Double-pump vacuum pump set for single crystal furnace

Abstract

The utility model relates to the technical field of vacuum pump sets, in particular to a double-pump vacuum pump set for a single crystal furnace, which comprises a first vacuum pump set and a second vacuum pump set, and an exhaust port of the first vacuum pump set is connected with an air inlet of the second vacuum pump set through a cooling heat exchange structure. The second vacuum pump set is used for exchanging heat of gas entering the second vacuum pump set and reducing the gas inlet temperature of the second vacuum pump set; cooling water channels of the first vacuum pump set and the second vacuum pump set are connected in series to form a vacuum pump set cooling water channel; according to the utility model, cold air is introduced into the first vacuum pump set to dissipate heat generated by working of the first vacuum pump set and the second vacuum pump set, and cold liquid is used to dissipate heat of the first vacuum pump set and the second vacuum pump set, so that high temperature generated by working of the first vacuum pump set and the second vacuum pump set is effectively reduced; and mechanical faults of the first vacuum pump and the second vacuum pump caused by too high temperature are prevented.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum pump set technical field, concretely is a double pump vacuum pump set for single crystal furnace. BACKGROUND

[0002] Vacuum pump is the device or equipment that utilizes mechanical, physical, chemical or physical chemistry to carry out pumping to the container and obtains vacuum, and double pump vacuum pump set is the equipment that utilizes two groups of vacuum pumps to be used in series.

[0003] The single crystal furnace vacuum system of the existing Czochralski method single crystal furnace is realized and maintained by vacuum pump, the control of the vacuum degree in the hearth is realized through the vacuum pump, thereby ensuring the high-quality growth of silicon single crystal, however, maintaining the single crystal furnace vacuum system needs the vacuum pump to keep low furnace pressure, high argon flow and high power pumping speed condition for a long time, and such condition is easy to make the vacuum pump produce high temperature, and high temperature is easy to make the vacuum pump appear the fault.

[0004] Therefore, it is necessary to design a vacuum pump to improve the above problems. SUMMARY

[0005] In order to solve the problems of the prior art, the utility model provides a double pump vacuum pump set for single crystal furnace, the vacuum pump set includes first vacuum pump set and second vacuum pump set, the exhaust port of first vacuum pump set is connected with the air inlet of second vacuum pump set through cooling heat exchange structure, is used for heat exchange to the gas that enters second vacuum pump set, reduces the air inlet temperature of second vacuum pump set.

[0006] The cooling waterway of first vacuum pump set and second vacuum pump set is connected in series, and forms a vacuum pump set cooling water channel.

[0007] Further, the cooling heat exchange structure is a water-cooled flange, and the air inlet end and the air outlet end of the water-cooled flange are connected with the exhaust port of the first vacuum pump set and the air inlet of the second vacuum pump set respectively.

[0008] Further, the water-cooled channel of the water-cooled flange is connected in series with the vacuum pump set cooling water channel.

[0009] Further, the water-cooled channel of the water-cooled flange is connected in series between the cooling waterway of the first vacuum pump set and the cooling waterway of the second vacuum pump set.

[0010] Further, an air heat exchange pipeline is further arranged between the exhaust port of the first vacuum pump set and the air inlet of the second vacuum pump set, one end of the air heat exchange pipeline is connected with the exhaust port of the first vacuum pump set / the air inlet of the second vacuum pump set, and the other end of the air heat exchange pipeline is connected with the air inlet end / air outlet end of the cooling heat exchange structure.

[0011] Further, the air heat exchange pipeline is a corrugated connecting pipe, a serpentine pipe or a finned pipe.

[0012] Further, two ends of the air heat exchange pipeline are connected with the air outlet end of the cooling heat exchange structure and the air inlet of the second vacuum pump group respectively.

[0013] Further, the flowing direction of the cooling water in the cooling water channel of the vacuum pump group is opposite to the gas flowing direction of the vacuum pump group, and a valve is arranged at the water inlet of the cooling water channel of the vacuum pump group.

[0014] Further, the vacuum pump group is installed on a fixed support.

[0015] The first vacuum pump group is located above the second vacuum pump group.

[0016] The utility model discloses a beneficial effect:

[0017] The first vacuum pump group and the second vacuum pump group are connected through the cooling structure, the heat generated by the working of the first vacuum pump group and the second vacuum pump group is radiated through the cold air in the first vacuum pump group, the water cooling channel of the water cooling flange is connected in series with the cooling water channel of the vacuum pump group, the water cooling channel of the water cooling flange is connected in series between the cooling water path of the first vacuum pump group and the cooling water path of the second vacuum pump group, and the first vacuum pump group and the second vacuum pump group are radiated through the cold liquid, so that the high temperature generated by the working of the first vacuum pump group and the second vacuum pump group is effectively reduced, and the mechanical failure of the first vacuum pump group and the second vacuum pump group caused by the excessively high temperature is prevented. BRIEF DESCRIPTION OF DRAWINGS

[0018] Fig. 1 It is a structure schematic view of the double-pump vacuum pump group for the single crystal furnace.

[0019] Fig. 2 It is a structure schematic view of the water cooling flange.

[0020] Reference signs:

[0021] In the drawing: 1 - first vacuum pump, 2 - second vacuum pump, 3 - water cooling flange, 4 - corrugated connecting pipe. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0023] Please refer to Figs. 1-2The utility model provides a double pump vacuum pump set for single crystal furnace, vacuum pump set includes first vacuum pump set 1 and second vacuum pump set 2, the exhaust of first vacuum pump set 1 with the air inlet of second vacuum pump set 2 is connected through cooling heat exchange structure, is used for carrying out heat exchange to the gas of second vacuum pump set 2, reduces the air inlet temperature of second vacuum pump set 2,

[0024] The cooling water path of the first vacuum pump set 1 and the second vacuum pump set 2 is connected in series to form a vacuum pump set cooling water channel. The first vacuum pump set 1 and the second vacuum pump set 2 are both Roots pump sets.

[0025] The cooling heat exchange structure is a water-cooled flange 3, and the air inlet end and the air outlet end of the water-cooled flange 3 are connected with the exhaust of the first vacuum pump set 1 and the air inlet of the second vacuum pump set 2 respectively.

[0026] The water-cooled channel of the water-cooled flange 3 is connected in series with the vacuum pump set cooling water channel.

[0027] The water-cooled channel of the water-cooled flange 3 is connected in series between the cooling water path of the first vacuum pump set 1 and the cooling water path of the second vacuum pump set 2.

[0028] An air heat exchange pipeline is further arranged between the exhaust of the first vacuum pump set 1 and the air inlet of the second vacuum pump set 2, one end of the air heat exchange pipeline is connected with the exhaust of the first vacuum pump set 1 / the air inlet of the second vacuum pump set 2, and the other end of the air heat exchange pipeline is connected with the air inlet end / air outlet end of the cooling heat exchange structure.

[0029] The air heat exchange pipeline is a corrugated connecting pipe 4, a serpentine pipe or a finned tube.

[0030] Both ends of the air heat exchange pipeline are connected with the air outlet end of the water-cooled flange 3 and the air inlet of the second vacuum pump set 2 respectively. Specifically, both ends of the corrugated connecting pipe 4 are connected with the air outlet end of the water-cooled flange 3 and the air inlet of the second vacuum pump set 2 respectively.

[0031] The flow direction of the cooling water in the vacuum pump set cooling water channel is opposite to the gas flow direction of the vacuum pump set, and a valve is arranged at the water inlet of the vacuum pump set cooling water channel.

[0032] The vacuum pump set is installed on a fixed support, and the first vacuum pump set 1 is located above the second vacuum pump set 2.

[0033] Working principle: the double-pump vacuum pump set of the single crystal furnace includes a first vacuum pump set 1, a second vacuum pump set 2, a fixed support and a vacuum pump set cooling water channel, and an air heat exchange pipeline; the fixed support is provided with the first vacuum pump set 1 at the top, the fixed support is internally provided with the second vacuum pump set 2 at the bottom end, the first vacuum pump set 1 is provided with an air inlet at the top, the second vacuum pump set 2 is provided with an air outlet at the bottom, and the first vacuum pump set 1 and the second vacuum pump set 2 are connected through a cooling structure; the compactness and stability of the overall structure facilitate operation and maintenance; due to the compact structure, the first vacuum pump set 1 and the second vacuum pump set 2 are superior in space occupation, and are particularly suitable for application in an environment with limited space. Meanwhile, the equipment is relatively simple to maintain, which not only facilitates daily maintenance of operators, but also quickly locates problems when faults occur, greatly reducing downtime and maintenance costs.

[0034] In addition, the first vacuum pump set 1 and the second vacuum pump set 2 are connected through a corrugated connecting pipe 4 and a water-cooled flange 3, cold air is introduced into the first vacuum pump set 1, heat exchange cold air is output from the second vacuum pump set 2 through the water-cooled flange 3, and meanwhile, the water cooling channel of the water-cooled flange 3 is connected between the cooling water channels of the first vacuum pump set 1 and the second vacuum pump set 2; the water-cooled flange 3 cools the first vacuum pump set 1 and the second vacuum pump set 2 through liquid cooling, effectively reduces the high temperature generated by the first vacuum pump set 1 and the second vacuum pump set 2 during work, effectively reduces the high temperature generated by the first vacuum pump set 1 and the second vacuum pump set 2 during work, prevents mechanical failure risks caused by excessively high temperature, and enables the first vacuum pump set 1 and the second vacuum pump set 2 to maintain higher stability during long-time operation.

[0035] It is worth noting that the first vacuum pump set 1 and the second vacuum pump set 2 are connected through a cooling structure, cold air is introduced into the first vacuum pump set 1 to cool the heat generated by the first vacuum pump set 1 and the second vacuum pump set 2 during work, the water cooling channel of the water-cooled flange 3 is connected with the vacuum pump set cooling water channel, the water cooling channel of the water-cooled flange 3 is connected between the cooling water channels of the first vacuum pump set 1 and the second vacuum pump set 2, the first vacuum pump set 1 and the second vacuum pump set 2 are cooled through cold liquid, the high temperature generated by the first vacuum pump set 1 and the second vacuum pump set 2 during work is effectively reduced through double cooling of cold air and cold liquid, and mechanical failures of the first vacuum pump set 1 and the second vacuum pump set 2 caused by excessively high temperature are prevented.

[0036] The above only describes preferred embodiments of the present application and is not intended to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A dual-pump vacuum pump set for a single crystal furnace, characterized by comprising: The vacuum pump set comprises a first vacuum pump set and a second vacuum pump set, an exhaust port of the first vacuum pump set is connected with an air inlet of the second vacuum pump set through a cooling heat exchange structure, for heat exchange of gas entering the second vacuum pump set, so as to reduce the air inlet temperature of the second vacuum pump set. The cooling water paths of the first vacuum pump set and the second vacuum pump set are connected in series to form a vacuum pump set cooling water channel.

2. The dual-pump vacuum pump set for a single crystal furnace according to claim 1, wherein The cooling heat exchange structure is a water-cooled flange, and the air inlet end and the air outlet end of the water-cooled flange are connected with the exhaust port of the first vacuum pump set and the air inlet of the second vacuum pump set respectively.

3. The dual-pump vacuum pump set for a single crystal furnace according to claim 2, wherein The water-cooled channel of the water-cooled flange is connected in series with the vacuum pump set cooling water channel.

4. The dual-pump vacuum pump set for a single crystal furnace according to claim 3, wherein The water-cooled channel of the water-cooled flange is connected in series between the cooling water path of the first vacuum pump set and the cooling water path of the second vacuum pump set.

5. The dual-pump vacuum pump set for a single crystal furnace according to claim 1, wherein An air heat exchange pipe is further arranged between the exhaust port of the first vacuum pump set and the air inlet of the second vacuum pump set, one end of the air heat exchange pipe is connected with the exhaust port of the first vacuum pump set / the air inlet of the second vacuum pump set, and the other end of the air heat exchange pipe is connected with the air inlet end / air outlet end of the cooling heat exchange structure.

6. The dual-pump vacuum pump set for a single crystal furnace according to claim 5, wherein The air heat exchange pipe is a corrugated connecting pipe, a serpentine pipe or a finned pipe.

7. The dual-pump vacuum pump set for a single crystal furnace according to claim 5, wherein Both ends of the air heat exchange pipe are connected with the air outlet end of the cooling heat exchange structure and the air inlet of the second vacuum pump set respectively.

8. The dual-pump vacuum pump set for a single crystal furnace according to claim 1, wherein The flow direction of the cooling water in the vacuum pump set cooling water channel is opposite to the gas flow direction of the vacuum pump set, and a valve is arranged at the water inlet of the vacuum pump set cooling water channel.

9. The dual-pump vacuum pump set for a single crystal furnace according to claim 1, wherein The vacuum pump set is installed on a fixed support. The first vacuum pump set is located above the second vacuum pump set.

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