Furnace cover heating electrode sealing structure

Abstract

The utility model relates to a furnace cover heating electrode sealing structure which is structurally characterized in that water-cooling rods on two sides of an electrode penetrate through a furnace cover electrode hole, a retainer ring is sleeved on the lower part of the water-cooling rods on two sides of the electrode in the hole, an insulating pad is arranged between the retainer ring and the furnace cover electrode hole, and an electrode space ring is sleeved on the upper part of the water-cooling rods on two sides of the electrode in the hole. The end face of the furnace cover electrode hole and the outer sides of the water cooling rods on the two sides of the electrode are sleeved with insulating sleeves, glands are installed on the insulating sleeves, the glands and the insulating sleeves are fixed to the ends of the furnace cover electrode hole through screws, sealing rings are arranged between the bottom ends of the insulating sleeves and the top ends of the electrode space rings, and the glands and the outer sides of the water cooling rods on the two sides of the electrode are sleeved with electrode covers. The utility model has the advantages that the end sealing is adopted, so that the smoothness of the sealing surface can be conveniently checked during assembly, the disassembly is convenient, the whole structure can limit the deformation of the electrode caused by thermal expansion and cold contraction of materials, the position of the electrode does not need to be manually adjusted by a worker during assembly, the time can be saved, the cost is reduced, errors are reduced, and the stability of production quality is ensured.

Description

Technical Field

[0001] This utility model relates to a furnace cover heating electrode sealing structure, specifically a furnace cover heating electrode sealing structure for a silicon carbide resistance furnace that is easy to disassemble and assemble, belonging to the technical field of silicon carbide resistance furnaces. Background Technology

[0002] The resistance furnace for silicon carbide production includes components such as a furnace cover, a middle furnace chamber, a furnace bottom plate, and electrodes. The space formed by the furnace cover, the middle furnace chamber, and the furnace bottom plate is a cavity. During production, the heat field is installed inside the cavity, silicon carbide powder is placed in the heat field crucible, and the seed crystal is attached to the crucible cover. The electrodes are connected to the heater and then suspended on the furnace cover. The power supply is connected to the electrodes through copper busbars. During production, the power supply is turned on to heat and sublimate the silicon carbide powder and cool it to crystallize it on the seed crystal by setting special process parameters and formula, thus completing the crystal growth process.

[0003] In the existing technology, the sealing structure of the heating electrode of the silicon carbide resistance furnace cover has defects. The electrode is inconvenient to disassemble and assemble, and it is easy to scratch the sealing surface, affecting the sealing effect and thus affecting the production stability. Utility Model Content

[0004] This utility model proposes a sealing structure for the heating electrode of the furnace cover, which aims to overcome the above-mentioned shortcomings of the prior art and improve the sealing effect of the heating electrode of the furnace cover of the silicon carbide resistance furnace.

[0005] The technical solution of this utility model is as follows: A furnace cover heating electrode sealing structure, comprising an electrode cover, an electrode, and a furnace cover. Water-cooled rods on both sides of the electrode pass through electrode holes in the furnace cover. A retaining ring is fitted around the lower part of the water-cooled rods within the electrode holes, with an insulating gasket between the retaining ring and the electrode holes. An electrode spacer is fitted around the upper part of the water-cooled rods within the electrode holes. An insulating sleeve is fitted around the outer side of the electrode above the electrode holes, and a pressure cap is mounted on the insulating sleeve. The pressure cap and insulating sleeve are fixed to the top of the electrode holes in the furnace cover by hexagonal head screws. A sealing ring is placed between the bottom end of the insulating sleeve and the top end of the electrode spacer. An electrode cover is fitted around the outer side of the electrode above the pressure cap and insulating sleeve. This structure uses end sealing, which facilitates inspection of the sealing surface smoothness during assembly and also facilitates disassembly. The retaining ring is used to bear the entire weight of the electrode and heater and transfer the load to the electrode hole on the furnace cover. When the electrode body is continuously heated at high temperature, it can limit the deformation of the electrode caused by the thermal expansion and contraction of the material. There is no need for workers to manually adjust the position of the electrode during assembly, which can save time, save costs and reduce errors.

[0006] Preferably, the electrode cover is a non-metallic electrode cover to ensure safety.

[0007] Preferably, the insulating pad is a non-metallic zirconium oxide insulating pad. This provides insulation and heat insulation, preventing damage to the sealing material and electrode spacers caused by high temperatures, thus ensuring a good seal.

[0008] The advantages of this utility model are: the reasonable structural design can effectively position and fix the electrode on the furnace cover, and the end sealing can facilitate the inspection of the smoothness of the sealing surface during assembly, making disassembly and maintenance convenient. The insulation structure is also reasonably designed, and the overall structure can limit the deformation of the electrode caused by the thermal expansion and contraction of the material. There is no need for workers to manually adjust the position of the electrode during assembly, which can save time, reduce costs, reduce errors, and ensure the stability of production quality. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the sealing structure of the furnace cover heating electrode of this utility model.

[0010] In the diagram, 1 is the electrode cover, 2 is the pressure cap, 3 is the insulating sleeve, 4 is the sealing ring, 5 is the furnace cover electrode hole, 6 is the electrode spacer, 7 is the retaining ring, 8 is the electrode, 9 is the insulating pad, and 10 is the internal hexagon socket head cap screw. Detailed Implementation

[0011] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0012] like Figure 1 As shown, a furnace cover heating electrode sealing structure includes an electrode cover 1, an electrode 8, and a furnace cover. The water-cooled rods on both sides of the electrode 8 pass through the furnace cover electrode holes 5 on the furnace cover. The lower part of the water-cooled rods on both sides of the electrode 8 inside the furnace cover electrode holes 5 is fitted with retaining rings 7. An insulating gasket 9 is provided between the retaining rings 7 and the furnace cover electrode holes 5. The upper part of the water-cooled rods on both sides of the electrode 8 inside the furnace cover electrode holes 5 is fitted with electrode spacers 6. An insulating sleeve 3 is fitted on the outside of the electrode 8 above the furnace cover electrode holes 5. A pressure cap 2 is installed on the insulating sleeve 3. The pressure cap 2 and the insulating sleeve 3 are fixed to the top of the furnace cover electrode holes 5 by hexagonal head screws 10. A sealing ring 4 is provided between the bottom end of the insulating sleeve 3 and the top end of the electrode spacer 6. The electrode cover 1 is fitted on the outside of the electrode 8 above the pressure cap 2 and the insulating sleeve 3.

[0013] Based on the above structure, the connection between electrode 8 and the electrode hole 5 in the furnace cover is achieved by the retaining ring 7 supporting electrode 8 and the insulating pad 9 supporting retaining ring 7, so that electrode 8 is positioned and fixed on the furnace cover.

[0014] Since the electrode 8 operates under vacuum inside the furnace cover, the end of the electrode body 8 needs to be sealed with a sealing ring 4. The advantage of end sealing is that it facilitates checking the smoothness of the sealing surface during assembly and also makes disassembly easier. The pressure cap 2 is pressed against the insulating sleeve 3 on the sealing ring 4 by an internal hexagonal head screw 10 to achieve a seal.

[0015] Since electrode 8 is charged, insulation design is also required between electrode body 8 and metal furnace cover. Insulation of the furnace cover is achieved by insulating sleeve 3, electrode spacer 6, and insulating pad 9. Considering safety issues, electrode cover 1 made of non-metallic material is added to electrode 8.

[0016] After the electrode assembly is completed, the retaining ring 7 is used to support the weight of the electrode 8 and the heater and transfer the load to the electrode hole 5 on the furnace cover. When the electrode 8 is continuously heated at high temperature, this structure can limit the deformation of the electrode caused by the thermal expansion and contraction of the material. There is no need for workers to manually adjust the position of the electrode during assembly, which can save time, save costs and reduce errors.

[0017] The main function of the insulating pad 9 is insulation and heat insulation. It can be made of non-metallic zirconium oxide material with high temperature resistance to prevent damage to the sealing material and electrode spacer 6 caused by high temperature, thus preventing the sealing effect from being affected.

[0018] The electrode spacer 6 is made of a non-metallic material with a small shrinkage coefficient, which can achieve insulation and prevent the material itself from deforming when the sealing ring 4 is pressed, thus affecting the sealing effect.

[0019] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0020] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present utility model, and these all fall within the protection scope of the present utility model.

Claims

1. A roof electrode heating electrode seal structure, characterized by, The utility model relates to an electrode cover (1), an electrode (8) and a furnace cover, wherein the middle part of the water cooling rod on both sides of the electrode (8) is arranged in the furnace cover electrode hole (5) on the furnace cover, the lower part of the water cooling rod on both sides of the electrode (8) is sleeved with a clamping ring (7) in the furnace cover electrode hole (5), an insulating pad (9) is arranged between the clamping ring (7) and the furnace cover electrode hole (5), the upper part of the water cooling rod on both sides of the electrode (8) is sleeved with an electrode spacer ring (6) in the furnace cover electrode hole (5), the outer side of the electrode (8) above the furnace cover electrode hole (5) is sleeved with an insulating sleeve (3), the insulating sleeve (3) is provided with a gland (2) on the top, the gland (2) and the insulating sleeve (3) are fixed on the top of the furnace cover electrode hole (5) through a hexagonal socket head cap screw (10), a sealing ring (4) is arranged between the bottom end of the insulating sleeve (3) and the top end of the electrode spacer ring (6), and the outer side of the electrode (8) above the gland (2) and the insulating sleeve (3) is sleeved with the electrode cover (1).

2. A roof heating electrode seal structure as claimed in claim 1, wherein, The electrode cover (1) is a non-metal electrode cover.

3. A roof heating electrode seal structure as claimed in claim 1, wherein, The insulating pad (9) is a non-metal zirconium oxide insulating pad.

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