Electron microscope sample stage

Abstract

The utility model discloses an electron microscope sample stage, and belongs to the technical field of electron microscope sample stages, the electron microscope sample stage comprises a sample stage base, a horizontal support and an inclined support; the number of the horizontally-placed supports is multiple, and any two horizontally-placed supports can be arranged in an overlapped mode and connected with each other. An angle adjusting mechanism is arranged on the inclined support and used for adjusting the inclination angle of the inclined support. The horizontal support is detachably installed on the sample table base or the other horizontal support, and the inclined support is detachably installed on the sample table base or the horizontal support. The sample placing device is simple in structure and flexible to operate, a plurality of samples which are different in height and need to be obliquely placed can be placed in the electron microscope chamber at a time for detection, and the detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electron microscope sample stage, in particular to an electron microscope sample stage. BACKGROUND

[0002] The types of samples to be detected by the electron scanning microscope are usually complex, and samples with different heights and shapes are often encountered. The current ordinary sample stage cannot place multiple samples with different heights in the electron microscope chamber at one time for detection, and multiple operations are required, resulting in low detection efficiency. Moreover, for irregularly shaped samples, the ordinary sample stage cannot be placed at an angle. CONTENT OF THE UTILITY MODEL

[0003] The present application provides an electron microscope sample stage, which aims to solve the problem that the ordinary sample stage in the prior art cannot place multiple samples with different heights and shapes at one time for detection.

[0004] An electron microscope sample stage, comprising a sample stage base, a horizontal placement support and an inclined placement support; a plurality of horizontal placement supports are provided, and any two horizontal placement supports can be arranged in overlap and connected to each other; an angle adjusting mechanism is arranged on the inclined placement support, and the angle adjusting mechanism is used for adjusting the inclination angle of the inclined placement support; the horizontal placement support is detachably mounted on the sample stage base or another horizontal placement support, and the inclined placement support is detachably mounted on the sample stage base or the horizontal placement support.

[0005] Optionally, the plurality of horizontal placement supports comprises at least one first height support and at least one second height support, and the first height support and the second height support are different in height.

[0006] Optionally, a plurality of clamping units are arranged on the sample stage base, a first matching unit is arranged on the horizontal placement support, and a second matching unit is arranged on the inclined placement support, and the first matching unit and the second matching unit can be clamped and matched with the clamping units.

[0007] Optionally, the sample stage base comprises a bottom platform and a clamping seat arranged below the bottom platform; the clamping unit comprises a movable clamping plate, and the movable clamping plate is arranged on the bottom platform and detachably connected with the bottom platform.

[0008] Optionally, the horizontal placement support comprises a support portion and a water platform surface arranged at the top end of the support portion; the first matching unit comprises a first clamping groove, and the first clamping groove is arranged at the bottom end of the support portion and can be clamped and matched with the movable clamping plate.

[0009] Optionally, the inclined support comprises a bottom plate and an inclined table arranged above the bottom plate, the angle adjusting mechanism is arranged between the bottom plate and the inclined table; the second matching unit comprises a second clamping groove arranged on the bottom plate and capable of clamping matching with the movable clamping plate.

[0010] Optionally, the edge of the water platform surface is further provided with a stacked clamping plate, the shape and size of the stacked clamping plate are adapted to the first clamping groove and the second clamping groove; the stacked clamping plate of any one of the horizontal supports can clamping match with the first clamping groove of another horizontal support or the second clamping groove of the inclined support.

[0011] Optionally, one end of the inclined table is hinged to one end of the bottom plate, a slot hole is arranged on the bottom plate and extends from the hinged end of the bottom plate to the direction away from the hinged end; the angle adjusting mechanism comprises a sliding rod and a locking nut; the sliding rod is arranged in the slot hole and can slide along the extension direction of the slot hole, the top end of the sliding rod abuts against the inclined table, the bottom end of the sliding rod penetrates through the slot hole and clamps with the slot hole; the locking nut is threadedly connected to the bottom end of the sliding rod for locking the position of the sliding rod in the slot hole.

[0012] Beneficial effects:

[0013] The electron microscope sample table provided in the application comprises a sample table base, horizontal supports and an inclined support; a plurality of horizontal supports are arranged, and any two horizontal supports can be arranged in stack and connected to each other; the inclined support is provided with an angle adjusting mechanism, the angle adjusting mechanism is used for adjusting the inclination angle of the inclined support; the horizontal supports are detachably mounted on the sample table base, and the inclined support is detachably mounted on the sample table base or the horizontal supports. By arranging a plurality of horizontal supports, the height of the supports can be adjusted by stacking the horizontal supports, the samples with different heights can be adjusted to a relatively uniform placement height, by arranging the inclined support and the angle adjusting mechanism, the inclination angle of the inclined support can be adjusted, various irregular samples can be conveniently placed, and ultimately the samples with different heights and needing to be placed in an inclination can be placed in the electron microscope chamber for detection at one time, and the detection efficiency is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0014] In order to more clearly illustrate the technical solutions of the embodiments of the application, the drawings needed to be used in the description of the embodiments of the application will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0015] Figure 1 is a front view of a sample stage base in an electron microscope sample stage according to an embodiment of the present application;

[0016] Figure 2 is a top view of a sample stage base in an electron microscope sample stage according to an embodiment of the present application;

[0017] Figure 3 is a front view of a flat placement support in an electron microscope sample stage according to an embodiment of the present application;

[0018] Figure 4 is a side view of a flat placement support in an electron microscope sample stage according to an embodiment of the present application;

[0019] Figure 5 is a schematic view of a first height support and a second height support in an electron microscope sample stage according to an embodiment of the present application;

[0020] Figure 6 is a schematic view of a first width support and a second width support in an electron microscope sample stage according to an embodiment of the present application;

[0021] Figure 7 is a front view of an inclined placement support in an electron microscope sample stage according to an embodiment of the present application;

[0022] Figure 8 is a bottom view of an inclined placement support in an electron microscope sample stage according to an embodiment of the present application.

[0023] BRIEF DESCRIPTION OF DRAWINGS

[0024] 1, sample stage base; 11, bottom platform; 12, clamping seat; 13, clamping unit; 131, movable clamping plate; 2, flat placement support; 21, support part; 22, water platform surface; 23, first clamping groove; 24, stacked clamping plate; 2H1, first height support; 2H2, second height support; 2W1, first width support; 2W2, second width support; 3, inclined placement support; 31, bottom plate; 311, slot hole; 32, inclined platform surface; 33, second clamping groove; 41, slide rod; 42, locking nut. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0026] The types of samples to be detected by the electron scanning microscope are usually complex, and different heights and shapes of samples are often encountered. The current general sample stage cannot place multiple samples of different heights in the electron microscope chamber at one time, and multiple operations are required, resulting in low detection efficiency. For irregularly shaped samples, the ordinary sample stage also cannot be placed at an angle.

[0027] In related technologies, a motor is used to control the lifting and rotating system to realize height adjustment and angle offset. This type of sample stage is relatively large in size, which is not conducive to flexible operation and is relatively heavy in quality. In addition, the measured sample will exert a relatively large pressure on the base of the electron microscope, which is easy to damage the base of the electron microscope. Moreover, multiple samples of different heights cannot be placed at one time. There is also a structure that uses a moving groove, a screw, and a nut combination to adjust the height. This structure cannot bear a sample with a relatively large mass, and the parts will wear out after a long period of use. The screw is prone to slipping, which is not conducive to controlling the height. Moreover, this type of adjustment structure makes the sample stage have an initial height, which is limited by the chamber of the electron microscope and cannot realize the measurement of samples with a large height difference.

[0028] Therefore, an electron microscope sample stage is provided in the embodiments of the present application.

[0029] Referring to Figure 1 , Figure 3 and Figure 7 , an electron microscope sample stage includes a sample stage base 1, a horizontal support 2, and an inclined support 3. Multiple horizontal supports 2 are provided, and any two horizontal supports 2 can be arranged in an overlapping manner and connected to each other. An angle adjustment mechanism is arranged on the inclined support 3, and the angle adjustment mechanism is used to adjust the inclination angle of the inclined support 3. The horizontal support 2 is detachably mounted on the sample stage base 1 or another horizontal support 2, and the inclined support 3 is detachably mounted on the sample stage base 1 or the horizontal support 2.

[0030] Specifically, the sample stage base 1, the horizontal support 2 and the inclined support 3 can be made of conductive materials. The sample stage base 1 is a bottom bearing structure for mounting and bearing the horizontal support 2 and the inclined support 3. The horizontal support 2 is mainly used for horizontally placing samples. A plurality of horizontal supports 2 are provided, and any two horizontal supports 2 can be overlapped and connected with each other. In actual application, a plurality of support groups can be mounted on the sample stage base 1. The height of each support group can be adjusted by stacking different numbers of horizontal supports 2, so as to adjust the height of the sample placement, so that samples with different original heights can be placed at a relatively uniform height position for detection. The inclined support 3 is used for placing samples at an angle. The inclined support 3 is provided with an angle adjusting mechanism, which can adjust the inclination angle of the inclined support 3, so as to adapt to the inclined placement requirement of irregular samples. In actual application, according to the overall placement height requirement of the sample, the inclined support 3 can be directly mounted on the sample stage base 1 or stacked on the horizontal support 2. The inclined support 3, the horizontal support 2 and the sample stage base 1 are connected in a detachable manner. The support structure can be freely combined and adjusted according to the height and size of the sample, which is convenient and flexible to operate, can maximize the number of samples placed, and improves the detection efficiency.

[0031] Optionally, a plurality of clamping units 13 are arranged on the sample stage base 1, a first matching unit is arranged on the horizontal support 2, and a second matching unit is arranged on the inclined support 3. The first matching unit and the second matching unit can be clamped and matched with the clamping unit 13.

[0032] As an optional embodiment, in the embodiment, the horizontal support 2 and the sample stage base 1, and the inclined support 3 and the sample stage base 1 are connected in a clamping manner. Specifically, a plurality of clamping units 13 are arranged on the sample stage base 1, a first matching unit is arranged on the horizontal support 2, and the first matching unit can be clamped and matched with any one of the clamping units 13. A second matching unit is arranged on the inclined support 3, and the second matching unit can be clamped and matched with any one of the clamping units 13.

[0033] Optionally, the sample stage base 1 comprises a bottom platform 11 and a clamping seat 12 arranged below the bottom platform 11. The clamping unit 13 comprises a movable clamping plate 131 arranged on the bottom platform 11 and detachably connected with the bottom platform 11.

[0034] Specifically, the sample stage base 1 comprises a bottom platform 11 and a clamping seat 12 fixed below the bottom platform 11, which is used to connect with the base of the electron microscope, so that the sample stage base 1 can be stably placed on the base of the electron microscope. The clamping unit 13 comprises a movable clamping plate 131 which is detachably mounted on the bottom platform 11. Specifically, referring to Figure 1 and Figure 2 In the embodiment, each group of clamping units 13 comprises two movable clamping plates 131 arranged oppositely, and the cross-sectional shape of the movable clamping plate 131 is L-shaped. The movable clamping plate 131 can be connected with the base platform by bolts or by adhesive tape, etc., which is convenient to install and remove and can be flexibly adjusted in position.

[0035] The number and position distribution of the clamping units 13 can be reasonably set according to the size of the bottom platform 11. As an example, in the embodiment, there are six groups of clamping units 13, which can correspond to six support groups. Each support group can comprise a single flat support 2, or a single inclined support 3, or a combination of the flat support 2 and the inclined support 3, and the height of each support group can be adjusted as needed.

[0036] Optionally, the flat support 2 comprises a support portion 21 and a water platform surface 22 arranged at the top end of the support portion 21; the first matching unit comprises a first clamping groove 23 arranged at the bottom end of the support portion 21 and capable of clamping with the movable clamping plate 131.

[0037] Specifically, referring to Figure 3 and Figure 4 The flat support 2 comprises a support portion 21 and a water platform surface 22. In the embodiment, the water platform surface 22 and the support portion 21 are both rectangular plate structures. The water platform surface 22 is arranged in the horizontal direction and can be used to place samples. The support portion 21 is arranged perpendicularly on both sides of the water platform surface 22 and below the water platform surface 22, and supports the water platform surface 22. The first matching unit comprises a first clamping groove 23 arranged at the bottom end of the support portion 21, which is adapted in shape and size to the movable clamping plate 131. Specifically, as shown in Figure 1 and Figure 3 In the embodiment, since the two L-shaped movable clamping plates 131 of the same group are arranged oppositely, i.e., the horizontal parts of the two L-shaped movable clamping plates 131 both face outward, the openings of the two first clamping grooves 23 at the bottom end of the flat support 2 are arranged oppositely, i.e., the openings of the two first clamping grooves 23 both face inward, so as to clamp with the two movable clamping plates 131 when the flat support 2 is installed.

[0038] It can be understood that in other embodiments, two L-shaped movable clamping plates 131 of the same group can also be arranged in a facing manner, that is, the horizontal parts of the two L-shaped movable clamping plates 131 are both directed inward, and the openings of the two first clamping grooves 23 at the bottom end of the flat support 2 are arranged in a facing manner, that is, the openings of the two first clamping grooves 23 are both directed outward, to ensure clamping in place.

[0039] Optionally, the plurality of flat supports 2 includes at least one first height support 2H1 and at least one second height support 2H2, and the first height support 2H1 and the second height support 2H2 are different in height.

[0040] As preferred, in the embodiment, the plurality of flat supports 2 has two or more different height specifications, and specifically, taking two heights as an example, the plurality of flat supports 2 includes at least one first height support 2H1 and at least one second height support 2H2, as shown in Figure 5 The second height support 2H2 is higher in height and is used for coarse height adjustment, and the first height support 2H1 is lower in height and is used for fine height adjustment. In specific operation, the sample height is generally roughly adjusted by using the second height support 2H2, and then one or more first height supports 2H1 are stacked on the second height support 2H2 for detailed adjustment; if the sample height difference is large, the sample with a relatively high height can also be directly placed on the bottom platform 11 of the sample stage base without using a support, or a plurality of first height supports 2H1 are stacked, and the final purpose is to make the placement heights of samples with different heights approximately consistent after placement.

[0041] The length and width of the flat support 2 can also be designed according to specific use, for example, in the embodiment, the bottom platform 11 of the sample stage base 1 is provided with six groups of clamping units 13 arranged in two rows and three columns, each group of clamping units 13 includes two movable clamping plates 131 arranged in opposite directions, and two flat supports 2 with different widths can be arranged for this structure, as shown in Figure 6 The first width support 2W1 is narrow in width, and the width thereof is adapted to the spacing between the two movable clamping plates 131 in the same group, so that the first width support 2W1 can be clamped and matched with any group of clamping units 13; the second width support 2W2 is wide in width, and the width thereof is adapted to the spacing between the two movable clamping plates 131 at the edges in the same row of clamping units 13, so that the second width support 2W2 can be clamped and matched with two groups of clamping units 13 in the same row. The first width support 2W1 and the second width support 2W2 can be placed on the same sample stage base 1 at the same time.

[0042] Similarly, platform supports with different lengths can also be placed on the same sample stage base 1.

[0043] Optionally, the inclined support 3 comprises a bottom plate 31 and an inclined table 32 arranged above the bottom plate 31, and the angle adjusting mechanism is arranged between the bottom plate 31 and the inclined table 32; the second matching unit comprises a second clamping groove 33 arranged on the bottom plate 31 and capable of clamping matching with the movable clamping plate 131.

[0044] Specifically, referring to Figure 7 and Figure 8 , the inclined support 3 comprises a bottom plate 31 and an inclined table 32, wherein the bottom plate 31 is arranged in a horizontal direction and mainly serves as a support, the inclined table 32 is arranged above the bottom plate 31 and used for placing samples in an inclined manner, and the angle adjusting mechanism is arranged between the bottom plate 31 and the inclined table 32 and used for adjusting the inclination angle of the inclined table 32 relative to the bottom plate 31.

[0045] The second matching unit comprises a second clamping groove 33 arranged at both ends of the bottom plate 31 and capable of clamping matching with the movable clamping plate 131. In the embodiment, for the arrangement mode that two L-shaped movable clamping plates 131 in the same group are arranged oppositely, the openings of the two second clamping grooves 33 of the inclined support 3 are arranged oppositely, that is, the openings of the two second clamping grooves 33 are both directed inward, so as to clamp matching with the two movable clamping plates 131 when the inclined support 3 is installed.

[0046] In other embodiments, for the arrangement mode that two L-shaped movable clamping plates 131 in the same group are arranged oppositely, the openings of the two second clamping grooves 33 of the inclined support 3 can be arranged oppositely, so as to ensure clamping in place.

[0047] In actual application, the number of the inclined supports 3 can be one or more according to the sample placing requirement, and the length and width of the inclined support 3 can be flexibly set according to the specific use condition.

[0048] Optionally, one end of the inclined table 32 is hinged to one end of the bottom plate 31, and a slot hole 311 is arranged on the bottom plate 31 and extends from the hinged end of the bottom plate 31 to a direction away from the hinged end; the angle adjusting mechanism comprises a sliding rod 41 and a locking nut 42; the sliding rod 41 is arranged in the slot hole 311 and can slide along the extension direction of the slot hole 311, the top end of the sliding rod 41 abuts against the inclined table 32, and the bottom end of the sliding rod 41 penetrates through the slot hole 311 and clamps with the slot hole 311; the locking nut 42 is threadedly connected to the bottom end of the sliding rod 41 and used for locking the position of the sliding rod 41 in the slot hole 311.

[0049] Specifically, one end of the inclined table 32 can be hinged to one end of the bottom plate 31 through a hinge or other hinge structure, and then the inclined table 32 can rotate relative to the bottom plate 31 around the hinge point to change the included angle between the inclined table 32 and the bottom plate 31, and the adjustable range of the included angle is 0°~90°. The angle adjusting mechanism includes a slide rod 41 and a locking nut 42, and a long strip-shaped slot hole 311 is arranged on the bottom plate 31, as shown in Figure 8 The slot hole 311 extends from the end of the bottom plate 31 hinged to the inclined table 32 to the end away from the hinge, the slide rod 41 is arranged in the slot hole 311, and the bottom end of the slide rod 41 passes through the slot hole 311 and is clamped with the slot hole 311, and the inclined table 32 is placed against the top end of the slide rod 41. When the slide rod 41 slides along the slot hole 311, the position of the inclined table 32 abutting against the slide rod 41 changes with the change of the position of the slide rod 41 in the length direction of the slot hole 311, and then the included angle between the inclined table 32 and the bottom plate 31 changes. The locking nut 42 is threadedly connected to the bottom end of the slide rod 41, and is used to lock the position of the slide rod 41 in the slot hole 311. When adjusting the angle, first loosen the locking nut 42 at the bottom end of the slide rod 41, then move the slide rod 41 to adjust the position of the slide rod 41 in the slot hole 311 to adjust the inclination angle of the inclined table 32, and after reaching the appropriate angle, tighten the locking nut 42 to fix the position of the slide rod 41, and then lock the angle of the inclined table 32 to ensure the stability of the subsequent sample placement.

[0050] Preferably, to further improve the stability of the inclined table 32, a matching groove structure is also arranged at the position where the bottom surface of the inclined table 32 contacts the slide rod 41, the groove structure is arranged in a long strip shape and extends along the moving track of the slide rod 41, and the groove structure forms a recessed space relative to the bottom surface of the inclined table 32 to accommodate the top end of the slide rod 41, which helps to increase the contact area between the slide rod 41 and the inclined table 32 and increase the support stability of the slide rod 41 to the inclined table 32, thereby reducing the shaking of the inclined table 32 and improving the reliability of sample placement.

[0051] Optionally, the edge of the water platform surface 22 is also provided with a stacking clamping plate 24, the shape and size of the stacking clamping plate 24 are adapted to the first clamping groove 23 and the second clamping groove 33; the stacking clamping plate 24 of any one of the flat placing supports 2 can be clamped and matched with the first clamping groove 23 of another flat placing support 2 or the second clamping groove 33 of the inclined placing support 3.

[0052] Preferably, to further facilitate the stacking of the supports and ensure stable connection, a stacking structure is also arranged on the flat placing support 2, and the stacking structure specifically includes a stacking clamping plate 24, as shown in Figure 3The stacking clamping plate 24 protrudes from the two side edges of the water platform surface 22, and is shaped and sized to fit the first clamping groove 23 and the second clamping groove 33. Thus, the stacking clamping plate 24 of any one flat support 2 can be clamped and matched with the first clamping groove 23 of any other flat support 2, so as to realize the overlapping placement and connection and fixation of the two platform supports. Alternatively, the stacking clamping plate 24 of any one flat support 2 can also be clamped and matched with the second clamping groove 33 of any one inclined support 3, so as to realize the overlapping placement and connection and fixation of the inclined support 3 on the flat support 2.

[0053] The electron microscope sample stage provided by the embodiment can realize the adjustment of the height of the support by stacking a plurality of flat supports 2, and the height adjustment span is large. The lowest position is the bottom platform 11 of the sample stage base 1, and the highest position can be arbitrarily increased without touching the filament of the electron microscope, so that the sample can be placed at the maximum height difference. By providing the inclined support 3 and the angle adjusting mechanism, the inclination angle of the inclined support 3 can be adjusted, so that various irregular samples can be placed conveniently. Finally, a plurality of samples with different heights and needing to be placed obliquely can be placed in the electron microscope chamber at one time for detection, so that the number of samples placed is maximized, and the detection efficiency is greatly improved. The electron microscope sample stage has a simple support structure, is convenient and flexible to assemble and disassemble, is firmly placed, has a relatively light overall quality, does not cause excessive pressure on the electron microscope base, and is helpful to prolong the service life.

[0054] It should be noted that each embodiment in the specification is described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same and similar parts between the embodiments can be referred to each other.

[0055] It also needs to be explained that in this paper, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between the entities or operations, nor can it be understood as indicating or implying relative importance. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or terminal device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or terminal device. Without more limitations, the element defined by the statement "including a" does not exclude the presence of another identical element in the process, method, article or terminal device including the element.

[0056] The above provides a detailed description of the technical solutions of the present application, and the principles and implementation modes of the present application are described by applying specific examples. The above example is only used to help understand the present application, and the content of the description should not be understood as limiting the present application. At the same time, for those skilled in the art, according to the present application, there will be different forms of changes in specific implementation modes and application ranges, which do not need and cannot be exhausted here, and the obvious changes or changes derived therefrom are still within the protection scope of the present application.

Claims

1. An electron microscope sample stage, characterized by, The utility model relates to an electron microscope sample stage, including: a sample stage base, a horizontal support and an inclined support; a plurality of horizontal supports are provided, any two of which can be arranged in an overlapping manner and connected to each other; the inclined support is provided with an angle adjusting mechanism for adjusting the inclination angle of the inclined support; the horizontal support is detachably mounted on the sample stage base or another horizontal support, and the inclined support is detachably mounted on the sample stage base or the horizontal support.

2. The electron microscope sample stage according to claim 1, characterized in that: the plurality of horizontal supports include at least one first height support and at least one second height support, the first height support and the second height support being different in height.

3. The electron microscope sample stage according to claim 1 or 2, characterized in that: the sample stage base is provided with a plurality of clamping units, the horizontal support is provided with a first matching unit, and the inclined support is provided with a second matching unit, the first matching unit and the second matching unit being capable of clamping matching with the clamping units.

4. The electron microscope sample stage according to claim 3, characterized in that: the sample stage base includes a bottom platform and a clamping seat arranged below the bottom platform; the clamping unit includes a movable clamping plate arranged on the bottom platform and detachably connected to the bottom platform.

5. The electron microscope sample stage according to claim 4, characterized in that: the horizontal support includes a support portion and a water platform surface arranged at the top end of the support portion; the first matching unit includes a first clamping groove arranged at the bottom end of the support portion and capable of clamping matching with the movable clamping plate.

6. The electron microscope sample stage according to claim 5, characterized in that: the inclined support includes a bottom plate and an inclined platform arranged above the bottom plate, and the angle adjusting mechanism is arranged between the bottom plate and the inclined platform; the second matching unit includes a second clamping groove arranged on the bottom plate and capable of clamping matching with the movable clamping plate.

7. The electron microscope sample stage according to claim 6, characterized in that: the edge of the water platform surface is further provided with a stacking clamping plate, the stacking clamping plate being adapted in shape and size to the first clamping groove and the second clamping groove; the stacking clamping plate of any horizontal support can clamping match with the first clamping groove of another horizontal support or the second clamping groove of the inclined support.

8. The electron microscope sample stage according to claim 6, characterized in that: one end of the inclined platform is hinged to one end of the bottom plate, and the bottom plate is provided with a slot hole extending away from the hinged end; the angle adjusting mechanism includes a sliding rod and a locking nut; the sliding rod is arranged in the slot hole and can slide along the extension direction of the slot hole, the top end of the sliding rod abuts against the inclined platform, and the bottom end of the sliding rod passes through the slot hole and clamps with the slot hole. The locking nut is threadedly connected to the bottom end of the slide rod, and is used for locking the position of the slide rod in the slot hole.

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