Chip mounting device and die bonder thereof

Abstract

The utility model relates to a chip mounting device and a die bonder thereof. The chip mounting device and the die bonder thereof have a first direction and a second direction, the first direction and the second direction intersect pairwise, and the chip mounting device comprises at least three guide rails, a base, a sliding plate, a first linear motor, a workbench and a chip mounting mechanism, the multiple guide rails are arranged on the base at intervals in the first direction and extend in the second direction, the sliding plate is arranged on the multiple guide rails in a sliding mode, the first linear motor is arranged on the base and used for driving the sliding plate to slide along the guide rails in a reciprocating mode, and the second linear motor is arranged on the base and used for driving the sliding plate to slide along the guide rails in a reciprocating mode. The workbench is arranged on the sliding plate, and the chip mounting mechanism is arranged on the workbench. The chip mounting device and the die bonder thereof provided by the utility model have the advantages of stable operation and high precision.

Description

TECHNICAL FIELD

[0001] The utility model relates to die bonder technical field especially relates to a patch device and die bonder thereof. BACKGROUND

[0002] Die bonding is an important process in the packaging process of semiconductor industry and electronic industry, and in the process, the chip needs to be transferred and attached to the specified area. In order to ensure the accuracy of the patch, the patch device is required to have good stability during operation. The existing patch device mainly realizes the movement of the workbench through the driving of the linear motor. However, the patch device with such structure will cause the deformation of the mounting platform after a long time of operation, which will affect the stability and service life of the patch device operation, and reduce the production quality of die bonding. SUMMARY

[0003] Therefore, the utility model discloses a patch device and die bonder thereof, which has the advantages of stable operation and high precision.

[0004] In order to achieve the above purpose, the utility model provides a patch device with a first direction and a second direction, the first direction and the second direction intersect with each other, which comprises a guide rail, a base, a sliding plate, a first linear motor, a workbench and a patch mechanism, the guide rail has at least three, a plurality of guide rails are arranged on the base along the first direction, the guide rail extends along the second direction, a plurality of guide rails are provided with the same sliding plate, the first linear motor is arranged on the base, the first linear motor is used for driving the sliding plate to reciprocate along the guide rail, the workbench is arranged on the sliding plate, and the patch mechanism is arranged on the workbench.

[0005] The patch device provided by the utility model solves the problem of deformation of the sliding plate caused by too large layout distance, and further ensures the precision and service life of the device.

[0006] Further, the plurality of guide rails are uniformly and evenly arranged, so that the sliding plate is balanced in force.

[0007] Further, the guide rail has three, and two of the guide rails are arranged at the two ends of the base in the first direction, and the other guide rail is located at the center position of the base in the first direction. This structure can solve the problem of deformation of the sliding plate, and make the device structure compact.

[0008] Further, a plurality of first linear motors are arranged between any two adjacent guide rails, and the plurality of first linear motors jointly drive the sliding plate to slide.

[0009] Further, a sliding block is arranged on the sliding plate, and the sliding plate is slidably connected with the guide rail through the sliding block.

[0010] Further, a plurality of hollow holes are arranged on the sliding plate, so that the weight of the sliding plate is reduced, the thrust of the motor is reduced, and the thermal deformation of the structure is further reduced.

[0011] Further, a third direction is arranged, the first direction, the second direction and the third direction are perpendicular to each other, the workbench comprises a first platform, a second platform and a mounting platform, the first platform is arranged on the sliding plate, a first guide rail and a second linear motor are arranged on the side of the first platform away from the sliding plate, the first guide rail extends along the first direction, the second platform is slidably connected to the first guide rail, the second linear motor drives the second platform to slide along the first guide rail, a second guide rail and a third linear motor are arranged on the side of the second platform away from the first platform, the second guide rail extends along the third direction, the mounting platform is slidably connected to the second guide rail, and the third linear motor drives the mounting platform to slide along the second guide rail.

[0012] Further, the guide rail, the first guide rail and the second guide rail are perpendicular to each other. This structure is convenient to control and can realize that the patch mechanism moves to any position, so that the movement range is ensured.

[0013] Further, a plurality of grooves are arranged on the base, the grooves are arranged between any two adjacent guide rails, and the plurality of first linear motors are arranged in the plurality of grooves. This structure can realize positioning of the first linear motor, and the structure of the device is more compact.

[0014] In order to achieve the same purpose, the utility model provides a die bonder, including the patch device as above.

[0015] In order to better understand and implement, the utility model is described in detail below in conjunction with the drawings. Attached Figure Description

[0016] Figure 1 This is a front view of the patch device described in this utility model;

[0017] Figure 2 This is an axial view of the patch device described in this utility model;

[0018] Explanation of reference numerals in the attached drawings: Y, first direction; X, second direction; Z, third direction; 1, guide rail; 2, base; 21, groove; 3, slide plate; 31, cutout hole; 4, first linear motor; 5, worktable; 51, first platform; 511, first guide rail; 512, second linear motor; 52, second platform; 521, second guide rail; 522, third linear motor; 53, mounting platform. Detailed Implementation

[0019] This solution improves upon traditional drive and guide structures by increasing the number of guide rails, thereby enhancing the stability of the skateboard and preventing deformation caused by excessive spacing between guide rails. Furthermore, this solution employs a dual-motor drive structure, resolving the issue of asynchronous skateboard movement on different guide rails due to uneven thrust from a single motor. It also reduces motor heat generation, minimizing structural thermal deformation and further enhancing the device's stability.

[0020] Please see Figures 1-2 , Figure 1 This is a front view of the patch device described in this utility model; Figure 2 This is an axial view of the patch device described in this utility model.

[0021] This utility model discloses a die bonding machine, including a die-attaching device, which enables the movement and placement of wafers. For ease of explanation, the die-attaching device has a first direction Y, a second direction X, and a third direction Z, wherein the first direction Y, the second direction X, and the third direction Z intersect each other in pairs, and preferably are perpendicular to each other in pairs.

[0022] The patch device comprises a guide rail 1, a base 2, a sliding plate 3, a first linear motor 4, a workbench 5 and a patch mechanism. The guide rail 1 is at least three, and a plurality of guide rails 1 are arranged on the base 2 in the first direction Y and extend in the second direction X. The number of guide rails 1 can be four or more, in order to ensure that the overall volume of the device is not too large and the cost of the device is not too high, the guide rails 1 are preferably three. The spacing distance of the three guide rails 1 can be adjusted according to product needs, so that the spacing distance of the guide rails 1 and the adjacent guide rails 1 is different, thereby adapting to the needs of different scenes, and the spacing distance of the three guide rails 1 is preferably equal, that is, the spacing of the guide rails 1 and the adjacent guide rails 1 is uniform. In order to ensure the balance of the device, two guide rails 1 are arranged at the two ends of the base 2 in the first direction Y, and the other guide rail 1 is located at the center position of the base 2 in the first direction Y.

[0023] A sliding plate 3 is arranged on the guide rail 1, and a plurality of hollow holes 31 are formed in the sliding plate 3, thereby reducing the weight of the sliding plate 3 and reducing the required driving force. The first linear motor 4 is arranged on the base 2 and located between the guide rails 1, and the output end of the first linear motor 4 is fixed with the sliding plate 3, which is used to drive the sliding plate 3 to reciprocate along the second direction X of the guide rail 1. The workbench 5 is arranged on the sliding plate 3 and is used to install the patch mechanism. The patch mechanism can be a mechanical hand or other structure for sucking and placing a wafer.

[0024] Two installation spaces are formed between the three guide rails 1, and the first linear motor 4 can have only one and be arranged in one of the installation spaces. In order to improve the stability of the sliding plate 3, the first linear motor 4 has two in the embodiment and is located in the two installation spaces, and the two first linear motors 4 jointly drive the sliding plate 3 to slide, so that the sliding plate 3 is balanced and the sliding plate 3 slides synchronously on each guide rail 1, thereby avoiding deformation of the sliding plate 3. As a preferred, the base 2 is also provided with a groove 21 corresponding to the installation space, and the first linear motor 4 is arranged in the groove 21, thereby making the device structure more compact and reducing the device volume.

[0025] The workbench 5 can drive the patch structure in various ways. In the embodiment, the workbench 5 comprises a first platform 51, a second platform 52 and a mounting platform 53. The first platform 51 is arranged on the slide plate 3, and a first guide rail 511 and a second linear motor 512 are arranged on the side of the first platform 51 away from the slide plate 3. The first guide rail 511 has two parts and is arranged in a spaced manner, and the second linear motor 512 is located between the two parts of the first guide rail 511. The output end of the second linear motor 512 is fixed with the second platform 52, so as to drive the second platform 52 to slide along the first guide rail 511. The second platform 52 is provided with a second guide rail 521 and a third linear motor 522. The second guide rail 521 has two parts and is arranged in a spaced manner, and the third linear motor 522 is located between the two parts of the second guide rail 521. The output end of the third linear motor 522 is fixed with the mounting platform 53, so as to realize that the third linear motor 522 drives the mounting platform 53 to slide along the second guide rail 521.

[0026] The extension directions of the first guide rail 511 and the second guide rail 521 can be designed according to actual needs. In the embodiment, the guide rail 1, the first guide rail 511 and the second guide rail 521 are perpendicular to each other in pairs. The first guide rail 511 extends along the first direction Y, so that the second linear motor 512 pushes the second platform 52 to move back and forth along the first direction Y. The second guide rail 521 extends along the third direction Z, so that the third linear motor 522 pushes the mounting platform 53 to move back and forth along the third direction Z. The mounting platform 53 is provided with a patch mechanism, and the patch mechanism can take and place chips.

[0027] In use, the first linear motor 4 operates simultaneously to drive the slide plate 3 to move back and forth along the guide rail 1, and the slide plate 3 drives the first platform 51 to move back and forth, so as to realize the rising and falling of the patch mechanism. When the second linear motor 512 starts, it drives the second platform 52 to move back and forth along the second guide rail 521, so as to realize the left-right transverse movement of the patch mechanism. When the third linear motor 522 starts, it drives the mounting platform 53 to move back and forth along the third guide rail, so as to realize the front-back transverse movement of the patch mechanism.

[0028] The patch device and die bonder disclosed by the utility model solve the deformation problem of the slide plate 3 caused by the too large span and the normal suction force generated by the first linear motor 4 through the arrangement of the plurality of guide rails 1, and the synchronization of the slide plate 3 sliding on the plurality of guide rails 1 is ensured by cooperating with the plurality of first linear motors 4 to drive the slide plate 3 to move. In addition, the common driving of the plurality of first linear motors 4 can also reduce the heat generation of a single first linear motor 4, thereby reducing the thermal deformation of the slide plate 3, so as to reduce the overall size of the device while ensuring the precision and service life of the device.

[0029] In the description of the present application, it should be understood that if the terms "upper", "lower", "front", "back", "left", "right", "X direction", "Y direction", "Z direction" and the like appear, the orientation or positional relationship indicated by these terms is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0030] In addition, if the terms "first", "second", "third" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", "third" can be explicitly or implicitly included at least one of the features. In the description of the present application, if the term "a plurality of" appears, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise explicitly specified.

[0031] In the present application, unless otherwise explicitly specified and limited, if the terms "mounting", "connecting", "connecting", "fixing" and the like appear, these terms should be understood in a broad sense. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0032] The above-described embodiments only express several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as a limitation on the scope of the utility model patent. It should be noted that for those skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, and the present application also intends to include these changes and modifications.

Claims

1. A patch device having a first direction and a second direction, the first direction and the second direction intersecting two by two, characterized in that: The device comprises guide rails, a base, a sliding plate, a first linear motor, a workbench and a patch mechanism. The guide rails are at least three, and multiple guide rails are arranged on the base in the first direction. The guide rails extend in the second direction, and the sliding plate is arranged on the guide rails. The first linear motor is arranged on the base, and is used to drive the sliding plate to slide along the guide rails. The workbench is arranged on the sliding plate, and the patch mechanism is arranged on the workbench.

2. The patch device of claim 1, wherein: The multiple guide rails are evenly spaced.

3. The patch device of claim 1, wherein: The guide rails are three, and two of the guide rails are arranged at the two ends of the base in the first direction, and the other guide rail is arranged at the center of the base in the first direction.

4. The patch device of claim 1, wherein: The device comprises multiple first linear motors, and each two adjacent guide rails are provided with a first linear motor. The multiple first linear motors jointly drive the sliding plate to slide.

5. The patch device of claim 1, wherein: The sliding plate is provided with a sliding block, and the sliding plate is connected with the guide rails through the sliding block.

6. The patch device of claim 1, wherein: The sliding plate is provided with multiple hollow holes.

7. The patch device of claim 1, wherein: The device has a third direction, and the first direction, the second direction and the third direction intersect with each other. The workbench comprises a first platform, a second platform and a mounting platform. The first platform is arranged on the sliding plate, and the first platform is provided with a first guide rail and a second linear motor on the side away from the sliding plate. The first guide rail extends in the first direction. The second platform is connected with the first guide rail in sliding mode, and the second linear motor drives the second platform to slide along the first guide rail. The second platform is provided with a second guide rail and a third linear motor on the side away from the first platform. The second guide rail extends in the third direction. The mounting platform is connected with the second guide rail in sliding mode, and the third linear motor drives the mounting platform to slide along the second guide rail. The patch mechanism is arranged on the mounting platform away from the second platform.

8. A patch device according to claim 7, wherein: The guide rails, the first guide rail and the second guide rail are perpendicular to each other.

9. The patch device of claim 4, wherein: The base is also provided with multiple grooves, and each two adjacent guide rails are provided with a groove. The multiple first linear motors are arranged in the multiple grooves.

10. A die bonder, characterized by: The device comprises the patch device according to any one of claims 1-9.

Images