjacent drive shafts 500 are connected in a transmission manner so that the drive source 210 can drive one drive shaft 500 to move, and one drive shaft 500 drives another drive shaft 500 to move.

[0041] By using a drive source 210 to simultaneously drive two or more transmission shafts 500 to move, the two or more transmission shafts 500 synchronously drive the two sets of sub-transmission components 110 connected to each other to move synchronously, thereby realizing that a drive source 210 synchronously drives two or more sets of transmission components 100 to move synchronously.

[0042] For example, such as Figures 1 to 3 As shown, the conveying mechanism 10 also includes two drive shafts 500 arranged sequentially along the first direction X1. A drive source 210 is connected to one drive shaft 500, and one drive shaft 500 is connected to the adjacent drive shaft 500 for transmission, so that one drive source 210 can drive one drive shaft 500 to move, and one drive shaft 500 drives the adjacent drive shaft 500 to move.

[0043] In some embodiments, such as Figures 1 to 8 As shown, the drive shaft 500 is rotatably connected to the first support plate 300 and the second support plate 400. The sub-drive assembly 110 includes a drive wheel 1110, a driven wheel 1120, and a conveyor belt 1130. The drive wheel 1110 is located at the first end 301 of the first support plate or the first end 401 of the second support plate and is fitted onto the drive shaft 500. The driven wheel 1120 is rotatably connected to the second end 302 of the first support plate or the second end 402 of the second support plate. The first end 301 and the second end 302 of the first support plate are arranged opposite each other along a second direction X2, and the first end 401 and the second end 402 of the second support plate are also arranged opposite each other along a second direction X2. The conveyor belt 1130 is fitted onto the drive wheel 1110 and driven wheel 1120 located on the first support plate 300, or the conveyor belt 1130 is fitted onto the drive wheel 1110 and driven wheel 1120 located on the second support plate 400, and the conveyor belt 1130 is configured to support one end of the support plate 2.

[0044] For example, such as Figure 5 As shown, the drive source 210 is connected to the end of the drive shaft 500 via a coupling 900.

[0045] For example, such as Figure 4 and Figure 7 As shown, the driven wheel 1120 is rotatably connected to the second end 302 of the first support plate or the second end 402 of the second support plate via a connecting shaft 1000. For example, the driven wheel 1120 is fitted onto and rotatably connected to the connecting shaft 1000, which is connected to the second end 302 of the first support plate or the second end 402 of the second support plate.

[0046] In addition, when the conveyor belt 1130 below the support plate 2 carries and transports the support plate 2, if the conveyor belt 1130 above the support plate 2 comes into contact with the support plate 2, the conveyor belt 1130 above the support plate 2 and the conveyor belt 1130 below the support plate 2 will move synchronously. The conveyor belt 1130 above the support plate 2 can assist in synchronously driving the support plate 2 to move, so as to prevent the conveyor belt 1130 above the support plate 2 and the conveyor belt 1130 below the support plate 2 from moving asynchronously, and prevent the support plate 2 from shifting due to the contact between the conveyor belt 1130 above the support plate 2 and the support plate 2.

[0047] In some embodiments, the conveying mechanism 10 further includes two or more drive wheels 600, which are respectively sleeved on two or more drive shafts 500, and the drive wheels 600 on adjacent drive shafts 500 mesh with each other, so that one drive shaft 500 can drive the adjacent drive shaft 500 to move. The drive wheels 600 and the drive source 210 are respectively disposed at both ends of the drive shaft 500, and are both located outside the receiving space 101 to prevent the drive wheels 600 from interfering with the bearing plate 2 entering or leaving the receiving space 101.

[0048] For example, such as Figure 1 , Figure 2 and Figure 3 As shown, the conveying mechanism 10 also includes two drive wheels 600, which are respectively sleeved on two drive shafts 500 and meshed.

[0049] In some embodiments, such as Figure 1 and Figure 8As shown, the conveying mechanism 10 also includes a plurality of pads 700, which extend along a second direction X2 and are connected to either the side of the first support plate 300 facing the receiving space 101 or the side of the second support plate 400 facing the receiving space 101. The pads 700 are capable of abutting against the side of the conveyor belt 1130 that carries the support plate 2. The pads 700 are configured to support the conveyor belt 1130 to prevent deformation of the conveyor belt 1130 due to excessive weight of the support plate 2 above it.

[0050] For example, the conveying mechanism 10 includes four pads 700, one pad 700 supporting a conveyor belt 1130.

[0051] In some embodiments, the conveying mechanism 10 further includes one or more baffles 800 extending along the second direction X2 and connected to the side of the conveying frame 340 facing the receiving space 101, and capable of abutting against the side of the support plate 2 to prevent the support plate 2 from shifting toward the side closer to the conveying frame 340.

[0052] For example, the baffle 800 is connected to the side of the first support plate 300 facing the receiving space 101 to prevent the support plate 2 from shifting towards the side closer to the first support plate 300, or the baffle 800 is connected to the side of the second support plate 400 facing the receiving space 101 to prevent the support plate 2 from shifting towards the side closer to the second support plate 400.

[0053] For example, the conveying mechanism 10 includes two baffles 800, one baffle 800 being connected to the side of the first support plate 300 facing the receiving space 101, and the other baffle 800 being connected to the side of the second support plate 400 facing the receiving space 101.

[0054] like Figure 1 As shown, the flipping device 1 provided in the embodiments of this disclosure includes a conveying mechanism 10 and a flipping component 20 as mentioned in the above embodiments. The conveying mechanism 10 is configured to carry and transport the carrier plate 2, and the flipping component 20 is connected to the conveying mechanism 10 and configured to flip the conveying mechanism 10.

[0055] For example, the flipping component 20 is connected to the first support plate 300 and the second support plate 400 so that the flipping component 20 flips the first support plate 300 and the second support plate 400 synchronously, thereby enabling the first support plate 300 and the second support plate 400 to drive all the transmission components 100 to flip synchronously, and the transmission components 100 to drive the carrier plate 2 to flip.

[0056] In some embodiments, the rotation center line of the flipping assembly 20 is located at the center of the conveying frame 340 of the conveying mechanism 10, so that the flipping assembly 20 can smoothly and stably flip the conveying frame 340. The arrangement direction of the two or more sets of transmission assemblies 100 of the conveying mechanism 10 and the transmission direction of the transmission assemblies 100 both intersect with the rotation center line.

[0057] Since the flipping device 1 includes the conveying mechanism 10, all the technical features and effects of the conveying mechanism 10 are not described here.

[0058] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0059] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0060] It should be understood that “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest manner, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0061] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0062] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0063] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications or equivalent substitutions made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A conveying mechanism configured to carry and transport a carrier plate, the carrier plate comprising a first carrier surface and a second carrier surface disposed opposite to each other, both the first carrier surface and the second carrier surface capable of carrying a workpiece; characterized in that, The conveying mechanism includes: The conveyor frame has a storage space; Two or more transmission components are disposed in the accommodating space and are arranged sequentially at intervals along a first direction, the first direction being perpendicular to the center plane of the bearing plate; A drive source component is disposed on the conveying frame and connected to the transmission component, so that the drive source component can drive the transmission component to move. In the case where the support plate is conveyed between two adjacent sets of the transmission components, the transmission component located below the support plate carries and transports the support plate, wherein the conveying frame can be flipped so that the workpiece can be loaded and unloaded on the first support surface and the second support surface.

2. The conveying mechanism according to claim 1, characterized in that, The conveying frame includes: A first support plate is connected to the transmission assembly and extends along the second direction; The second support plate is connected to the transmission assembly, is disposed opposite to the first support plate, and extends along the second direction, wherein the receiving space is formed between the first support plate and the second support plate, and wherein the second direction intersects the first direction; The transmission assembly includes: Two sets of sub-transmission assemblies are arranged opposite to each other and are respectively connected to the drive source assembly. One set of the sub-transmission assemblies is connected to the side of the first support plate facing the receiving space, and the other set of the sub-transmission assemblies is connected to the side of the second support plate facing the receiving space. The two sets of sub-transmission assemblies are respectively capable of supporting both ends of the support plate.

3. The conveying mechanism according to claim 2, characterized in that, Also includes: Two or more drive shafts are arranged sequentially along the first direction and extend along a third direction. The drive shafts are connected to the drive source assembly and to two sets of sub-drive assemblies of a set of drive assemblies. The third direction intersects the first direction and the second direction, respectively.

4. The conveying mechanism according to claim 3, characterized in that, The driving source component includes: A drive source is connected to one of the drive shafts; The adjacent drive shafts are connected by a drive source so that the drive source can drive one of the drive shafts to move, and one drive shaft drives the other drive shaft to move.

5. The conveying mechanism according to claim 4, characterized in that, The drive shaft is rotatably connected to the first support plate and the second support plate; The sub-drive assembly includes: The drive wheel is located at the first end of the first support plate or the first end of the second support plate, and is fitted onto the drive shaft; The driven wheel is rotatably connected to the second end of the first support plate or the second end of the second support plate, wherein the first end of the first support plate and the second end of the first support plate are arranged opposite to each other along the second direction, and the first end of the second support plate and the second end of the second support plate are arranged opposite to each other along the second direction; The conveyor belt, fitted onto the drive wheel and the driven wheel located on the first support plate, or fitted onto the drive wheel and the driven wheel located on the second support plate, is configured to support one end of the support plate.

6. The conveying mechanism according to claim 4, characterized in that, Also includes: Two or more transmission wheels are respectively sleeved on two or more transmission shafts, and the transmission wheels on two adjacent transmission shafts mesh with each other, so that one transmission shaft can drive the movement of the adjacent transmission shaft. The transmission wheel and the drive source are respectively located at both ends of the transmission shaft, and both are located outside the accommodating space.

7. The conveying mechanism according to claim 5, characterized in that, Also includes: Multiple pads extend along the second direction and are connected to either the side of the first support plate facing the receiving space or the side of the second support plate facing the receiving space. The pads are configured to abut against the side of the conveyor belt that carries the support plate, and are configured to support the conveyor belt.

8. The conveying mechanism according to any one of claims 1 to 6, characterized in that, Also includes: One or more baffles extend along a second direction and are connected to the side of the conveying frame facing the receiving space, and are capable of abutting against the side of the support plate, wherein the second direction intersects the first direction.

9. A flipping device, characterized in that, include: The conveying mechanism as described in any one of claims 1 to 8 is configured to carry and transport a carrier plate; A flipping component, connected to the conveying mechanism, is configured to flip the conveying mechanism.

10. The flipping device according to claim 9, characterized in that, The rotation center line of the flipping component is located at the center of the conveying frame of the conveying mechanism, and the arrangement direction of the two or more sets of transmission components of the conveying mechanism and the transmission direction of the transmission components all intersect with the rotation center line.

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