Loading device for ellipsometer test

Abstract

The utility model discloses a loading device for testing an ellipsometer. The loading device comprises a loading platform, a loading platform and a loading platform, the test pad is detachably connected to the object carrying platform; the test pad is used for bearing a sample to be tested so as to test the refractive index and the film thickness; the test pad is made of a material of which the refractive index is similar to that of the sample to be tested; the adsorption area is arranged on the test pad and is used for adsorbing and fixing the sample to be tested on the surface of the test pad during testing; and the plurality of pressing devices are arranged on the test pad and are used for pressing the sample to be tested during testing. According to the loading device for ellipsometer testing, the test pad is detachably connected to the loading platform, so that the test pad of which the refractive index is close to that of a sample to be tested can be flexibly selected according to the material of the sample to be tested in the sample testing process, and the back reflection of the sample to be tested can be eliminated to a certain extent; therefore, the test accuracy is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the testing technical field of photovoltaic module, specifically relates to a kind of ellipsometer test with carrier device. BACKGROUND

[0002] The principle of ellipsometer testing refractive index is based on ellipsometry, the polarization state change (including amplitude and phase change) of polarized light before and after the reflection on the surface of the sample to be measured is measured, to determine the refractive index and film thickness of the sample to be measured.In the testing process, the incident light is guaranteed to hit the surface of the sample to be measured, and then the reflection is received by the device, however, the reflection light on the back of the sample will interfere with the reflection light on the front, thereby affecting the accuracy of the test.

[0003] Therefore, the reflection light on the back of the sample to be measured during testing should be as small as possible or non-existent, and for testing transparent materials, the back reflection is strong and the interference is large, to solve this problem, the current solution is to paste a tape with haze on the back of the sample to be measured, so as to eliminate the back reflection interference, however, this method not only has the problem of complicated testing process, but also has the problem of large amount of material and high cost;At the same time, the sample testing platform in the existing testing equipment is rigid structure, and the contact with the sample to be measured is not close, especially for glass sample, which further causes the problem of low detection accuracy.Therefore, it is urgent to design a sample testing platform to simplify the testing steps and improve the testing accuracy. UTILITY MODEL CONTENT

[0004] The utility model aims at: in view of the problems of complicated testing process and low testing accuracy of the existing sample refractive index and film thickness detection method, a kind of ellipsometer test with carrier device is provided, which aims at simplifying the refractive index and film thickness testing steps of the sample to be measured, and improving the accuracy of test results.

[0005] To achieve the above-mentioned purpose, the utility model is realized by the following technical schemes:

[0006] The utility model designs a kind of ellipsometer test with carrier device, and the carrier device includes the following:

[0007] The carrier platform is used to support the sample to be measured during testing, and the material of the carrier platform is selected to be similar to the refractive index of the sample to be measured;

[0008] The test pad is detachably connected to the carrier platform, and the test pad is used to support the sample to be measured for testing, and the material of the test pad is selected to be similar to the refractive index of the sample to be measured;

[0009] The adsorption area is arranged on the test pad, and is used to adsorb and fix the sample to be measured on the surface of the test pad during testing;

[0010] and several pressing devices arranged on the test pad for pressing the sample under test during testing.

[0011] Further, the ellipsometer test carrier device further comprises a leveling device arranged below the carrier platform for adjusting the test pad to be horizontal during testing.

[0012] Further, the ellipsometer test carrier device further comprises a test pad for carrying the sample under test, wherein one side of the test pad is arranged as a smooth plane.

[0013] Further, the ellipsometer test carrier device further comprises a test pad for carrying the sample under test, wherein the thickness of the test pad is arranged to be 20-30mm, and the color of the test pad is arranged to be black.

[0014] Further, the ellipsometer test carrier device further comprises a test pad for carrying the sample under test, wherein the middle of the test pad is provided with the adsorption area, and the adsorption area is arranged as a "Hui" type structure.

[0015] Further, the ellipsometer test carrier device further comprises a test pad for carrying the sample under test, wherein the inner circle of the "Hui" type adsorption area is arranged to be 50-80mm away from the center of the test pad.

[0016] Further, the ellipsometer test carrier device further comprises a test pad for carrying the sample under test, wherein the adsorption area is uniformly provided with a plurality of adsorption holes.

[0017] The ellipsometer test carrier device has the following advantages:

[0018] (1) The ellipsometer test carrier device is arranged to be detachably connected to the carrier platform, so that the test pad with a refractive index close to the material of the sample under test can be selected flexibly according to the material of the sample under test during the sample testing process, which can eliminate the back reflection of the sample under test to a certain extent, thereby improving the testing accuracy.

[0019] (2) The ellipsometer test carrier device is further provided with a plurality of adsorption holes and pressing devices on the test pad, which can ensure the close contact between the sample under test and the test pad under the double action, eliminate the gap between the sample under test and the test pad, and avoid the problem of low testing accuracy caused by the loose contact between the sample under test and the test pad (test platform).

[0020] (3) The ellipsometer test carrier device does not need to paste a tape with haze on the back of the sample under test, which reduces a testing process, saves materials, and reduces costs. The test pad is arranged to be black, which can further eliminate reflected light and improve testing accuracy.

[0021] (4) the utility model further is provided with the vacuum adsorption area of " back " type structure on test pad, and the distance of inner ring of the adsorption area from test pad center is 50-80mm, then the center of test pad is the area of no vacuum adsorption hole, this can guarantee that the position corresponding to the center of sample to be measured is no adsorption hole in the testing process, therefore can avoid the problem that the adsorption hole in the center of sample to be measured affects the light path, and then affects the testing precision. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will be briefly introduced the drawings needed to be used in the embodiment description, obviously, the drawings in the following description only some embodiments of the utility model, for the person skilled in the art, under the premise of not paying creative labor, can also obtain other drawings according to these drawings.

[0023] Figure 1 The structure diagram of a kind of support device for ellipsometer testing designed for embodiment 1;

[0024] Figure 2 For the test process diagram of sample to be measured.

[0025] Mark in the figure: 1-support platform, 2-test pad, 3-adsorption area, 4-pressing device, 5-leveling device, 6-sample to be measured. DETAILED DESCRIPTION

[0026] The technical scheme in the embodiments of the utility model will be described clearly and completely in the following by combining with the drawings in the embodiments of the utility model, obviously, the described embodiment only part of the embodiments of the utility model, not all the embodiments. The description of at least one exemplary embodiment is actually only illustrative, and is by no means any limitation on the utility model and its application or use. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without making creative labor are within the scope of the utility model.

[0027] In the description of the utility model, need understanding is, the orientation or position relation that the terms "upper", "lower", "left", "right", "top", "bottom" and the like indicate, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply that the device or element indicated must have a particular orientation, with a particular orientation structure and operation, therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included one or more features. Moreover, the terms "first", "second" and the like are used to distinguish similar objects, and do not have to be used to describe a particular order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the utility model described herein can be implemented in an order other than those illustrated or described herein.

[0028] Embodiment 1

[0029] As Figures 1-2 shown, the utility model provides a kind of support device for ellipsometer test, and the support device includes as follows:

[0030] Support platform 1;

[0031] Test pad 2 is detachably connected to the support platform 1;The test pad 2 is used to carry the sample 6 to be tested to carry out refractive index and film thickness test;The test pad 2 is selected with the refractive index similar material of the sample 6 to be tested;The side for carrying the sample 6 to be tested on the test pad 2 is set as smooth plane;The thickness of the test pad 2 is set as 20-30mm, and its color is set as black;The middle part of the test pad 2 is provided with adsorption area 6, and the adsorption area 6 is set as "hui" type structure, and the inner circle distance D of the adsorption area 6 of "hui" type structure from the center of test pad 2 is 50-80mm;

[0032] Adsorption area 3 is arranged on the test pad 2, and a plurality of adsorption holes are uniformly distributed in the adsorption area 3, and the adsorption area 3 is used to adsorb and fix the sample 6 to be tested on the surface of the test pad 2 during test;

[0033] A plurality of pressing devices 4 are arranged on the test pad 2, for pressing the sample 6 to be tested during test, as Figure 2 shown;

[0034] And leveling device 5 is arranged below the support platform 1, for adjusting the test pad 2 to be in horizontal state during test.

[0035] Test:

[0036] Test group 1: the refractive index of the photovoltaic adhesive film is tested by using the object support device for ellipsometer test provided in the embodiment 1, and the result is shown in the following table 1;

[0037] Test group 2: the film layer refractive index and film layer thickness of the coated glass are tested by using the object support device for ellipsometer test provided in the embodiment 1, and the result is shown in the following table 1;

[0038] Test group 3: the refractive index of the same photovoltaic adhesive film in the test group 1 is tested by using the platform device of the ellipsometer, and the result is shown in the following table 1;

[0039] Test group 4: the film layer refractive index and film layer thickness of the same coated glass in the test group 1 are tested by using the platform device of the ellipsometer, and the result is shown in the following table 1.

[0040] Table 1 is the refractive index, film thickness and MSE simulation result of the test groups 1-4

[0041] Whether or not an adhesive tape is needed Refractive index Film thickness / nm MSE Test group 1 Not needed 1.49853 - - Test group 2 Not needed 1.28312 112 5.8 Test group 3 Needed 1.49882 - - Test group 4 Needed 1.27551 105 32

[0042] Note: the size of MSE represents the matching degree of the simulation curve and the measured curve, the lower the value is, the higher the matching degree is, and the higher the accuracy is.

[0043] It can be seen that the MSE value of the test group 2 is much smaller than that of the test group 4, which shows that the accuracy of the test data is higher, the simulation time is shorter and the test cost is lower after using the object support device for ellipsometer test.

[0044] The above is the preferred embodiment of the present application, which is only used for explaining the present application, and is not used for limiting the present application. Any obvious changes or changes derived from the technical solution of the present application are still within the protection scope of the present application.

Claims

1. A sample holder for ellipsometry testing, characterized by, The described loading device includes the following: A loading platform (1); A test pad (2), which is detachably connected to the loading platform (1); the test pad (2) is used to carry a sample to be tested (6) for testing; the test pad (2) is made of a material with a refractive index similar to that of the sample to be tested (6); An adsorption area (3), which is arranged on the test pad (2) to adsorb and fix the sample to be tested (6) on the surface of the test pad (2) during testing; And a plurality of pressing devices (4), which are arranged on the test pad (2) to press the sample to be tested (6) during testing.

2. The sample holder for use in ellipsometry according to claim 1, characterized in that The loading device further includes: a leveling device (5); The leveling device (5) is arranged below the loading platform (1) and is used to adjust the test pad (2) to a horizontal state during testing.

3. The sample holder for use in ellipsometry according to claim 1, wherein The surface of the test pad (2) for carrying the sample to be tested (6) is set as a smooth plane.

4. The sample holder for use in ellipsometry according to claim 1 or 3, characterized in that The thickness of the test pad (2) is set to 20 - 30 mm, and the color of the test pad (2) is set to black.

5. The sample holder for use in ellipsometry according to claim 1, wherein The adsorption area (3) is arranged in the middle of the test pad (2), and the adsorption area (3) is set as a "return" - shaped structure.

6. A sample holder for use in ellipsometry according to claim 5, wherein For the "return" - shaped adsorption area (3), the distance between the inner circle and the center of the test pad (2) is 50 - 80 mm.

7. A sample holder for use in ellipsometry according to claim 5, wherein A plurality of adsorption holes are evenly distributed in the adsorption area (3).

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