Coating device

Abstract

The utility model discloses a coating device, and relates to the technical field of vacuum coating. The film coating device comprises a vacuum chamber, a supporting roller set, a driving mechanism, a first target material and a second target material. The vacuum chamber is provided with a vacuum cavity. The supporting roller set is arranged in the vacuum cavity and comprises at least three supporting rollers, at least one supporting roller and other supporting rollers are distributed on different straight lines, the supporting rollers are rotationally installed on a first rotating shaft through bearings, and the first rotating shaft is rotationally connected to the vacuum chamber. The first rotating shafts connected with the at least three supporting rollers are in transmission connection with a driving mechanism, and the driving mechanism is used for driving the first rotating shafts to rotate; the first target material is arranged on one side of the supporting roller set, and the first target material is configured to be opposite to the first surface of the film coating workpiece; the second target material is arranged among the at least three supporting rollers, and the second target material is configured to be opposite to the second surface of the film coating workpiece. According to the coating device provided by the invention, double-sided coating can be realized, and the influence on small tension control can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating, in particular to a coating device. BACKGROUND

[0002] In order to improve the performance of metal, fabric, plastic and other workpieces, coating is usually performed on the surface of the workpieces. Vacuum coating equipment can be used for coating operation on metal, fabric, plastic and other workpieces. However, in the process of conveying workpieces, the small tension of the workpieces is prone to uncontrollable problems, resulting in a decrease in coating quality. CONTENT OF THE UTILITY MODEL

[0003] The present application provides a coating device to reduce the rotational resistance of the bearing when the support roller set rotates and reduce the influence on small tension control.

[0004] The present application provides a coating device, comprising a vacuum chamber, a support roller set, a driving mechanism, a first target material and a second target material, wherein the vacuum chamber is provided with a vacuum cavity;

[0005] The support roller set is arranged in the vacuum cavity, and the support roller set comprises at least three support rollers. At least one of the support rollers is arranged on a different straight line from the other support rollers. The support rollers are rotatably mounted on a first shaft through bearings. The first shaft is rotatably connected to the vacuum chamber. The first shaft connected to the at least three support rollers is drivingly connected to the driving mechanism. The driving mechanism is used to drive the first shaft to rotate.

[0006] The first target material is arranged in the vacuum cavity and located on one side of the support roller set. The first target material is configured to be opposite to a first surface of a coating workpiece.

[0007] The second target material is arranged in the vacuum cavity and located between the at least three support rollers. The second target material is configured to be opposite to a second surface of the coating workpiece.

[0008] In some possible embodiments, the support roller set comprises four support rollers. The four support rollers are arranged at four corner positions of a quadrilateral. The first shaft connected to the four support rollers is drivingly connected to the driving mechanism.

[0009] In some possible embodiments, the driving mechanism comprises a first driving member and a transmission assembly. The transmission assembly is drivingly connected between the first driving member and the first shaft connected to the at least three support rollers.

[0010] In some possible implementation manners, the transmission assembly comprises at least two transmission belts, one end of the transmission belts is in transmission connection with the output shaft of the first driving member, and the other end of the at least two transmission belts is in transmission connection with the first rotating shaft connected with the at least three supporting rollers, and each of the first rotating shafts is in transmission connection with one of the transmission belts.

[0011] In some possible implementation manners, the linear rotation speed of the bearing is configured to be equal to the linear speed of the coated workpiece.

[0012] In some possible implementation manners, the coating device further comprises:

[0013] A feed roller is arranged upstream of the supporting roller set, and the feed roller is used to carry a roll of the uncoated workpiece.

[0014] A take-up roller is arranged downstream of the supporting roller set, and the take-up roller is used to carry a roll of the coated workpiece.

[0015] In some possible implementation manners, the coating device further comprises a second driving member and a third driving member, the second driving member is in transmission connection with the feed roller, and the third driving member is in transmission connection with the take-up roller.

[0016] In some possible implementation manners, the coating device further comprises a first tension detection roller and a second tension detection roller, the first tension detection roller is arranged between the supporting roller set and the feed roller, and the second tension detection roller is arranged between the supporting roller set and the take-up roller.

[0017] In some possible implementation manners, the coating device further comprises a first speed detection roller and a second speed detection roller, the first speed detection roller is arranged between the supporting roller set and the feed roller, and the second speed detection roller is arranged between the supporting roller set and the take-up roller.

[0018] In some possible implementation manners, the driving mechanism is arranged on a side of the vacuum chamber away from the vacuum cavity, and the first rotating shaft penetrates through the vacuum chamber.

[0019] A magnetic fluid member is arranged at a position where the first rotating shaft is connected with the vacuum chamber.

[0020] The coating device provided in the application can drive the first rotating shafts connected with the supporting rollers to rotate in the use process, so that the rotation resistance of the bearings between the first rotating shafts and the supporting rollers can be reduced, the influence on the small tension control of the coated workpiece is reduced, the small tension control of the coated workpiece in the coating process is facilitated, and the influence of the uncontrolled tension of the coated workpiece on the coating quality in the conveying process is reduced.BRIEF DESCRIPTION OF DRAWINGS BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some of the embodiments of the present application, and therefore should not be considered as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0022] Figure 1 A bottom view schematic diagram of the coating device in some embodiments is shown.

[0023] Figure 2 A partial cross-sectional structure schematic diagram of the coating device in some embodiments is shown.

[0024] Figure 3 A cross-sectional structure schematic diagram of the support roller after installation in some embodiments is shown.

[0025] Main element symbol explanation:

[0026] 1000-coating device;

[0027] 100-vacuum chamber; 101-vacuum cavity;

[0028] 200-support roller group; 201-support roller; 210-first support roller; 220-second support roller; 230-third support roller; 240-fourth support roller;

[0029] 310-bearing; 320-first rotating shaft; 330-second rotating shaft; 340-third rotating shaft;

[0030] 400-driving mechanism; 410-first driving member; 420-transmission assembly; 421-transmission belt;

[0031] 510-first target material; 520-second target material;

[0032] 600-magnetic fluid member;

[0033] 710-second driving member; 720-third driving member;

[0034] 811-first tension detection roller; 812-second tension detection roller; 821-first speed detection roller; 822-second speed detection roller; 831-feeding roller; 832-receiving roller;

[0035] 2000-coated workpiece; 2100-first surface; 2200-second surface. DETAILED DESCRIPTION

[0036] Embodiments of the present application are described below in detail with reference to the accompanying drawings, wherein the same or similar components are denoted by the same or similar reference numerals throughout the drawings. The embodiments described below are exemplary only, and are merely intended to explain the present application, and are not to be understood as limiting the present application.

[0037] In the description of the present application, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0038] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly specified and limited.

[0039] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, or internal communication of two elements or interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0040] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "under" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0041] As Figure 1 and Figure 2As shown, the embodiment provides a coating device 1000, which can be used for double-sided coating of a coating workpiece 2000. The coating workpiece 2000 can be a paper, a fabric or a metal sheet, etc. Correspondingly, the coating workpiece 2000 can include a first surface 2100 and a second surface 2200 arranged oppositely.

[0042] As shown, the coating device 1000 includes a vacuum chamber 100, a support roller set 200, a driving mechanism 400, a first target material 510 and a second target material 520. Figures 1 to 3

[0043] The vacuum chamber 100 is configured with a vacuum cavity 101. During the coating process, the vacuum cavity 101 can be vacuumized to provide a vacuum environment for the coating process.

[0044] The support roller set 200 can be arranged in the vacuum cavity 101 of the vacuum chamber 100, and can be used to provide support for the coating workpiece 2000 during movement. In some embodiments, the support roller set 200 can include at least three support rollers 201, wherein at least one support roller 201 can be arranged on a different straight line from the other support rollers 201. In the embodiment, the support roller 201 can be rotatably mounted on a first rotating shaft 320 through a bearing 310, and the first rotating shaft 320 can be rotatably connected to a wall plate on one side of the vacuum chamber 100. In some embodiments, the first rotating shaft 320 can be rotatably connected to a top plate of the vacuum chamber 100.

[0045] In other embodiments, the first rotating shaft 320 can also be rotatably connected to a side plate of the vacuum chamber 100.

[0046] In the embodiment, the driving mechanism 400 can be drivingly connected to the first rotating shaft 320 connected to the at least three support rollers 201.

[0047] The first target material 510 is arranged in the vacuum cavity 101 of the vacuum chamber 100 and on one side of the support roller set 200. The first target material 510 is configured to be opposite to the first surface 2100 of the coating workpiece 2000.

[0048] The second target material 520 is arranged in the vacuum cavity 101 of the vacuum chamber 100 and between the at least three support rollers 201. The second target material 520 is configured to be opposite to the second surface 2200 of the coating workpiece 2000.

[0049] ​During use, the first target 510 can perform coating on the first surface 2100 of the coating workpiece 2000. The second target 520 can perform coating on the second surface 2200 of the coating workpiece 2000. The support roller set 200 can provide support to the coating workpiece 2000 during movement. During this process, each support roller 201 can rotate under the drive of the coating workpiece 2000. In the embodiment of the present application, the driving mechanism 400 can drive the first rotating shaft 320 connected with each support roller 201 to rotate, so as to reduce the rotation resistance of the bearing 310 between each first rotating shaft 320 and the support roller 201, and further reduce the influence on the small tension control of the coating workpiece 2000, so as to facilitate the realization of the small tension control of the coating workpiece during the coating process, and reduce the influence of the uncontrolled tension of the coating workpiece 2000 on the coating quality during the conveying process.

[0050] As shown in Figures 1 to 3 In some embodiments, the support roller set 200 can include four support rollers 201, i.e., a first support roller 210, a second support roller 220, a third support roller 230, and a fourth support roller 240. The first support roller 210, the second support roller 220, the third support roller 230, and the fourth support roller 240 can be sequentially arranged at the four corner positions of a quadrilateral. In some embodiments, the four support rollers 201 can be arranged at the four corner positions of a right-angled quadrilateral. The first support roller 210 can be used as an input roller of the support roller set 200, and the second support roller 220 can be used as an output roller of the support roller set 200. That is, the coating workpiece 2000 can enter the support roller set 200 from the position of the first support roller 210, and after winding around the support roller set 200, the coating workpiece 2000 can be output from the side of the second support roller 220 away from the first support roller 210.

[0051] In other embodiments, the four support rollers 201 can also be arranged at the four corner positions of a parallelogram or a rhombus.

[0052] In other embodiments, the support roller set 200 can also include three support rollers 201, which can be arranged at the three corner positions of a triangle.

[0053] In other embodiments, the support roller set 200 can also include five or six support rollers 201, and the plurality of support rollers 201 can be arranged at the plurality of corner positions of a corresponding polygon one by one.

[0054] In some embodiments, the first rotating shaft 320 can be arranged through the top plate of the vacuum chamber 100. One end of the first rotating shaft 320 can protrude away from the side of the vacuum chamber 100 away from the vacuum cavity 101, i.e., exposed outside the vacuum chamber 100. The other end of the first rotating shaft 320 can be located in the vacuum cavity 101 of the vacuum chamber 100. In addition, the first rotating shaft 320 can be arranged to rotate relative to the vacuum chamber 100.

[0055] In some embodiments, the connection position between the first rotating shaft 320 and the vacuum chamber 100 can be provided with a magnetic fluid member 600, so that the connection position between the first rotating shaft 320 and the vacuum chamber 100 can be sealed to prevent air leakage and other problems, so as to ensure that the vacuum cavity can be vacuumized during the coating process.

[0056] The support roller 201 can be rotatably installed at one end of the first rotating shaft 320 located in the vacuum cavity 101 through a bearing 310. It can be understood that the bearing 310 can be sleeved on the first rotating shaft 320, and the inner ring of the bearing 310 can be fixedly connected with the first rotating shaft 320 by interference fit, riveting or bonding. The support roller 201 can be sleeved on the side of the bearing 310 away from the first rotating shaft 320, and the support roller 201 can be fixedly connected with the outer ring of the bearing 310 by interference fit, riveting or bonding.

[0057] In some embodiments, the driving mechanism 400 can be arranged on the side of the vacuum chamber 100 away from the vacuum cavity 101, i.e. the driving mechanism 400 is arranged outside the vacuum chamber 100. The driving mechanism 400 can be drivingly connected with the exposed end of the four first rotating shafts 320 relative to the vacuum chamber 100.

[0058] In some embodiments, the driving mechanism 400 can include a first driving member 410 and a transmission assembly 420. The transmission assembly 420 can be drivingly connected between the four first rotating shafts 320 and the first driving member 410.

[0059] In some embodiments, the first driving member 410 can be an electric motor. The transmission assembly 420 can include at least two transmission belts 421. In some embodiments, the transmission assembly 420 can include four transmission belts 421, and the four transmission belts 421 can be drivingly connected one by one between the four first rotating shafts 320 and the first driving member 410.

[0060] Specifically, for the same transmission belt 421, one end of the transmission belt 421 can be sleeved on the output shaft of the first driving member 410 and drivingly connected with the output shaft of the first driving member 410. The other end of the transmission belt 421 can be sleeved on the first rotating shaft 320 and drivingly connected with the first rotating shaft 320.

[0061] In some embodiments, the transmission assembly 420 can include two transmission belts 421. One end of one of the transmission belts 421 can be sleeved on the output shaft of the first driving member 410, and the other end of the transmission belt 421 can be sleeved on the first shafts 320 connected with the first support rollers 210 and the second support rollers 220 at the same time, and in transmission connection with the two first shafts 320. One end of the other transmission belt 421 can be sleeved on the output shaft of the first driving member 410 and in transmission connection with the output shaft, and the other end of the transmission belt 421 can be sleeved on the first shafts 320 connected with the third support rollers 230 and the fourth support rollers 240 at the same time, and in transmission connection with the two first shafts 320.

[0062] In some other embodiments, the transmission assembly 420 can also include three equal numbers of transmission belts 421, so as to achieve the transmission connection between the first driving member 410 and each of the first shafts 320.

[0063] In some embodiments, the transmission belt 421 can be a synchronous belt. The output shaft of the first driving member 410 and the first shafts 320 can be fixedly connected with corresponding synchronous wheels. One end of the synchronous belt can be sleeved on the synchronous wheel on the output shaft of the first driving member 410, and the other end of the synchronous belt can be sleeved on the synchronous wheel on the first shafts 320. The synchronous belt can cooperate with the synchronous wheels to achieve the transmission connection between the first driving member 410 and the first shafts 320. It can be understood that the number of synchronous wheels on the output shaft of the first driving member 410 can be equal to the number of synchronous belts. Alternatively, the synchronous wheels on the output shaft of the first driving member 410 can have a certain extension length in the axial direction of the output shaft of the first driving member 410, and be sufficient to sleeve all the synchronous belts.

[0064] In some other embodiments, the transmission belt 421 can also be a belt. Correspondingly, the output shaft of the first driving member 410 and the first shafts 320 can be connected with corresponding belt wheels.

[0065] In some other embodiments, the transmission assembly 420 can include a gear set, and the first driving member 410 and each of the first shafts 320 can be in transmission connection through the gear set.

[0066] In some other embodiments, the driving mechanism 400 can include four first driving members 410, and the four first driving members 410 can be in one-to-one transmission connection with the four first shafts 320, i.e., one first driving member 410 can drive one first shaft 320 to rotate.

[0067] In some embodiments, the rotational linear speed of the bearing 310 can be configured to be equal to the linear speed of the coated workpiece 2000. Thus, the rotational resistance of the bearing 310 on each of the first shafts 320 can be completely offset, and the influence on the small tension control can be reduced.

[0068] In use, the coated workpiece 2000 can be wound around the periphery of the support roller group 200 and can be wound in a spiral shape multiple times.

[0069] like Figure 1 and Figure 2 As shown, in some embodiments, the first target 510 may be disposed opposite to the coated workpiece 2000 between the first support roller 210 and the second support roller 220, and located on the side of the coated workpiece 2000 away from the third support roller 230. Accordingly, the first target 510 may be opposite to the first surface 2100 of the coated workpiece 2000. The second target 520 may be disposed between the four support rollers 201, that is, the second target 520 may be located in the middle of the annular structure around which the coated workpiece 2000 is wound, thereby allowing the second target 520 to be opposite to the second surface 2200 of the coated workpiece 2000.

[0070] like Figure 1 and Figure 2 As shown, the coating apparatus 1000 also includes a feeding roller 831 and a receiving roller 832. Both the feeding roller 831 and the receiving roller 832 are located in the vacuum chamber 101 of the vacuum chamber 100.

[0071] The feeding roller 831 can be located upstream of the support roller group 200, and can be used to carry the uncoated roll of the coated workpiece 2000. In some embodiments, the feeding roller 831 can be rotatably mounted on the top plate of the vacuum chamber 100 via a second rotating shaft 330. The end of the second rotating shaft 330 away from the feeding roller 831 can protrude relative to the side of the top plate of the vacuum chamber 100 opposite to the vacuum chamber 101, and is connected to a second driving member 710. The second driving member 710 can drive the feeding roller 831 to rotate via the second rotating shaft 330 to achieve feeding. A magnetohydrodynamic component 600 can also be provided at the connection position between the second rotating shaft 330 and the vacuum chamber 100.

[0072] The take-up roller 832 can be located downstream of the support roller group 200. The take-up roller 832 can be used to carry the coated workpiece 2000 roll. In some embodiments, the take-up roller 832 can be rotatably mounted on the top plate of the vacuum chamber 100 via a third rotating shaft 340. The end of the third rotating shaft 340 away from the take-up roller 832 can protrude relative to the side of the top plate of the vacuum chamber 100 opposite to the vacuum cavity 101. The end of the third rotating shaft 340 protruding relative to the vacuum chamber 100 can be connected to a third driving member 720. The third driving member 720 can drive the take-up roller 832 to rotate via a second rotating shaft 330 to realize the take-up action. A magnetic fluid component 600 can also be provided at the connection position between the third rotating shaft 340 and the vacuum chamber 100 to achieve a sealing effect.

[0073] like Figure 1As shown, the coating device 1000 further comprises a first tension detection roller 811 and a second tension detection roller 812. The first tension detection roller 811 is arranged between the unwinding roller 831 and the support roller set 200. The first tension detection roller 811 can detect the tension of the coating workpiece 2000 between the unwinding roller 831 and the support roller set 200. The second tension detection roller 812 can be arranged between the support roller set 200 and the winding roller 832. The second tension detection roller 812 can detect the tension of the coated coating workpiece 2000 between the support roller set 200 and the winding roller 832.

[0074] In addition, the coating device 1000 further comprises a first speed detection roller 821 and a second speed detection roller 822. The first speed detection roller 821 can be arranged between the first tension detection roller 811 and the unwinding roller 831, and the first speed detection roller 821 can detect the unwinding speed of the unwinding roller 831. The second speed detection roller 822 can be arranged between the second tension detection roller 812 and the winding roller 832. The second speed detection roller 822 detects the winding speed of the winding roller 832.

[0075] It can be understood that the first tension detection roller 811, the second tension detection roller 812, the first speed detection roller 821 and the second speed detection roller 822 are all arranged in the vacuum cavity 101 and are rotationally connected to the top plate of the vacuum chamber 100. The first tension detection roller 811, the second tension detection roller 812, the first speed detection roller 821 and the second speed detection roller 822 can all rotate under the driving of the coating workpiece 2000 to reduce the resistance during the movement of the coating workpiece 2000.

[0076] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, different embodiments or examples described in the present specification and the features of different embodiments or examples can be combined and combined by those skilled in the art without contradiction.

[0077] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. A coating apparatus, characterized by comprising: The coating device comprises a vacuum chamber, a supporting roller set, a driving mechanism, a first target material and a second target material, wherein the vacuum chamber is provided with a vacuum cavity; The supporting roller set is arranged in the vacuum cavity, and comprises at least three supporting rollers, at least one of which is arranged on a different straight line from the other supporting rollers, and the supporting rollers are rotatably arranged on a first rotating shaft through bearings, the first rotating shaft is rotatably connected to the vacuum chamber, and the first rotating shaft connected to the at least three supporting rollers is drivingly connected to the driving mechanism, and the driving mechanism is used to drive the first rotating shaft to rotate; The first target material is arranged in the vacuum cavity and located on one side of the supporting roller set, and is configured to be opposite to a first surface of a coated workpiece; The second target material is arranged in the vacuum cavity and located between the at least three supporting rollers, and is configured to be opposite to a second surface of the coated workpiece.

2. The coating apparatus according to claim 1, wherein The supporting roller set comprises four supporting rollers, which are arranged at four corners of a quadrilateral, and the first rotating shaft connected to the four supporting rollers is drivingly connected to the driving mechanism.

3. The coating apparatus according to claim 1 or 2, characterized in that, The driving mechanism comprises a first driving member and a transmission assembly, and the transmission assembly is drivingly connected between the first driving member and the first rotating shaft connected to the at least three supporting rollers.

4. The coating apparatus according to claim 3, wherein The transmission assembly comprises at least two transmission belts, one end of the transmission belt is drivingly connected to the output shaft of the first driving member, the other end of the at least two transmission belts away from the first driving member is drivingly connected to the first rotating shaft connected to the at least three supporting rollers, and each first rotating shaft is drivingly connected to one transmission belt.

5. The coating apparatus according to claim 1 or 2, wherein The rotational linear speed of the bearing is configured to be equal to the linear speed of the coated workpiece.

6. The coating apparatus of claim 1, wherein The coating device further comprises: A feed roller arranged upstream of the supporting roller set, the feed roller being used to carry a roll of the coated workpiece before coating; A take-up roller arranged downstream of the supporting roller set, the take-up roller being used to carry a roll of the coated workpiece after coating.

7. The coating apparatus of claim 6, wherein The coating device further comprises a second driving member and a third driving member, the second driving member is drivingly connected to the feed roller, and the third driving member is drivingly connected to the take-up roller.

8. The coating apparatus according to claim 6 or 7, characterized in that The coating device further comprises a first tension detection roller and a second tension detection roller, the first tension detection roller is arranged between the supporting roller set and the feed roller, and the second tension detection roller is arranged between the supporting roller set and the take-up roller.

9. The coating apparatus according to claim 6 or 7, wherein The coating device further comprises a first speed detection roller and a second speed detection roller, the first speed detection roller is arranged between the supporting roller set and the feed roller, and the second speed detection roller is arranged between the supporting roller set and the take-up roller.

10. The coating apparatus of claim 1, wherein The driving mechanism is arranged on a side of the vacuum chamber away from the vacuum cavity, and the first rotating shaft penetrates the vacuum chamber; The connection position of the first rotating shaft and the vacuum chamber is provided with a magnetic fluid member.

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