Air extractor and diffusion equipment

Abstract

The utility model provides an air extractor and diffusion equipment, and the air extractor comprises a negative pressure pump which is provided with an input port and a discharge port; the collecting assembly is connected to the discharge port through a discharge pipeline; the valve assembly is connected to the input port through a valve pipeline; the gas inlet assembly is connected to the valve assembly through a gas inlet pipeline, and the gas inlet assembly is used for being connected with a reaction furnace tube; the water supply assembly is connected to the valve assembly through a water supply pipeline; when the valve assembly is in the first state, the gas inlet assembly is communicated with the input port through the valve assembly so as to allow the process tail gas of the reaction furnace tube to enter the input port; when the valve assembly is in the second state, the water supply assembly communicates with the input port through the water supply pipeline so as to allow the cleaning fluid to enter the input port. The cleaning liquid in the water supply assembly can clean structures such as a pipeline, a diaphragm and a cavity in the negative pressure pump and scour dust particles blocked in the negative pressure pump, so that the negative pressure pump is effectively prevented from being blocked by the dust particles to influence the air exhaust efficiency, and the working stability of the negative pressure pump is improved.

Description

Technical Field

[0001] This application relates to the field of battery cell processing technology, and in particular to an air extraction device and a diffusion device. Background Technology

[0002] During the production of solar cells, a diffusion process is required, which typically generates some process exhaust gas that needs to be collected by an extraction device.

[0003] In related technologies, the exhaust system includes a condenser flask, a pneumatic diaphragm valve, a vacuum diaphragm pump, and an acid discharge pipe. When the pneumatic diaphragm valve and vacuum diaphragm pump are activated, the process exhaust gas in the reactor tubes first passes through the condenser flask for condensation, then through the pneumatic diaphragm valve and vacuum diaphragm pump, and finally flows through the acid discharge pipe to the waste gas collection pipe. However, the exhaust system in these technologies suffers from a problem where the vacuum diaphragm pump is prone to clogging. Utility Model Content

[0004] In view of the above, it is necessary to provide an air extraction device and a diffusion device that can effectively prevent the negative pressure pump from being affected by dust particles clogging it, thereby increasing the working stability of the negative pressure pump.

[0005] The first aspect of this application provides a vacuum device, comprising: a negative pressure pump having an inlet and an outlet; a collection assembly connected to the outlet via a discharge pipe; a valve assembly connected to the inlet via a valve pipe; an air inlet assembly connected to the valve assembly via an air inlet pipe, the air inlet assembly being used to connect to a reactor tube; and a water supply assembly connected to the valve assembly via a water supply pipe; wherein, when the valve assembly is in a first state, the air inlet assembly is connected to the inlet via the valve assembly to allow process exhaust gas from the reactor tube to enter the inlet; and when the valve assembly is in a second state, the water supply assembly is connected to the inlet via the valve assembly to allow cleaning fluid to enter the inlet.

[0006] In some embodiments, the water supply assembly includes a water supply tank and a water pump, with the water pump inlet connected to the water supply tank and the water pump outlet connected to a valve assembly.

[0007] In some embodiments, the valve assembly includes a reversing valve having a first channel, a second channel, and a third channel, an air intake assembly connected to the first channel, a water supply assembly connected to the second channel, and an inlet connected to the third channel; wherein, when the valve assembly is in a first state, the first channel is connected to the third channel; and when the valve assembly is in a second state, the second channel is connected to the third channel.

[0008] In some embodiments, the air intake assembly includes a condenser for connecting to the air outlet of the reactor tube, and the condenser is connected to the valve assembly.

[0009] In some embodiments, the collection component includes an acid drain pipe and a wastewater tank, with the outlet connected to the acid drain pipe and the acid drain pipe connected to the wastewater tank.

[0010] In some embodiments, the lower end of the acid drain pipe is provided with a drain outlet, which is connected to the wastewater tank.

[0011] In some embodiments, the upper end of the acid discharge pipe is provided with an acid discharge connector, which is used to connect to the waste gas collection pipe.

[0012] In some embodiments, one or more of the discharge pipe, valve pipe, air inlet pipe, and water supply pipe are corrugated pipes.

[0013] In some embodiments, one or more of the discharge pipe, valve pipe, air inlet pipe, and water supply pipe are made of polytetrafluoroethylene (PTFE).

[0014] A second aspect of this application provides a diffusion apparatus, including a reactor tube and an extraction device as described in the first aspect, wherein the inlet assembly of the extraction device is connected to the reactor tube.

[0015] The exhaust device and diffusion equipment provided in this application, when the valve assembly is in the first state, connect the intake assembly to the inlet through the valve assembly to allow the process tail gas from the reactor tube to enter the inlet, thus achieving the waste gas collection function. When the valve assembly is in the second state, connect the water supply assembly to the inlet through the valve assembly to allow the cleaning fluid to enter the inlet. At this time, the cleaning fluid in the water supply assembly can enter the inlet of the negative pressure pump from the water supply pipeline and the valve assembly and exit from the outlet of the negative pressure pump, cleaning the internal pipes, diaphragms, chambers, and other structures of the negative pressure pump, and flushing away the dust particles clogging the inside of the negative pressure pump. The wastewater generated after flushing can be collected in the collection assembly through the discharge pipeline. In this way, the inside of the negative pressure pump can be flushed, effectively preventing the negative pressure pump from being affected by dust particle blockage and increasing the working stability of the negative pressure pump. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the air extraction device of this application.

[0017] Figure 2 This is a schematic diagram of the diffusion device of this application.

[0018] Explanation of main component symbols

[0019] 100. Air extraction device; 10. Negative pressure pump; 11. Inlet; 12. Outlet; 20. Collection assembly; 21. Discharge pipeline; 22. Acid discharge pipe; 221. Acid discharge connector; 222. Drain outlet; 23. Wastewater tank; 30. Valve assembly; 31. Valve pipeline; 32. Reversing valve; 40. Air intake assembly; 41. Air intake pipeline; 42. Condenser; 50. Water supply assembly; 51. Water supply pipeline; 52. Water supply tank; 53. Water pump; 200. Reactor tube; 1000. Diffusion equipment. Detailed Implementation

[0020] In the description of the embodiments of this application, when an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an element centrally located simultaneously. When an element is considered to be "disposed" on another element, it can be directly disposed on the other element or there may be an element centrally located simultaneously. In this application, unless otherwise expressly specified and limited, the terms "installed," "connected," "attached," "fixed," etc., should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances. The directional descriptions in this embodiment, such as "up" and "down," are all based on the direction of the product in the actual use scenario.

[0021] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0022] Currently, the production process of solar cells typically involves diffusion processes on the sheet materials, such as boron diffusion and phosphorus diffusion. These diffusion processes usually generate waste gases, which need to be collected using extraction devices. Taking the boron diffusion process as an example, it typically uses a gaseous source of BCl3 (boron trichloride). BCl3 is highly toxic and corrosive, and the process gases produce particulate dust as a byproduct; therefore, it is necessary to collect the waste gases and particulate dust after the reaction.

[0023] In related technologies, the exhaust system includes a condenser flask, a pneumatic diaphragm valve, a vacuum diaphragm pump, and an acid discharge pipe. When the pneumatic diaphragm valve and vacuum diaphragm pump are activated, the process exhaust gas in the reactor tubes first passes through the condenser flask for condensation, then through the pneumatic diaphragm valve and vacuum diaphragm pump, and finally flows through the acid discharge pipe to the waste gas collection pipe. However, the process exhaust gas usually contains particulate dust, which can easily cause blockages in the vacuum diaphragm pump.

[0024] To address the issue of blockage in vacuum diaphragm pumps, another solution involves installing a filter between the condenser flask and the pneumatic diaphragm valve to remove particulate dust from the process exhaust gas. However, this method requires frequent filter element replacement, necessitates lengthy maintenance and disassembly times, and incurs significant costs, thus presenting a technical challenge.

[0025] Therefore, this application provides a pumping device 100 and a diffusion device 1000, which can solve the problem of easy clogging of vacuum diaphragm pumps.

[0026] Figure 1 This is a schematic diagram of the air extraction device of this application. Figure 2 This is a schematic diagram of the diffusion device of this application.

[0027] like Figure 1 and Figure 2 As shown, this application embodiment first provides a gas extraction device 100. The gas extraction device 100 can be applied to a diffusion device 1000. The diffusion device 1000 is used to perform a diffusion process on sheet materials. The diffusion process can be boron diffusion, phosphorus diffusion, atomic layer deposition, etc., and the sheet materials can be silicon wafers, silicon carbide wafers, wafers, and other raw materials for solar cells. Exemplarily, the diffusion device 1000 includes a reactor tube 200 and a gas extraction device 100, wherein the reactor tube 200 is used for the chemical treatment of the sheet materials by the diffusion process, and the gas extraction device 100 is used to extract the process exhaust gas in the reactor tube 200 and direct the process exhaust gas to the waste gas collection pipe.

[0028] In this embodiment, the air extraction device 100 includes a negative pressure pump 10, a collection assembly 20, a valve assembly 30, an air inlet assembly 40, and a water supply assembly 50. The negative pressure pump 10 is a vacuum diaphragm pump, having an inlet 11 and an outlet 12. The negative pressure pump 10 extracts substances through the inlet 11 and discharges substances through the outlet 12. The substances can be gases, liquids, or particulate matter attached to gases or liquids.

[0029] The collection component 20 is connected to the outlet 12 via the discharge pipe 21. The material discharged from the outlet 12 by the negative pressure pump 10 can flow to the collection component 20 and be collected by the collection component 20.

[0030] Valve assembly 30 is connected to inlet 11 via valve pipe 31. Inlet 11 can be connected to multiple pipes via valve assembly 30, and valve assembly 30 has a switchable on / off state. By switching the on / off state of valve assembly 30, the on / off state between inlet 11 and the corresponding pipe can be changed, thereby allowing the specified pipe to connect to inlet 11.

[0031] The air intake assembly 40 is connected to the valve assembly 30 via the air intake pipe 41. The air intake assembly 40 is used to connect to the reactor tube 200. The air intake assembly 40 is connected to the outlet of the reactor tube 200, and the process exhaust gas discharged from the reactor tube 200 can enter the air intake assembly 40, and the air intake assembly 40 can transmit the process exhaust gas through the air intake pipe 41.

[0032] The water supply assembly 50 is connected to the valve assembly 30 via a water supply pipe 51. The water supply assembly 50 stores cleaning fluid and can output the cleaning fluid through the water supply pipe 51. The cleaning fluid can be water or a cleaning agent.

[0033] The valve assembly 30 in this embodiment has a first state and a second state as its on / off states.

[0034] When the valve assembly 30 is in the first state, the air intake assembly 40 is connected to the inlet 11 through the valve assembly 30, allowing the process exhaust gas from the reactor tube 200 to enter the inlet 11. At this time, the exhaust device 100 is in the exhaust gas collection mode. Under the action of the negative pressure pump 10, the process exhaust gas in the reactor tube 200 can enter the inlet 11 of the negative pressure pump 10 from the air intake assembly 40 and the valve assembly 30, and be output to the collection assembly 20 from the outlet 12 of the negative pressure pump 10, thus realizing the exhaust gas collection function.

[0035] When valve assembly 30 is in the second state, water supply assembly 50 is connected to inlet 11 through valve assembly 30 to allow cleaning fluid to enter inlet 11. At this time, the air extraction device 100 is in maintenance flushing mode. The cleaning fluid in water supply assembly 50 can enter inlet 11 of negative pressure pump 10 from water supply pipeline 51 and valve assembly 30 and exit from outlet 12 of negative pressure pump 10, cleaning the internal pipes, diaphragms, chambers and other structures of negative pressure pump 10, and flushing away dust particles that clog the inside of negative pressure pump 10. The wastewater generated after flushing can be collected in collection assembly 20 through discharge pipeline 21. In this way, the inside of negative pressure pump 10 can be flushed, effectively preventing the negative pressure pump 10 from being affected by dust particles clogging it and increasing the working stability of negative pressure pump 10.

[0036] It is understandable that when it is necessary to extract process tail gas from reactor tube 200, valve assembly 30 can be switched to the first state. When negative pressure pump 10 has been operating for a period of time, or when negative pressure pump 10 is slightly clogged, valve assembly 30 can be switched to the second state. In this way, on the one hand, the problem of negative pressure pump 10 failing to operate normally after clogging is solved; on the other hand, cleaning negative pressure pump 10 eliminates the need to disassemble certain structures such as filter elements, making the process more convenient and faster.

[0037] In some embodiments, the air inlet assembly 40 includes a condenser 42 for connecting to the outlet of the reactor tube 200 and connected to the valve assembly 30. For example, the condenser 42 is a condenser bottle, with its inlet end connected to the outlet of the reactor tube 200, one end of the air inlet pipe 41 connected to the outlet end of the condenser bottle via a PTFE connector, and the other end of the air inlet pipe 41 connected to the valve assembly 30.

[0038] It is understandable that before the process exhaust gas discharged from the reactor tube 200 enters the inlet pipe 41, the process exhaust gas can be cooled by passing through the condenser 42 to prevent the high-temperature process exhaust gas from damaging the pipe structure or other mechanisms.

[0039] In some embodiments, the intake pipe 41 is a corrugated pipe, so that the intake pipe 41 can be bent or extended according to the relative position of the condenser 42 and the valve assembly 30, which facilitates use.

[0040] In some embodiments, the intake pipe 41 is made of polytetrafluoroethylene (PTFE) to give it the characteristics of high temperature resistance, corrosion resistance and excellent chemical stability, so as to ensure that the process exhaust gas can be transported normally.

[0041] In some embodiments, the water supply assembly 50 includes a water supply tank 52 and a water pump 53. The inlet of the water pump 53 is connected to the water supply tank 52, and the outlet of the water pump 53 is connected to the valve assembly 30. For example, the water supply tank 52 is connected to the inlet of the water pump 53 via a water pipe, and the outlet of the water pump 53 is connected to the valve assembly 30 via a water supply pipeline 51.

[0042] It is understood that the water tank 52 can store cleaning fluid, the water pump 53 can draw the cleaning fluid from the water tank, and deliver the cleaning fluid to the valve assembly 30 through the water supply pipeline 51.

[0043] In some embodiments, the water supply pipe 51 is a corrugated pipe, so that the water supply pipe 51 can be bent or extended according to the relative position of the water pump 53 and the valve assembly 30, which facilitates use.

[0044] In some embodiments, the water supply pipeline 51 is made of polytetrafluoroethylene (PTFE) to give it the characteristics of high temperature resistance, corrosion resistance and excellent chemical stability, so as to ensure that the cleaning fluid can be delivered normally.

[0045] In some embodiments, the valve assembly 30 includes a reversing valve 32, which has a valve core and multiple channels. By rotating the valve core of the reversing valve 32, communication conditions between different channels can be established. The multiple channels of the reversing valve 32 include a first channel, a second channel, and a third channel. An air intake assembly 40 is connected to the first channel, a water supply assembly 50 is connected to the second channel, and an inlet 11 is connected to the third channel. For example, a condenser 42 is connected to the first channel via an air intake pipe 41, a water pump 53 is connected to the second channel via a water supply pipe 51, and a negative pressure valve is connected to the third channel via a valve pipe 31.

[0046] When valve assembly 30 is in the first state, the first channel is connected to the third channel, and at this time, the air inlet pipe 41 is connected to the negative pressure valve, allowing process exhaust gas to enter the negative pressure valve. At the same time, the second channel is disconnected from the third channel, blocking the cleaning fluid from entering the negative pressure valve.

[0047] When valve assembly 30 is in the second state, the second channel is connected to the third channel, and at this time, water supply line 51 is connected to the negative pressure valve, allowing cleaning fluid to enter the negative pressure valve. At the same time, the first channel is disconnected from the third channel, blocking process exhaust gas from entering the negative pressure valve.

[0048] It is understandable that the intake pipe 41 and the water supply pipe 51 are connected to the valve pipe 31 by a reversing valve 32. The multi-way function of the reversing valve 32 is used to switch between the exhaust gas collection function and the maintenance flushing function, which simplifies the pipe valve structure and makes the design more ingenious.

[0049] In some embodiments, the reversing valve 32 is a pneumatic reversing valve. The reversing valve 32 can receive remote control commands from the control system and rotate its valve core according to these commands, thereby remotely controlling the on / off state of the reversing valve 32.

[0050] In some embodiments, the valve pipeline 31 is a bellows so that the valve pipeline 31 can be bent or extended according to the relative position of the reversing valve 32 and the negative pressure valve, which facilitates use.

[0051] In some embodiments, the valve pipeline 31 is made of polytetrafluoroethylene (PTFE) to give it the characteristics of high temperature resistance, corrosion resistance and excellent chemical stability, so as to ensure that the process exhaust gas and cleaning fluid can be transported normally.

[0052] In some embodiments, the collection assembly 20 includes an acid drain pipe 22 and a wastewater tank 23, with an outlet 12 connected to the acid drain pipe 22 and the acid drain pipe 22 connected to the wastewater tank 23. Exemplarily, the acid drain pipe 22 is connected to the outlet 12 of the negative pressure pump 10 via a discharge pipe 21. An acid drain connector 221 is provided at the upper end of the acid drain pipe 22, which is used to connect to a waste gas collection pipe, which also has a suction function. A drain outlet 222 is provided at the lower end of the acid drain pipe 22, and the drain outlet 222 is connected to the wastewater tank 23.

[0053] When the reversing valve 32 is in the first state, the process tail gas discharged from the negative pressure pump 10 can enter the acid discharge pipe 22 through the discharge pipe 21, and the process tail gas flows to the waste gas collection pipe through the acid discharge pipe 22.

[0054] When the reversing valve 32 is in the second state, the wastewater discharged from the negative pressure pump 10 can enter the acid discharge pipe 22 through the discharge pipe 21, and flow to the wastewater tank 23 under the action of gravity.

[0055] In some embodiments, the discharge pipe 21 is a corrugated pipe, so that the discharge pipe 21 can be bent or extended according to the relative position of the negative pressure valve and the acid discharge pipe 22, which is convenient to use.

[0056] In some embodiments, the discharge pipe 21 is made of polytetrafluoroethylene (PTFE) to give it the characteristics of high temperature resistance, corrosion resistance and excellent chemical stability, so as to ensure that the process exhaust gas and cleaning fluid can be transported normally.

[0057] like Figure 1 and Figure 2 As shown in the illustration, this application also provides a diffusion device 1000. The diffusion device 1000 includes a reactor tube 200 and an extraction device 100, wherein the air inlet assembly 40 of the extraction device 100 is connected to the reactor tube 200. The reactor tube 200 is used for chemical treatment of sheet materials using a diffusion process, and the extraction device 100 is used to extract process exhaust gas from the reactor tube 200 and direct the process exhaust gas to a waste gas collection pipe.

[0058] The implementation principle and beneficial effects of the diffusion device 1000 provided in this application can be found in the relevant descriptions in the foregoing embodiments, and will not be repeated here.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and scope of the technical solutions of this application.

Claims

1. A suction device, characterized in that The application relates to an exhaust device for a reaction furnace, comprising: a negative pressure pump having an input port and an output port; a collection assembly connected to the output port through an exhaust pipeline; a valve assembly connected to the input port through a valve pipeline; an air inlet assembly connected to the valve assembly through an air inlet pipeline, the air inlet assembly being used for connecting a reaction furnace pipeline; a water supply assembly connected to the valve assembly through a water supply pipeline; wherein, when the valve assembly is in a first state, the air inlet assembly is communicated with the input port through the valve assembly to allow process tail gas of the reaction furnace pipeline to enter the input port; and when the valve assembly is in a second state, the water supply assembly is communicated with the input port through the valve assembly to allow cleaning liquid to enter the input port.

2. A gas extraction device according to claim 1, characterised in that The water supply assembly comprises a water supply tank and a water pump, the water inlet of the water pump being connected to the water supply tank, and the water outlet of the water pump being connected to the valve assembly.

3. The gas extraction device of claim 1, wherein The valve assembly comprises a reversing valve having a first channel, a second channel and a third channel, the air inlet assembly being connected to the first channel, the water supply assembly being connected to the second channel, and the input port being connected to the third channel; wherein, when the valve assembly is in the first state, the first channel is communicated with the third channel; and when the valve assembly is in the second state, the second channel is communicated with the third channel.

4. The gas extraction device of claim 1, wherein The air inlet assembly comprises a condenser used for connecting a gas outlet of the reaction furnace pipeline, the condenser being connected to the valve assembly.

5. The gas extraction device of claim 1, wherein The collection assembly comprises an acid discharge pipeline and a wastewater tank, the output port being connected to the acid discharge pipeline, and the acid discharge pipeline being connected to the wastewater tank.

6. A gas extraction device according to claim 5, characterised in that A drain port is arranged at the lower end of the acid discharge pipeline, and the drain port is connected to the wastewater tank.

7. A gas extraction device according to claim 6, characterised in that An acid discharge connector is arranged at the upper end of the acid discharge pipeline, and the acid discharge connector is used for connecting a waste gas collection pipeline.

8. The gas extraction device of claim 1, wherein One or more of the exhaust pipeline, the valve pipeline, the air inlet pipeline and the water supply pipeline is a corrugated pipe.

9. The gas extraction device of claim 1, wherein One or more of the exhaust pipeline, the valve pipeline, the air inlet pipeline and the water supply pipeline is made of polytetrafluoroethylene.

10. A diffusion apparatus characterized by, The application further relates to a reaction furnace comprising a reaction furnace pipeline and an exhaust device as claimed in any one of claims 1 to 9, the air inlet assembly of the exhaust device being connected to the reaction furnace pipeline.

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