Transportation device and processing equipment

Abstract

The utility model provides a transportation device and processing equipment, particularly relates to the field of photovoltaic material processing, and solves the problems that a traditional boat pushing assembly is large in occupied space and cannot meet various application scenes. The transporting device is configured to transport the boat structures to the multiple reaction furnaces or transport the boat structures out of the multiple reaction furnaces, and the multiple reaction furnaces are sequentially arranged in the vertical direction. The transportation device comprises a bearing assembly; a first transport assembly; a second transport assembly; a lifting assembly; the first conveying assembly comprises a power piece and a first conveying assembly. A first synchronization member; a second synchronization member; a first transmission member; a first screw rod; and a first screw nut. According to the transportation device provided by the embodiment of the invention, the first transportation assembly is provided with the first synchronous part, the second synchronous part, the transmission part, the first lead screw and the first lead screw nut, so that the occupied space of the transportation assembly is reduced, the transportation device can meet the requirements of different installation site sizes, and the purpose that the transportation device meets more application scenes is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic material processing, and particularly relates to a conveying device and a processing equipment. BACKGROUND

[0002] With the increasing demand for renewable energy worldwide, the photovoltaic industry has entered a period of rapid development. Solar cells are the main devices for converting light energy into electrical energy in photovoltaic power generation, and plasma-enhanced chemical vapor deposition (PECVD) equipment is usually used for surface coating during the preparation process. In the traditional PECVD reaction furnace system, multiple reaction furnaces are usually arranged in the vertical direction to save space, reduce handling time, and reduce costs.

[0003] However, in actual application, since multiple reaction furnaces are arranged in the vertical direction, the reaction furnace shaft cannot be located on the same straight line in the Y-axis direction due to installation position errors or processing errors, and manual adjustment is usually required to adjust the position to facilitate the smooth entry and exit of the graphite boat. However, the furnace body is large in size, and manual adjustment is difficult. To solve the problem of labor cost, a boat pushing system is usually used to adjust the position of the graphite boat relative to the reaction furnace to solve the problem of difficult manual adjustment. However, the traditional boat pushing system usually uses a direct connection method, which results in a large occupation of land, and many installation conditions cannot be met, which greatly limits the development of solar cell processing.

[0004] Therefore, there is an urgent need for a conveying device to solve the problem of large space occupation of the traditional boat pushing assembly and the inability to meet various application scenarios. Practical new type content

[0005] Therefore, the present application provides a conveying device to solve the problem of large space occupation of the traditional boat pushing assembly and the inability to meet various application scenarios.

[0006] In a first aspect, embodiments of the present application provide a conveying device configured to convey a boat structure to or from a plurality of reaction furnaces, the plurality of reaction furnaces being arranged in a vertical direction; the conveying device comprising: a bearing assembly configured to support the boat structure, the boat structure being arranged in a first horizontal direction; a first conveying assembly connected to the bearing assembly and configured to move the bearing assembly in a second horizontal direction, the second horizontal direction being perpendicular to the first horizontal direction; a second conveying assembly connected to the first conveying assembly and configured to move the first conveying assembly in the first horizontal direction; and a lifting assembly connected to the second conveying assembly and configured to move the second conveying assembly and the first conveying assembly vertically.

[0007] In some embodiments, the first and second synchronization members are both synchronization wheels, and the first transmission member is a transmission belt; or, the first and second synchronization members are both gears, and the first transmission member is at least one gear.

[0008] In some embodiments, the first conveying assembly further comprises: a support platform configured to support the power member, the first and second synchronization members being rotatably connected to the support platform, the support platform being connected to the second conveying assembly; a slide rail arranged on the support platform and extending in the second horizontal direction, the slide rail being spaced apart from the power member in the first direction; and a slide block connected to the bearing assembly and slidably connected to the slide rail, the slide block being configured to support and guide the bearing assembly.

[0009] In some embodiments, the slide rail comprises: a first sub-slide rail arranged on the support platform and extending in the second horizontal direction, the first sub-slide rail being spaced apart from the power member in the first horizontal direction; and a second sub-slide rail arranged on the support platform and extending in the second horizontal direction, the second sub-slide rail being arranged on a side of the power member away from the first sub-slide rail; and the slide block comprises: a first sub-slide block connected to the bearing assembly and slidably connected to the first sub-slide rail; and a second sub-slide block connected to the bearing assembly and slidably connected to the second sub-slide rail.

[0010] In some embodiments, the first conveying assembly further comprises a fixing member fixedly connected to the support platform, and the second synchronizing member is rotatably connected to the fixing member.

[0011] In some embodiments, the lifting assembly comprises a lifting driver configured to provide a lifting power; a first lifting member connected to the second conveying assembly and connected to the lifting driver, and driven by the lifting driver to lift; a second lifting member connected to the second conveying assembly, the first and second lifting members being respectively arranged at two ends of the second conveying assembly along the first horizontal direction; and a second transmission member having two ends respectively connected to the lifting driver and the second lifting member, and configured to transmit the lifting power of the lifting driver to the second lifting member, so that the second lifting member synchronously lifts with the first lifting member.

[0012] In some embodiments, the conveying device further comprises an auxiliary guide rod extending along the vertical direction and being retractable along the vertical direction, the auxiliary guide rod being connected to the second conveying assembly and arranged adjacent to the second lifting member.

[0013] In some embodiments, the first and / or second lifting member comprises a second lead screw extending along the vertical direction, the second lead screw being connected to the lifting driver and being driven by the lifting driver to rotate; a second lead screw nut threadedly connected to the second lead screw and connected to the second conveying assembly, the second lead screw nut being driven by the second lead screw to move along the vertical direction to drive the second conveying assembly to move along the vertical direction; and at least one retractable guide rod extending along the vertical direction and being retractable along the vertical direction, the retractable guide rod being arranged adjacent to the second lead screw and connected to the second conveying assembly, and configured to support and guide the second conveying assembly.

[0014] In some embodiments, the second transmission member comprises at least one transmission shaft having two ends respectively connected to the lifting driver and the second lifting member, and configured to transmit the lifting power of the lifting driver to the second lifting member; and a shaft seat sleeved on the transmission shaft and rotatably connected to the transmission shaft, and connected to the second conveying assembly.

[0015] In some embodiments, the carrying assembly comprises a carrying platform connected to the first conveying assembly; a positioning block slidably connected to the carrying platform along the first horizontal direction; and a boat pushing driver configured to drive the boat structure to move on the carrying platform along the first horizontal direction.

[0016] In a second aspect, embodiments of the present application provide a processing device, comprising: a plurality of reaction furnaces arranged in sequence along the vertical direction and configured to process a sheet-shaped material carried by the boat structure; and the conveying device of any one of the above-mentioned embodiments, the conveying device being configured to respectively transport the boat structure to or from the plurality of reaction furnaces.

[0017] The first conveying assembly, the second conveying assembly and the lifting assembly can drive the boat structure to move by the bearing assembly without manual adjustment of the position of the furnace body. The first conveying assembly of the conveying device provided by the embodiment of the application includes a power member, a first synchronization member, a second synchronization member, a first transmission member, a first screw rod and a first screw rod nut. The power of the power member is transmitted through cooperation of the first synchronization member, the second synchronization member and the first transmission member to drive the first screw rod to rotate, so that the first screw rod nut moves in the second horizontal direction, and the transmission of the force output by the power member is realized. In the case of the same moving distance, the space occupied by the power member in the moving direction is reduced, the space occupied in the moving direction is saved, the space occupied by the first conveying assembly is reduced, the conveying assembly meets the needs of different installation site sizes, the conveying device meets more application scenarios, the use range of the conveying device is increased, and the problem that the traditional boat pushing system cannot meet various application scenarios is solved. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 Fig. 1 shows a structure schematic diagram of a conveying device provided by an embodiment of the application.

[0019] Figure 2 Fig. 2 shows a structure schematic diagram of a first conveying assembly provided by an embodiment of the application.

[0020] Figure 3 Fig. 3 shows a structure schematic diagram of a first conveying assembly provided by another embodiment of the application.

[0021] Figure 4 Fig. 4 shows a structure schematic diagram of a first conveying assembly provided by another embodiment of the application.

[0022] Figure 5 Fig. 5 shows a structure schematic diagram of a conveying device provided by another embodiment of the application.

[0023] Figure 6 Fig. 6 shows a structure schematic diagram of a first lifting member provided by an embodiment of the application.

[0024] Figure 7 Fig. 7 shows an enlarged view of the conveying device at A. Figure 1 Fig. 8 shows an enlarged view of the conveying device at B.

[0025] Figure 8a Fig. 9 shows an enlarged view of the conveying device at C. Figure 1 Fig. 10 shows an enlarged view of the conveying device at D.

[0026] Figure 8b Fig. 11 shows an enlarged view of the conveying device at E. Figure 1 Fig. 12 shows an enlarged view of the conveying device at F.

[0027] Figure 9Fig. 1 shows a schematic structural diagram of a processing device according to an embodiment of the present application.

[0028] Reference signs:

[0029] 100, transport device; 110, bearing assembly; 120, first transport assembly; 130, second transport assembly; 140, lifting assembly; 121, power member; 122, first synchronization member; 123, second synchronization member; 124, first transmission member; 125, first screw rod; 126, first screw rod nut; 127, support platform; 128, slide rail; 129, sliding block; 1281, first sub-slide rail; 1282, second sub-slide rail; 1291, first sub-sliding block; 1292, second sub-sliding block; 1210, fixing member; 141, lifting driving member; 142, first lifting member; 143, second lifting member; 144, second transmission member; 150, auxiliary guide rod; 1421, second screw rod; 1422, second screw rod nut; 1423, telescopic guide rod; 1441, transmission shaft; 1424, rotating shaft seat; 111, bearing platform; 112, positioning block; 113, boat pushing drive; 200, boat structure; 300, reaction furnace; 400, processing device. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. Figures 1 to 9 The transport device provided by the embodiments of the present application is briefly introduced.

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. Figure 1 And Figure 2 The transport device provided by the embodiments of the present application is briefly introduced. Figure 1 Fig. 1 shows a schematic structural diagram of a processing device according to an embodiment of the present application. Figure 1 As shown, the transport device 100 provided by the embodiments of the present application comprises a bearing assembly 110, a first transport assembly 120, a second transport assembly 130, and a lifting assembly 140. Specifically, the bearing assembly 110 is configured to support the boat structure 200, and the boat structure 200 is arranged along a first horizontal direction (for example, the horizontal direction of the drawing) and sequentially arranged along a vertical direction. Figure 1The boat structure 200 is placed along the first horizontal direction (e.g., the X direction) shown. The first transport assembly 120, connected with the carrying assembly 110, is configured to drive the carrying assembly 110 to move along a second horizontal direction (e.g., the Y direction) shown, which is perpendicular to the first horizontal direction. The second transport assembly 130, connected with the first transport assembly 120, is configured to drive the first transport assembly 120 to move along the first horizontal direction. The lifting assembly 140, connected with the second transport assembly 130, is configured to drive the second transport assembly 130 and the first transport assembly 120 to lift. Figure 1

[0033] In some embodiments, the carrying assembly 110 can support a plurality of boat structures 200, which are placed along the first horizontal direction (e.g., the X direction) shown in sequence. The carrying assembly 110 can support a plurality of boat structures 200 to reduce the time for placing the boat structures 200 multiple times, thereby improving the transport efficiency of the transport device 100. Figure 1

[0034] Figure 2 Fig. 2 shows a structural schematic diagram of the first transport assembly 120 according to an embodiment of the present application. As shown, the first transport assembly 120 according to the embodiment of the present application includes a power member 121, a first synchronization member 122, a second synchronization member 123, a first transmission member 124, a first screw rod 125, and a first screw rod nut 126. Specifically, the power member 121 is connected with the second transport assembly 130 and is configured to provide power. The first synchronization member 122 is connected with the power member 121 and rotates under the drive of the power member 121. The second synchronization member 123 is arranged in the first horizontal direction and is spaced apart from the first synchronization member 122. The first transmission member 124 is sleeved on the first synchronization member 122 and the second synchronization member 123 and is configured to move under the drive of the first synchronization member 122 and drive the second synchronization member 123 to rotate. The first screw rod 125 extends along the second horizontal direction and is spaced apart from the power member 121 along the first direction. One end of the first screw rod 125 is connected with the second synchronization member 123 and rotates under the drive of the second synchronization member 123. The first screw rod nut 126 is screwed with the first screw rod 125 and is connected with the carrying assembly. The first screw rod nut 126 moves along the second horizontal direction under the drive of the first screw rod 125 to drive the carrying assembly 110 to move along the second horizontal direction. Figure 2

[0035] ​​​Exemplarily, the first conveying assembly 120 is connected with the second conveying assembly 130, and the first conveying assembly 120 and the bearing assembly 110 are driven by the second conveying assembly 130 to move in the first horizontal direction. The first conveying assembly 120 can drive the bearing assembly 110 to move in the second horizontal direction, so as to realize the movement of the boat structure 200 on the bearing assembly 110 in the second horizontal direction. The second conveying assembly 130 is connected with the lifting assembly 140, and the second conveying assembly 130 and the first conveying assembly 120 connected with the second conveying assembly 130 are driven by the lifting assembly 140 to move up and down in the vertical direction, and the first conveying assembly 120 drives the bearing assembly 110 to move up and down when the first conveying assembly 120 moves up and down. Therefore, the conveying device provided by the embodiment of the present application can realize the movement of the bearing assembly 110 and the boat structure in the first horizontal direction, the second horizontal direction and the vertical direction, so that the boat structure can smoothly enter and exit the furnace body of the reaction furnace, without manual adjustment of the position of the furnace body.

[0036] Exemplarily, the force of the power member 121 is transmitted through the cooperation of the first synchronization member 122, the second synchronization member 123 and the first transmission member 124 in the first conveying assembly, and the first lead screw 126 and the first lead screw nut 126 are combined to realize the purpose of driving the bearing assembly 110 to move in the second horizontal direction. The first synchronization member 122 and the second synchronization member 123 provided by the embodiment of the present application are arranged at intervals in the first horizontal direction, the first lead screw 125 is combined as a power input member, and the first lead screw nut 126 is combined as a power output member, which reduces the space occupied by the first conveying assembly 120 in the second horizontal direction, so that the conveying device 100 can meet the needs of different installation site sizes, realizes the purpose that the conveying device meets more application scenarios, and increases the use range of the conveying device.

[0037] Exemplarily, the power member 121 can be a servo motor, which is combined with a related control device to adjust the position of the boat structure relative to the reaction furnace through the control device, thereby reducing the difficulty and labor cost of manual adjustment. In addition, the conveying device provided by the embodiment of the present application can save the time consumed by manual adjustment of the position of the reaction furnace. It should be understood that the power member 121 can be other motors, such as a variable motor, a stepper motor, a brushless direct current motor, etc. The embodiment of the present application does not further limit the specific type of the power member 121.

[0038] Exemplarily, the second conveying assembly 130 can be a synchronous belt module conveying in the first horizontal direction. When the conveying device 100 conveys the plurality of boat structures 200 out of the reaction furnace 300, the temperature of the boat structure is high, and in view of the use safety and service life of the second conveying assembly 130, the second conveying assembly 130 can further include a drag chain and a drag chain cover. Since the first conveying assembly 120 needs cables, the cables are protected by the first horizontal direction drag chain. The drag chain is placed in the drag chain cover, which ensures that the first conveying assembly 120 operates normally under high temperature conditions, avoids direct radiation of hot air to the drag chain, and avoids damage to the drag chain and cables due to high temperature.

[0039] The conveying device 100 provided by the embodiment of the present application can realize the movement of the boat structure 200 driven by the bearing assembly 110 through the first conveying assembly 120, the second conveying assembly 130 and the lifting assembly 140, so that the boat structure 200 can smoothly enter and exit the reaction furnace 300 without manual adjustment of the position of the furnace body. Since the first conveying assembly of the conveying device provided by the embodiment of the present application includes the power member 121, the first synchronization member 122, the second synchronization member 123, the first transmission member 124, the first lead screw 125 and the first lead screw nut 126, the power of the power member 121 is transmitted through the first synchronization member 122, the second synchronization member 123 and the first transmission member 124 to drive the first lead screw 125 to rotate, so that the first lead screw nut 126 moves in the second horizontal direction, realizing the transmission of the force output by the power member 121. In the same moving distance, the space occupied by the power member 121 in the moving direction is reduced, the occupied space in the moving direction can be saved, thereby reducing the occupied space of the first conveying assembly 120, so that the conveying device 100 meets the needs of different installation site sizes, and realizes the purpose that the conveying device 100 meets more application scenarios.

[0040] In some embodiments, the first synchronization member 122 and the second synchronization member 123 are both synchronous wheels, and the first transmission member 124 is a transmission belt; or, the first synchronization member 122 and the second synchronization member 123 are both gears, and the first transmission member 124 is at least one gear. Exemplarily, the connection between the synchronous wheel and the transmission belt is based on the engagement between the teeth on the synchronous belt and the gear on the driven wheel, so that the driven wheel (the first synchronization member 122 or the second synchronization member 123) can rotate with the driving wheel (the first synchronization member 122 or the second synchronization member 123). When the first synchronization member 122 and the second synchronization member 123 are both synchronous wheels, and the first transmission member 124 is a transmission belt, the precise transmission ratio can be achieved, which is more suitable for mechanical systems that need to be precisely controlled. In addition, the synchronous belt wheel system can be designed to be very compact, which is suitable for application occasions with limited space. When the first synchronization member 122 and the second synchronization member 123 are both gears, and the first transmission member 124 is at least one gear, the gear transmission can provide precise speed ratio and motion control, which is also more suitable for mechanical systems that need to be precisely synchronized. In addition, the gear transmission system can also be designed to be very compact, which is suitable for application occasions with limited space.

[0041] Figure 3 Fig. 1 shows a structural schematic diagram of a first conveying assembly provided by another embodiment of the present application. Figure 2 Based on the embodiment shown in Fig. 1, the first conveying assembly provided by another embodiment of the present application further comprises a support platform 127, a slide rail 128 and a slide block 129. Figure 3 Based on the embodiment shown in Fig. 1, the first conveying assembly provided by another embodiment of the present application further comprises a support platform 127, a slide rail 128 and a slide block 129. Figure 3 Based on the embodiment shown in Fig. 1, the first conveying assembly provided by another embodiment of the present application further comprises a support platform 127, a slide rail 128 and a slide block 129. Figure 2 Based on the embodiment shown in Fig. 1, the first conveying assembly provided by another embodiment of the present application further comprises a support platform 127, a slide rail 128 and a slide block 129.

[0042] As shown in Fig. 1, the first conveying assembly provided by another embodiment of the present application further comprises a support platform 127, a slide rail 128 and a slide block 129. Figure 3 Based on the embodiment shown in Fig. 1, the first conveying assembly provided by another embodiment of the present application further comprises a support platform 127, a slide rail 128 and a slide block 129.

[0043] For example, the slide rail 128 and the power component 121 are spaced apart along a first direction, and the spacing can be selected according to requirements. The slide rail 128 extends along a second horizontal direction, and the slider 129 is connected to the support component 110 and slidably connected to the slide rail 128. The slider 128 can provide a linear guide for the support component 110, ensuring that the support component 110 moves smoothly in the second horizontal direction. In addition, the slide rail 128 and the slider 129 can support the support component 110, further ensuring the stability of the support component 110 when it moves in the second horizontal direction.

[0044] In this embodiment, by setting the slide rail 128 and the slider 129, the bearing component 110 moves smoothly in the second horizontal direction, further ensuring the stability of the boat structure 200 during the position adjustment process.

[0045] Figure 4 The diagram shown is a structural schematic of another first transport component provided in another embodiment of this application. Figure 3 Extending from the illustrated embodiment Figure 4 The illustrated embodiment will be described in detail below. Figure 4 The illustrated embodiments and Figure 3 The differences between the embodiments shown are not repeated here, and the similarities are not repeated here.

[0046] like Figure 4 As shown, the slide rail 128 includes a first sub-slide rail 1281 and a second sub-slide rail 1282. Specifically, the first sub-slide rail 1281 is disposed on the support platform 127, extends along a second horizontal direction, and is spaced apart from the power member 121 along a first horizontal direction; the second sub-slide rail 1282 is disposed on the support platform 127, extends along a second horizontal direction, and is disposed on the side of the power member 121 away from the first sub-slide rail 1281. The slider 129 includes a first sub-slider 1291 and a second sub-slider 1292. Specifically, the first sub-slider 1291 is connected to the bearing assembly 110 and is slidably connected to the first sub-slide rail 1281; the second sub-slider 1292 is connected to the bearing assembly 110 and is slidably connected to the second sub-slide rail 1282.

[0047] Exemplarily, the first sub-slideway 1281 and the second sub-slideway 1282 are arranged at two sides of the power member 121 along the first horizontal direction, and are connected with the bearing assembly 110 through the first sub-slideway 1291 and the second sub-slideway 1292 respectively, so that the bearing assembly 110 is more stable during movement. The first sub-slideway 1281 is arranged at a distance from the power member 121 along the first horizontal direction, and can support the bearing assembly 110 with large size. In actual application, the distance between the first sub-slideway 1281 and the power member 121 can be set according to requirements. For example, when the bearing assembly 110 is large in size, the distance between the first sub-slideway 1281 and the power member 121 can be selected to be large, or when the installation site is limited, the distance can be selected to be small under the condition that the bearing assembly 110 can be supported.

[0048] The first sub-slideway 1281 and the second sub-slideway 1282 support and guide the movement of the bearing assembly 110 together, so that the movement of the bearing assembly 110 in the second horizontal direction is more stable.

[0049] In some embodiments, as shown in Figure 3 The first conveying assembly 120 further includes a fixing member 1210 fixedly connected with the support platform 127, and the second synchronous member 123 is rotatably connected with the fixing member 1210.

[0050] Exemplarily, the fixing member 1210 can include a bearing support or other support element. The fixing member 1210 can be connected with the support platform 127 through a cooperating screw. The fixing member 1210 can also be connected with the support platform 127 through welding or bonding, so as to fix the second synchronous member 123. The fixing member 1210 is rotatably connected with the second synchronous member 123, and the second synchronous member 123 is stably fixed on the support platform 127 through the fixing member 1210. During movement, when the second synchronous member 123 is driven to move by the first synchronous member 122, the stability of the first conveying assembly 120 in the second horizontal direction is ensured due to the stability of the fixing member 1210.

[0051] The fixing member 1210 ensures the stability of the second synchronous member 123 during movement, and further ensures the stability of the first conveying assembly 120 in the second horizontal direction.

[0052] In some embodiments, as shown in Figure 1As shown, the lifting assembly 140 comprises a lifting driver 141, a first lifting member 142, a second lifting member 143, and a second transmission member 144. Specifically, the lifting driver 141 is configured to provide lifting power; the first lifting member 142 is connected with the second conveying assembly 130 and the lifting driver 141, and is driven by the lifting driver 141 to lift; the second lifting member 143 is connected with the second conveying assembly 130, and the first lifting member 142 and the second lifting member 143 are respectively arranged at two ends of the second conveying assembly 130 along the first horizontal direction; and the second transmission member 144 is connected with the lifting driver 141 and the second lifting member 143 at two ends thereof, and is configured to transmit the lifting power of the lifting driver 141 to the second lifting member 143, so that the second lifting member 143 synchronously lifts with the first lifting member 142.

[0053] Exemplarily, the second transmission member 144 comprises a rotating shaft, a transmission shaft, and a mandrel, etc. It should be understood that, in order to cooperate with the corner reducer of the lifting driver 141, the linear output shaft of the lifting driver 141 is converted into an output perpendicular to the motor shaft, and the second transmission member 144 is cooperated to achieve the purpose of synchronously lifting the first lifting member 142 and the second lifting member 143.

[0054] The lifting assembly 140 of the conveying device 100 provided by the embodiment of the present application is composed of the lifting driver 141, the first lifting member 142, the second lifting member 143, and the second transmission member 144, and has a simple structure. In addition, the first lifting member 142 and the second lifting member 143 are respectively arranged at two ends of the second conveying assembly 130 along the first horizontal direction, which ensures the stability of the second conveying assembly 130 during lifting movement, and further improves the stability of the conveying device 100.

[0055] Figure 5 As shown, the structure of the conveying device provided by another embodiment of the present application is shown in a schematic view. Figure 1 Based on the embodiment shown above, the following embodiments are extended Figure 5 In the embodiment shown above, the following will be mainly described Figure 5 The differences between the embodiment shown above and Figure 1 The differences between the embodiment shown above and

[0056] As Figure 5As shown, another transport device 100 provided by another embodiment of the present application further comprises: an auxiliary guide rod 150 extending in the vertical direction and capable of extending and retracting in the vertical direction, the auxiliary guide rod 150 is connected with the second transport assembly 130 and is arranged adjacent to the second lifting piece 143. Exemplarily, the auxiliary guide rod 150 can be lifted synchronously with the second lifting piece 143. The synchronous lifting of the auxiliary guide rod with the second lifting piece 143 disperses the stress of the lifting assembly, and can support the second transport assembly 130, especially when the second transport assembly 130 is large in size, further ensuring the stability of the structure of the second transport assembly 130.

[0057] The transport device provided by the embodiment of the present application further improves the stability of the structure of the second transport assembly 130 by arranging the auxiliary lifting telescopic rod 150 to assist in lifting the second transport assembly 130.

[0058] Figure 6 As shown is a structural schematic diagram of the first lifting piece and / or the second lifting piece provided by an embodiment of the present application. As shown in the figure, the first lifting piece 142 and / or the second lifting piece 143 comprises: a second lead screw 1421, a second lead screw nut 1422, and a telescopic guide rod 1423. Figure 6 As shown, the first lifting piece 142 and / or the second lifting piece 143 provided by the embodiment of the present application comprises: a second lead screw 1421, a second lead screw nut 1422, and a telescopic guide rod 1423. The second lead screw 1421 extends in the vertical direction, and the second lead screw 1421 is connected with the lifting drive 141 and rotates under the driving of the lifting drive 141; the second lead screw nut 1422 is screwed with the second lead screw 1421 and connected with the second transport assembly 130, and the second lead screw nut 1422 moves in the vertical direction under the driving of the second lead screw 1421 to drive the second transport assembly 130 to move in the vertical direction; at least one telescopic guide rod 1423 extends in the vertical direction and is capable of extending and retracting in the vertical direction, the telescopic guide rod 1423 is arranged adjacent to the second lead screw 1421 and connected with the second transport assembly 130, and is configured to support and guide the second transport assembly 130.

[0059] Exemplarily, a plurality of telescopic guide rods 1423 can be symmetrically arranged on both sides of the second lead screw 1421 and spaced apart from the second lead screw 1421. The combination of the second lead screw 1421 and the second lead screw nut 1422 can bear a higher load, and the overall structure is stable. In addition, the combination of the lead screw nut can generally realize high-precision linear motion, ensuring the accuracy of the lifting of the first lifting piece 142, so as to accurately and efficiently enter a plurality of vertically placed reaction furnaces 300. It should be understood that, in actual application, the structure of the second lifting piece 143 can be completely the same as that of the first lifting piece 142 in order to save cost and facilitate installation.

[0060] The first lifting piece 142 provided in the embodiment of the present application realizes high-precision linear motion through the combination of the screw rod and the nut, ensures the precision of the lifting motion of the boat structure 200, and has simple structure and low manufacturing cost.

[0061] Figure 7 An enlarged view of the transport device at A is shown. Figure 1 The transport device shown at A is an enlarged view. The second transmission piece 144 provided in the embodiment of the present application includes: a plurality of transmission shafts 1441. As shown in the figure, Figure 7 As shown, the lifting assembly 140 further includes: a rotating shaft seat 1442. Specifically, the rotating shaft seat 1442 is sleeved on the transmission shaft 1441 and is rotatably connected with the transmission shaft 1441 and connected with the second transport assembly 130. It should be understood that the plurality of transmission shafts 1441 are connected through a shaft coupling to realize the mutual connection between the plurality of transmission shafts 1441. The embodiment of the present application avoids the flexural deformation of the plurality of transmission shafts by providing the rotating shaft seat, ensures the stability of power transmission, and thus ensures the synchronous operation of the first lifting piece and the second lifting piece. It should be understood that other structures can be selected to replace the transmission shaft structure in actual application, such as a screw rod structure.

[0062] Figure 8a An enlarged view of the transport device at B is shown. Figure 1 An enlarged view of the transport device at B is shown. Figure 8b An enlarged view of the transport device at C is shown. Figure 1 An enlarged view of the transport device at C is shown. As shown in the figure, Figure 8a and Figure 8b As shown, the carrying assembly 110 includes: a carrying platform 111, a sliding block 112, and a boat pushing drive 113, wherein the carrying platform 111 is connected with the first transport assembly 120; the sliding block 112 is connected with the carrying platform 111; and the boat pushing drive 113 is configured to push the boat structure to move in the first horizontal direction on the carrying platform.

[0063] Exemplarily, the carrying platform 111 can support the boat structure 200, is connected with the first transport assembly 120, and can move with the first transport assembly 120 in the second horizontal direction, thereby ensuring the stability of the boat structure 200 during the transport process. The sliding block 112 is connected with the carrying platform 111 and can realize the process of the boat structure 200 entering the reaction furnace, the boat pushing of the transport device 100 at the appropriate position, and the stability of the transport device 100.

[0064] Exemplarily, in actual application, impurities after processing may fall off during the transport process of the boat structure 200, and a protective plate can be additionally added at the position of the carrying platform 111 carrying the boat structure to avoid the influence of the falling impurities on the transport environment and the influence on artificial safety.

[0065] The transportation device provided by the embodiment of the present application further guarantees the stability of the boat structure in the transportation process through the bearing platform, the sliding block and the boat pushing drive.

[0066] Figure 9 As shown in the structural schematic diagram of the processing equipment provided by an embodiment of the present application. As shown in the structural schematic diagram of the processing equipment provided by an embodiment of the present application. The embodiment of the present application provides a processing equipment 400, which comprises a plurality of reaction furnaces 300 arranged in sequence along a vertical direction and configured to process the sheet material carried by the boat structure 200; and a transportation device 100 configured to respectively transport the boat structure 200 to or from the plurality of reaction furnaces 300. In actual application, the number of the boat structures 200 can be multiple, and the boat structures 200 are arranged in sequence along a first horizontal direction, which is a horizontal direction towards the reaction furnace 300. Figure 9

[0067] The processing equipment provided by the embodiment of the present application has the beneficial effects of the above-mentioned transportation device, which will not be described herein again.

[0068] In the description, “an embodiment”, “one embodiment”, etc. means that the described embodiment can include a specific feature, structure or property, but not necessarily every embodiment includes the specific feature, structure or property. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or property is described in combination with an embodiment, it is within the knowledge of those skilled in the art to realize such feature, structure or property in combination with other embodiments which are explicitly or implicitly described.

[0069] It should be understood that “on”, “above” and “over” in the present disclosure should be interpreted in the broadest way, so that “on” not only means “directly on”, but also includes the meaning of “on” with intermediate features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over”, but also includes the meaning of “above” or “over” without intermediate features or layers therebetween (i.e. directly on).

[0070] In addition, spatial relative terms can be used in the text for the purpose of description, such as “below”, “under”, “beneath”, “above”, “over” and the like, to describe the relationship of one component or feature with respect to other components or features as shown in the drawings. The spatial relative terms are intended to include different orientations of the components in use or operation in addition to the orientation shown in the drawings. The device can have other orientations (rotated 90 degrees or in other orientations), and the spatial relative terms used in the text can also be interpreted accordingly.

[0071] ​It should be noted that, as used in this document, the terms "comprises", "comprising", or any other variation thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises a", "comprising", or "comprises" does not, without more constraints, preclude the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0072] The foregoing is merely illustrative of the principles of this application and various modifications can be made by those skilled in the art without departing from the scope and spirit of the application.

Claims

1. A transport device, characterized in that The boat structure is configured to be transported to and from a plurality of reaction furnaces arranged in sequence in a vertical direction, respectively; The transport device comprises: A bearing assembly configured to support the boat structure, the boat structure being placed along a first horizontal direction; A first transport assembly connected with the bearing assembly and configured to drive the bearing assembly to move in a second horizontal direction, wherein the second horizontal direction is perpendicular to the first horizontal direction; A second transport assembly connected with the first transport assembly and configured to drive the first transport assembly to move in the first horizontal direction; A lifting assembly connected with the second transport assembly and configured to drive the second transport assembly and the first transport assembly to lift; The first transport assembly comprises: A power member connected with the second transport assembly and configured to provide power; A first synchronization member connected with the power member and rotating under the drive of the power member; A second synchronization member arranged in the first horizontal direction and spaced apart from the first synchronization member; A first transmission member in transmission connection with the first synchronization member and the second synchronization member and configured to move under the drive of the first synchronization member and drive the second synchronization member to rotate; A first screw rod extending along the second horizontal direction and arranged in the first horizontal direction and spaced apart from the power member, one end of the first screw rod being connected with the second synchronization member and rotating under the drive of the second synchronization member; A first screw rod nut in screw connection with the first screw rod and connected with the bearing assembly, the first screw rod nut moving along the second horizontal direction under the drive of the first screw rod to drive the bearing assembly to move along the second horizontal direction.

2. The transport device of claim 1, wherein, The first synchronization member and the second synchronization member are both synchronous wheels, and the first transmission member is a transmission belt; or The first synchronization member and the second synchronization member are both gears, and the first transmission member is at least one gear.

3. The transport apparatus of claim 1, wherein, The first transport assembly further comprises: A support platform configured to support the power member, the first synchronization member and the second synchronization member being rotatably connected with the support platform, the support platform being connected with the second transport assembly; A slide rail arranged on the support platform and extending along the second horizontal direction and arranged in the first horizontal direction and spaced apart from the power member; A slide block connected with the bearing assembly and in sliding connection with the slide rail and used to support and guide the bearing assembly.

4. The transport apparatus of claim 3, wherein, The slide rail comprises: A first sub-slide rail arranged on the support platform and extending along the second horizontal direction and arranged in the first horizontal direction and spaced apart from the power member; A second sub-slide rail arranged on the support platform and extending along the second horizontal direction and arranged on a side of the power member away from the first sub-slide rail; The slide block comprises: A first sub-slide block connected with the bearing assembly and in sliding connection with the first sub-slide rail; A second sub-slide block connected with the bearing assembly and in sliding connection with the second sub-slide rail.

5. The transport apparatus of claim 3, wherein, The first transport assembly further comprises: A fixing member fixedly connected with the support platform, and the second synchronizing member is rotatably connected with the fixing member.

6. Transport device according to any one of claims 1 to 5, characterized in that The lifting assembly comprises: A lifting drive configured to provide a lifting power; A first lifting member connected with the second conveying assembly and the lifting drive, and driven by the lifting drive to lift; A second lifting member connected with the second conveying assembly, and the first and second lifting members are respectively arranged at two ends of the second conveying assembly along the first horizontal direction; A second transmission member connected at two ends of the lifting drive and the second lifting member, and configured to transmit the lifting power of the lifting drive to the second lifting member so that the second lifting member synchronously lifts with the first lifting member.

7. The transport apparatus of claim 6, wherein, Further comprising: An auxiliary guide rod extending along the vertical direction and capable of extending and retracting along the vertical direction, the auxiliary guide rod being connected with the second conveying assembly and arranged adjacent to the second lifting member.

8. The transport apparatus of claim 6, wherein, The first lifting member and / or the second lifting member comprises: A second screw rod extending along the vertical direction, the second screw rod being connected with the lifting drive and rotated under the driving of the lifting drive; A second screw rod nut threadedly connected with the second screw rod and connected with the second conveying assembly, the second screw rod nut moving along the vertical direction under the driving of the second screw rod to drive the second conveying assembly to move along the vertical direction; At least one telescopic guide rod extending along the vertical direction and capable of extending and retracting along the vertical direction, the telescopic guide rod being arranged adjacent to the second screw rod and connected with the second conveying assembly, and configured to support and guide the second conveying assembly.

9. The transport apparatus of claim 6, wherein, The transmission member comprises: At least one transmission shaft connected at two ends of the lifting drive and the second lifting member, and configured to transmit the lifting power of the lifting drive to the second lifting member; The lifting assembly further comprises: A rotating shaft seat sleeved on the transmission shaft, rotatably connected with the transmission shaft, and connected with the second conveying assembly.

10. The transport device according to any one of claims 1 to 5, characterized in that The bearing assembly comprises: A bearing platform connected with the first conveying assembly; A positioning block connected with the bearing platform; A boat pushing drive configured to drive the boat structure to move on the bearing platform along the first horizontal direction.

11. A processing apparatus characterized by comprising: The conveying device comprises: A plurality of reaction furnaces arranged in sequence along the vertical direction and configured to process the sheet-shaped material carried by the boat structure; The conveying device of any one of claims 1 to 10 is configured to respectively convey the boat structure to or from the plurality of reaction furnaces.

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