Welding protection jig for U-shaped groove of target material

Abstract

The utility model provides a welding protection jig for a U-shaped groove of a target material. The welding protection jig comprises a metal cover plate and a fixing device, wherein the metal cover plate is provided with a positioning hole; the fixing device is used for fixing a target material to be welded and the metal cover plate; the thickness of the metal cover plate is 6-8 mm. The welding protection jig for the U-shaped groove of the target material is simple in structure and can be repeatedly used; and the welding flux can be effectively prevented from flowing into the screw hole in the welding process, and the qualified rate of target welding is further improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to technical field relates to, especially be related to a kind of welding protection fixture for target material U type groove. BACKGROUND

[0002] In semiconductor industry, sputtering target is mainly composed of target blank, back plate and other parts, wherein, target blank is the target material of high-speed ion beam flow bombardment, and it is the core part of sputtering target, in sputtering process, the surface atoms of target blank are scattered and deposited on substrate to make electronic film after being hit by ion; since high-purity metal has low strength, and sputtering target needs to be installed in machine for completing sputtering process, the inside of machine is high-voltage and high-vacuum environment, therefore, sputtering target blank of ultra-high purity metal needs to be joined with back plate through different welding process, back plate plays a role of fixing sputtering target, and needs to have good conductivity and heat conduction performance.

[0003] In sputtering process, the working environment of target assembly is relatively harsh. The environmental temperature of target assembly is high, for example, 300 DEG C to 600 DEG C; in addition, one side of target assembly is cooled by cooling water, and the other side is in high-vacuum environment of 10 -9 Pa, thus forming a huge pressure difference on the opposite sides of target assembly; in addition, target assembly is in high-voltage electric field and magnetic field, and is bombarded by various particles. In such harsh environment, if the welding strength between target and back plate in target assembly is poor, target assembly will be deformed, cracked and separated from combined back plate under heat condition, so that sputtering cannot achieve uniform sputtering effect, and sputtering base may also be damaged.

[0004] At present, in welding process of strip-shaped target, indium material is placed on back plate to combine back plate with target blank, so as to realize welding of target and target blank. However, if U-shaped groove has no any protective measures in welding process of strip-shaped target, indium solder will easily enter screw hole of U-shaped groove, causing blockage of screw hole and damage of target.

[0005] In summary, it is necessary to provide a protection fixture to prevent the influence of solder on target in welding process. UTILITY MODEL CONTENTS

[0006] In view of the deficiencies in prior art, the utility model aims to provide a welding protection fixture for target material U type groove. The protection fixture provided by the utility model can effectively prevent solder from entering screw hole in welding process, improve the qualified rate of target, and the protection fixture can be reused.

[0007] To achieve the purpose, the utility model adopts the following technical solutions:

[0008] The utility model provides a kind of for target material U-shaped groove's welding protection fixture, the welding protection fixture includes the metal cover plate and fixing device being provided with positioning hole;

[0009] The fixing device is used to fix the target material to be welded and the metal cover plate.

[0010] The thickness of the metal cover plate is 6-8mm, for example, it can be 6mm, 6.4mm, 6.8mm, 7.2mm, 7.6mm or 8mm, but is not limited to the listed values, and other values not listed within the value range are also applicable.

[0011] The protection fixture provided by the utility model is simple in structure and can be reused; it can effectively prevent solder from flowing into the screw hole during welding, further improving the qualified rate of target material welding.

[0012] As a preferred technical solution of the utility model, the positioning hole includes a first positioning hole and a second positioning hole.

[0013] As a preferred technical solution of the utility model, the first positioning hole and the second positioning hole are symmetrically arranged along the center line of the metal cover plate.

[0014] Preferably, the distance between the centers of the first positioning hole and the second positioning hole is 42-48mm, for example, it can be 42mm, 43mm, 44mm, 45mm, 46mm, 47mm or 48mm, but is not limited to the listed values, and other values not listed within the value range are also applicable.

[0015] As a preferred technical solution of the utility model, the positioning hole is used to install the fixing device.

[0016] Preferably, the diameter of the positioning hole is 6-8mm, for example, it can be 6mm, 6.4mm, 6.8mm, 7.2mm, 7.6mm or 8mm, but is not limited to the listed values, and other values not listed within the value range are also applicable.

[0017] As a preferred technical solution of the utility model, the fixing device includes a screw and a nut used in conjunction.

[0018] As a preferred technical solution of the utility model, the metal cover plate includes a working area and a fixed area.

[0019] Preferably, the shape of the working area is trapezoidal, and the shape of the fixed area is rectangular.

[0020] Preferably, the length of the long side of the trapezoid is the same as the length of the long side of the rectangle.

[0021] As a preferred technical scheme of the utility model, the long side length of the trapezoid is 62-64mm, for example, can be 62mm, 62.4mm, 62.8mm, 63.2mm, 63.6mm or 64mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0022] Preferably, the short side length of the trapezoid is 10-55mm, for example, can be 10mm, 20mm, 30mm, 40mm, 50mm or 55mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0023] Preferably, the hypotenuse length of the trapezoid is 9-10mm, for example, can be 9mm, 9.2mm, 9.4mm, 9.6mm, 9.8mm or 10mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0024] As a preferred technical scheme of the utility model, the short side length of the rectangle is 8-15mm, for example, can be 8mm, 9mm, 10mm, 11mm, 12mm, 13mm, 14mm or 15mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0025] More specifically, according to the actual size of the target material, the protective jig provided by the utility model can be divided into a first size jig and a second size jig.

[0026] Preferably, the long side length of the trapezoid of the first size jig is 62-64mm, for example, can be 62mm, 62.4mm, 62.8mm, 63.2mm, 63.6mm or 64mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0027] Preferably, the short side length of the trapezoid of the first size jig is 52-55mm, for example, can be 52mm, 52.5mm, 53mm, 53.5mm, 54mm, 54.5mm or 55mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0028] Preferably, the hypotenuse length of the trapezoid of the first size jig is 9-9.5mm, for example, can be 9mm, 9.1mm, 9.2mm, 9.3mm, 9.4mm or 9.5mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0029] Preferably, the short side length of the rectangle of the first size fixture is 13-15 mm, for example, it can be 13 mm, 13.4 mm, 13.8 mm, 14.2 mm, 14.6 mm or 15 mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0030] Preferably, the diameter of the positioning hole of the first size fixture is 7-8 mm, for example, it can be 7 mm, 7.2 mm, 7.4 mm, 7.6 mm, 7.8 mm or 8 mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0031] Preferably, the long side length of the trapezoid of the second size fixture is 62-64 mm, for example, it can be 62 mm, 62.4 mm, 62.8 mm, 63.2 mm, 63.6 mm or 64 mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0032] Preferably, the short side length of the trapezoid of the second size fixture is 10-13 mm, for example, it can be 10 mm, 10.5 mm, 11 mm, 11.5 mm, 12 mm, 12.5 mm or 13 mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0033] Preferably, the length of the oblique side of the trapezoid of the second size fixture is 9.5-10 mm, for example, it can be 9.5 mm, 9.6 mm, 9.7 mm, 9.8 mm, 9.9 mm or 10 mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0034] Preferably, the short side length of the rectangle of the second size fixture is 8-12 mm, for example, it can be 8 mm, 8.5 mm, 9 mm, 9.5 mm, 10 mm, 10.5 mm, 11 mm, 11.5 mm or 12 mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0035] Preferably, the diameter of the positioning hole of the second size fixture is 6-7 mm, for example, it can be 6 mm, 6.2 mm, 6.4 mm, 6.6 mm, 6.8 mm or 7 mm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0036] Preferably, the side of the rectangle away from the working area is provided with a rounded corner.

[0037] Preferably, the radius of the chamfer is 3-5mm, for example, it can be 3mm, 3.4mm, 3.8mm, 4.2mm, 4.6mm or 5mm, but not limited to the listed values, other values not listed in the value range are also applicable.

[0038] As a preferred technical scheme of the utility model, the fixing area is provided with a positioning hole and a through hole.

[0039] As a preferred technical scheme of the utility model, the through hole is arranged between the first positioning hole and the second positioning hole.

[0040] Preferably, the through hole is in the shape of a circular runway.

[0041] Preferably, the length of the through hole is 20-22mm, for example, it can be 20mm, 20.4mm, 20.8mm, 21.2mm, 21.6mm or 22mm, but not limited to the listed values, other values not listed in the value range are also applicable.

[0042] The system refers to a device system, a device system or a production device.

[0043] Compared with the prior art, the utility model has the beneficial effects that:

[0044] (1) The protective jig provided by the utility model is simple in structure, reusable and suitable for industrial application.

[0045] (2) The protective jig provided by the utility model can effectively prevent the solder from flowing into the screw hole during the welding process, further improving the qualified rate of target material welding. BRIEF DESCRIPTION OF DRAWINGS

[0046] Figure 1 The structure diagram of the welding protective jig for the target material U-shaped groove provided by the utility model embodiment 1 is shown in the figure.

[0047] Among them: 1 is a metal cover plate, 2 is a working area, 3 is a fixed area, 4 is a first positioning hole, 5 is a second positioning hole, 6 is a through hole. DETAILED DESCRIPTION

[0048] It should be understood that in the description of the utility model, the orientation or position relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the utility model.

[0049] It should be noted that in the description of the utility model, unless otherwise explicitly specified and limited, the terms "arrangement", "connection", "connection" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances.

[0050] The technical solutions of the utility model will be further illustrated below by combining with the drawings and through specific embodiments.

[0051] Embodiment 1

[0052] The embodiment provides a welding protection jig for target material U-shaped groove as shown in the figure, the welding protection jig includes metal cover plate 1 provided with positioning hole and fixing device, the thickness of the metal cover plate 1 is 7mm. Figure 1

[0053] The fixing device is used for fixing the target material to be welded and the metal cover plate 1.

[0054] The positioning hole includes first positioning hole 4 and second positioning hole 5, the first positioning hole 4 and the second positioning hole 5 are symmetrically arranged along the center line of the metal cover plate, the center distance of the first positioning hole 4 and the second positioning hole 5 is 45mm, the positioning hole is used for installing the fixing device, and the diameter of the positioning hole is 8mm.

[0055] The fixing device includes matched screw and nut;

[0056] The metal cover plate 1 includes working area 2 and fixed area 3, the shape of the working area 2 is trapezoidal, the shape of the fixed area 3 is rectangular, and the length of the long side of the trapezoid is same with the length of the long side of the rectangle.

[0057] The length of the long side of the trapezoid is 63mm, the length of the short side is 53mm, and the length of the inclined side is 9mm, the length of the short side of the rectangle is 15mm, one side of the rectangle away from the working area is provided with a rounded corner, and the radius of the rounded corner is 4mm.

[0058] The fixed area 3 is provided with positioning hole and through hole 6, the through hole 6 is arranged between the first positioning hole 4 and the second positioning hole 5, the through hole 6 is annular track shape, and the length of the through hole 6 is 20mm.

[0059] Embodiment 2

[0060] ​The embodiment provides a welding protection jig for a target U-shaped groove, the welding protection jig comprising a metal cover plate 1 provided with positioning holes and a fixing device; the thickness of the metal cover plate 1 is 6 mm;

[0061] The fixing device is used for fixing a target to be welded and the metal cover plate 1.

[0062] The positioning holes comprise first positioning holes and second positioning holes; the first positioning holes 4 and the second positioning holes 5 are symmetrically arranged along the center line of the metal cover plate; the center distance of the first positioning holes 4 and the second positioning holes 5 is 42 mm; the positioning holes are used for mounting the fixing device; the diameter of the positioning holes is 6 mm;

[0063] The fixing device comprises a screw and a nut used in pairs;

[0064] The metal cover plate 1 comprises a working area 2 and a fixing area 3; the shape of the working area 2 is a trapezoid, and the shape of the fixing area 3 is a rectangle; the length of the long side of the trapezoid is the same as the length of the long side of the rectangle;

[0065] The length of the long side of the trapezoid is 63 mm, the length of the short side of the trapezoid is 13 mm, and the length of the oblique side of the trapezoid is 10 mm; the length of the short side of the rectangle is 8 mm; one side of the rectangle away from the working area is provided with a rounded corner; the radius of the rounded corner is 3 mm;

[0066] The fixing area 3 is provided with positioning holes and a through hole 6; the through hole 6 is arranged between the first positioning hole 4 and the second positioning hole 5; the through hole 6 is in the shape of a circular track; the length of the through hole 6 is 22 mm.

[0067] Embodiment 3

[0068] The embodiment provides a welding protection jig for a target U-shaped groove, the welding protection jig comprising a metal cover plate 1 provided with positioning holes and a fixing device; the thickness of the metal cover plate 1 is 8 mm;

[0069] The fixing device is used for fixing a target to be welded and the metal cover plate 1.

[0070] The positioning holes comprise first positioning holes and second positioning holes; the first positioning holes 4 and the second positioning holes 5 are symmetrically arranged along the center line of the metal cover plate; the center distance of the first positioning holes 4 and the second positioning holes 5 is 48 mm; the positioning holes are used for mounting the fixing device; the diameter of the positioning holes is 6-8 mm;

[0071] The fixing device comprises a screw and a nut used in pairs;

[0072] The metal cover plate 1 comprises a working area 2 and a fixed area 3; the shape of the working area 2 is trapezoidal, and the shape of the fixed area 3 is rectangular; the length of the long side of the trapezoid is the same as that of the long side of the rectangle;

[0073] The length of the long side of the trapezoid is 63.5 mm, the length of the short side is 10 mm, and the length of the hypotenuse is 9.2 mm; the length of the short side of the rectangle is 12 mm; one side of the rectangle away from the working area is provided with a rounded corner; the radius of the rounded corner is 5 mm;

[0074] The fixed area 3 is provided with a positioning hole and a through hole 6; the through hole 6 is arranged between the first positioning hole 4 and the second positioning hole 5; the through hole 6 is in the shape of a circular track; the length of the through hole 6 is 21 mm.

[0075] The welding protection jig provided by examples 1-3 can well avoid the inflow of solder into the screw hole in the welding process, and improve the qualified rate of target material welding.

[0076] Comparative example 1

[0077] The welding protection jig for the U-shaped groove of the target material provided by the comparative example is only different from example 1 in that:

[0078] The comparative example omits the setting of the positioning hole.

[0079] Compared with example 1, the welding protection jig provided by the comparative example cannot be fixed on the target material to be welded, the position of the welding protection jig is easy to deviate in the welding process, and the solder is extremely easy to flow into the screw hole, which causes the effect to be unable to meet the requirements of semiconductor products.

[0080] Comparative example 2

[0081] The welding protection jig for the U-shaped groove of the target material provided by the comparative example is only different from example 1 in that:

[0082] The thickness of the metal cover plate 1 in the comparative example is adjusted to 5 mm.

[0083] Comparative example 3

[0084] The welding protection jig for the U-shaped groove of the target material provided by the comparative example is only different from example 1 in that:

[0085] The thickness of the metal cover plate 1 in the comparative example is adjusted to 9 mm.

[0086] Compared with example 1, the difference between comparative examples 2-3 is only the adjustment of the thickness of the metal cover plate, when the thickness of the metal cover plate 1 is too large or too small, it will lead to the failure to efficiently and successfully install the target material, the failure to guarantee the installation tightness, and the increase of the welding failure rate.

[0087] In summary, the welding protection jig for the target material U-shaped groove is simple in structure and can be repeatedly used, and can effectively prevent the solder from flowing into the screw hole in the welding process, and further improves the qualified rate of target material welding.

[0088] The applicant declares that the above description is only a specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, and the skilled person in the art should understand that any change or replacement within the technical range disclosed by the utility model can be easily thought of by any person skilled in the art, and falls within the protection scope and disclosure range of the utility model.

Claims

1. A welding protection jig for a target U-groove, characterized by, The welding protection jig comprises a metal cover plate provided with positioning holes and a fixing device; The fixing device is used for fixing the target material to be welded and the metal cover plate; The thickness of the metal cover plate is 6-8 mm.

2. The welding protection jig for a target U-groove according to claim 1, wherein The positioning holes comprise first positioning holes and second positioning holes.

3. The welding protection jig for a target U-groove according to claim 2, wherein The first positioning holes and the second positioning holes are symmetrically arranged along the center line of the metal cover plate; The distance between the centers of the first positioning holes and the second positioning holes is 42-48 mm.

4. The welding protection jig for a target U-groove according to claim 1, wherein The positioning holes are used for mounting the fixing device; The diameter of the positioning holes is 6-8 mm.

5. The welding protection jig for a target U-groove according to claim 1, wherein The fixing device comprises a screw and a nut used in pairs.

6. The welding protection jig for a target U-groove according to claim 1, wherein The metal cover plate comprises a working area and a fixing area; The shape of the working area is trapezoidal, and the shape of the fixing area is rectangular; The length of the long side of the trapezoid is the same as the length of the long side of the rectangle.

7. The welding protection jig for a target U-groove according to claim 6, wherein The length of the long side of the trapezoid is 62-64 mm; The length of the short side of the trapezoid is 10-55 mm; The length of the inclined side of the trapezoid is 9-10 mm.

8. The welding protection jig for a target U-groove according to claim 6, wherein The length of the short side of the rectangle is 8-15 mm; The side of the rectangle away from the working area is provided with a rounded corner; The radius of the rounded corner is 3-5 mm.

9. The welding protection jig for a target U-groove according to claim 6, wherein The fixing area is provided with positioning holes and through holes.

10. The welding protection jig for a target U-groove according to claim 9, wherein The through hole is arranged between the first positioning hole and the second positioning hole; The through hole is in the shape of a circular track; The length of the through hole is 20-22 mm.

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