Semiconductor process ultrapure water remote monitoring device

Abstract

The utility model relates to the technical field of accessory devices of pipeline pressure detection devices, in particular to a semiconductor process ultrapure water remote monitoring device, which is provided with three groups of pressure sensors, and adopts an intermediate numerical value to control the operation frequency of an external supply pump by comparing the change of the magnitude of signals of the three groups of pressure sensors, so that the external supply is kept in constant-pressure operation. The ultrapure water remote monitoring device for the semiconductor process eliminates shutdown faults caused by sensor faults or abnormal signal interference, thereby enhancing practicability. Comprising a main pipe and further comprises a first pipe, two sets of second three-way connectors, two sets of second pipes and a third pipe, the first three-way connector is arranged on the main pipe, three sets of pressure sensors are arranged on the main pipe, two sets of first two-position three-way electromagnetic valves and second two-position three-way electromagnetic valves are arranged on the main pipe, and a first electromagnetic valve is arranged on the main pipe.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of pipeline pressure detection device accessory, particularly to a kind of semiconductor technology ultrapure water remote monitoring device. BACKGROUND

[0002] It is known that in semiconductor manufacturing process, the quality of ultrapure water has extremely strict requirements, because even trace impurities can seriously affect the performance and yield of semiconductor devices. But now the external supply pipeline installs a pressure sensor, adjusts the frequency output of frequency converter to control the speed of water pump by detecting the pressure change trend on the external supply pipeline, so as to make the external supply pipeline constant pressure water supply. Because only one pressure sensor is used for control, it is difficult to accurately judge the health status of the current sensor. If there is a problem, it will directly lead to external supply shutdown, so the practicability is poor. INVENTION CONTENTS

[0003] To solve the above technical problems, the utility model provides a kind of semiconductor technology ultrapure water remote monitoring device which is provided with three groups of pressure sensors, the middle value is always taken to control the running frequency of external supply pump by comparing the change of signal size of three groups of pressure sensors, so that the external supply keeps constant pressure operation, eliminates the shutdown failure caused by sensor failure or signal interference exception, and enhances the practicability.

[0004] The semiconductor technology ultrapure water remote monitoring device of the utility model, including main pipeline, still include first pipe, two groups of second three-way joint, two groups of second pipe and third pipe, first three-way joint is set on main pipeline, three groups of pressure sensors are set on main pipeline, two groups of first two-position three-way electromagnetic valve and second two-position three-way electromagnetic valve are set on main pipeline, first electromagnetic valve is set on main pipeline, first three-way joint is communicated with first pipe, the right end of first pipe is communicated with second three-way joint, second electromagnetic valve is set on first pipe, the top of two groups of first two-position three-way electromagnetic valve is communicated with second pipe respectively, the top of two groups of second pipe is communicated with second three-way joint respectively, the inner end of two groups of second three-way joint is communicated with fourth pipe, the top of second two-position three-way electromagnetic valve is communicated with third pipe, third pipe is communicated with the second three-way joint of right side.

[0005] Preferably, the main pipeline is provided with a main valve.

[0006] Preferably, it further includes a protective box, a cover plate and screws, the left end and the right end of the protective box are respectively provided with a first through hole, two groups of first through holes are respectively connected with the main pipe sleeve, the top of the protective box is provided with four groups of mounting screw holes, the top of the cover plate is provided with four groups of mounting through holes, and four groups of screws are respectively connected with the mounting screw holes through the mounting through holes.

[0007] Preferably, the top of the protective box is provided with a sealing ring.

[0008] Preferably, the top end of the protective box is provided with three sets of through holes, and each of the three sets of through holes is provided with glass.

[0009] Preferably, the four sets of mounting through holes are all provided as counterbores.

[0010] Preferably, the bottom end of the protective box is connected with four sets of stable pads.

[0011] Preferably, the right end of the protective box is provided with a drain pipe.

[0012] Compared with the prior art, the beneficial effects of the utility model are as follows: when the ultrapure water pipeline is conveying, the efficiency of the external supply pump in the upper device is detected through the three sets of pressure sensors; when the leftmost pressure sensor is damaged, the left electromagnetic valve of the first electromagnetic valve and the left electromagnetic valve of the left two-way three-way electromagnetic valve are closed, the second electromagnetic valve is started, then the ultrapure water is conveyed by bypassing the left pressure sensor through the first pipeline and the left second three-way joint, and the efficiency of the external supply pump in the upper device is detected through the right two sets of pressure sensors; when the middle pressure sensor is damaged, the electromagnetic valves in the two sets of first two-way three-way electromagnetic valves are closed, so that the left and right pressure sensors are detected, and the ultrapure water flow through the middle pressure sensor is stopped; when the right pressure sensor is damaged, the right electromagnetic valve of the right first two-way three-way electromagnetic valve and the left electromagnetic valve of the second two-way three-way electromagnetic valve are closed, so as to prevent the ultrapure water from flowing through the right pressure sensor, so that when any one of the three sets of pressure sensors needs to be maintained and repaired in the later period, the supply of ultrapure water does not need to be stopped, so that the stoppage failure caused by sensor failure or signal interference is eliminated, and the practicability is enhanced. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 is a connection structure schematic view of the utility model;

[0014] Fig. 2 is a first pipe and second three-way joint communication structure schematic view of the utility model;

[0015] Fig. 3 is a bottom end and stable pad connection structure schematic view of the protective box of the utility model;

[0016] Fig. 4 is a A local enlarged structure schematic view of the utility model;

[0017] Marked in the drawing: 1, main pipeline; 2, first tee joint; 3, pressure sensor; 4, first two-position tee electromagnetic valve; 5, second two-position tee electromagnetic valve; 6, first electromagnetic valve; 7, first pipe; 8, second pipe; 9, second tee joint; 10, third pipe; 11, main valve; 12, protective box; 13, cover plate; 14, screw; 15, sealing ring; 16, glass; 17, stable pad; 18, drain pipe; 19, second electromagnetic valve; 20, fourth pipe. DETAILED DESCRIPTION

[0018] The specific embodiments of the utility model are described in further detail below in combination with the drawings and examples. The following examples are used to illustrate the utility model, but not to limit the scope of the utility model.

[0019] As Figs. 1 to 4 shown, the utility model discloses a semiconductor process ultrapure water remote monitoring device, including main pipeline 1, still including first pipe 7, two groups of second tee joint 9, two groups of second pipe 8 and third pipe 10, be provided with first tee joint 2 on main pipe, be provided with three groups of pressure sensor 3 on main pipe, be provided with two groups of first two-position tee electromagnetic valve 4 and second two-position tee electromagnetic valve 5 on main pipe, be provided with first electromagnetic valve 6 on main pipe, first tee joint 2 with first pipe 7 intercommunication, the right end of first pipe 7 with second tee joint 9 intercommunication, be provided with second electromagnetic valve 19 on first pipe 7, the top of two groups of first two-position tee electromagnetic valve 4 is respectively with second pipe 8 intercommunication, the top of two groups of second pipe 8 is respectively with second tee joint 9 intercommunication, the inner end of two groups of second tee joint 9 all with fourth pipe 20 intercommunication, the top of second two-position tee electromagnetic valve 5 with third pipe 10 intercommunication, third pipe 10 with the second tee joint 9 of right side intercommunication;When carrying out ultrapure water pipeline delivery, the efficiency of the delivery of the external supply pump in the superior device is detected through three groups of pressure sensors, when the leftmost pressure sensor is damaged, the left electromagnetic valve of first electromagnetic valve and left two-position tee electromagnetic valve is closed, and second electromagnetic valve is started, then ultrapure water is transported by first pipe, left second tee joint and bypasses left pressure sensor, and the efficiency of the external supply pump in the superior device is detected through right two groups of pressure sensors, when the middle pressure sensor is damaged, the electromagnetic valve of two groups of first two-position tee electromagnetic valve inside is closed, so that the detection is carried out through left and right pressure sensors, and the flow of ultrapure water through the middle pressure sensor is stopped, when the right pressure sensor is damaged, the right electromagnetic valve of right first two-position tee electromagnetic valve and the left electromagnetic valve of second two-position tee electromagnetic valve are closed, so as to prevent the flow of ultrapure water through the right pressure sensor, so that when any one of the three groups of pressure sensors needs to be maintained and repaired in the later period, the supply of ultrapure water does not need to be stopped, so that the stoppage failure caused by sensor failure or signal interference anomaly is eliminated, and therefore the practicability is enhanced.

[0020] As a preferred of the above embodiment, the main pipeline 1 is provided with a main valve 11; the main pipeline can be closed by the main valve, so that the supply of ultrapure water is not affected when the right main pipeline is broken, thereby enhancing the practicability.

[0021] As a preferred of the above embodiment, the protective box 12, the cover plate 13 and the screws 14 are further included, the left end and the right end of the protective box 12 are respectively provided with first through holes, the two groups of first through holes are respectively connected with the main pipe sleeve, the top end of the protective box 12 is provided with four groups of mounting threaded holes, the top end of the cover plate 13 is provided with four groups of mounting through holes, and the four groups of screws 14 are respectively connected with the mounting threaded holes through the mounting through holes; the three groups of two-position three-way electromagnetic valves, the three groups of pressure sensors, the first electromagnetic valve and the second electromagnetic valve can be protected by the protective box, thereby enhancing the practicability.

[0022] As a preferred of the above embodiment, the top end of the protective box 12 is provided with a sealing ring 15; the sealing ring can effectively enhance the sealing box between the protective box and the cover plate, thereby enhancing the practicability.

[0023] As a preferred of the above embodiment, the top end of the protective box 12 is provided with three groups of through holes, and the three groups of through holes are respectively provided with glasses 16; the values of the pressure sensors can be conveniently observed through the glasses in the three groups of through holes, thereby enhancing the practicability.

[0024] As a preferred of the above embodiment, the four groups of mounting through holes are all provided as counterbores; the four groups of screws can be hidden through the counterbores, thereby maintaining the appearance of the protective box, and thus enhancing the practicability.

[0025] As a preferred of the above embodiment, the bottom end of the protective box 12 is connected with four groups of stable pads 17; the protective box can be conveniently placed through the four groups of stable pads, and the friction force of the bottom of the device is enhanced, thereby enhancing the practicability.

[0026] As a preferred of the above embodiment, the right end of the protective box 12 is provided with a drain pipe 18; the ultrapure water can be discharged through the drain pipe when the pipeline leaks, thereby enhancing the practicability.

[0027] The utility model discloses a semiconductor process ultrapure water remote monitoring device, its working principle is, when working, first, the protective box is encased in the main pipe, then through three groups of pressure sensor detection the efficiency of the external supply pump of senior device, and through the glass in three groups of through -going hole carries out the numerical record, after when the leftmost pressure sensor is damaged, the left side electromagnetic valve of first electromagnetic valve and left two three -way electromagnetic valve closes, and starts second electromagnetic valve, then ultrapure water will bypass first pressure sensor, and flow through the pressure sensor of middle and right side, and carry out the detection of senior device external supply pump efficiency, when the middle pressure sensor is damaged, the electromagnetic valve of two groups of first two three -way electromagnetic valve inside closes, and through the left side and right side pressure sensor detection, and stop ultrapure water flow through the pressure sensor of middle, when the pressure sensor of right side is damaged, the right side electromagnetic valve of right first two three -way electromagnetic valve and the left side electromagnetic valve of second two three -way electromagnetic valve close, so as to prevent ultrapure water flow through the pressure sensor of right side, then when three groups of pressure sensor maintenance and repair simultaneously, can through the main valve and close the main pipe, so as to facilitate the maintenance and repair of later period, and when the pressure sensor maintenance, through four groups of screws and open the cover plate, then can carry out the maintenance and repair of equipment, and when maintenance, the ultrapure water remaining in the pipeline can be discharged through the drain pipe, then after maintenance and repair end, through four groups of screws and reinstall the cover plate.

[0028] The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0029] The "first", "second", "third" in the utility model do not represent the specific quantity and order, but only for the name distinction.

[0030] The above is only the preferred embodiment of the utility model, and it should be pointed out that for ordinary skilled person in the art, without departing from the technical principle of the utility model, can make a number of improvements and variations, and these improvements and variations should be regarded as the protection scope of the utility model.

Claims

1. A kind of semiconductor process ultrapure water remote monitoring device, including main pipeline (1);Its characterized in that, It also includes the first pipe (7), two groups of second three-way joint (9), two groups of second pipe (8) and third pipe (10), the main pipe is provided with the first three-way joint (2), the main pipe is provided with three groups of pressure sensor (3), the main pipe is provided with two groups of first two-position three-way solenoid valve (4) and second two-position three-way solenoid valve (5), the main pipe is provided with the first solenoid valve (6), the first three-way joint (2) is communicated with the first pipe (7), the right end of the first pipe (7) is communicated with the second three-way joint (9), the first pipe (7) is provided with the second solenoid valve (19), the top end of two groups of first two-position three-way solenoid valve (4) is communicated with the second pipe (8) respectively, the top end of two groups of second pipe (8) is communicated with the second three-way joint (9) respectively, the inner end of two groups of second three-way joint (9) is communicated with the fourth pipe (20), the top end of second two-position three-way solenoid valve (5) is communicated with the third pipe (10), the third pipe (10) is communicated with the right side second three-way joint (9).

2. The semiconductor process ultrapure water remote monitoring device of claim 1, wherein, The main pipeline (1) is provided with a main valve (11).

3. The apparatus for remote monitoring of ultra-pure water in a semiconductor process according to claim 2, wherein, It also includes a protective box (12), a cover plate (13) and a screw (14), the left end and the right end of the protective box (12) are respectively provided with a first through hole, two groups of first through holes are respectively connected with the main pipe sleeve, the top end of the protective box (12) is provided with four groups of mounting screw holes, the top end of the cover plate (13) is provided with four groups of mounting through holes, four groups of screws (14) are respectively connected with the mounting screw holes through the mounting through holes.

4. The apparatus for remote monitoring of ultra-pure water in a semiconductor process according to claim 3, wherein the water quality sensor is a conductivity sensor. The top end of the protective box (12) is provided with a sealing ring (15).

5. The apparatus for remote monitoring of ultra-pure water in a semiconductor process according to claim 4, wherein the water quality sensor is a conductivity sensor. The top end of the protective box (12) is provided with three groups of through holes, and the three groups of through holes are respectively provided with a glass (16).

6. The apparatus for remote monitoring of ultra-pure water in a semiconductor process according to claim 5, wherein The four groups of mounting through holes are all set as counterbores.

7. The apparatus according to claim 6, wherein the apparatus is characterized by: It also includes four groups of stable pads (17), the bottom end of the protective box (12) is connected with the four groups of stable pads (17).

8. The semiconductor process ultrapure water remote monitoring device of claim 7, wherein, The right end of the protective box (12) is provided with a drain pipe (18).

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