Single crystal furnace cover with protection device

Abstract

The utility model discloses a single crystal furnace cover with a protection device. The single crystal furnace cover comprises a furnace cover body, the protection device is matched with the furnace cover body; the protection device comprises a pressure relief pipe arranged on the furnace cover body, a linkage plate, a sleeve arranged on the linkage plate, a screw connected to the sleeve in a threaded mode, a sealing plate arranged on the outer wall of the pressure relief pipe, a first elastic piece arranged on the screw in a sleeving mode and a limiting assembly, threads are arranged on the outer wall of the sleeve, the linkage plate is provided with a threaded hole matched with the sleeve, the sleeve is provided with an exhaust port, and the exhaust port is communicated with the sealing plate. A vent hole is formed in the end of the screw, a communicating hole is formed in the outer wall of the screw and communicates with the vent hole, one end of the first elastic piece makes contact with the sealing plate, and the other end of the first elastic piece makes contact with the top of the sleeve.

Description

Technical Field

[0001] This utility model belongs to the field of single crystal furnace technology, and in particular relates to a single crystal furnace cover with a protective device. Background Technology

[0002] In the production of single-crystal silicon rods, inert gases such as argon are typically used for protection. Inert gases are chemically stable, and their pressure changes are minimal even at high temperatures. However, due to aging of the single-crystal furnace, improper operation, or other factors, other gases are often mixed in or mistakenly introduced as inert gases during the inert gas filling process. Since the pressure inside the single-crystal furnace is already high, thermal expansion poses a significant risk of explosion.

[0003] Patent CN202322427872.3 discloses a furnace cover protection device for a single crystal furnace, belonging to the field of single crystal furnaces. It includes: a cylindrical furnace body; a furnace cover for sealing the upper end of the furnace body; pressure relief pipes evenly distributed along the circumference of the upper end of the furnace cover, connecting to the furnace body, with pressure relief components mounted on the pressure relief pipes; a linkage plate on the upper side of the furnace cover, fixed to the outer wall of the pressure relief components near the bottom; clamping components evenly distributed along the circumference of the outer wall of the furnace body, the upper part of the clamping components fixedly connected to the linkage plate; the clamping components include: a support cylinder and a connecting rod, the support cylinder fixed to the furnace body, the connecting rod inserted into the support cylinder, and a connecting spring fixed inside the support cylinder, the connecting spring being fixedly connected to the connecting rod. The beneficial effect of this application is that it provides a single crystal furnace cover protection device that automatically relieves pressure while maintaining the stability of the device.

[0004] The pressure relief component in the aforementioned patent is fixed on the linkage plate. If a single pressure relief component is damaged, it cannot be repaired or replaced individually. Instead, both the pressure relief component and the clamping component need to be replaced, which is very inconvenient and costly. Utility Model Content

[0005] The summary section of this application is intended to provide a brief overview of the concepts, which will be described in detail in the detailed description section below. This summary section is not intended to identify key or essential features of the claimed technical solutions, nor is it intended to limit the scope of the claimed technical solutions.

[0006] To address the technical problems mentioned in the background section above, some embodiments of this application provide a single crystal furnace cover with a protective device, including:

[0007] Furnace cover body;

[0008] The protective device is designed to work in conjunction with the furnace cover body.

[0009] The protective device includes a pressure relief pipe on the furnace cover body, a linkage plate, a sleeve on the linkage plate, a screw rod screwed to the sleeve, a sealing plate on the outer wall of the pressure relief pipe, a first elastic element sleeved on the screw rod, and a limiting component. The outer wall of the sleeve is threaded, the linkage plate is threaded to mate with the sleeve, the sleeve is vented, the end of the screw rod is vented, the outer wall of the screw rod is connected to the vented hole, one end of the first elastic element contacts the sealing plate, and the other end contacts the top of the sleeve.

[0010] Preferably, a rotating handle is provided at the end of the screw.

[0011] Preferably, the limiting component includes a fixed seat on the side wall of the furnace cover cup, a fixed sleeve on the fixed seat, a second elastic member inside the fixed sleeve, and a connecting rod on the end of the second elastic member. The connecting rod is connected to the linkage plate and can slide up and down relative to the fixed sleeve.

[0012] Preferably, one end of the second elastic element is fixed to the bottom of the fixed sleeve, and the other end is fixed to the bottom of the connecting rod.

[0013] Preferably, a limiting plate is provided at the bottom of the connecting rod, and a baffle is provided on the top of the inner wall of the sleeve.

[0014] Preferably, the furnace cover body is provided with an observation port, and a light-transmitting sealing plate is fixed at the observation port by a connector.

[0015] Preferably, the connector includes a lower fixing frame on the furnace cover body, an upper fixing frame that cooperates with the fixing frame, and a screw on the upper fixing frame. Both the upper fixing frame and the lower fixing frame are provided with slots for the light-transmitting sealing plate to be inserted, and the lower fixing frame is provided with fixing holes that cooperate with the screw.

[0016] Preferably, both the upper and lower fixed frames are provided with cooling tanks, and the lower fixed frame is provided with an inlet pipe and an outlet pipe, both of which are connected to the cooling tanks.

[0017] Preferably, a vacuum gauge is provided on the furnace cover body.

[0018] Preferably, the top of the furnace cover body is provided with a flange.

[0019] This application provides a single crystal furnace cover with a protective device that is easy to maintain. Attached Figure Description

[0020] The accompanying drawings, which form part of this application, are used to provide a further understanding of the application and to make other features, objects, and advantages of the application more apparent. The illustrative embodiments and descriptions of this application are used to explain the application and do not constitute an undue limitation of the application.

[0021] Furthermore, throughout the accompanying drawings, the same or similar reference numerals denote the same or similar elements. It should be understood that the drawings are schematic, and the elements are not necessarily drawn to scale.

[0022] In the attached diagram:

[0023] Figure 1 This is a schematic diagram of the structure of this utility model.

[0024] Figure 2 This is a schematic diagram of the partial structure and assembly of the protective device of this utility model.

[0025] Figure 3 This is a schematic diagram of the structure and fit of the limiting component of this utility model.

[0026] Figure 4 This is a schematic diagram of the partial structural assembly of this utility model. Detailed Implementation

[0027] Embodiments of this disclosure will now be described in more detail with reference to the accompanying drawings. While some embodiments of this disclosure are shown in the drawings, it should be understood that this disclosure can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this disclosure. It should be understood that the accompanying drawings and embodiments of this disclosure are for illustrative purposes only and are not intended to limit the scope of protection of this disclosure.

[0028] It should also be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings. Unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other.

[0029] It should be noted that the concepts of "first" and "second" mentioned in this disclosure are used only to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependencies.

[0030] It should be noted that the terms "a" and "a plurality of" used in this disclosure are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0031] This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0032] like Figure 1-4 As shown, a single crystal furnace cover with a protective device includes a furnace cover body 1 and a protective device, with a flange 11 fixed to the top of the furnace cover body 1.

[0033] Specifically, the protection device includes a pressure relief pipe 21, a linkage plate 22, a sleeve 23, a screw 24, a sealing plate 25, a first elastic element 26, and a limiting assembly. The pressure relief pipe 21 is fixed to the top of the furnace cover body; the sleeve 23 is connected to the linkage plate, and its outer wall is threaded, with an exhaust port 231 on the outer wall; the linkage plate 22 has a threaded hole that mates with the sleeve; the screw 24 is screwed to the top of the sleeve, and its end has a vent hole 241, with a connecting hole 242 on the outer wall of the screw, which communicates with the vent hole; the sealing plate 25 is fixed to the outside of the pressure relief pipe. On the wall, it can slide against the inner wall of the sleeve; the first elastic element 26 is a metal spring, which is sleeved on the screw, and one end of the first elastic element contacts the sealing plate and the other end contacts the top of the sleeve. When the pressure inside the furnace is too high, the gas pressure will push the screw upward. When the connecting hole of the screw moves out of the pressure relief pipe, the gas will flow into the sleeve along the vent hole and then be discharged from the exhaust hole, thereby achieving the effect of pressure relief. Moreover, there is no fixed connection between the four parts: sleeve, linkage plate, first elastic element and screw. Each part can be disassembled and replaced, reducing costs.

[0034] Specifically, the limiting assembly includes a fixed base 271, a fixed sleeve 272, a second elastic element 273, a connecting rod 274, a limiting plate 274, and a baffle 276. The fixed base 271 is fixed to the side wall of the furnace cover body; the fixed sleeve 272 is fixed to the fixed base; the second elastic element 273 is a metal spring, one end of which is fixed to the bottom of the fixed sleeve; one end of the connecting rod 274 is fixed to the end of the second elastic element, and the other end is fixed to the linkage plate, allowing the connecting rod to slide up and down relative to the fixed sleeve; the limiting plate 274 is fixed to the outer wall of the bottom end of the connecting rod; and the baffle 276 is fixed to the top of the inner wall of the sleeve to prevent the connecting rod from coming out of the fixed sleeve, thereby ensuring the safe connection between the sleeve and the pressure relief pipe.

[0035] In other embodiments, a rotating handle 241 is fixed to the end of the screw 24 to facilitate rotating the screw to adjust the pressure threshold.

[0036] In other embodiments, the furnace cover body 1 is provided with an observation port, and a light-transmitting sealing plate 3 is fixed to the observation port by a connector. The light-transmitting sealing plate 3 can be made of glass. The connector includes a lower fixing frame 31, an upper fixing frame 32, screws 33, a water inlet pipe 34, and a water outlet pipe 35. The lower fixing frame 31 is fixed to the furnace cover body and is arranged around the observation port. The upper fixing frame 32 is correspondingly arranged to the lower fixing frame, and both the upper and lower fixing frames are provided with slots 311 for the light-transmitting sealing plate to be inserted. The screws 33 pass through the upper fixing frame. The lower fixed frame has fixing holes 312 that mate with screws, allowing the interior of the furnace to be observed at any time through the light-transmitting sealing plate. One end of the water inlet pipe 34 is connected to the lower and upper fixed frames, and the other end is connected to a water tank. One end of the water outlet pipe 35 is connected to the lower and upper fixed frames, and the other end is connected to a water pump. Both the upper and lower fixed frames are equipped with cooling tanks 313, and both the water inlet and outlet pipes are connected to the cooling tanks. By supplying coolant into the cooling tanks, the light-transmitting sealing plate can be cooled down to ensure the observation effect.

[0037] In other embodiments, a vacuum gauge 4 is provided on the furnace cover body 1 to facilitate monitoring of internal pressure.

[0038] The above description is merely a selection of preferred embodiments of this disclosure and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in the embodiments of this disclosure is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the above-described inventive concept. For example, technical solutions formed by substituting the above-described features with (but not limited to) technical features with similar functions disclosed in the embodiments of this disclosure.

Claims

1. A single-crystal furnace cover with a protective device, comprising: Furnace cover body; A protective device that works in conjunction with the furnace cover body; The protective device is characterized in that it includes a pressure relief pipe, a linkage plate, a sleeve on the linkage plate, a screw threaded to the sleeve, a sealing plate on the outer wall of the pressure relief pipe, a first elastic element and a limiting component sleeved on the screw, the outer wall of the sleeve being threaded, the linkage plate being threaded to mate with the sleeve, the sleeve being vented, the end of the screw being vented, the outer wall of the screw being vented, the venting hole being connected to the venting hole, one end of the first elastic element contacting the sealing plate, and the other end contacting the top of the sleeve.

2. The single crystal furnace cover with a protective device according to claim 1, characterized in that: A rotating handle is provided at the end of the screw.

3. A single-crystal furnace cover with a protective device according to claim 1, characterized in that: The limiting component includes a fixed seat on the side wall of the furnace cover cup, a fixed sleeve on the fixed seat, a second elastic element inside the fixed sleeve, and a connecting rod on the end of the second elastic element. The connecting rod is connected to the linkage plate and can slide up and down relative to the fixed sleeve.

4. A single crystal furnace cover with a protective device according to claim 3, characterized in that: One end of the second elastic element is fixed to the bottom of the fixed sleeve, and the other end is fixed to the bottom of the connecting rod.

5. A single-crystal furnace cover with a protective device according to claim 3, characterized in that: The bottom end of the connecting rod is provided with a limiting plate, and the top of the inner wall of the sleeve is provided with a baffle.

6. A single crystal furnace cover with a protective device according to claim 1, characterized in that: The furnace cover body is provided with an observation port, and a light-transmitting sealing plate is fixed to the observation port by a connector.

7. A single crystal furnace cover with a protective device according to claim 6, characterized in that: The connector includes a lower fixing frame on the furnace cover body, an upper fixing frame that cooperates with the fixing frame, and a screw on the upper fixing frame. Both the upper fixing frame and the lower fixing frame are provided with slots for the light-transmitting sealing plate to be inserted, and the lower fixing frame is provided with fixing holes that cooperate with the screw.

8. A single crystal furnace cover with a protective device according to claim 7, characterized in that: Both the upper and lower fixed frames are equipped with cooling tanks. The lower fixed frame is equipped with an inlet pipe and an outlet pipe, both of which are connected to the cooling tanks.

9. A single-crystal furnace cover with a protective device according to claim 1, characterized in that: The furnace cover body is equipped with a vacuum gauge.

10. A single crystal furnace cover with a protective device according to claim 1, characterized in that: The furnace cover body is equipped with a flange on its top.

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