Coating device

Abstract

The utility model provides a coating device and relates to the technical field of semiconductor equipment. The coating device comprises a cavity, an air inlet pipe, an air outlet pipe, an air inlet adjusting valve and an air outlet adjusting valve. The cavity is used for containing a substrate and provided with at least two air inlet pipes and at least two air outlet pipes, the air inlet pipes and the air outlet pipes are communicated with an inner cavity of the cavity, each air inlet pipe is provided with an air inlet adjusting valve used for adjusting the air flow passing through the air inlet pipe, each air outlet pipe is provided with an air outlet adjusting valve used for adjusting the air flow passing through the air outlet pipe, and the air outlet adjusting valve is used for adjusting the air flow passing through the air outlet pipe. The exhaust regulating valve is used for regulating the air flow passing through the exhaust pipe, so that the pressure in the cavity is controlled according to the coating device disclosed by the utility model, the pressure distribution at each part of the surface of the substrate is more uniform, the volatilization rates at a plurality of positions in the cavity are controlled to be basically consistent, and a film formed on the substrate is more uniform; and the compactness and uniformity of the formed film are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a coating device. Background Technology

[0002] In the manufacturing process of perovskite solar cells, coating processes are typically involved, such as using vacuum concentration and drying equipment to prepare high-quality, large-area perovskite thin films. Current coating devices utilize the low boiling point of the solvent under low pressure. At low temperatures, the perovskite solvent vaporizes and is pumped out. Due to the volatility of the low-boiling-point solvent, the perovskite liquid film becomes supersaturated, forming intermediates. As the solvent continues to evaporate, seed crystals form and gradually grow into polycrystalline perovskite thin films.

[0003] However, existing coating devices typically only have one low-pressure exhaust port. Due to the volatile nature of solvents, the solvent evaporation rate is lower for solvents farther from the exhaust port than for solvents closer to the exhaust port. This results in uneven pressure on the surface of the perovskite liquid film, affecting the evaporation rate of the liquid film solvent. Consequently, this leads to excessive differences in the crystallization rate and crystal structure of the perovskite film, ultimately affecting the overall density and uniformity of the perovskite film. Utility Model Content

[0004] The purpose of this invention is to provide a coating device that can exhaust gas relatively uniformly, thereby controlling the evaporation rate at multiple locations within the cavity to be basically the same, thus making the film formed on the substrate more uniform and improving the density and uniformity of the film.

[0005] The embodiments of this utility model are implemented as follows:

[0006] In a first aspect, this utility model provides a coating device, including a cavity, an air inlet pipe, an air outlet pipe, an air inlet regulating valve, and an air outlet regulating valve;

[0007] The cavity is used to house the substrate. The cavity is provided with at least two air inlet pipes and at least two air outlet pipes. Both the air inlet pipes and the air outlet pipes are connected to the internal chamber of the cavity. Each air inlet pipe is provided with an air inlet regulating valve, which is used to regulate the air flow rate through the air inlet pipe. Each air outlet pipe is provided with an air outlet regulating valve, which is used to regulate the air flow rate through the air outlet pipe.

[0008] In the above embodiments, the cavity is provided with a sealed internal chamber to provide a sealed coating environment for the substrate. By providing at least two exhaust pipes on the cavity that communicate with the internal chamber, the gas inside the cavity is discharged relatively uniformly, thereby ensuring that the solvent evaporation efficiency is consistent throughout the cavity. Furthermore, by providing at least two air inlet pipes on the cavity that communicate with the internal chamber, the air flow rate of the corresponding air inlet pipes can be adjusted by an air inlet regulating valve when the pressure inside the cavity is abnormal, so as to replenish the cavity with protective gas in a timely manner, further ensuring that the solvent evaporation efficiency is consistent throughout the cavity. Therefore, a high-quality and large-area film can be formed, and the density and crystallization uniformity of the film are guaranteed.

[0009] The beneficial effects of the coating apparatus provided in this embodiment of the present invention include: by setting at least two exhaust pipes connected to the internal chamber of the cavity, i.e., by using a multi-point air extraction method, the gas in the cavity can be discharged relatively uniformly, achieving overall uniformity of the liquid film surface pressure, and completing the control of the uniformity of crystallization of large-area perovskite liquid film. This avoids the problem of poor film density and crystallization uniformity caused by different solvent evaporation rates at different locations of the film due to a single exhaust port. Furthermore, by setting at least two air inlet pipes connected to the internal chamber of the cavity, the air flow rate of the corresponding air inlet pipe can be adjusted by the air inlet regulating valve when the pressure in the cavity is abnormal, so as to replenish the cavity with protective gas in a timely manner, further ensuring that the solvent evaporation efficiency at different locations in the cavity is consistent. Therefore, a high-quality and large-area film can be formed, and the density and crystallization uniformity of the film are guaranteed. Attached Figure Description

[0010] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0011] Figure 1 A cross-sectional view of the coating apparatus provided in an embodiment of this utility model from one angle;

[0012] Figure 2 A cross-sectional view from another angle of the coating apparatus provided in an embodiment of this utility model;

[0013] Figure 3 A schematic diagram showing the connection of the air intake pump, air intake regulating valve and air intake pipe of the coating device provided in this embodiment of the utility model;

[0014] Figure 4A schematic diagram showing the connection and exhaust of the exhaust pump, exhaust regulating valve and exhaust pipe of the coating device provided in this embodiment of the utility model.

[0015] Icons: 10-Coating device; 100-Cavity; 110-Guide plate; 120-Support platform; 200-Inlet pipe; 300-Exhaust pipe; 400-Inlet regulating valve; 500-Exhaust regulating valve; 600-Inlet pump; 700-Exhaust pump; 800-Monitoring mechanism; 810-First sensor; 820-Second sensor; 830-Controller; 11-Substrate; 12-Film layer. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0017] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0018] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0019] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0020] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0021] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0022] In the manufacturing process of perovskite solar cells, coating processes are typically involved, such as using vacuum concentration and drying equipment to prepare high-quality, large-area perovskite thin films. Current coating devices utilize the low boiling point of the solvent under low pressure. At low temperatures, the perovskite solvent vaporizes and is pumped out. Due to the volatility of the low-boiling-point solvent, the perovskite liquid film becomes supersaturated, forming intermediates. As the solvent continues to evaporate, seed crystals form and gradually grow into polycrystalline perovskite thin films.

[0023] However, existing coating devices typically only have one low-pressure exhaust port. Due to the volatile nature of solvents, the solvent evaporation rate is lower for solvents farther from the exhaust port than for solvents closer to the exhaust port. This results in uneven pressure on the surface of the perovskite liquid film, affecting the evaporation rate of the liquid film solvent. Consequently, this leads to excessive differences in the crystallization rate and crystal structure of the perovskite film, ultimately affecting the overall density and uniformity of the perovskite film.

[0024] Based on the problems existing in the current technology, please refer to Figures 1 to 4 This invention provides a coating apparatus 10, applicable to the field of perovskite photovoltaic cell manufacturing technology, and particularly suitable for VCD (Vacuum Concentration Drying) processes. It solves the problem in existing apparatuses where, during the preparation of large-area perovskite thin films, the varying distances between the vacuum port and the substrate liquid film surface in the VCD equipment result in different solvent evaporation rates, leading to the finished film's density and uniformity failing to meet the requirements of high-efficiency cells.

[0025] In detail, the coating apparatus 10 includes a cavity 100, an air inlet pipe 200, an exhaust pipe 300, an air inlet regulating valve 400, and an exhaust regulating valve 500.

[0026] The cavity 100 is used to house the substrate 11. The cavity 100 is provided with at least two air inlet pipes 200 and at least two air outlet pipes 300. Both the air inlet pipes 200 and the air outlet pipes 300 are connected to the internal chamber of the cavity 100. Each air inlet pipe 200 is provided with an air inlet regulating valve 400, which is used to regulate the air flow through the air inlet pipe 200. Each air outlet pipe 300 is provided with an air outlet regulating valve 500, which is used to regulate the air flow through the air outlet pipe 300.

[0027] In this embodiment, the cavity 100 is provided with a sealed internal chamber to provide a sealed coating environment for the substrate 11. By providing at least two exhaust pipes 300 connected to the internal chambers of the cavity 100, gas can be discharged relatively uniformly from the chambers through multi-point evacuation, achieving overall uniformity of liquid film surface pressure. This controls the uniformity of large-area perovskite liquid film crystallization and avoids the problem of poor film density and uniformity caused by different solvent evaporation rates at different locations due to a single exhaust port. Furthermore, by providing at least two inlet pipes 200 connected to the internal chambers of the cavity 100, the air flow rate of the corresponding inlet pipe 200 can be adjusted by the inlet regulating valve 400 when the pressure inside the chamber is abnormal, so as to replenish the chamber with protective gas in a timely manner. This further ensures that the solvent evaporation efficiency is consistent throughout the cavity 100, thereby controlling the crystallization rate and crystal morphology of the perovskite film. Therefore, high-quality and large-area films can be formed, and the density and uniformity of the film are guaranteed.

[0028] Furthermore, there are multiple intake pipes 200, with at least some intake pipes 200 respectively disposed on multiple side walls of the cavity 100, and at least another portion of intake pipes 200 disposed on the top wall of the cavity 100.

[0029] In this embodiment, air inlet pipes 200 are provided on multiple side walls and top walls of the cavity 100, that is, the air inlet pipes 200 are distributed around the cavity 100 and the top, so that the protective gas can be introduced into the internal chamber of the cavity 100 relatively evenly through multiple air inlet pipes 200, thereby further improving the uniformity of solvent evaporation efficiency in various parts of the cavity 100.

[0030] It should be noted that the intake pipe 200 is for the input of a protective gas, such as nitrogen, but it is not limited to this and can also be other gases, without specific restrictions here.

[0031] Furthermore, each side wall of the cavity 100 is provided with a plurality of equally spaced air inlet pipes 200, and the plurality of air inlet pipes 200 provided on the plurality of side walls of the cavity 100 are located on the same horizontal plane.

[0032] In this embodiment, by providing multiple air inlet pipes 200 on each side wall of the cavity 100 and distributing the multiple air inlet pipes 200 at equal intervals, and by placing the multiple air inlet pipes 200 on the multiple side walls of the cavity 100 on the same height plane of the cavity 100, the multiple air inlet pipes 200 are evenly distributed relative to the cavity 100. Furthermore, when the substrate 11 is placed inside the cavity 100, the distance between the multiple air inlet pipes 200 and the substrate 11 is basically the same. Therefore, when gas is introduced into the cavity 100, gas can be introduced at points at the same height from the substrate 11, which can make the surface pressure of the perovskite liquid film more uniform, and further make the solvent evaporation rate at various locations on the substrate 11 inside the cavity 100 basically the same.

[0033] Furthermore, there are multiple exhaust pipes 300, with at least some of the exhaust pipes 300 respectively disposed on multiple side walls of the cavity 100, and at least another portion of the exhaust pipes 300 disposed on the top wall of the cavity 100.

[0034] In this embodiment, exhaust pipes 300 are provided on multiple side walls and top walls of the cavity 100, that is, the exhaust pipes 300 are distributed around and on the top of the cavity 100, so that the protective gas inside the cavity 100 is discharged relatively evenly through multiple exhaust pipes 300, so that the suction force of the exhaust pipes 300 is evenly distributed on the surface of the liquid film, thereby making the solvent evaporation efficiency consistent throughout the cavity 100.

[0035] Furthermore, each side wall of the cavity 100 is provided with a plurality of equally spaced exhaust pipes 300, and the plurality of exhaust pipes 300 provided on the plurality of side walls of the cavity 100 are located on the same horizontal plane.

[0036] As can be seen, each side wall of the cavity 100 is provided with multiple air inlet pipes 200 and multiple exhaust pipes 300, so that the multiple air inlet pipes 200 and multiple exhaust pipes 300 are arranged around the base 11. In this way, the gas is introduced into the base 11 relatively evenly through the multiple air inlet pipes 200, so as to achieve a more uniform surface pressure of the perovskite liquid film; and the gas is extracted from the cavity 100 relatively evenly through the multiple exhaust pipes 300, so that the solvent evaporation rate at various locations on the base 11 inside the cavity 100 is basically the same.

[0037] In this embodiment, by providing multiple exhaust pipes 300 on each side wall of the cavity 100 and distributing the multiple exhaust pipes 300 at equal intervals, and by ensuring that the multiple exhaust pipes 300 located on the multiple side walls of the cavity 100 are on the same height plane of the cavity 100, the multiple exhaust pipes 300 are uniformly distributed relative to the cavity 100. Furthermore, when the substrate 11 is placed inside the cavity 100, the distance between the multiple exhaust pipes 300 and the substrate 11 is basically the same, thereby further ensuring the uniform distribution of the suction force on the liquid film surface during pumping, and thus further ensuring that the solvent evaporation rate at various locations on the substrate 11 inside the cavity 100 is basically the same.

[0038] It should be noted that the relative height of the plane containing the multiple air intake pipes 200 located on the side wall of the cavity 100 on the cavity 100 is greater than the relative height of the plane containing the multiple exhaust pipes 300 located on the side wall of the cavity 100 on the cavity 100. The multiple air intake pipes 200 and the multiple exhaust pipes 300 are located above the base 11, and the number of multiple air intake pipes 200 and the number of multiple exhaust pipes 300 are the same. The multiple air intake pipes 200 are positioned vertically above the multiple exhaust pipes 300, which not only enhances the gas circulation effect but also reduces the vortex effect.

[0039] Optionally, each side wall of the cavity 100 is provided with three air inlet pipes 200 and three exhaust pipes 300. Of course, the number of air inlet pipes 200 and exhaust pipes 300 provided on each side wall of the cavity 100 can also be other configurations, which are not specifically limited here.

[0040] Furthermore, the top wall of the cavity 100 is provided with at least two air inlet pipes 200 and at least two exhaust pipes 300, which are staggered.

[0041] In this embodiment, the staggered distribution of at least two air inlet pipes 200 and at least two exhaust pipes 300 means that at least two air inlet pipes 200 and at least two exhaust pipes 300 are arranged in an array, and the other pipe adjacent to any one of the air inlet pipes 200 is an exhaust pipe 300. Each air inlet pipe 200 and exhaust pipe 300 can be set in a one-to-one correspondence, so that the at least two air inlet pipes 200 and at least two exhaust pipes 300 are relatively evenly distributed on the top wall of the cavity 100, improving the uniformity of the surface pressure of the substrate 11 and avoiding affecting the evaporation efficiency of the solvent.

[0042] Optionally, the top wall of the cavity 100 is provided with two intake pipes 200 and two exhaust pipes 300. Therefore, the two intake pipes 200 and the two exhaust pipes 300 are arranged in an array of two rows and two columns, as shown below. Figure 2As shown, one intake pipe 200 is located in the upper left position of the array, another intake pipe 200 is located in the lower right position of the array, one exhaust pipe 300 is located in the upper right position of the array, and another exhaust pipe 300 is located in the lower left position of the array.

[0043] Therefore, it can be seen that, Figure 3 and Figure 4 As shown, in this embodiment, the cavity 100 is provided with 14 air intake pipes 200, a1 to a14, and correspondingly, 14 air intake regulating valves 400, c1 to c14, are connected to the 14 air intake pipes 200 respectively; and 14 exhaust pipes 300, b1 to b14, are provided, and correspondingly, 14 exhaust regulating valves 500, d1 to d14, are connected to the 14 exhaust pipes 300 respectively.

[0044] Furthermore, such as Figure 3 and 4 As shown, the coating apparatus 10 also includes an air intake pump 600 and an exhaust pump 700, with at least two air intake regulating valves 400 connected to the air intake pump 600 and at least two exhaust pumps 700 connected to the exhaust pump 700.

[0045] In this embodiment, multiple intake regulating valves 400 are connected to intake pump 600, and multiple exhaust regulating valves 500 are connected to exhaust pump 700. Therefore, intake pump 600 simultaneously inputs protective gas into multiple intake pipes 200 through multiple intake regulating valves 400, and exhaust pump 700 simultaneously discharges protective gas into multiple exhaust pipes 300 through multiple exhaust regulating valves 500.

[0046] Furthermore, the coating apparatus 10 also includes a monitoring mechanism 800, which includes at least one of a first sensor 810 and a second sensor 820.

[0047] The first sensor 810 and the second sensor 820 are both disposed on the cavity 100. The first sensor 810 is used to monitor the pressure inside the cavity 100, and the second sensor 820 is used to monitor the composition of the protective gas in the cavity 100.

[0048] In this embodiment, the first sensor 810 is a pressure sensor used to monitor the pressure inside the cavity 100 in real time, thereby facilitating the operator to adjust the opening of the inlet regulating valve 400 or the exhaust regulating valve 500 based on the pressure inside the cavity 100. The second sensor 820 is a residual gas analysis sensor used to monitor the composition of the protective gas inside the cavity 100 in real time, thereby facilitating the operator to adjust the opening of the inlet regulating valve 400 or the exhaust regulating valve 500 based on the composition of the residual gas inside the cavity 100, thereby correspondingly adjusting the evaporation rate of the solvent at each position inside the cavity 100. For example, when the pressure at b2 is too low, the second sensor 820 detects that the amount of evaporating gas at b2 exceeds the set value, then opens the opening of the inlet regulating valve 400 at a2, adding a certain amount of protective gas, thereby restoring the evaporation amount at b2 back to the set value until the entire solvent has evaporated and formed a thin film with high uniformity.

[0049] Furthermore, the monitoring mechanism 800 also includes a controller 830, a first sensor 810 and / or a second sensor 820 connected to the controller 830, an intake regulating valve 400 and an exhaust regulating valve 500 connected to the controller 830, and the controller 830 is used to receive pressure information and / or protective gas composition information, and to control the opening degree of the intake regulating valve 400 and the exhaust regulating valve 500.

[0050] In this embodiment, the first sensor 810, the second sensor 820, the intake regulating valve 400, the exhaust regulating valve 500, the intake pump 600, and the exhaust pump 700 are all connected to the controller 830. Therefore, after receiving the pressure information transmitted by the first sensor 810 and the protective gas composition information from the second sensor 820, the controller 830 processes and analyzes the pressure information and the protective gas composition information to adjust the opening degree of one or more of the intake regulating valves 400 and the exhaust regulating valves 500 accordingly. It can also adjust the power of the intake pump 600 and the exhaust pump 700 in a targeted manner, thereby adjusting the air flow of the corresponding intake pipe 200 or exhaust pipe 300 based on the evaporation of the solvent. This achieves automatic control of the opening and closing degree of the regulating valves, that is, automatic adjustment of the internal solvent evaporation, thereby achieving controllable crystallization of perovskite thin films, forming high-quality large-area thin films, and improving the automation level of the coating device 10.

[0051] Furthermore, the coating apparatus 10 also includes a guide plate 110, and a support platform 120 is provided inside the cavity 100. The support platform 120 is used to support and heat the substrate 11. One end of the guide plate 110 is connected to the support platform 120, and the other end is connected to the inner wall of the cavity 100. And / or, one end of the guide plate 110 is connected to the top wall of the cavity 100, and the other end is connected to the side wall of the cavity 100. The guide plate 110 has an inwardly concave arc shape.

[0052] In this embodiment, the guide plate 110 is disposed at the connection between the inner wall of the cavity 100 and the support platform 120, for example, at the right angle and edge of the inner wall of the cavity 100 and the support platform 120, and the guide plate 110 is in the shape of a curved arc to prevent the generation of eddies, stagnant airflow or condensed solvent vapor in the cavity 100, and to prevent contamination inside the cavity 100.

[0053] Furthermore, the guide plate 110 can also be installed at the connection between the top wall and the side wall of the cavity 100.

[0054] Understandably, the curvature and shape of the curved surface of the guide plate 110 can be adjusted according to the actual movement trajectory of the evaporating airflow so that the speed of the solvent evaporating airflow is kept consistent throughout the cavity 100.

[0055] In summary, this utility model provides a coating apparatus 10. During the coating process, firstly, the cavity door of the chamber 100 is opened, and the inside of the chamber 100 is cleaned using cleaning equipment. Simultaneously, the heating function of the support platform 120 and the vacuum system are checked for proper operation. Then, the substrate 11 coated with the thin film layer 12 to be dried is placed inside the chamber 100, and the substrate 11 is fixed stably at the support platform 120. The cavity door of the chamber 100 is then closed. After the vacuum equipment brings the inside of the chamber 100 to a low-pressure state, the opening of the exhaust regulating valve 500 of the exhaust pipe 300 at the top of the chamber 100 is opened and adjusted, and the opening of the exhaust regulating valve 500 of the exhaust pipe 300 on the side wall of the chamber 100 is also opened and adjusted. The opening is adjusted so that all parts of the thin film layer 12 on the substrate 11 are under the same pressure environment, thereby controlling the solvent evaporation rate at each location to remain at the same level. During this process, if the first sensor 810 or the second sensor 820 detects an abnormal situation, for example, when the first sensor 810 detects that the pressure at the b2 exhaust pipe 300 is too low, and the second sensor 820 detects that the amount of evaporation protection gas at the b2 exhaust pipe 300 exceeds the set value, the opening of the air intake regulating valve 400 at the a2 air intake pipe 200 is opened to add a certain amount of protection gas, thereby restoring the evaporation amount at the b2 exhaust pipe 300 back to the set value. This process continues until the entire solvent has evaporated, thus forming a thin film with high uniformity.

[0056] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A coating apparatus, characterized in that, It includes a cavity (100), an intake pipe (200), an exhaust pipe (300), an intake regulating valve (400), and an exhaust regulating valve (500); The cavity (100) is used to house the substrate (11). The cavity (100) is provided with at least two air inlet pipes (200) and at least two exhaust pipes (300). The air inlet pipes (200) and the exhaust pipes (300) are both connected to the internal chamber of the cavity (100). Each air inlet pipe (200) is provided with an air inlet regulating valve (400) for regulating the air flow through the air inlet pipe (200). Each exhaust pipe (300) is provided with an exhaust regulating valve (500) for regulating the air flow through the exhaust pipe (300).

2. The coating apparatus according to claim 1, characterized in that, There are multiple exhaust pipes (300), with at least some of the exhaust pipes (300) respectively disposed on multiple side walls of the cavity (100), and at least another portion of the exhaust pipes (300) disposed on the top wall of the cavity (100).

3. The coating apparatus according to claim 2, characterized in that, Each side wall of the cavity (100) is provided with a plurality of equally spaced exhaust pipes (300), and the plurality of exhaust pipes (300) provided on the plurality of side walls of the cavity (100) are located on the same horizontal plane.

4. The coating apparatus according to any one of claims 1-3, characterized in that, There are multiple air intake pipes (200), at least some of which are respectively disposed on multiple side walls of the cavity (100), and at least another part of which are disposed on the top wall of the cavity (100).

5. The coating apparatus according to claim 4, characterized in that, Each side wall of the cavity (100) is provided with a plurality of equally spaced air inlet pipes (200), and the plurality of air inlet pipes (200) provided on the plurality of side walls of the cavity (100) are located on the same horizontal plane.

6. The coating apparatus according to claim 1, characterized in that, The top wall of the cavity (100) is provided with at least two air inlet pipes (200) and at least two air outlet pipes (300), which are staggered.

7. The coating apparatus according to claim 1, characterized in that, The coating apparatus further includes an intake pump (600) and an exhaust pump (700), at least two of the intake regulating valves (400) are connected to the intake pump (600), and at least two of the exhaust pumps (700) are connected to the exhaust pump (700).

8. The coating apparatus according to claim 1, characterized in that, The coating apparatus further includes a first sensor (810) and / or a second sensor (820), both of which are disposed on the cavity (100). The first sensor (810) is used to monitor the pressure inside the cavity (100), and the second sensor (820) is used to monitor the gas composition of the cavity (100).

9. The coating apparatus according to claim 8, characterized in that, The coating apparatus further includes a controller (830), the first sensor (810) and / or the second sensor (820) are connected to the controller (830), the intake regulating valve (400) and the exhaust regulating valve (500) are connected to the controller (830), and the controller (830) is used to receive pressure information and / or gas composition information, and to control the opening degree of the intake regulating valve (400) and the exhaust regulating valve (500).

10. The coating apparatus according to claim 1, characterized in that, The coating device further includes a guide plate (110), and a support platform (120) is provided inside the cavity (100). The support platform (120) is used to support the substrate (11), and the guide plate (110) is in the shape of an inwardly concave arc. One end of the guide plate (110) is connected to the support platform (120), and the other end is connected to the side wall of the cavity (100); and / or, one end of the guide plate (110) is connected to the top wall of the cavity (100), and the other end is connected to the side wall of the cavity (100).

Images