Seed crystal shaft positioning device and crystal growth furnace
By designing a seed crystal shaft positioning device and utilizing the limiting fit of the positioning sleeve and the positioning bearing, the problem of seed crystal shaft shaking during the crystal growth process was solved, thus improving the crystal growth quality.
Patent Information
- Application Number
- CN202423159958.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2034-12-20
AI Technical Summary
The existing seed crystal axis is prone to shaking during the crystal growth process, resulting in uneven crystal growth and affecting the quality of crystal growth.
A seed crystal shaft positioning device was designed, including a positioning sleeve and a positioning bearing. The seed crystal shaft is prevented from shaking by limiting the fit. A crossbar positioning device and an up-and-down translation mechanism are used to ensure the stability of the seed crystal shaft during the rotation and lifting process.
The positioning sleeve and positioning bearing with limit cooperation prevent the seed crystal shaft from shaking during the crystal growth process, thus improving the crystal growth quality.
Smart Images
Figure CN223837640U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor crystal growth technology, and in particular to a seed crystal axis positioning device and a crystal growth furnace using the seed crystal axis positioning device. Background Technology
[0002] Existing crystal growth methods involve heating the raw material in a crucible to form a solution, and then inserting a seed crystal shaft with a seed crystal rod attached to its head into the solution for rotational pulling to grow the crystal. However, in existing equipment, the seed crystal shaft vibrates during rotational pulling, which can lead to uneven crystal growth and affect the quality of the crystal.
[0003] The technical problem to be solved by this application is: to design a seed crystal axis positioning device that can prevent the seed crystal axis from shaking during crystal growth, thereby improving the quality of crystal growth, and a crystal growth furnace using the seed crystal axis positioning device. Utility Model Content
[0004] In order to overcome the shortcomings of the prior art, the purpose of this utility model is to provide a seed crystal axis positioning device that can prevent the seed crystal axis from shaking during crystal growth, thereby improving the quality of crystal growth, and a crystal growth furnace using the seed crystal axis positioning device.
[0005] The technical solution adopted by this utility model is as follows: a seed crystal shaft positioning device, including a seed crystal shaft and a crossbar positioning device. The crossbar positioning device includes a positioning rod and a positioning mechanism connected to one end of the positioning rod. The positioning mechanism includes a positioning sleeve and a positioning bearing located inside the positioning sleeve. The positioning bearing and the seed crystal shaft are in a limiting fit.
[0006] In some embodiments, the positioning sleeve is fixedly connected to one end of the positioning rod, and a number of leveling screws are symmetrically arranged on the side of the positioning sleeve to rotate with it. One end of the leveling screw is fixedly connected to the outer side of the positioning bearing.
[0007] In some embodiments, a vertical translation mechanism is also included, which includes a translation slide rail and a translation slider that is limited and slidably engaged with the translation slide rail.
[0008] In some implementations, the translation slider is fixedly connected to the other end of the positioning rod.
[0009] In some implementations, the translation slide rail is arranged longitudinally.
[0010] A crystal growth furnace is provided, which includes any of the seed crystal shaft positioning devices described in the above embodiments, comprising a vacuum chamber, wherein the seed crystal shaft passes through the top of the vacuum chamber, and the crossbar positioning device is located inside the vacuum chamber.
[0011] In some implementations, the translational slide rail is located on the inner wall of the vacuum cavity.
[0012] In some embodiments, a crucible is also provided inside the vacuum chamber, and a crucible shaft is provided at the bottom of the crucible, which extends through the bottom of the vacuum chamber.
[0013] In some embodiments, the seed crystal shaft has a seed crystal rod connected to its end located inside the vacuum cavity.
[0014] The present invention has the following technical effects: by providing a crossbar positioning device, which includes a positioning mechanism, and the positioning mechanism includes a positioning sleeve and a positioning bearing, the positioning bearing and the seed crystal shaft are matched in a limiting manner. When the seed crystal shaft is rotating and pulling the crystal, the positioning bearing limits its movement, so there will be no shaking, thus not affecting the quality of the crystal growth. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the seed crystal axis positioning device in Embodiment 1 of this utility model;
[0016] Figure 2 This is the seed crystal axis positioning device of Embodiment 1 of the present invention. Figure 1 Schematic diagram of partial structure A;
[0017] Figure 3 This is a schematic diagram of the crystal growth furnace in Embodiment 2 of this utility model;
[0018] Figure 4 This is a cross-sectional structural diagram of the crystal growth furnace in Embodiment 2 of this utility model.
[0019] The labels and names in the diagram correspond as follows: 1. Seed crystal shaft; 2. Crossbar positioning device; 20. Positioning rod; 21. Positioning mechanism; 210. Positioning sleeve; 211. Positioning bearing; 212. Leveling screw; 3. Up and down translation mechanism; 30. Translation slide rail; 31. Translation slider; 4. Vacuum cavity; 40. Crucible; 41. Crucible shaft; 42. Seed crystal rod. Detailed Implementation
[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0021] Example 1, please refer to Figure 1-2This utility model provides a technical solution: a seed crystal shaft positioning device, including a seed crystal shaft 1 and a crossbar positioning device 2, wherein the crossbar positioning device 2 includes a positioning rod 20 and a positioning mechanism 21 connected to one end of the positioning rod 20, wherein the positioning mechanism 21 includes a positioning sleeve 210 and a positioning bearing 211 located inside the positioning sleeve 210. By limiting the fit between the positioning bearing 211 and the seed crystal shaft 1, when the seed crystal shaft 1 is rotated and pulled for crystal growth, the seed crystal shaft 1 will not wobble due to the limitation of the positioning bearing 211, thus affecting the crystal growth quality.
[0022] The positioning sleeve 210 is fixedly connected to one end of the positioning rod 20. Several leveling screws 212 are symmetrically arranged on the side of the positioning sleeve 210 and rotate with it. One end of the leveling screw 212 is fixedly connected to the outside of the positioning bearing 211. There will be a certain gap between the positioning sleeve 210 and the positioning bearing 211. Therefore, by adjusting the leveling screw 212, the position of the positioning bearing 211 can be moved appropriately, so that the positioning bearing 211 can better limit the fit between itself and the seed crystal shaft 1.
[0023] It also includes a vertical translation mechanism 3, which includes a translation slide rail 30 and a translation slider 31 that is limited and slidably engaged with the translation slide rail 30. The translation slide rail 30 is arranged longitudinally, and the translation slider 31 is fixedly connected to the other end of the positioning rod 20. Since the seed crystal shaft 1 needs to be lifted and pulled during crystal growth, when the seed crystal shaft 1 is lifted and pulled, it may drive the positioning bearing 211 that is limited to it to rise and fall together. Therefore, when the positioning bearing 211 rises and falls, it will drive the positioning rod 20, thereby driving the slider to rise and fall synchronously.
[0024] Example 2: Please refer to Figure 3-4 This utility model provides another technical solution: a crystal growth furnace, which is equipped with any of the seed crystal shaft positioning devices in Embodiment 1 above, including a vacuum chamber 4, a seed crystal shaft 1 passing through the top of the vacuum chamber 4, wherein a crossbar positioning device 2 is located inside the vacuum chamber 4, a translation slide rail 30 is provided on the inner wall of the vacuum chamber 4, a crucible 40 is also provided inside the vacuum chamber 4, a crucible shaft 41 is provided at the bottom of the crucible 40, the crucible shaft 41 passes through the bottom of the vacuum chamber 4, and a seed crystal rod 42 connected to the end of the seed crystal shaft 1 located inside the vacuum chamber 4 is also provided. When crystal growth is carried out, the raw material is first placed in the crucible 40 for heating and melting, and then the seed crystal shaft 1 drives the seed crystal rod 42 to extend into the crucible 40 for rotation and crystal growth. Since the seed crystal shaft 1 and the positioning bearing 211 are in a limiting fit, and the positioning bearing 211 is connected to the positioning rod 20 through the positioning sleeve 210, the seed crystal shaft 1 will not shake when rotating, thus not affecting the quality of crystal growth.
[0025] The working principle of this utility model is as follows: A horizontal bar positioning device 2 is provided, which is equipped with a positioning mechanism 21. The positioning mechanism 21 is equipped with a positioning sleeve 210 and a positioning bearing 211. By limiting the positioning bearing 211 and the seed crystal shaft 1, when the seed crystal shaft 1 is rotating and pulling the crystal, the positioning bearing 211 limits it, so there will be no shaking, thus not affecting the crystal growth quality.
[0026] Finally, it should be noted that the above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A seed crystal axis positioning device, characterized in that, The device includes a seed crystal shaft and a crossbar positioning device. The crossbar positioning device includes a positioning rod and a positioning mechanism connected to one end of the positioning rod. The positioning mechanism includes a positioning sleeve and a positioning bearing located inside the positioning sleeve. The positioning bearing has a limiting fit with the seed crystal shaft.
2. The seed crystal axis positioning device according to claim 1, characterized in that, The positioning sleeve is fixedly connected to one end of the positioning rod. Several leveling screws are symmetrically arranged on the side of the positioning sleeve and rotate with it. One end of the leveling screw is fixedly connected to the outer side of the positioning bearing.
3. The seed crystal axis positioning device according to claim 1, characterized in that, It also includes a vertical translation mechanism, which includes a translation slide rail and a translation slider that has a limiting sliding engagement with the translation slide rail.
4. The seed crystal axis positioning device according to claim 3, characterized in that, The translation slider is fixedly connected to the other end of the positioning rod.
5. The seed crystal axis positioning device according to claim 3, characterized in that, The translation slide rail is set longitudinally.
6. A crystal growth furnace, characterized in that, The crystal growth furnace is equipped with any of the seed crystal shaft positioning devices according to claims 1-5, including a vacuum chamber, wherein the seed crystal shaft passes through the top of the vacuum chamber, and the crossbar positioning device is located inside the vacuum chamber.
7. The crystal growth furnace according to claim 6, characterized in that, The translation slide rail is located on the inner wall of the vacuum cavity.
8. The crystal growth furnace according to claim 6, characterized in that, The vacuum chamber is also equipped with a crucible, and the bottom of the crucible is equipped with a crucible shaft that passes through the bottom of the vacuum chamber.
9. The crystal growth furnace according to claim 6, characterized in that, The seed crystal shaft has a seed crystal rod connected to its end located inside the vacuum cavity.