Vacuum crystallization equipment

Abstract

The utility model relates to vacuum crystallization equipment, which comprises a main body, a vacuum pump and a vacuum pump, the objective table is arranged in the vacuum cavity; the vacuum pump is communicated with the vacuum cavity, the first switch valve is used for controlling gas connection and disconnection between the vacuum pump and the vacuum cavity, and the vacuum pump is used for pumping gas in the vacuum cavity, so that the vacuum cavity can be in a vacuum state; the flow control valve is used for adjusting the air exhaust speed of the vacuum pump based on the relation between the actual pressure in the vacuum cavity and the target pressure, so that the actual pressure reaches the target pressure; the second switch valve is used for controlling connection and disconnection between the vacuum cavity and the external environment; when the second switch valve is opened, external gas can enter the vacuum cavity, so that the vacuum cavity can be in a vacuum breaking state; and the heating plate is arranged in the vacuum cavity and is used for heating the product carried on the objective table when the vacuum cavity is in the vacuum breaking state.

Description

TECHNICAL FIELD

[0001] The utility model relates to solar cell manufacturing equipment technical field especially relates to a vacuum crystallization equipment. BACKGROUND

[0002] The perovskite solar cell is the solar cell that utilizes the perovskite type organic metal halide semiconductor as light absorption material, and compared with the traditional crystalline silicon solar cell, has the advantages such as higher efficiency, lower cost, better soft transparency, and therefore the perovskite solar cell occupies the important position in future energy structure.

[0003] The perovskite thin film can be quickly crystallized by vacuum drying method after coating, and the perovskite crystallization needs to be completed in a vacuum crystallization equipment. However, the conventional vacuum crystallization equipment has the following problems: the pressure control precision in the vacuum cavity is low, which affects the crystallization effect; the vacuum crystallization equipment is only designed for vacuum crystallization function, lacks integration of other functions, and cannot quickly heat and keep warm the perovskite after crystallization. SUMMARY

[0004] Therefore, it is necessary to provide a vacuum crystallization equipment with accurate pressure control in the vacuum cavity and rapid heating and keeping warm function.

[0005] A vacuum crystallization equipment comprises:

[0006] A main body, which is provided with a vacuum cavity;

[0007] A carrier, which is arranged in the vacuum cavity;

[0008] A vacuum pump and a first on-off valve connected to the main body, the first on-off valve is used to control the on-off between the vacuum pump and the vacuum cavity, and the vacuum pump is used to extract the gas in the vacuum cavity, so that the vacuum cavity can be in a vacuum state;

[0009] A flow control valve connected to the main body, which adjusts the air extraction speed of the vacuum pump based on the relationship between the actual pressure in the vacuum cavity and the target pressure, so that the actual pressure reaches the target pressure;

[0010] A second on-off valve connected to the main body, which is used to control the on-off between the vacuum cavity and the external environment; when the second on-off valve is opened, the external gas can enter the vacuum cavity, so that the vacuum cavity can be in a broken vacuum state;

[0011] A heating plate arranged in the vacuum cavity, which is used to heat the product carried on the carrier when the vacuum cavity is in the broken vacuum state.

[0012] The vacuum crystallization device detects the pressure in the vacuum cavity when the vacuum pump extracts the gas in the vacuum cavity, adjusts the air extraction speed through the flow control valve when the actual pressure in the vacuum cavity reaches the vicinity of the target pressure, and controls the first on-off valve to be quickly closed when the actual pressure reaches the target pressure, so that the vacuum cavity is maintained at the target pressure for closed pressure retention. In this way, the cooperation of the flow control valve and the first on-off valve can improve the control accuracy of the pressure in the vacuum cavity and ensure the crystallization effect. Moreover, when the vacuum cavity is in a broken vacuum state, the heating plate immediately heats and keeps warm after the vacuum cavity is broken, and the annealing process of product crystallization is completed, thereby improving the performance of the product.

[0013] In one of the embodiments, the vacuum crystallization device further comprises a vacuum gauge for detecting the actual pressure in the vacuum cavity.

[0014] In one of the embodiments, the heating plate is integrated with the object table, and the heating plate can heat the object table to transfer heat to the product on the object table.

[0015] In one of the embodiments, the vacuum crystallization device further comprises a support column arranged in the vacuum cavity, and the object table is supported on the support column.

[0016] In one of the embodiments, a magnet is arranged on one of the support column and the object table, and the magnet can attract and fix the support column and the object table.

[0017] In one of the embodiments, the vacuum cavity is provided with a vacuum port at the bottom facing the object table, and the vacuum pump is connected with the vacuum port.

[0018] The vacuum crystallization device further comprises a flow equalizing plate located in the vacuum cavity, and the flow equalizing plate is located downstream of the object table in the flow path of the gas flowing from the inside of the vacuum cavity to the vacuum port.

[0019] The flow equalizing plate is provided with a plurality of air holes, and the gas on the object table can flow to the vacuum port through the plurality of air holes.

[0020] In one of the embodiments, the vacuum crystallization device further comprises a throttle valve connected with the main body.

[0021] When the second on-off valve is opened to make the vacuum cavity communicate with the external environment, the throttle valve is used to adjust the speed of the external gas entering the vacuum cavity.

[0022] In one of the embodiments, the vacuum crystallization device further comprises an observation window arranged on the main body for observing the product on the object table.

[0023] In one embodiment, the vacuum cavity has a square cross-sectional shape, and the observation window is located above the stage and is also a square window.

[0024] In one embodiment, the vacuum crystallization apparatus further includes a pressure plate for pressing the observation window against the main body;

[0025] The vacuum crystallization equipment also includes a gasket, which is clamped between the pressure plate and the observation window. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of a vacuum crystallization device provided in one embodiment of this application;

[0027] Figure 2 for Figure 1 The cross-sectional view of the support column and magnet of the vacuum crystallization equipment shown;

[0028] Figure 3 for Figure 1 A schematic diagram of the heating plate and flow equalization plate of the vacuum crystallization equipment shown in the figure;

[0029] Figure 4 for Figure 1 The installation diagram of the pressure plate, observation window and cover of the vacuum crystallization equipment shown;

[0030] Figure 5 for Figure 4 The cross-sectional view of the structure shown is shown.

[0031] Explanation of reference numerals in the attached figures:

[0032] 100. Vacuum crystallization equipment; 10. Main body; 11. Vacuum chamber; 111. Vacuum port; 12. Cavity; 13. Cover; 20. Stage; 30. Vacuum pump; 40. First switching valve; 50. First pipeline; 60. Flow control valve; 70. Vacuum gauge; 80. Second switching valve; 90. Heating plate; 110. Support column; 120. Magnet; 130. Throttling valve; 140. Second pipeline; 150. Flow equalization plate; 151. Air hole; 160. Observation window; 170. Pressure plate; 180. Gasket. Detailed Implementation

[0033] In order to make the above object, characteristics and advantages of the present application more apparent, concrete embodiments of the present application will be described in detail with reference to the drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a number of different manners without departing from the spirit of the present application. Those skilled in the art will appreciate the scope of the present application and can make similar modifications without departing from the spirit of the present application. Therefore, the present application is not limited by the embodiments disclosed below.

[0034] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements indicated thereby must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0035] In addition, the terms "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated thereby. Therefore, the features defined with "first" and "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0036] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0037] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0038] It should be noted that when an element is referred to as "fixed to" or "provided on" another element, it can be directly on another element or there can be a middle element. When an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and are not the only embodiment.

[0039] Referring to Figure 1 , an embodiment of the present application provides a vacuum crystallization device 100, comprising a main body 10 and a carrier 20. The main body 10 is provided with a vacuum cavity 11, and the carrier 20 is arranged in the vacuum cavity 11 and used for carrying products. Specifically, the products carried by the carrier 20 are perovskite films after coating. It should be understood that in some other embodiments, the types of products carried by the carrier 20 are not limited, and products capable of crystallizing in a vacuum state can be used.

[0040] Optionally, the main body 10 comprises a cavity 12 and a cover 13 arranged in a split manner, the cover 13 is arranged on the cavity 12, and the vacuum cavity 11 is formed between the two. By arranging the main body 10 in a split manner, it is convenient to place the products in the vacuum cavity 11 for crystallization. It should be understood that in some other embodiments, the main body 10 can also be arranged in other ways, as long as the arrangement can realize the placement of the products in the vacuum cavity 11.

[0041] Continuing to refer to Figure 1 , the vacuum crystallization device 100 further comprises a vacuum pump 30 and a first switch valve 40 connected with the main body 10, the first switch valve 40 is arranged between the vacuum cavity 11 and the vacuum pump 30, and is used for controlling the on-off between the vacuum pump 30 and the vacuum cavity 11. The vacuum pump 30 is used for extracting the gas in the vacuum cavity 11, so that the vacuum cavity 11 can be in a vacuum state. When the products on the carrier 20 need to be crystallized in a vacuum state, the first switch valve 40 is opened, the vacuum pump 30 extracts the gas in the vacuum cavity 11, so that the vacuum cavity 11 is in a vacuum state, and the products are quickly crystallized by vacuum drying.

[0042] Optionally, the vacuum crystallization apparatus 100 comprises a first pipeline 50 connected to the main body 10 and communicating with the vacuum cavity 11, the vacuum pump 30 communicates with the vacuum cavity 11 through the first pipeline 50, and the first on-off valve 40 is arranged on the first pipeline 50.

[0043] The vacuum crystallization apparatus 100 further comprises a flow control valve 60 connected to the main body 10, which adjusts the pumping speed of the vacuum pump 30 based on the relationship between the actual pressure in the vacuum cavity 11 and the target pressure, so that the actual pressure reaches the target pressure. Specifically, the flow control valve 60 is installed on the first pipeline 50. It should be noted that both the actual pressure and the target pressure are absolute pressures.

[0044] When the vacuum pump 30 extracts the gas in the vacuum cavity 11, the pressure in the vacuum cavity 11 is detected, and when the actual pressure in the vacuum cavity 11 reaches the vicinity of the target pressure, the pumping speed is adjusted through the flow control valve 60, and when the actual pressure reaches the target pressure, the first on-off valve 40 is quickly closed to maintain the target pressure in the vacuum cavity 11. In this way, the cooperation of the flow control valve 60 and the first on-off valve 40 can improve the control accuracy of the pressure in the vacuum cavity 11 and ensure the crystallization effect.

[0045] Optionally, the vacuum crystallization apparatus 100 comprises a vacuum gauge 70 for detecting the actual pressure in the vacuum cavity 11. Specifically, the vacuum gauge 70 is installed on the main body 10, and the number of vacuum gauges 70 is two to improve the detection accuracy.

[0046] It is conceivable that in some other embodiments, the vacuum crystallization apparatus 100 can also omit the vacuum gauge 70, and detect the actual pressure in the vacuum cavity 11 through an external device. At the same time, when the vacuum crystallization apparatus 100 comprises the vacuum gauge 70, the number of vacuum gauges 70 is not limited.

[0047] Further, the vacuum crystallization apparatus 100 further comprises a second on-off valve 80 connected to the main body 10, which is used to control the opening and closing of the vacuum cavity 11 and the external environment. When the second on-off valve 80 is opened, external gas can enter the vacuum cavity 11, so that the vacuum cavity 11 is in a broken vacuum state. In this way, when the product changes from a solution to a crystal, the second on-off valve 80 is opened, so that the vacuum cavity 11 quickly switches to a broken vacuum state.

[0048] The vacuum crystallization apparatus 100 further comprises a heating plate 90 arranged in the vacuum cavity 11, which is used to heat the product carried on the carrier 20. When the vacuum cavity 11 is in a broken vacuum state (non-vacuum state), that is, after the vacuum cavity 11 is broken, the heating plate 90 immediately heats and keeps warm to complete the annealing process of the product crystallization, thereby improving the performance of the product.

[0049] In some embodiments, referring to Figure 1 The heating plate 90 and the object table 20 are integrated together, and the heating plate 90 can heat the object table 20 to transfer heat to the product on the object table 20. By integrating the heating plate 90 and the object table 20 together, the space occupied by the heating plate 90 and the object table 20 in the vacuum cavity 11 can be reduced, the volume of the vacuum cavity 11 can be reduced, and the floor area of the entire vacuum crystallization device 100 can be reduced. At the same time, by directly integrating the heating plate 90 and the object table 20 together, the heating effect of the heating plate 90 in heating the product on the object table 20 can be ensured.

[0050] Specifically, the above-mentioned heating plate 90 and object table 20 are formed by pressing two stainless steel plates and a heating pad together. Specifically, the pressed stainless steel plates and heating pad can be specially treated to prevent bubbles and small gaps from occurring between the heating pad and the stainless steel plates, which can affect the pressing effect and the pumping speed of the vacuum pump 30.

[0051] In some embodiments, the vacuum crystallization device 100 further comprises a support column 110, which is arranged in the vacuum cavity 11 and connected to the cavity wall of the vacuum cavity 11, and the object table 20 is supported on the support column 110. When the heating plate 90 and the object table 20 are integrated together, the heating plate 90 is also supported on the support column 110. By arranging the object table 20 and the heating plate 90 on the support column 110, the heating plate 90 and the object table 20 are prevented from being directly placed on the inner wall of the vacuum cavity 11, which can affect the flow of gas. At the same time, the heating plate 90 is prevented from transferring more heat to the outside through the cavity wall of the vacuum cavity 11, which can reduce heat loss.

[0052] Further, referring to Figure 2 One of the support column 110 and the object table 20 is provided with a magnet 120, which can attract and fix the support column 110 and the object table 20. In this way, the magnet 120 can firmly attract the object table 20 to the support column 110, which can prevent the object table 20 from being tilted due to the unbalanced force caused by the rapid influx of gas during the vacuum breaking process.

[0053] It can be understood that in other embodiments, the object table 20 can also be firmly fixed to the support column 110 by other means, such as clamping, which is not limited herein.

[0054] Further, referring to Figure 1, the vacuum crystallization device 100 comprises a throttle valve 130 connected with the main body 10, when the second switch valve 80 is opened to make the vacuum cavity 11 communicate with the external environment, the throttle valve 130 is used to adjust the opening size to adjust the speed of the external gas entering the vacuum cavity 11. In this way, by setting the throttle valve 130, the speed of the gas rushing into the vacuum cavity 11 can be controlled, and the problem of the rapid rush of the external gas into the vacuum cavity 11 causing the side overturning of the object table 20 can be reduced.

[0055] In order to facilitate the installation of the second switch valve 80 and the throttle valve 130, the vacuum crystallization device 100 comprises a second pipeline 140 connected with the main body 10 and communicating with the vacuum cavity 11, and the second switch valve 80 and the throttle valve 130 are both installed on the second pipeline 140.

[0056] In some embodiments, the vacuum cavity 11 is provided with a vacuum port 111 at the bottom opposite to the object table 20, and the vacuum pump 30 is connected with the vacuum port 111 through the first pipeline 50. It is continued to refer to Figure 1 and refer to Figure 3 , the vacuum crystallization device 100 further comprises a flow equalization plate 150 located in the vacuum cavity 11. On the flow path of the gas flowing in the vacuum cavity 11 to the vacuum port 111, the flow equalization plate 150 is located downstream of the object table 20. That is, when the vacuum pump 30 extracts the gas in the vacuum cavity 11, on the flow path of the gas, the flow equalization plate 150 is located downstream of the object table 20, and the gas flows to the flow equalization plate 150 from the object table 20 and then flows to the vacuum port 111. The flow equalization plate 150 is provided with a plurality of gas holes 151, and the gas at the object table 20 can flow to the vacuum port 111 through the plurality of gas holes 151. The gas holes 151 can be uniformly distributed on the flow equalization plate 150, or can be non-uniformly distributed, depending on the needs.

[0057] When the vacuum pump 30 is pumping, the gas in the vacuum cavity 11 flows downward, and after the pressure reaches the non-continuous fluid limit, the pumping continues. There is a problem of uneven pressure distribution, which will cause uneven evaporation speed of the crystallization solvent, and the lower the pressure, the faster the solvent is precipitated, which affects the crystallization quality. The size and position of the gas holes 151 on the flow equalization plate 150 can be adjusted according to the pumping effect of each pumping to adjust the local flow rate, so that the solvent evaporation is relatively uniform, and the product crystallization uniformity is improved.

[0058] In some embodiments, it is continued to refer to Figure 1 , the vacuum crystallization device 100 further comprises an observation window 160 provided on the main body 10, so that the crystallization of the product can be observed through optical instruments during the entire crystallization process and the heating and holding process.

[0059] The cross-sectional shape of the vacuum cavity 11 is square, and the observation window 160 is located above the object table 20 and is a square window. For the vacuum cavity 11 with a square cross-sectional shape, the square observation window 160 has a larger area, and the observed area is larger than that of a circular observation window 160, and the light transmittance can meet the observation needs of the optical instrument.

[0060] Of course, in some other embodiments, when the cross-sectional shape of the vacuum cavity 11 is square, the observation window 160 can also be a circular window.

[0061] In some specific embodiments, the cover 13 covers the cavity 12, and the observation window 160 is mounted on the cover 13. Referring to Figure 1 , and referring to Figure 4 and Figure 5 , the vacuum crystallization device 100 further comprises a pressing plate 170, and the observation window 160 is located between the cover 13 and the pressing plate 170. The pressing plate 170 is used to press the observation window 160. The vacuum crystallization device 100 further comprises a gasket 180 clamped between the pressing plate 170 and the observation window 160. Generally, the observation window 160 is made of glass material. When the pressing plate 170 presses the observation window 160 and causes uneven local stress, the observation window 160 is prone to breakage. By arranging the gasket 180 between the observation window 160 and the pressing plate 170, the overall stress can be uniform, and the breakage of the observation window 160 is reduced.

[0062] The vacuum crystallization device 100 provided by the application has the following beneficial effects:

[0063] 1. The vacuum gauge 70 can detect the actual pressure in the vacuum cavity 11. The flow control valve 60 adjusts the pumping speed of the vacuum pump 30 based on the relationship between the actual pressure in the vacuum cavity 11 and the target pressure, so that the actual pressure reaches the target pressure. When the actual pressure reaches the target pressure, the first on-off valve 40 is quickly closed, so that the vacuum cavity 11 is maintained at the target pressure for closed pressure retention. In this way, the cooperation of the vacuum gauge 70, the flow control valve 60 and the first on-off valve 40 can improve the control accuracy of the pressure in the vacuum cavity 11 and ensure the crystallization effect.

[0064] 2. When the vacuum cavity 11 is in a broken vacuum state, that is, after the vacuum cavity 11 is broken, the heating plate 90 immediately heats and keeps warm to complete the annealing process of product crystallization, thereby improving the performance of the product.

[0065] 3. The size and position of the air holes 151 on the flow equalizing plate 150 can be adjusted according to the pumping effect of each pumping to adjust the local flow rate, so that the solvent evaporation is relatively uniform, and the product crystallization uniformity is improved.

[0066] 4、By setting the throttle valve 130, the speed of the gas surge into the vacuum cavity 11 can be controlled, which can reduce the problem of the external gas quickly surging into the vacuum cavity 11 to cause the side turning of the object table 20. At the same time, the magnet 120 can firmly adsorb the object table 20 on the support column 110, which can prevent the side turning caused by the force imbalance of the object table 20 due to the rapid gas surge in the process of breaking the vacuum.

[0067] 5、The square observation window 160 is matched with the cross-sectional shape of the square vacuum cavity 11, so that the observation area is larger, and the light transmittance can meet the observation needs of the optical instrument.

[0068] The technical features of the above-described embodiments can be combined arbitrarily, and in order to make the description simple, all possible combinations of the technical features in the above-described embodiments are not described, however, as long as the combination of the technical features does not exist contradictory, it should be considered as the scope of the description.

[0069] The above-described embodiments only express several implementation manners of the utility model, the description is more specific and detailed, but it cannot be understood as the limitation of the scope of the utility model patent. It should be pointed out that for ordinary skilled in the art, on the premise of not departing from the concept of the utility model, a number of modifications and improvements can be made, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent should be subject to the appended claims.

Claims

1. A vacuum crystallization apparatus, characterized by, The vacuum crystallization device comprises: a main body (10) in which a vacuum cavity (11) is arranged; a carrier table (20) arranged in the vacuum cavity (11); a vacuum pump (30) and a first switch valve (40) connected to the main body (10), the first switch valve (40) being used for controlling the on-off between the vacuum pump (30) and the vacuum cavity (11), and the vacuum pump (30) being used for extracting gas in the vacuum cavity (11) so that the vacuum cavity (11) can be in a vacuum state; a flow control valve (60) connected to the main body (10), the flow control valve (60) being used for adjusting the air extraction speed of the vacuum pump (30) based on the relationship between the actual pressure in the vacuum cavity (11) and the target pressure so that the actual pressure reaches the target pressure; a second switch valve (80) connected to the main body (10), the second switch valve (80) being used for controlling the on-off between the vacuum cavity (11) and the external environment, and when the second switch valve (80) is opened, external gas can enter the vacuum cavity (11) so that the vacuum cavity (11) can be in a broken vacuum state; a heating plate (90) arranged in the vacuum cavity (11) and used for heating a product carried on the carrier table (20) when the vacuum cavity (11) is in the broken vacuum state.

2. The vacuum crystallization apparatus according to claim 1, characterized in that The vacuum crystallization device further comprises a vacuum gauge (70) used for detecting the actual pressure in the vacuum cavity (11).

3. The vacuum crystallization apparatus of claim 1, wherein, The heating plate (90) is integrated with the carrier table (20), and the heating plate (90) can heat the carrier table (20) to transfer heat to the product on the carrier table (20).

4. The vacuum crystallization apparatus of claim 1, wherein, The vacuum crystallization device further comprises a support column (110) arranged in the vacuum cavity (11), and the carrier table (20) is supported on the support column (110).

5. The vacuum crystallization apparatus of claim 4, wherein, One of the support column (110) and the carrier table (20) is provided with a magnet (120), and the magnet (120) can attract and fix the support column (110) and the carrier table (20).

6. The vacuum crystallization apparatus of claim 1, wherein, The vacuum cavity (11) is provided with a vacuum port (111) at the bottom opposite to the carrier table (20), and the vacuum pump (30) is connected to the vacuum port (111); The vacuum crystallization device further comprises a flow equalizing plate (150) located in the vacuum cavity (11); on a flow path of gas flowing from inside the vacuum cavity (11) to the vacuum port (111), the flow equalizing plate (150) is located downstream of the carrier table (20); The flow equalizing plate (150) is provided with a plurality of air holes (151), and gas at the carrier table (20) can flow to the vacuum port (111) through the plurality of air holes (151).

7. The vacuum crystallization apparatus of claim 1, wherein, The vacuum crystallization device further comprises a throttle valve (130) connected to the main body (10); When the second switch valve (80) is opened to make the vacuum cavity (11) communicate with the external environment, the throttle valve (130) is used for adjusting the speed of external gas entering the vacuum cavity (11).

8. Vacuum crystallization apparatus according to any one of claims 1-7, characterized in that The vacuum crystallization apparatus further comprises an observation window (160) provided on the main body (10) for observing a product on the stage (20).

9. The vacuum crystallization apparatus of claim 8, wherein, The cross-sectional shape of the vacuum chamber is square, and the observation window (160) is located above the stage (20) and is a square window.

10. The vacuum crystallization apparatus of claim 8, wherein, The vacuum crystallization apparatus further comprises a pressing plate (170) for pressing the observation window (160) tightly on the main body (10). The vacuum crystallization apparatus further comprises a gasket (180) clamped between the pressing plate (170) and the observation window (160).

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