Monocrystalline silicon reclaimed material resistivity automatic measuring device

Abstract

The utility model relates to the technical field of resistivity measurement, and particularly discloses a monocrystalline silicon reclaimed material resistivity automatic measurement device, which comprises a flexible clamping jaw unit arranged at one end of an arranged three-axis servo mechanical arm, and the flexible clamping jaw unit comprises an array type silica gel air bag structure, a pneumatic driving unit, a first pressure sensor and a laser profile sensor; the array type silica gel air bag structure comprises a plurality of independent air chambers, a first pressure sensor is arranged in each air chamber, and a vacuum adsorption disc is arranged at the end of each air chamber. The pneumatic driving unit comprises an air cylinder, an electromagnetic valve and a pneumatic pipeline; the four-probe measuring module comprises a probe array, a driving sliding table, a probe base and a measuring station platform; the probe array comprises four tungsten steel probes, the four tungsten steel probes are linearly arranged, each probe of the probe array is arranged on a probe base, a second pressure sensor is arranged at the joint of the probe base and the probes, the probe base is connected with a driving sliding table, and the driving sliding table is in sliding connection with an arranged lifting frame.

Description

Technical Field

[0001] This application relates to the field of resistivity measurement technology, specifically to an automatic resistivity measuring device for recycled monocrystalline silicon. Background Technology

[0002] The recycled monocrystalline silicon material needs to be classified according to the needs of downstream production. The resistivity of each recycled monocrystalline silicon material needs to be measured before cleaning. In the existing technology, a universal resistance meter is used to measure the resistivity of the recycled monocrystalline silicon material. The measurement results cannot be stored, making it inconvenient to verify the data with subsequent processes. The measurement data cannot be displayed on a large screen in real time and can only be done manually, which is inefficient. Summary of the Invention

[0003] The purpose of this application is to provide an automatic resistivity measuring device for recycled monocrystalline silicon materials, which solves the problems of the prior art where a universal resistance meter is used to measure the resistivity of recycled monocrystalline silicon materials, the measurement results cannot be stored, it is inconvenient to verify the data with subsequent processes, the measurement data cannot be displayed on a large screen in real time and can only be done manually, resulting in low efficiency.

[0004] To achieve the above objectives, this application provides an automatic resistivity measuring device for recycled monocrystalline silicon, comprising: a flexible gripper unit and a four-probe measuring module, wherein...

[0005] The flexible gripper unit is located at one end of the three-axis servo robotic arm. The flexible gripper unit includes an array-type silicone airbag structure, a pneumatic drive unit, a first pressure sensor, and a laser contour sensor.

[0006] The array-type silicone airbag structure includes multiple independent air chambers, each of which is equipped with the first pressure sensor, and each of which is equipped with a vacuum adsorption plate at its end;

[0007] The pneumatic drive unit includes a cylinder, a solenoid valve, and pneumatic pipelines. Each air chamber is connected to a pneumatic pipeline, and each pneumatic pipeline is connected to the cylinder through a solenoid valve.

[0008] The four-probe measurement module includes a probe array, a drive slide, a probe base, and a measurement station platform;

[0009] The probe array is set above the measurement station platform. The probe array includes four tungsten steel probes arranged in a straight line. Each probe in the probe array is set on the probe base. A second pressure sensor is provided at the connection between the probe base and the probe. The probe base is connected to the drive slide, and the drive slide is slidably connected to the set lifting frame.

[0010] Optionally, the laser profile sensor is communicatively connected to the PLC controller, and the PLC controller is also communicatively connected to the first pressure sensor and the solenoid valve.

[0011] Optionally, the lifting frame is provided with at least two ball screws, and the drive slide is connected to the nuts provided on the ball screws.

[0012] Optionally, the probe tail is integrated with a piezoelectric ceramic micro-motion mechanism.

[0013] Optionally, the measuring station platform is provided with vacuum adsorption holes.

[0014] Optionally, it also includes:

[0015] A data management system is communicatively connected to the probe array of the four-probe measurement module for acquiring and storing measurement results.

[0016] Optionally, it also includes:

[0017] The display screen is communicatively connected to the data management system and is used to display the measurement result data.

[0018] The embodiments of this application have the following advantages:

[0019] Compared to existing technologies, the automatic resistivity measurement device for recycled monocrystalline silicon provided by the above technical solution utilizes a flexible gripper unit to pick up the recycled monocrystalline silicon and place it onto a resistivity measurement platform equipped with a four-probe measurement module. The recycled monocrystalline silicon is then fixed using vacuum adsorption holes. A servo motor drives a ball screw to rotate, causing the drive slide to move downwards. When the probe array contacts the recycled monocrystalline silicon, the four-probe measurement module performs multi-point resistivity measurements. The measurement results are uploaded to a data management system, generating a quality report, which is displayed on a screen. Afterwards, the silicon is automatically sorted into corresponding material frames according to preset thresholds. Thus, through the combination of precision mechanical structure and intelligent control algorithms, fully automatic and high-precision measurement of the resistivity of recycled monocrystalline silicon is achieved, meeting industrial-grade reliability and efficiency requirements. Attached Figure Description

[0020] To more clearly illustrate the embodiments of this application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0021] Figure 1 A communication connection diagram of an automatic resistivity measuring device for single-crystal silicon recycled material provided for at least one embodiment of this application;

[0022] Figure 2 A schematic diagram of a flexible gripper unit structure for an automatic resistivity measuring device for single-crystal silicon recycled material provided in at least one embodiment of this application;

[0023] Figure 3 A schematic diagram of a three-axis servo robotic arm structure for an automatic resistivity measuring device for single-crystal silicon recycled material provided in at least one embodiment of this application;

[0024] Figure 4 A schematic diagram of the four-probe measurement module structure of an automatic resistivity measurement device for monocrystalline silicon recycled material provided in at least one embodiment of this application;

[0025] Figure 5 A schematic diagram of the probe array structure of an automatic resistivity measuring device for single-crystal silicon recycled material provided in at least one embodiment of this application.

[0026] Explanation of reference numerals in the attached figures:

[0027] 1. Three-axis servo robotic arm; 2. Array-type silicone airbag structure; 3. Probe array; 4. Drive slide; 5. Probe base; 6. Measurement station platform; 7. Lifting frame. Detailed Implementation

[0028] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Unless otherwise expressly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication of two elements. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] Furthermore, the technical features involved in the different embodiments of this application described below can be combined with each other as long as they do not conflict with each other.

[0031] This application provides an automatic resistivity measuring device for recycled monocrystalline silicon material, referencing... Figures 1 to 5 ,include:

[0032] The flexible gripper unit and the four-probe measurement module, among which,

[0033] The flexible gripper unit is located at one end of the three-axis servo robotic arm 1. The flexible gripper unit includes an array-type silicone airbag structure 2, a pneumatic drive unit, a first pressure sensor, and a laser contour sensor.

[0034] The array-type silicone airbag structure 2 includes multiple independent air chambers, each of which is equipped with the first pressure sensor, and each of which is equipped with a vacuum adsorption plate at its end;

[0035] The pneumatic drive unit includes a cylinder, a solenoid valve, and pneumatic pipelines. Each air chamber is connected to a pneumatic pipeline, and each pneumatic pipeline is connected to the cylinder through a solenoid valve.

[0036] The four-probe measurement module includes a probe array 3, a drive slide 4, a probe base 5, and a measurement station platform 6.

[0037] The probe array 3 is set above the measurement station platform 6. The probe array 3 includes four tungsten steel probes arranged in a straight line. Each probe of the probe array 3 is set on the probe base 5. A second pressure sensor is provided at the connection between the probe base 5 and the probe. The probe base 5 is connected to the drive slide 4. The drive slide 4 is slidably connected to the set lifting frame 7.

[0038] In some embodiments, the laser profile sensor is communicatively connected to a PLC controller, and the PLC controller is also communicatively connected to a first pressure sensor and a solenoid valve.

[0039] Specifically, the workflow of the flexible gripper unit is as follows: a laser sensor scans the outline of the monocrystalline silicon recycled material and generates 3D point cloud data; based on the 3D point cloud data, the PLC controller calculates the optimal gripping point and controls the solenoid valve to adjust the airbag pressure distribution of the array-type silicone airbag structure 2; vacuum adsorption is initiated, and the first pressure sensor provides real-time feedback on the contact pressure; the servo motor rotates, causing the three-axis servo robotic arm 1 to move the monocrystalline silicon recycled material to the resistivity measurement station equipped with a four-probe measurement module.

[0040] In some embodiments, the lifting frame 7 is provided with at least two ball screws, and the drive slide 4 is connected to the nuts provided on the ball screws. The ball screws are driven to rotate by a servo motor.

[0041] In some embodiments, the probe tail integrates a piezoelectric ceramic micro-motion mechanism (PIP-611.3S). This enables vertical fine-tuning within the probe base 5 by ±10μm, compensating for unevenness on the silicon surface. A second pressure sensor monitors the contact pressure of the probe array 3 in real time and feeds it back to the PLC controller. When the detected pressure reaches a preset threshold, the drive slide 4 is immediately stopped.

[0042] In some embodiments, the measuring station platform 6 is provided with vacuum adsorption holes for fixing recycled monocrystalline silicon material.

[0043] In some embodiments, it also includes:

[0044] The data management system is communicatively connected to the probe array 3 of the four-probe measurement module and is used to acquire and store measurement results.

[0045] In some embodiments, it also includes:

[0046] The display screen is communicatively connected to the data management system and is used to display the measurement result data.

[0047] Specifically, the workflow of the automatic resistivity measurement device for recycled monocrystalline silicon includes:

[0048] The feeding conveyor belt delivers the recycled monocrystalline silicon material to the flexible gripper unit station. The flexible gripper unit picks up the recycled monocrystalline silicon material and places it onto the measurement station platform 6, which is equipped with a four-probe measurement module. The recycled monocrystalline silicon material is fixed by vacuum adsorption holes. The ball screw is driven by a servo motor to rotate, causing the drive slide 4 to move down. When the probe array 3 contacts the recycled monocrystalline silicon material, the resistivity is measured at multiple points by the four-probe measurement module. The measurement results are uploaded to the data management system and a quality report is generated and displayed on the screen. After that, the material is automatically sorted into the corresponding material frame according to the preset threshold.

[0049] Note that, unless otherwise explicitly stated, all features disclosed in this specification (including any appended claims, abstract, and drawings) may be replaced by alternative features for achieving the same, equivalent, or similar purpose. Therefore, unless explicitly stated otherwise, each disclosed feature is merely one example of a set of equivalent or similar features. Where used, "further," "preferably," "even further," and "more preferably" are simple starting points for describing another embodiment based on the foregoing embodiments, the combination of which with the foregoing embodiments constitutes the complete configuration of another embodiment. Any combination of several "further," "preferably," "even further," or "more preferably" settings following the same embodiment constitutes yet another embodiment.

[0050] In the implementation of functions and steps, the corresponding functions and steps in the various embodiments may occur in a different order than those shown. For example, two consecutive functions and steps may actually be executed or implemented substantially in parallel, and they may sometimes be executed or implemented in reverse order, depending on the functions involved.

[0051] Although this application has been described in detail above with general descriptions and specific embodiments, some modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, all such modifications or improvements made without departing from the spirit of this application fall within the scope of protection claimed in this application.

Claims

1. An automatic resistivity measuring device for recycled monocrystalline silicon, characterized in that, include: The flexible gripper unit and the four-probe measurement module, among which, The flexible gripper unit is located at one end of the three-axis servo robotic arm. The flexible gripper unit includes an array-type silicone airbag structure, a pneumatic drive unit, a first pressure sensor, and a laser contour sensor. The array-type silicone airbag structure includes multiple independent air chambers, each of which is equipped with the first pressure sensor, and each of which is equipped with a vacuum adsorption plate at its end; The pneumatic drive unit includes a cylinder, a solenoid valve, and pneumatic pipelines. Each air chamber is connected to a pneumatic pipeline, and each pneumatic pipeline is connected to the cylinder through a solenoid valve. The four-probe measurement module includes a probe array, a drive slide, a probe base, and a measurement station platform; The probe array is set above the measurement station platform. The probe array includes four tungsten steel probes arranged in a straight line. Each probe in the probe array is set on the probe base. A second pressure sensor is provided at the connection between the probe base and the probe. The probe base is connected to the drive slide, and the drive slide is slidably connected to the set lifting frame.

2. The automatic resistivity measuring device for recycled monocrystalline silicon material according to claim 1, characterized in that, The laser profile sensor is communicatively connected to the PLC controller, which is also communicatively connected to the first pressure sensor and the solenoid valve.

3. The automatic resistivity measuring device for recycled monocrystalline silicon according to claim 1, characterized in that, The lifting frame is equipped with at least two ball screws, and the drive slide is connected to the nuts on the ball screws.

4. The automatic resistivity measuring device for recycled monocrystalline silicon material according to claim 1, characterized in that, The probe tail integrates a piezoelectric ceramic micro-motion mechanism.

5. The automatic resistivity measuring device for recycled monocrystalline silicon according to claim 1, characterized in that, The measuring station platform is equipped with vacuum adsorption holes.

6. The automatic resistivity measuring device for recycled monocrystalline silicon according to claim 1, characterized in that, Also includes: A data management system is communicatively connected to the probe array of the four-probe measurement module for acquiring and storing measurement results.

7. The automatic resistivity measuring device for recycled monocrystalline silicon according to claim 6, characterized in that, Also includes: The display screen is communicatively connected to the data management system and is used to display the measurement result data.

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