Furnace pipe structure and heating equipment

Abstract

The utility model belongs to the technical field of photovoltaic and semiconductor processing equipment, and discloses a furnace pipe structure and heating equipment. The furnace pipe structure comprises a furnace pipe body, an insulating part and a plurality of heating parts. The multiple heating pieces are arranged in the circumferential direction of the furnace pipe body at intervals and are divided into multiple heating assemblies, and the insulating pieces are arranged between the adjacent heating assemblies. The multiple heating assemblies are connected to a power source, and the distance between every two adjacent heating assemblies is larger than the distance between every two adjacent heating pieces in the same heating assembly. The furnace pipe structure can avoid the discharge phenomenon caused by insufficient safety creepage distance of the heating wire and even the problem of damage to the furnace pipe structure.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic and semiconductor processing equipment technology, and in particular to a furnace structure and heating equipment. Background Technology

[0002] Traditional semiconductor processing equipment such as CVD tube furnaces (chemical vapor deposition) have multiple heating wires arranged circumferentially in the furnace chamber structure to heat the space within the furnace chamber. With the continuous development of semiconductor and photovoltaic material processing technologies, the requirements for heating efficiency and heating power of semiconductor processing equipment such as CVD tube furnaces are increasing.

[0003] In traditional CVD tube furnaces, multiple heating wires are evenly spaced along the circumference of the furnace chamber. However, with the increase in heating power, the design voltage is limited to 380V, and according to national standards, the safe creepage distance for 380V needs to be greater than 12.5mm. Given the inability to increase the heating space, the spacing between the heating wires in the existing CVD tube furnace structure cannot meet the safe creepage distance requirement.

[0004] Furthermore, in the chemical vapor deposition thin film preparation process, the highest operating temperature reaches 1050℃. At this temperature, the insulation performance of the ceramic fiber furnace structure decreases significantly. Insufficient creepage distance can lead to discharge between adjacent heating wires, and in severe cases, current can cause current breakdown of the furnace structure, melting the heating wires and ultimately resulting in thermal deterioration. Currently, heating elements in heating furnaces are uniformly distributed, and insufficient creepage distance between them can lead to the aforementioned phenomena.

[0005] Therefore, there is an urgent need for a furnace structure and heating equipment to solve the above problems. Utility Model Content

[0006] According to one aspect of this utility model, the objective is to provide a furnace shell structure that can avoid the discharge phenomenon caused by insufficient safe creepage distance of the heating wire, or even damage to the furnace shell structure.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] The furnace structure includes:

[0009] Furnace body;

[0010] A plurality of heating assemblies are arranged along the circumference of the furnace body, each of the heating assemblies comprises a plurality of heating elements arranged along the circumference of the furnace body, and the plurality of heating assemblies are respectively connected to a power source.

[0011] As a preferred scheme of the furnace structure provided by the utility model, the ratio of the interval between adjacent heating assemblies to the interval between adjacent heating elements in the same heating assembly is 1.6-2.

[0012] As a preferred scheme of the furnace structure provided by the utility model, the heating elements are arranged on the inner wall of the furnace body, and the furnace structure further comprises an insulating element arranged between adjacent heating assemblies.

[0013] As a preferred scheme of the furnace structure provided by the utility model, a plurality of mounting grooves are arranged on the inner wall of the furnace body along the circumference of the furnace body, and the heating elements are arranged in the mounting grooves one by one.

[0014] The plurality of heating elements in the same heating assembly are arranged uniformly.

[0015] As a preferred scheme of the furnace structure provided by the utility model, the furnace body comprises a plurality of furnace segments connected to each other along the axial direction, and the inner wall of each furnace segment is provided with a plurality of heating elements along the circumference.

[0016] As a preferred scheme of the furnace structure provided by the utility model, the heating element is a spiral electric heating wire structure.

[0017] According to another aspect of the utility model, a heating device is provided, which comprises a device shell and a plurality of wiring terminals, and further comprises the furnace structure according to any one of the above schemes, the furnace body is arranged in the device shell, the wiring terminals are arranged outside the device shell, the plurality of heating assemblies are respectively connected to the corresponding wiring terminals, and the wiring terminals are used for connecting a power source.

[0018] As a preferred scheme of the heating device provided by the utility model, the device shell comprises a first shell and a second shell, the first shell and the second shell are connected to form a containing space, and the furnace body is arranged in the containing space.

[0019] As a preferred scheme of the heating device provided by the utility model, the first shell is provided with a lap flange plate on the side parallel to the axial direction, and the lap flange plate can be lapped and covered on the outside of the side parallel to the axial direction of the second shell.

[0020] As a preferred scheme of the heating equipment provided by the utility model, the equipment shell further comprises a connecting piece, a first connecting hole is formed on the lap wing plate, a second connecting hole is formed on the second shell, the first connecting hole corresponds to the second connecting hole, and the connecting piece is threaded and connected in the first connecting hole and the second connecting hole.

[0021] The utility model discloses the beneficial effect:

[0022] The furnace body structure provided by the utility model comprises a furnace body and a plurality of heating assemblies. The plurality of heating assemblies are arranged at intervals along the circumference of the furnace body. Each heating assembly comprises a plurality of heating elements arranged at intervals along the circumference of the furnace body. The plurality of heating assemblies are respectively connected to a power supply. The spacing between adjacent heating assemblies is greater than the spacing between adjacent heating elements in the same heating assembly. Through the above arrangement, the spacing between adjacent heating assemblies is increased, thereby further solving the problem of discharge caused by insufficient safety distance between adjacent heating assemblies. The uniformity of heat distribution inside the furnace body structure is improved, which is conducive to improving the stability of the heating equipment. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the drawings needed to be used in the description of the embodiments of the utility model will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the utility model. For those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the utility model and the drawings without creative labor.

[0024] Figure 1 It is the front view of the heating equipment provided by the embodiments of the utility model.

[0025] Figure 2 It is Figure 1 The sectional view of A-A direction in it.

[0026] Figure 3 It is Figure 2 The local enlarged view of structure mark B in it.

[0027] Figure 4 It is the structural schematic view of the heating equipment provided by the embodiments of the utility model.

[0028] Figure 5 It is Figure 4 The local enlarged view of structure mark C in it.

[0029] Figure 6 It is Figure 4 The local enlarged view of structure mark D in it.

[0030] In the drawing:

[0031] 10, device housing; 11, first housing; 12, second housing; 13, overlapping flap; 14, first connecting hole; 15, connecting piece; 20, terminal;

[0032] 100, furnace body; 110, mounting groove; 120, furnace section;

[0033] 200, heating assembly; 210, heating piece;

[0034] 300, insulating piece. DETAILED DESCRIPTION

[0035] The technical solutions of the present application will be further described below in combination with the drawings and through specific embodiments.

[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0038] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0039] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships in which the product of the present application is usually placed, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third", etc. are only used for differentiation in description, and cannot be understood as indicating or implying relative importance. In the description of the present application, unless otherwise specified, the meaning of "multiple" is two or more.

[0040] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "connect," and "fix" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0041] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0042] In this embodiment, the term "and / or" is merely a description of the relationship between associated objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this invention, the character " / " generally indicates that the preceding and following associated objects have an "or" relationship.

[0043] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0044] Figure 1 This shows a front view of the heating device provided in an embodiment of the present invention; Figure 2 Show Figure 1 Sectional view along the middle AA direction; Figure 3 Show Figure 2 A magnified view of a section marked B in the middle; Figure 4 This diagram shows a structural schematic of the heating device provided in an embodiment of the present invention; Figure 5 Show Figure 4 A magnified view of the structure marked C in the middle. (Refer to...) Figures 1-5The embodiment provides a furnace structure and a heating device. The heating device comprises a device shell 10, a power supply (not shown in the figure) and a plurality of wiring terminals 20, and further comprises the furnace structure provided by the embodiment. The furnace body 100 is arranged in the device shell 10, and the plurality of wiring terminals 20 are arranged outside the device shell 10 and electrically connected to the power supply. In the embodiment, the heating device can be a CVD tube furnace. In the embodiment, the power supply can be a built-in power supply belonging to the heating device or an external power supply not belonging to the heating device.

[0045] Specifically, the device shell 10 is in a hollow cylindrical structure, which comprises a first shell 11 and a second shell 12, the first shell 11 and the second shell 12 are connected to form a complete device shell 10, and an accommodating space is formed in the inside of the device shell 10, and the furnace structure is arranged in the accommodating space. The first shell 11 and the second shell 12 can be made of sheet metal.

[0046] Specifically, referring to Figures 3-5 The first shell 11 is integrally provided with a lap flange plate 13 on the edge parallel to the axis direction, and the lap flange plate 13 can be overlapped and covered on the outside of the edge of the second shell 12 parallel to the axis direction. Through the lap flange plate 13, the contact area of the first shell 11 and the second shell 12 at the connection position can be increased, and the reliability of the connection and the reliability of the structure can be ensured.

[0047] More specifically, continuing to refer to Figures 3-5 The device shell 10 further comprises a connecting piece 15. The lap flange plate 13 is provided with a first connecting hole 14, the edge of the second shell 12 is provided with a second connecting hole corresponding to the position of the lap flange plate 13, the first connecting hole 14 corresponds to the second connecting hole, and the connecting piece 15 is arranged in the first connecting hole 14 and the second connecting hole. In the embodiment, the connecting piece 15 can be a bolt, the shank of which is arranged in the first connecting hole 14 and the second connecting hole, and the bolt head and a gasket can be fastened to realize reliable connection between the lap flange plate 13 and the second shell 12.

[0048] More specifically, referring to Figure 4The first connecting holes 14 are evenly arranged along the length direction of the overlapping wing plate 13, and the second connecting holes are also evenly arranged along the length direction of the second shell 12 corresponding to the positions of the overlapping wing plate 13. By connecting the overlapping wing plate 13 and the second shell 12 along the length direction of the overlapping wing plate 13 by the plurality of connecting members 15, the reliability of the connection between the first shell 11 and the second shell 12 and the uniformity of the stress at the connection between the overlapping wing plate 13 and the second shell 12 can be further improved.

[0049] Figure 6 The partial enlarged view of the structure marked as D is shown. Figure 4 Referring to Figure 2 , Figure 4 and Figure 6 , the furnace structure provided by the embodiment includes a furnace body 100 and a plurality of heating assemblies 200. The furnace body 100 is arranged in the equipment shell 10. In the embodiment, the furnace body 100 is made of ceramic fiber material and has insulation. The plurality of heating assemblies 200 are arranged along the circumference of the furnace body 100 at intervals, each of the heating assemblies 200 includes a plurality of heating elements 210 arranged along the circumference of the furnace body at intervals, and the plurality of heating assemblies 200 are respectively connected to a power supply.

[0050] Specifically, referring to Figure 2 , the interval L1 between the adjacent heating assemblies 200 is greater than the interval L2 between the adjacent heating elements 210 in the same heating assembly 200. Since the plurality of heating assemblies 200 are respectively connected to the power supply, there is a potential difference between each group of heating assemblies 200, and the greater the working voltage, the greater the potential difference. Under the design voltage of 380V, it is easy to produce a discharge phenomenon, therefore, by setting the interval between the adjacent heating assemblies 200 to be greater than the interval between the adjacent heating elements 210 in the same heating assembly 200, the creepage distance between the adjacent heating assemblies 200 can be increased, the generation of the discharge phenomenon can be avoided, and the uniformity of the heat distribution inside the furnace structure is also improved, which is beneficial to improving the stability of the heating equipment.

[0051] Specifically, the ratio of the interval L1 between the adjacent heating assemblies 200 to the interval L2 between the adjacent heating elements 210 in the same heating assembly 200 is a, and a is 1.6 to 2.0. When the interval L1 between the adjacent heating assemblies 200 is too large, it will lead to uneven temperature distribution of the thermal field in the heating equipment; when the interval L1 between the adjacent heating assemblies 200 is too small, it will lead to insufficient creepage distance between the heating assemblies 200, thereby generating a discharge phenomenon. In the embodiment, when a is 1.6 to 2.0, the generation of the discharge phenomenon between the adjacent heating assemblies 200 can be avoided, and the uniformity of the temperature distribution of the thermal field in the heating equipment can be ensured.

[0052] As preferred, in the present embodiment, the heating element 210 is in the form of an electric heating wire which is helical and extends along the axial direction of the furnace body 100.

[0053] Specifically, the heating element 210 is arranged on the inner wall of the furnace body 100. By the above arrangement, the interior space of the furnace body 100 can be directly heated by the heating element 210, and the heating efficiency of the heating element 210 is improved.

[0054] Further specifically, the inner wall of the furnace body 100 is provided with a plurality of mounting grooves 110, the extension direction of the mounting grooves 110 is parallel to the axial direction of the furnace body 100. The mounting grooves 110 are arranged in the circumferential direction of the furnace body 100, and the heating element 210 is arranged in the mounting groove 110 in one-to-one correspondence. By the above arrangement, a reliable mounting position can be provided for the heating element 210, and by embedding the heating element 210 in the mounting groove 110, the independence between the heating elements 210 can be improved, and mutual interference can be avoided.

[0055] More specifically, the plurality of heating elements 210 in the same heating assembly 200 are arranged uniformly. That is to say, the distance L2 between the two adjacent heating elements 210 in the same heating assembly 200 is equal. By the above arrangement, the uniformity of the arrangement of the heating elements 210 in each heating assembly 200 in the circumferential direction of the furnace body 100 can be improved, and the uniformity of the thermal field inside the furnace body 100 can be improved.

[0056] In the present embodiment, the heating assembly 200 is specifically four groups, and the insulating element 300 is specifically four. The four groups of heating assemblies 200 are arranged in a circular array in the circumferential direction of the furnace body 100. The plurality of heating assemblies 200 are respectively connected to the power supply through the corresponding connecting terminals 20, and the power supply supplies power to different heating assemblies 200.

[0057] More specifically, with reference to Figure 6 The furnace body 100 includes a plurality of furnace segments 120 which are connected to each other in the axial direction, and the inner wall of each furnace segment 120 is provided with a plurality of heating elements 210 in the circumferential direction. By the above arrangement, the length of the furnace body 100 can be adjusted according to the length of the material to be processed, and the application range of the heating device is expanded. And by the above arrangement, the length of the single heating element 210 can be shortened, and if one of the heating elements 210 is damaged, only the heating element 210 with shorter length needs to be replaced. Compared with the scheme in which the length of the heating element 210 is basically equal to the length of the furnace body 100, the above arrangement can effectively improve the economy of maintenance.

[0058] More specifically, with reference to Figure 2The insulating member 300 is arranged between the adjacent heating assemblies 200.

[0059] Obviously, the above embodiments of the present application are merely exemplary and are not intended to limit the embodiments of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the scope of the present application. Here, it is not necessary and impossible to enumerate all the embodiments. Any modification, equivalent substitution and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A furnace structure, characterized by, The furnace body comprises: a plurality of heating assemblies, the plurality of heating assemblies are arranged along the circumference of the furnace body, each of the heating assemblies comprises a plurality of heating elements arranged along the circumference of the furnace body, the plurality of heating assemblies are respectively connected to a power supply, and the distance between adjacent heating assemblies is greater than the distance between adjacent heating elements in the same heating assembly. The ratio of the distance between adjacent heating assemblies to the distance between adjacent heating elements in the same heating assembly is 1.6-2.

2. The firebox structure of claim 1, wherein The heating elements are arranged on the inner wall of the furnace body, and the furnace structure further comprises an insulation element arranged between adjacent heating assemblies.

3. The firebox structure of claim 1, wherein The inner wall of the furnace body is provided with a plurality of mounting grooves arranged along the circumference of the furnace body, and the heating elements are arranged one-to-one in the mounting grooves.

4. The firebox structure of claim 1, wherein The plurality of heating elements in the same heating assembly are arranged uniformly. The furnace body comprises a plurality of furnace segments connected to each other along the axis direction, and the inner wall of each furnace segment is provided with a plurality of heating assemblies along the circumference.

5. The firebox structure of claim 1, wherein The heating element is a spiral electric heating wire structure.

6. The oven structure according to any one of claims 1-5, characterized in that, The device shell and a plurality of wiring terminals are further provided, and the furnace structure as claimed in any one of claims 1-6 is further provided, the furnace body is arranged in the device shell, the wiring terminals are arranged outside the device shell, the plurality of heating assemblies are respectively connected to the corresponding wiring terminals, and the wiring terminals are used to connect the power supply.

7. Heating device, characterized in that The device shell comprises a first shell and a second shell, the first shell and the second shell are connected to form a containing space, and the furnace body is arranged in the containing space.

8. The heating apparatus of claim 7, wherein, The first shell is provided with a lap flange plate on the side parallel to the axis direction, and the lap flange plate can be overlapped and covered on the outside of the side parallel to the axis direction of the second shell.

9. The heating apparatus of claim 8, wherein, The device shell further comprises a connecting piece, a first connecting hole is arranged on the lap flange plate, a second connecting hole is arranged on the second shell, the first connecting hole corresponds to the second connecting hole, and the connecting piece is arranged in and connected to the first connecting hole and the second connecting hole.

10. The heating apparatus of claim 9, wherein, ​

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