Metallized film double-sided evaporation device

Abstract

The utility model discloses a metallized film double-sided evaporation device, which relates to the technical field of metallized film evaporation, and comprises an evaporation bin, a film main body and an evaporation mechanism, the evaporation mechanism is arranged on an evaporation source at the bottom of the inner side of the evaporation bin, an air outlet nozzle fixedly communicated with the air outlet end of the evaporation source, and a bottom evaporation part arranged on the air outlet nozzle, the bottom evaporation part is an evaporation pipe I arranged below the thin film main body; the evaporation mechanism further comprises a top evaporation part for evaporating the top surface of the thin film main body, a differential compensation part for compensating the evaporation effect of the top surface of the thin film main body and a flow direction limiting part; through the arrangement of the top evaporation part, when an evaporation material is heated and gasified and is introduced into the inner side of the evaporation pipe I through the gas outlet nozzle, part of the gasified evaporation material can still be introduced into the evaporation pipe II through the communicating pipe and is output by the evaporation pipe II facing downwards and directly facing the top surface of the film main body, so that the evaporation gas is distributed in a manner of distributing the evaporation gas; the second evaporation pipe and the first evaporation pipe are matched, and the effect of synchronous evaporation of the two faces of the film body is achieved.

Description

Technical Field

[0001] This utility model relates to the field of metallization thin film evaporation technology, specifically to a metallization thin film double-sided evaporation device. Background Technology

[0002] Evaporation refers to heating the material to be vaporized under certain vacuum conditions, causing it to melt (or sublimate) and form vapor composed of atoms, molecules, or atomic groups, which condenses on the surface of the substrate to form a film. The vaporization angle refers to the angle between the evaporation beam and the substrate, and the vaporization angle affects the thickness of the vaporized layer.

[0003] In the production of metallized films for capacitors, existing metallization coating equipment can only deposit metal film on one side at a time. For products that require double-sided metallization, it is necessary to deposit metal film on one side, rewind, and then rewind to deposit the other side. This not only results in low deposition efficiency and wasted energy, but also increases the defect rate due to repeated rewinding and unwinding, which is not conducive to mass production. Utility Model Content

[0004] To address the aforementioned technical problems, a double-sided metallization thin film evaporation apparatus is provided. This solves the problem in the prior art where, when performing double-sided evaporation on a thin film, the film needs to be removed from the equipment, flipped over, and then evaporated. This not only increases the operational process but may also lead to contamination or damage to the film during the flipping process, affecting the evaporation quality.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a metallization thin film double-sided vapor deposition apparatus, including a vapor deposition chamber, a thin film body that is recessed inside the vapor deposition chamber, and a vapor deposition mechanism for vapor deposition on the surface of the thin film body.

[0006] The vapor deposition mechanism includes an evaporation source installed at the bottom of the inner side of the vapor deposition chamber, an outlet nozzle fixedly connected to the outlet end of the evaporation source, and a bottom vapor deposition section disposed on the outlet nozzle. The bottom vapor deposition section is an evaporation tube placed below the film body. The vapor deposition mechanism also includes a top vapor deposition section for vapor deposition of the top surface of the film body, a differential speed compensation section for compensating the evaporation effect of the top surface of the film body, and a flow direction restriction section.

[0007] The top evaporation section includes an evaporation tube two located above the film body and a connecting pipe fixedly connected between the evaporation tube two and the air outlet. The evaporation tube two and the evaporation tube one are symmetrically distributed vertically.

[0008] The differential compensation unit mainly consists of an adjustable ventilation component and a flow rate enhancement component;

[0009] The flow restriction part includes a restriction seat that is fixedly sleeved on the outside of the second evaporator tube in the shape of a rectangular frame and a pressure enhancement component located inside the restriction seat. Exhaust grooves are provided at the bottom of both the front and rear sides of the restriction seat.

[0010] Preferably, the adjustable ventilation assembly includes a corrugated pipe fixedly connected between the evaporator pipe and the air outlet, a control panel disposed on the rear side of the corrugated pipe, and a bending member disposed on the control panel for changing the shape of the corrugated pipe.

[0011] Preferably, the flow rate enhancement component is a blower installed on the body of the connecting pipe, and a solenoid valve is built into the connection between the connecting pipe and the air outlet.

[0012] Preferably, the bending member mainly consists of a fixed sleeve fitted onto the corrugated pipe body and two movable sleeves. The two movable sleeves are symmetrically distributed vertically and slidably connected to the control panel. The fixed sleeve is located between the two movable sleeves and is fixedly connected to the control panel.

[0013] Preferably, the bending component further includes two transmission screws staggered on the control panel, a transmission screw seat rotatably connected between the inner walls on both sides of the transmission screw, and a connecting frame threaded onto the shaft of the transmission screw seat. The two connecting frames are respectively fixedly connected to the two movable sleeves, and the threads of the two transmission screw seats are in opposite directions.

[0014] Preferably, the air pressure enhancement assembly includes two air guide hoods symmetrically fixed inside the limiting seat, a ventilation pipe fixedly connected between the two air guide hoods, and an exhaust fan installed in the ventilation pipe.

[0015] Compared with the prior art, the advantages of this utility model are:

[0016] (1) By setting the top evaporation section, when the vaporized material is heated and vaporized, it is introduced into the inner side of the evaporation tube one through the gas outlet. Part of the vaporized material can still be introduced into the evaporation tube two through the connecting pipe and output from the evaporation tube two downwards to the top surface of the film body. In this way, by diverting the vaporized gas, the evaporation tube two and the evaporation tube one can cooperate to achieve the effect of simultaneous vaporization on both sides of the film body.

[0017] (2) By setting up the differential compensation section, the bending component in the adjustable ventilation component is used to change the deformation of the bellows, so that it forms an "S" shape. By increasing the path, the time for the vaporized gas to enter the evaporation tube one is extended. At the same time, the blower can still be turned on to enhance the steam flow rate in the connecting pipe, so as to compensate for the time difference between the steam entering the evaporation tube one and the evaporation tube two as much as possible, and improve the use effect.

[0018] (3) By setting the limiting seat, an efficient and stable airflow channel can be built between the second evaporator tube and the thin film body, and the flow direction of the vapor deposition gas output from the second evaporator tube is strictly constrained and guided. Specifically, the physical barrier formed by the limiting seat makes the vapor deposition gas flow vertically downward in a specific space and accurately reach the top surface of the thin film body, thereby achieving a high degree of controllability of the vapor deposition process. After the vapor deposition gas completes its interaction with the surface of the thin film body, it will be discharged horizontally through the exhaust groove. After leaving the exhaust groove, the discharged gas blows the surface of the thin film body located outside the limiting seat again in a specific horizontal flow pattern, thereby greatly suppressing the disorderly diffusion of gas, so that the vapor deposition material fully adheres to the top surface of the thin film body and improves the vapor deposition quality of the top surface.

[0019] (4) By setting up the air pressure enhancement component, when the evaporation tube 2 outputs the vapor deposition gas, the induced draft fan is turned on. The induced draft fan can efficiently draw the vapor deposition gas output by the evaporation tube 2 from the inside of the upper air guide hood and discharge the vapor deposition gas into the lower air guide hood. In this way, by enhancing the air pressure, the vapor deposition gas can sink quickly along the direction guided by the lower air guide hood at a faster speed and a more concentrated flow direction, and finally be accurately blown to the top surface of the film body. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the internal structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the evaporator tube structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the internal structure of the limiting seat of this utility model;

[0024] Figure 5 This is a schematic diagram of the adjustable ventilation component of this utility model.

[0025] The numbers on the map are:

[0026] 1. Evaporation chamber; 2. Thin film body; 3. Evaporation source; 4. Air outlet; 5. Evaporation tube one; 6. Evaporation tube two; 7. Connecting pipe; 8. Blower; 9. Corrugated pipe; 10. Control panel; 11. Fixed sleeve; 12. Movable sleeve; 13. Drive screw; 14. Drive screw seat; 15. Connecting frame; 16. Operating lever; 17. Drive belt; 18. Limiting seat; 19. Exhaust duct; 20. Air guide hood; 21. Ventilation pipe; 22. Exhaust fan. Detailed Implementation

[0027] The following description is intended to disclose the present invention so that those skilled in the art can implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art.

[0028] Reference Figure 1-5 As shown, a metallized thin film double-sided vapor deposition apparatus includes a vapor deposition chamber 1, a thin film body 2 that is recessed inside the vapor deposition chamber 1, and a vapor deposition mechanism for vapor deposition on the surface of the thin film body 2. One end of the thin film body 2 is connected to a take-up roller (not shown in the figure), and the other end of the thin film body 2 is connected to a take-up roller (not shown in the figure).

[0029] The vapor deposition mechanism includes an evaporation source 3 installed at the bottom of the inner side of the vapor deposition chamber 1, an outlet nozzle 4 fixedly connected to the outlet end of the evaporation source 3, and a bottom vaporization section set on the outlet nozzle 4.

[0030] The bottom evaporation section is an evaporation tube 5 located below the film body 2;

[0031] When the winding and unwinding rollers are turned on so that the film body 2 is shrunk inside the vapor deposition chamber 1, the evaporation source 3 is turned on to heat the vapor deposition material stored inside, so that the vapor deposition material is heated and vaporized, and discharged into the evaporation tube 5 through the outlet 4. Finally, the vapor is output from the bottom surface of the film body 2 directly through the evaporation tube 5, thereby achieving the single-sided vapor deposition effect of the film body 2.

[0032] The above implementation method can only achieve the effect of single-sided vapor deposition of thin film body 2. For products that require double-sided vapor deposition of metal film, it is often necessary to rewind and re-deposit the other side after single-sided vapor deposition. This not only results in low vapor deposition efficiency but also wastes energy. Furthermore, repeated rewinding and unwinding will increase the defect rate and is not conducive to mass production.

[0033] A search revealed a double-sided vapor deposition apparatus with the published patent publication number CN216585197U. From the above patent, it can be seen that the prior art sets up two sets of vapor deposition sources that are symmetrically distributed vertically, so that when the thin film body 2 passes through the two sets, it can simultaneously perform double-sided vapor deposition on the thin film body 2, thereby improving the coating efficiency.

[0034] However, in practice, the vapor deposition source placed at the top must have its outlet facing downwards and directly opposite the film body 2 in order to properly vaporize the film body 2. This results in the vapor deposition source being inverted relative to the vapor deposition source below. Once the vapor deposition source is inverted, it is very easy for the vapor deposition material to spill out of the vapor deposition source, resulting in material waste. It will also prevent the material from being supplied to the evaporation area according to the normal path and method, causing the material supply to be interrupted during the vapor deposition process, making it impossible to continue vapor deposition, and thus preventing the formation of a complete and uniform film on the film body 2.

[0035] In view of this, refer to Figure 2 As shown, it is worth noting that the vapor deposition mechanism also includes a top vapor deposition section for the top surface of the thin film body 2.

[0036] The top evaporation section includes an evaporation tube 6 located above the film body 2 and a connecting pipe 7 fixedly connected between the evaporation tube 6 and the air outlet 4. The evaporation tube 6 and the evaporation tube 5 are symmetrically distributed vertically. Several air holes are provided on the opposite side of the evaporation tube 6 and the evaporation tube 5. The evaporation tube 6 and the evaporation tube 5 are both fixedly connected to the inner wall of the vapor deposition chamber 1 through a bracket.

[0037] By setting up the top evaporation section, when the vaporized material is heated and vaporized, it is introduced into the inner side of the first evaporation tube 5 through the gas outlet 4. Part of the vaporized material can still be introduced into the second evaporation tube 6 through the connecting pipe 7, and output from the second evaporation tube 6 downwards towards the top surface of the thin film body 2. In this way, by diverting the vaporized gas, the second evaporation tube 6 and the first evaporation tube 5 can cooperate to achieve the effect of simultaneous vaporization on both sides of the thin film body 2.

[0038] Although the above-described embodiment achieves the effect of simultaneous evaporation on both sides of the thin film body 2 through evaporation tube 2 6 and evaporation tube 1 5, from the actual flow path of the evaporation gas, evaporation tube 1 5, which is built under the thin film body 2, is closer to the evaporation source 3. As a result, the evaporation gas enters the interior of evaporation tube 1 5 earlier than it enters the interior of evaporation tube 2 6. This results in a time difference in the evaporation on both sides of the thin film body 2 at the beginning stage. This time difference may cause the evaporation rate on both sides of the thin film body 2 to be different in the initial stage, affecting the uniformity and consistency of the coating on both sides of the thin film body 2, and ultimately may lead to differences in the overall performance of the thin film body 2.

[0039] Therefore, referring to Figure 2 and Figure 5 As shown, it is worth noting that the vapor deposition mechanism also includes a differential speed compensation unit for compensating for the evaporation effect on the top surface of the thin film body 2.

[0040] The differential compensation unit mainly consists of an adjustable ventilation assembly and a flow rate enhancement assembly;

[0041] The adjustable ventilation assembly includes a corrugated pipe 9 fixedly connected between the evaporation pipe 5 and the air outlet 4, a control panel 10 disposed on the rear side of the corrugated pipe 9, and a bending member disposed on the control panel 10 for changing the shape of the corrugated pipe 9. The control panel 10 is fixedly connected to the inner wall of the vapor deposition chamber 1 via a bracket.

[0042] The flow rate enhancement component is a blower 8 installed on the body of the connecting pipe 7;

[0043] By setting up a differential compensation unit, the bending component in the adjustable ventilation assembly changes the deformation of the bellows 9 to form an "S" shape. By increasing the path, the time for the vapor deposition gas to enter the evaporation tube 5 is extended. At the same time, the blower 8 can still be turned on to enhance the steam flow rate in the connecting pipe 7, thereby compensating for the time difference between the steam entering the evaporation tube 5 and the evaporation tube 6 as much as possible. This allows the evaporation tubes 5 and 6 to output steam to both sides of the film body 2 simultaneously, improving the performance.

[0044] Specifically, refer to Figure 5 As shown, it is worth noting that the bending component is mainly composed of a fixed sleeve 11 and two movable sleeves 12 sleeved on the body of the corrugated pipe 9. The two movable sleeves 12 are symmetrically distributed vertically and are slidably connected to the control panel 10. The fixed sleeve 11 is located between the two movable sleeves 12 and is fixedly connected to the control panel 10.

[0045] The bending component also includes two transmission screws 13 that are staggered on the control panel 10, a transmission screw seat 14 that is rotatably connected between the inner walls on both sides of the transmission screw 13, and a connecting frame 15 that is threaded onto the body of the transmission screw seat 14. The two connecting frames 15 are respectively fixedly connected to the two movable sleeves 12, and the threads of the two transmission screw seats 14 are opposite.

[0046] Both drive screw seats 14 rotate through the control panel 10 and are fixed with operating rods 16. The end of the operating rod 16 rotates through the vapor deposition chamber 1, and a drive belt 17 is connected between the ends of the two operating rods 16. One of the operating rods 16 is also fixed with a handle.

[0047] Turning the handle causes one of the operating rods 16 to rotate, while the other operating rod 16 rotates synchronously under the action of the transmission belt 17, so as to achieve the effect of synchronous rotation of the two transmission screw seats 14, so that the two connecting brackets 15 slide in opposite directions under the corresponding thread structure, pulling the two ends of the bellows 9 in different directions, so that the two ends of the bellows 9 are subjected to forces in different directions to form an "S" shape.

[0048] Furthermore, it is worth noting that a solenoid valve (not shown in the figure) is built into the connection between the connecting pipe 7 and the air outlet 4.

[0049] By setting the solenoid valve, the internal connection of the connecting pipe 7 can be easily switched on and off according to the actual processing situation. When only one side of the thin film body 2 needs to be vaporized using the evaporation tube 1 5, the solenoid valve is closed, so that the steam generated by the evaporation source 3 can only be input into the evaporation tube 1 5 through the gas outlet 4 and the bellows 9. Conversely, when vaporizing the thin film body 2 on both sides, the solenoid valve is opened, so that the internal connection of the connecting pipe 7 and the gas outlet 4 can be connected to split the vaporization gas, so that part of the vaporization gas can be introduced into the evaporation tube 2 6 through the connecting pipe 7 to carry out vaporization on the top surface of the thin film body 2.

[0050] Although the above embodiment enables the evaporator tube 5 and the evaporator tube 6 to output steam to both sides of the thin film body 2 simultaneously through the differential speed compensation unit, the evaporator tube 6 always outputs gas downwards. According to the gas flow, the gas often has enough space to diffuse and rise after being output downwards, so the steam output by the evaporator tube 6 cannot be completely blown onto the top surface of the thin film body 2, resulting in a decrease in the evaporation quality of the top surface of the thin film body 2.

[0051] In view of this, refer to Figure 2-4 As shown, it is worth noting that the vapor deposition mechanism also includes a flow direction restriction part for compensating for the evaporation effect on the top surface of the thin film body 2;

[0052] The flow restriction part includes a restriction seat 18 that is fixedly sleeved on the outside of the evaporator tube 2 6 in a rectangular frame shape. The bottom of the front and rear sides of the restriction seat 18 are provided with exhaust grooves 19. The film body 2 is inserted into the inside of the exhaust groove 19, and there is a certain gap between the film body 2 and the inner wall of the top of the exhaust groove 19.

[0053] By setting the limiting seat 18, an efficient and stable airflow channel can be built between the evaporation tube 2 6 and the thin film body 2, which strictly constrains and guides the flow direction of the vapor deposition gas output from the evaporation tube 2 6. Specifically, the physical barrier formed by the limiting seat 18 allows the vapor deposition gas to flow vertically downwards in a specific space, accurately reaching the top surface of the thin film body 2, thereby achieving a high degree of controllability of the vapor deposition process. After the vapor deposition gas completes its interaction with the surface of the thin film body 2, it will be discharged horizontally through the exhaust groove 19. After leaving the exhaust groove 19, the discharged gas will blow again on the surface of the thin film body 2 located outside the limiting seat 18 in a specific horizontal flow pattern, thereby greatly suppressing the disorderly diffusion of gas and allowing the vapor deposition material to fully adhere to the top surface of the thin film body 2, improving the vapor deposition quality of the top surface.

[0054] Furthermore, referring to Figure 4 As shown, it is worth noting that the flow restriction section also includes a pressure enhancement component located within the restriction seat 18;

[0055] The air pressure enhancement assembly includes two air guide hoods 20 that are symmetrically fixed inside the limiting seat 18, a ventilation pipe 21 that is fixedly connected between the two air guide hoods 20, and an exhaust fan 22 installed in the ventilation pipe 21.

[0056] By setting up the air pressure enhancement component, when the evaporation tube 26 outputs the vapor deposition gas, the exhaust fan 22 is turned on. The exhaust fan 22 can efficiently draw the vapor deposition gas output by the evaporation tube 26 from the inside of the upper air guide hood 20 and discharge the vapor deposition gas into the lower air guide hood 20. In this way, by enhancing the air pressure, the vapor deposition gas can sink quickly along the direction guided by the lower air guide hood 20 at a faster speed and with a more concentrated flow direction, and finally be accurately blown to the top surface of the film body 2.

[0057] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A metallization thin film double-sided vapor deposition apparatus, comprising a vapor deposition chamber (1), a thin film body (2) retracted into the inner side of the vapor deposition chamber (1), and a vapor deposition mechanism for vapor deposition on the surface of the thin film body (2); The vapor deposition mechanism is installed with an evaporation source (3) at the bottom inside the vapor deposition chamber (1), an outlet nozzle (4) fixedly connected to the outlet end of the evaporation source (3), and a bottom vapor deposition section disposed on the outlet nozzle (4). The bottom vapor deposition section is an evaporation tube (5) placed below the film body (2). The vapor deposition mechanism also includes a top vapor deposition section for vapor deposition of the top surface of the thin film body (2), a differential speed compensation section for compensating the evaporation effect of the top surface of the thin film body (2), and a flow direction restriction section; The top evaporation section includes an evaporation tube two (6) located above the film body (2) and a connecting pipe (7) fixedly connected between the evaporation tube two (6) and the air outlet (4). The evaporation tube two (6) and the evaporation tube one (5) are symmetrically distributed vertically. The differential compensation unit mainly consists of an adjustable ventilation component and a flow rate enhancement component; The flow restriction part includes a restriction seat (18) fixedly sleeved outside the evaporator tube (6) in the shape of a rectangular frame and a pressure enhancement component located inside the restriction seat (18). Exhaust grooves (19) are provided at the bottom of both the front and rear sides of the restriction seat (18).

2. The double-sided evaporation apparatus for metallized thin films according to claim 1, characterized in that, The adjustable ventilation assembly includes a corrugated pipe (9) fixedly connected between the evaporator pipe (5) and the air outlet (4), a control panel (10) disposed on the rear side of the corrugated pipe (9), and a bending member disposed on the control panel (10) for changing the shape of the corrugated pipe (9).

3. The double-sided evaporation apparatus for metallized thin films according to claim 1, characterized in that, The flow rate enhancement component is a blower (8) installed on the body of the connecting pipe (7), and a solenoid valve is built into the connection between the connecting pipe (7) and the air outlet (4).

4. The double-sided evaporation apparatus for metallized thin films according to claim 2, characterized in that, The bending component mainly consists of a fixed sleeve (11) sleeved on the body of the corrugated pipe (9) and two movable sleeves (12). The two movable sleeves (12) are symmetrically distributed vertically and slidably connected to the control panel (10). The fixed sleeve (11) is located between the two movable sleeves (12) and is fixedly connected to the control panel (10).

5. The double-sided evaporation apparatus for metallized thin films according to claim 4, characterized in that, The bending component also includes two transmission screws (13) that are staggered on the control panel (10), a transmission screw seat (14) that is rotatably connected between the inner walls on both sides of the transmission screw (13), and a connecting frame (15) that is threaded onto the shaft of the transmission screw seat (14). The two connecting frames (15) are respectively fixedly connected to the two movable sleeves (12), and the threads of the two transmission screw seats (14) are opposite.

6. The double-sided evaporation apparatus for metallized thin films according to claim 1, characterized in that, The air pressure enhancement assembly includes two air guide hoods (20) fixed symmetrically inside the limiting seat (18), a ventilation pipe (21) fixedly connected between the two air guide hoods (20), and an exhaust fan (22) installed in the ventilation pipe (21).

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