Reaction furnace

By partially embedding the heating wire inside the insulation layer and exposing it in the reactor, and combining it with a heat radiation reflective layer and a multi-layer insulation structure, the problem of heat loss through the insulation layer of the heating wire is solved, thus achieving efficient energy utilization and improved heating effect.

CN223710246UActive Publication Date: 2025-12-23HUAIAN ARTIS OPTOELECTRONICS NEW ENERGY CO LTD +1
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Patent Information

Application Number
CN202423126675.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-18
Publication Date
2025-12-23
Estimated Expiration
2034-12-18

AI Technical Summary

Technical Problem

The heating wires in the existing reactors are completely inside the insulation layer, which means that heat needs to pass through the insulation layer to heat the furnace body, resulting in energy waste and obstructed heating temperature.

Method used

The heating wire is partially embedded inside the insulation layer and partially exposed from the inner periphery of the insulation layer. Combined with a heat radiation reflective layer and a multi-layer insulation structure, the heat transfer path is optimized.

Benefits of technology

It improves energy utilization, enhances heating effect, reduces energy waste, improves heating efficiency and stability, and reduces the overall energy consumption of the equipment.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model discloses a reaction furnace which comprises a furnace body shell, the first heat insulation layer is arranged on the inner circumferential side of the furnace body shell, the heating wire is arranged close to the inner circumferential side of the first heat insulation layer, and the heating wire is partially embedded in the first heat insulation layer and partially exposed out of the inner circumferential side of the first heat insulation layer. The reaction furnace disclosed by the embodiment of the utility model at least has the advantages of high energy utilization rate, good heating effect and the like.
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Description

TECHNICAL FIELD

[0001] The utility model relates to production equipment technical field especially is related to a reaction furnace. BACKGROUND

[0002] The heating wire of the reaction furnace in the prior art is completely inside the heat insulation layer, so that the heat of the heating wire needs to pass through the heat insulation layer to heat the inside of the furnace body, and due to the heat insulation effect of the heat insulation layer, a part of the heat of the electric heating wire is consumed, resulting in waste of heating energy and hindering the increase of heating temperature. SUMMARY

[0003] The utility model discloses at least one of the prior art technical problems. Therefore, one purpose of the utility model is to provide a reaction furnace, which has the advantages of high energy utilization rate, good heating effect and the like.

[0004] To achieve the above-mentioned purpose, according to the reaction furnace of the utility model embodiment, the reaction furnace comprises: a furnace body shell; a first heat insulation layer, the first heat insulation layer is arranged on the inner circumferential side of the furnace body shell; a heating wire, the heating wire is arranged adjacent to the inner circumferential side of the first heat insulation layer, and the heating wire is partially embedded in the first heat insulation layer and partially exposed from the inner circumferential side of the first heat insulation layer.

[0005] According to the reaction furnace of the utility model embodiment, by partially embedding the heating wire in the first heat insulation layer and partially exposing it from the inner circumferential side of the first heat insulation layer, the material barrier in the heat conduction process of the electric heating wire to the inside of the reaction furnace is reduced, the heat of the electric heating wire can be more fully conducted to the inside of the furnace body, the energy waste is reduced, and the heating effect is better.

[0006] According to some specific embodiments of the utility model, the first heat insulation layer is alumina fiber.

[0007] Further, the density of the first heat insulation layer is 0.2-0.6t / m 3 .

[0008] According to some specific embodiments of the utility model, further comprising: a heat radiation reflection layer, the heat radiation reflection layer is arranged on the inner circumferential side of the first heat insulation layer, and the thickness of the heat radiation reflection layer is 0.5mm-3mm.

[0009] According to some specific embodiments of the utility model, further comprising: a second heat insulation layer, the second heat insulation layer is located between the furnace body shell and the first heat insulation layer along the radial direction.

[0010] According to some specific embodiments of the utility model, the second heat insulation layer is aerogel, and the thickness of the second heat insulation layer is less than the thickness of the first heat insulation layer.

[0011] According to some specific embodiments of the present application, the second thermal insulation layer is alumina fiber, and the density of the second thermal insulation layer is greater than the density of the first thermal insulation layer.

[0012] According to some specific embodiments of the present application, the reaction furnace further comprises a plurality of reinforcing rib plates, each of the reinforcing rib plates is connected to the inner circumferential surface of the first thermal insulation layer and is arranged in a circumferential direction, and each of the reinforcing rib plates extends in the axial direction of the reaction furnace.

[0013] According to some specific embodiments of the present application, the first thermal insulation layer is provided with a slot on the inner circumferential side, the heating wire is embedded in the first thermal insulation layer, and the first thermal insulation layer exposes the heating wire from the slot.

[0014] According to some specific embodiments of the present application, the cross section of the heating wire is configured as a ring and comprises an embedded part inside the first thermal insulation layer and an exposed part connected to the radial inner side of the embedded part and inside the slot.

[0015] According to some specific embodiments of the present application, the cross-sectional area of the exposed part is not less than 65% of the cross-sectional area of the heating wire.

[0016] According to some specific embodiments of the present application, the furnace shell is a stainless steel part, and the reaction furnace is a vacuum furnace.

[0017] The additional aspects and advantages of the present application will be partially given in the following description, partially will become obvious from the following description, or will be understood through the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:

[0019] Figure 1 is a structural schematic view of a reaction furnace according to an embodiment of the present application;

[0020] Figure 2 is another structural schematic view of a reaction furnace according to an embodiment of the present application;

[0021] Figure 3 is a side view of a reaction furnace according to an embodiment of the present application;

[0022] Figure 4 is a partial schematic view of Figure 3 ;

[0023] Figure 5 is a partial schematic view of a reaction furnace according to an embodiment of the present application.

[0024] Reference signs:

[0025] Reaction furnace 1, furnace body shell 100, first heat insulation layer 200, heating wire 300, radiation reflection layer 400,

[0026] Second heat insulation layer 500, reinforcing rib plate 600, hardening layer 700, slot 201. DETAILED DESCRIPTION

[0027] The embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation of the present application.

[0028] In the description of the present application, it should be understood that the orientations or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0029] In the description of the present application, "first feature" and "second feature" can include one or more features.

[0030] In the description of the present application, "a plurality of" means two or more, and "several" means one or more.

[0031] The reaction furnace 1 according to the embodiments of the present application is described below with reference to the drawings.

[0032] As shown in Figures 1-5 The reaction furnace 1 according to the embodiments of the present application includes a furnace body shell 100, a first heat insulation layer 200, and a heating wire 300.

[0033] The first heat insulation layer 200 is provided on the inner circumferential side of the furnace body shell 100, and the density of the first heat insulation layer 200 is 0.2-0.6 t / m³. The heating wire 300 is partially embedded inside the first heat insulation layer 200 and adjacent to the inner circumferential side of the first heat insulation layer 200.

[0034] For example, the reaction furnace 1 is cylindrical in shape, the furnace body shell 100 is a metal member, the heating wire 300 is an electric heating wire, and the first heat insulation layer 200 can be a fiber brick. The reaction furnace 1 can accommodate a quartz furnace tube, a process boat, or the like inside to perform a process reaction. The heat conduction of the reaction furnace 1 mainly has three aspects. The first aspect is that the heat of the heating wire 300 is lost by heat conduction to the furnace body shell 100, and the first heat insulation layer 200 plays a heat insulation role, thereby playing a heat preservation role. The second aspect is that the heat of the heating wire 300 is radiated to the quartz furnace tube inside. The third aspect is that the heat of the heating wire 300 is lost by convection conduction from the furnace door.

[0035] According to the reaction furnace 1 of the embodiment of the present application, the heating wire 300 is adjacent to the inner circumferential side of the first heat insulation layer 200, the heat conduction distance of the heating wire 300 from the inside of the furnace body is short, and the heat transfer efficiency is higher. Further, the heating wire 300 is partially embedded in the first heat insulation layer 200 and partially exposed from the inside of the first heat insulation layer 200, and the heat of the heating wire 300 can be directly transferred to the inside of the furnace body from the exposed part of the first heat insulation layer 200 to heat the reactants of the process boat. The heat of the heating wire 300 is not blocked by the first heat insulation layer 200 in the radial inward direction, and the heating efficiency is higher.

[0036] Further, the electric heating wire 300 can be directly fixed by using the structure of the first heat insulation layer 200 itself, and the heating wire 300 is directly embedded in the inside of the first heat insulation layer 200, so that the structure for fixing the heating wire 300 is omitted, the structure is simpler, and the stability of the heating wire 300 is higher.

[0037] Therefore, the reaction furnace according to the embodiment of the present application has the advantages of high energy utilization rate, good heating effect, high stability, and the like.

[0038] In some specific embodiments of the present application, the first heat insulation layer 200 is an alumina fiber. The alumina fiber brick is a high-performance heat insulation material with low thermal conductivity, which can effectively reduce heat conduction, maintain a high-temperature environment in the reaction furnace 1, thereby improving thermal efficiency and maintaining the stability of the internal temperature of the reaction furnace 1. This material can withstand high temperatures up to 1600°C, and is very suitable for use as a heat insulation layer of the reaction furnace 1 to reduce heat loss. In addition, the hardening layer 220 is a nano-prepared high-molecular composite resin material, and the alumina fiber brick composite layer has a lower weight than traditional refractory bricks, which helps to reduce the overall structural burden of the reaction furnace 1, simplifies the installation and maintenance process, and improves the operating efficiency of the equipment. At the same time, the alumina fiber composite material has good acid and alkali resistance and corrosion resistance, prolonging the service life of the reaction furnace 1.

[0039] Further, the density of the first heat insulation layer is 0.2-0.6 t / m 3The density of the first heat insulation layer 200 is set between 0.2-0.6 t / m³, and different densities of materials have differences in heat preservation performance. Moderate density can provide good heat insulation performance, reduce heat conduction, ensure the stability of the temperature in the reaction furnace 1, effectively keep the heat inside the reaction furnace 1, reduce the influence of the heat of the external environment, and thus improve the heating efficiency. With the decrease of the density, the energy aggregation at the wrapped part of the heating wire 300 can be reduced, and the thermal stress caused by temperature changes can be better adapted. In a high-temperature environment, thermal stress can cause expansion and contraction of the material, and lower density can reduce stress concentration caused by temperature difference, thereby reducing the risk of deformation of the heating wire 300 and increasing the safety of the overall structure of the reaction furnace 1.

[0040] For example, when the density of the first heat insulation layer 200 is 0.6 t / m³, the heating wire 300 can be prevented from deforming while having good heat insulation capacity. For another example, when the density of the first heat insulation layer 200 is 0.3 t / m³, the temperature gradient is reduced, the energy difference between the wrapped and unwrapped parts of the heating wire 300 is reduced, the stress distribution is more uniform, the risk of deformation of the heating wire 300 is reduced, and the stability of the heating wire 300 during use is improved.

[0041] In some embodiments, the inner circumferential surface of the first heat insulation layer 200 is configured with a hardened layer, which is usually made of high-temperature-resistant material, which helps to prevent the first heat insulation layer 200 from softening, deforming or breaking down at high temperatures, thereby enhancing the structural stability of the entire reaction furnace 1. The hardened layer 700 also provides a relatively smooth surface, which makes it easier and more uniform to coat a reflective layer thereon. In addition, the hardened layer 700 acts as an isolation layer to prevent the internal quartz or other high-temperature components from directly contacting the first heat insulation layer 200.

[0042] In some specific embodiments of the present application, the hardened layer 220 is a ceramic layer, and the thickness of the ceramic layer is 1-5 mm. Ceramic materials generally have superior high-temperature resistance and can withstand the high-temperature environment inside the reaction furnace 1, thereby protecting the internal structure and other components from thermal damage. Ceramic materials also have low thermal conductivity, which can effectively reduce heat loss, improve the efficiency of heat energy utilization, and help maintain the stability of the temperature in the furnace.

[0043] In some specific embodiments of the present application, as shown in Figure 3 and Figure 4 The reaction furnace 1 further comprises a heat radiation reflection layer 400. The heat radiation reflection layer 400 is arranged on the inner circumferential side of the first heat insulation layer 200, and the thickness of the heat radiation reflection layer 400 is 0.5-3 mm.

[0044] For example, the thermal radiation reflection layer 400 can be a plating or coating layer with high thermal radiation reflection performance. The thermal radiation reflection layer 400 can effectively reflect the thermal infrared rays inside the furnace 1, reducing the heat loss through the furnace wall and structural materials. This means that the reaction furnace 1 can better maintain the internal temperature, thereby reducing energy consumption and improving overall thermal efficiency. By reflecting the thermal infrared rays inside the furnace 1, the thermal radiation reflection layer 400 helps to form a uniform and persistent high-temperature environment within the reaction furnace 1, promoting more efficient use of heat for material heating and reaction processes, thereby achieving an effect of improving heat utilization rate by more than 5%.

[0045] When the thickness of the thermal radiation reflection layer 400 is in the range of 0.5mm~3mm, most of the thermal radiation can be effectively reflected, thereby reducing heat loss and greatly improving the heat insulation performance of the reaction furnace 1. The thermal radiation reflection layer 400 has a certain thickness and good wear resistance, which improves the service life of the reaction furnace. For example, the thickness of the thermal radiation reflection layer 400 of the reaction furnace 1 is 1.5mm, which can reflect about 65% of the incident thermal radiation.

[0046] In some embodiments of the present application, as shown in Figure 3 and Figure 4 The reaction furnace 1 further comprises a second heat insulation layer 500. The second heat insulation layer 500 is a porous material piece, and the second heat insulation layer 500 is located between the furnace body shell 100 and the first heat insulation layer 200 along the radial direction.

[0047] The second heat insulation layer 500 significantly reduces heat loss by effectively preventing heat conduction from the reaction furnace 1 to the external environment. This helps to improve the energy utilization efficiency of the reaction furnace 1 and reduce energy consumption, thereby improving the overall operating economy. The second heat insulation layer 500 can protect the reaction furnace 1 shell and the surrounding environment from high temperatures, preventing external equipment and personnel from being injured by contact with high-temperature surfaces. This improves operational safety and avoids potential hazards.

[0048] By reducing heat loss, the second heat insulation layer 500 helps the reaction furnace maintain stable internal temperature, ensuring the efficiency and consistency of the reaction process. Stable temperature control is crucial for the efficiency of chemical reactions, product quality, and equipment reliability.

[0049] In some embodiments of the present application, as shown in Figure 3 and Figure 4As shown, the second thermal insulation layer 500 is aerogel, and the thickness of the second thermal insulation layer 500 is smaller than that of the first thermal insulation layer 200. Aerogel has extremely low thermal conductivity, usually around 0.01 W / (m·K), much lower than most traditional thermal insulation materials. This means that even if the aerogel layer is thin, it can provide very good thermal insulation effect, effectively reducing the heat loss caused by the temperature difference between the inside and outside of the reaction furnace 1, and improving the thermal efficiency of the reaction furnace 1. Due to the excellent thermal insulation performance of aerogel, the heat loss caused by the temperature difference between the inside and outside of the reaction furnace 1 can be significantly reduced, the energy consumption can be reduced, and the energy utilization efficiency can be improved.

[0050] In some other specific embodiments of the present application, as shown in Figure 3 and Figure 4 , the second thermal insulation layer 500 is alumina fiber, and the density of the second thermal insulation layer 500 is greater than that of the first thermal insulation layer.

[0051] For example, in some embodiments, the second thermal insulation layer 500 can be made of high-density alumina fiber, and the first thermal insulation layer 300 is made of low-density alumina fiber, which has better material consistency and lower cost. In some other embodiments, the second thermal insulation layer 500 is made of alumina fiber, and the first thermal insulation layer 300 is made of aluminum silicate fiber. By setting a higher density for the second thermal insulation layer 500 on the outer circumferential side and a lower density for the first thermal insulation layer 300 on the inner circumferential side, heat is concentrated in the area with lower density, thereby being concentrated towards the inside of the furnace body, thereby having a better heat preservation effect.

[0052] In some specific embodiments of the present application, as shown in Figure 3 and Figure 4 , the reaction furnace 1 further comprises a plurality of reinforcing rib plates 600. The plurality of reinforcing rib plates 600 are connected to the inner circumferential surface of the first thermal insulation layer 200 and are arranged in a circumferential direction, and the plurality of reinforcing rib plates 600 extend in the axial direction of the reaction furnace 1. The reinforcing rib plate 600 forms a whole structure by being connected to the first thermal insulation layer 200, increases the rigidity and stability of the furnace tube, and can withstand the pressure, weight and thermal expansion of the furnace tube, which helps to prevent the furnace tube from being broken or leaking due to deformation at high temperature, and improves the reliability and safety of the reaction furnace 1.

[0053] In a high-temperature process state, the furnace tube will produce thermal expansion due to temperature change. The presence of the reinforcing rib plate 600 can effectively disperse and withstand the stress generated by thermal expansion, reducing the deformation and damage of the furnace tube. This is very important to ensure the normal operation of the furnace tube and prolong its service life.

[0054] In some specific embodiments of the present application, as shown in Figure 2As shown in the drawings, the inner circumferential side of the first heat insulation layer 200 is configured with a plurality of grooves 201, and the heating wire 300 is embedded in the interior of the first heat insulation layer 200, and the first heat insulation layer 200 exposes the heating wire 300 from the grooves 201. Among them, a plurality of grooves 201 are uniformly arranged to form a fan-shaped surface, and a plurality of fan-shaped surfaces are arranged on the inner circumferential surface of the first heat insulation layer 200 to form a complete arc. Alternatively, the grooves 201 can extend along the length direction of the first heat insulation layer 200, and a plurality of grooves 201 are arranged around the circumference of the first heat insulation layer 200.

[0055] Further, as shown in the drawings, Figure 1 The side of the first heat insulation layer 200 facing the hardening layer is configured with a plurality of grooves 201, and the plurality of grooves 201 extend along the axial direction of the first heat insulation layer 200 and are arranged at intervals along the circumferential direction of the first heat insulation layer 200. The heating wire 300 is embedded in the interior of the first heat insulation layer 200 and exposed from the grooves 201. Among them, the grooves 201 can extend along the width direction of the first heat insulation layer 200, and a plurality of grooves 201 are arranged side by side in the length direction of the first heat insulation layer 200. For example, the first heat insulation layer 200 can be directly attached to the heating wire 300, so that the first heat insulation layer 200 and the heating wire 300 form an integrated structure, and the structural integration is strong.

[0056] It can be understood that the heating wire 300 is exposed from the groove 201, which means that the heating wire 300 is visible from the groove 201, and heat can be directly transmitted from the groove 201 to the interior of the furnace body, and it does not mean that the heating wire 300 protrudes out of the groove 201. Compared with the conventional heating wire completely embedded in the heat insulation material, this way can more quickly transmit heat to the interior of the reaction furnace 1, and shorten the heating time. The grooves 201 are arranged at intervals along the axial direction of the first heat insulation layer 200, so that the heating wire 300 is uniformly distributed in the interior of the first heat insulation layer 200. In this way, the temperature of each area in the interior of the reaction furnace 1 can be more uniform, and local overheating or cold spots can be avoided, and the uniformity and stability of heating can be improved.

[0057] In addition, as shown in the drawings, Figure 5 The cross section of the heating wire 300 is configured as a ring and includes an embedded part 310 and an exposed part 320. The embedded part 310 is in the interior of the first heat insulation layer 200. The exposed part 320 is connected to the radially inner side of the embedded part 310 and is in the groove 201. By embedding part of the heating wire 300 in the interior of the first heat insulation layer 200 and exposing another part in the groove 201, the contact area between the heating wire 300 and the environment in the interior of the reaction furnace 1 is increased. This allows more heat to be transmitted to the interior of the reaction furnace 1 in a radiative manner, thereby improving the heating efficiency.

[0058] In some specific embodiments of the present application, as shown in the drawings, Figure 5As shown, the cross-sectional area of the exposed portion 320 is not less than 65% of the cross-sectional area of the heating wire 300. By the cross-sectional area of the exposed portion 320 being not less than 65% of the cross-sectional area of the heating wire 300, it is ensured that most of the heat can be effectively radiated out. This increases the intensity of heat radiation, so that the inside of the reaction furnace 1 can reach a uniform temperature distribution more quickly.

[0059] In some specific embodiments of the present application, the furnace shell 100 is a stainless steel part, and the reaction furnace 1 is a vacuum furnace. Stainless steel has good corrosion resistance and can resist high temperature, water, acid, alkali and other harsh environmental erosion. This makes the reaction furnace 1 maintain its structural integrity and aesthetics during long-term use.

[0060] The vacuum state inside the vacuum furnace also reduces the possibility of corrosion occurring, because the oxygen content in the vacuum environment is very low, reducing the occurrence of oxidation reactions. Stainless steel can withstand high temperature environments, which allows the reaction furnace to maintain its performance and stability at higher operating temperatures. The vacuum environment reduces heat transfer and convection effects, allowing the reaction furnace to operate stably at high temperatures, reducing the risk of structural damage and failure due to high temperatures. The vacuum environment of the vacuum furnace reduces convection and heat conduction effects, allowing the reaction furnace to have good heat preservation performance. This helps to reduce heat loss and improve energy utilization.

[0061] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example.

[0062] Although embodiments of the present application have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations of these embodiments can be made without departing from the principles and purposes of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A reactor furnace characterized by, The application relates to a reaction furnace, comprising: a furnace body shell; a first heat insulation layer arranged on the inner circumferential side of the furnace body shell, a heating wire arranged adjacent to the inner circumferential side of the first heat insulation layer, and partially embedded in the first heat insulation layer and partially exposed from the inner circumferential side of the first heat insulation layer.

2. The reactor of claim 1, wherein The first heat insulation layer is an alumina fiber.

3. The reactor of claim 1, wherein The density of the first thermal insulation layer is 0.2-0.6 t / m 3 .

4. The reactor of claim 1, wherein Further comprising: a heat radiation reflection layer arranged on the inner circumferential side of the first heat insulation layer, and the thickness of the heat radiation reflection layer is 0.5-3 mm.

5. The reactor of claim 1, wherein Further comprising: a second heat insulation layer arranged between the furnace body shell and the first heat insulation layer in the radial direction.

6. The reactor of claim 5, wherein The second heat insulation layer is aerogel, and the thickness of the second heat insulation layer is smaller than that of the first heat insulation layer.

7. The reactor of claim 5, wherein The second heat insulation layer is an alumina fiber, and the density of the second heat insulation layer is greater than that of the first heat insulation layer.

8. The reactor of claim 1, wherein Further comprising: a plurality of reinforcing rib plates connected to the inner circumferential surface of the first heat insulation layer and arranged in the circumferential direction at intervals, and the reinforcing rib plates extend in the axial direction of the reaction furnace.

9. The reactor of claim 1, wherein The inner circumferential side of the first heat insulation layer is configured with a slot, the heating wire is embedded in the first heat insulation layer, and the first heat insulation layer exposes the heating wire from the slot.

10. The reactor of claim 9, wherein The cross section of the heating wire is configured as a ring and comprises: an embedded part in the interior of the first heat insulation layer, an exposed part connected to the inner side of the embedded part in the slot.

11. The reactor of claim 10, wherein The cross-sectional area of the exposed part is not less than 65% of the cross-sectional area of the heating wire.

12. The reactor of claim 1, wherein The furnace body shell is a stainless steel part, and the reaction furnace is a vacuum furnace.