Anti-blocking gas treatment device suitable for dry etching equipment

Abstract

The utility model relates to an anti-blocking gas treatment device suitable for dry etching equipment, and belongs to the technical field of gas treatment.The anti-blocking gas treatment device comprises a gas inlet pipeline and a waste gas treatment box, the gas inlet pipeline is connected with the waste gas treatment box, and liquid used for purifying waste gas is stored in the waste gas treatment box; a cleaning device and an air curtain device are arranged on the air inlet pipeline, the cleaning device is used for cleaning impurities attached to the inner wall of the air inlet pipeline, and the air curtain device forms an air curtain through air to prevent water vapor from moving into the air inlet pipeline. In the waste gas purification treatment process, the cleaning device automatically cleans impurities attached to the inner wall of the pipeline, and the air curtain device blocks water vapor escaping from the waste gas treatment box after forming an air curtain in the pipeline, so that the impurities attached to the inner wall of the pipeline are reduced, and the cleaning convenience is effectively improved.

Description

Technical Field

[0001] This application relates to the field of gas treatment technology, and in particular to an anti-clogging gas treatment device suitable for dry etching equipment. Background Technology

[0002] In the dry etching process, the gas treatment unit is used to treat the waste material. Boron trichloride becomes a viscous substance before it is completely dissolved in water, and then adheres to the inner wall of the pipe. After a period of use, it will cause blockage at the interface between the air inlet pipe and the treatment box.

[0003] The existing method involves periodically separating the pipeline from the treatment box and then cleaning the inside of the pipeline separately. This cleaning process requires a long downtime, which is not only cumbersome to operate but also affects the gas treatment efficiency. Utility Model Content

[0004] To address the problem of cumbersome pipe cleaning caused by boron trichloride becoming viscous and adhering to the inner wall of pipes, thus clogging the pipes, this application provides an anti-clogging gas treatment device suitable for dry etching equipment.

[0005] This application provides a clog-prevention gas treatment device suitable for dry etching equipment, which adopts the following technical solution:

[0006] A gas treatment device for preventing clogging in dry etching equipment includes an inlet pipe and an exhaust gas treatment box. The inlet pipe is connected to the exhaust gas treatment box, which contains a liquid for purifying exhaust gas. The inlet pipe is equipped with a cleaning device and an air curtain device. The cleaning device is used to clean impurities adhering to the inner wall of the inlet pipe, and the air curtain device uses gas to form an air curtain to prevent water vapor from moving into the inlet pipe.

[0007] By adopting the above technical solution, during the purification process of exhaust gas, the cleaning device automatically cleans the impurities attached to the inner wall of the pipe, and the air curtain device forms an air curtain inside the pipe to block the water vapor escaping from the exhaust gas treatment box, which helps to reduce the formation of impurities attached to the inner wall of the pipe and effectively improves the convenience of cleaning.

[0008] Preferably, the cleaning device includes a first cleaning component, and a connecting pipe is provided on the air intake pipe. The end of the connecting pipe away from the air intake pipe is connected to the exhaust gas treatment box. The first cleaning component includes a cleaning cylinder and a cleaning plate. The cleaning cylinder is located at the end of the connecting pipe away from the exhaust gas treatment box. The piston rod of the cleaning cylinder extends into the connecting pipe. The cleaning plate is located at the end of the piston rod of the cleaning cylinder. The cleaning plate is located inside the connecting pipe, and the circumferential surface of the cleaning plate abuts against the inner wall of the connecting pipe.

[0009] By adopting the above technical solution, the cleaning cylinder drives the cleaning plate to move back and forth along the connecting pipe, and the cleaning plate scrapes and cleans the inner wall of the connecting pipe.

[0010] Preferably, the cleaning plate has a cleaning collar and a cleaning brush evenly distributed around its perimeter. The cleaning collar is detachably connected to the cleaning plate, and the cleaning brush is located on the side of the cleaning collar away from the cleaning plate.

[0011] By adopting the above technical solution, the cleaning plate drives the cleaning collar and cleaning brush to move. The cleaning brush cleans the inner wall of the pipe. The cleaning collar is detachable, and the cleaning brush is easy to replace after it wears out after a period of use.

[0012] Preferably, the cleaning device further includes a second cleaning component. The air intake pipe is also provided with a cleaning pipe, which is connected to both the connecting pipe and the air intake pipe. The cleaning pipe is connected to the exhaust gas treatment box. The second cleaning component includes a double-headed cylinder, a cleaning motor, and a scraper. The double-headed cylinder is located on the inner wall of the cleaning pipe. Each end of the piston rod of the double-headed cylinder is provided with a cleaning rod. The cleaning motor is located at one end of the cleaning rod. The scraper is located on the output shaft of the cleaning motor and is in contact with the inner wall of the cleaning pipe.

[0013] By adopting the above technical solution, the inner wall of the pipe below is easily cleaned of debris. The double-headed cylinder drives the cleaning rod to move back and forth, the cleaning motor runs, drives the scraper to rotate, and cooperates with the double-headed cylinder to clean the inner wall of the pipe section.

[0014] Preferably, a sewage pipe is connected to the cleaning pipe, and a control valve is provided on the sewage pipe.

[0015] By adopting the above technical solution, after cleaning is completed, the cleaned impurities are discharged from the equipment through the sewage pipe by opening the control valve.

[0016] Preferably, the air intake pipe is further provided with an air curtain pipe, which is disposed between the connecting pipe and the cleaning pipe. The air curtain device includes an air intake plate and a first air pipe. The air intake plate is sleeved on the air curtain pipe, and the first air pipe is connected to the air intake plate. Nitrogen gas is connected to the end of the first air pipe away from the air intake plate. A first cavity communicating with the first air pipe is opened in the air intake plate, and a plurality of air holes for connecting the first cavity and the air curtain pipe are opened on the side of the air intake plate near the air curtain pipe.

[0017] By adopting the above technical solution, nitrogen enters the first cavity of the air inlet plate through the first air pipe, and enters the air curtain pipe through the air hole, forming an air curtain in the pipe to block water vapor.

[0018] Preferably, the axial direction of the air hole intersects with the radial direction of the air intake plate.

[0019] By adopting the above technical solution, the airflow passing through multiple pores intersects with each other, making the air curtain more evenly distributed, which is conducive to improving the blocking effect on water vapor.

[0020] Preferably, the dual-head cylinder is a waterproof cylinder, and the cleaning motor is a waterproof motor.

[0021] By adopting the above technical solutions, the service life can be effectively extended.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] 1. During the purification process of exhaust gas, the cleaning device automatically cleans the impurities adhering to the inner wall of the pipe. After the air curtain device forms an air curtain inside the pipe, it blocks the water vapor escaping from the exhaust gas treatment box, which helps to reduce the formation of impurities adhering to the inner wall of the pipe and effectively improves the convenience of cleaning.

[0024] 2. The cleaning plate drives the cleaning collar and cleaning brush to move. The cleaning brush cleans the inner wall of the pipe. The cleaning collar is detachable, and the cleaning brush can be easily replaced after it wears out after a period of use. Attached Figure Description

[0025] Figure 1 This is a schematic diagram illustrating the overall structure of the processing device in the embodiments of this application.

[0026] Figure 2 This is a schematic diagram illustrating the structure of the cleaning device in the embodiments of this application.

[0027] Figure 3 yes Figure 2 A magnified view of part A in the middle.

[0028] Figure 4 yes Figure 2 A magnified view of part B in the middle.

[0029] Figure 5 This is a schematic diagram illustrating the structure of the air curtain device in the embodiments of this application.

[0030] Explanation of reference numerals in the attached drawings: 1. Exhaust gas treatment box; 2. Inlet pipe; 3. Connecting pipe; 4. Air curtain pipe; 5. Cleaning pipe; 6. Cleaning device; 61. Cleaning cylinder; 62. Cleaning plate; 63. Cleaning collar; 64. Cleaning brush; 65. Double-headed cylinder; 66. Cleaning rod; 67. Cleaning motor; 68. Scraper; 7. Air curtain device; 71. First air pipe; 72. Inlet plate; 73. First cavity; 74. Air hole; 8. Sewage pipe; 81. Control valve. Detailed Implementation

[0031] To make the inventive objectives, features, and advantages of this application more apparent and understandable, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0032] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0033] This application discloses an anti-clogging gas treatment device suitable for dry etching equipment, such as... Figure 1 As shown, it includes an air intake pipe 2 and an exhaust gas treatment box 1. The air intake pipe 2 is equipped with a connecting pipe 3, an air curtain pipe 4 and a cleaning pipe 5. The connecting pipe 3, the air curtain pipe 4 and the cleaning pipe 5 are connected in sequence. The air intake pipe 2 is fixedly connected to the connecting pipe 3 and the cleaning pipe 5 is fixedly connected to the exhaust gas treatment box 1.

[0034] like Figure 2 , 3 As shown in Figure 4, the system also includes a cleaning device 6. The cleaning device 6 includes a first cleaning assembly, which comprises a cleaning cylinder 61 and a cleaning plate 62. The cleaning cylinder 61 is fixedly connected to the end of the connecting pipe 3 away from the air curtain pipe 4. The piston rod of the cleaning cylinder 61 extends into the connecting pipe 3. The cleaning plate 62 is fixedly connected to the end of the piston rod of the cleaning cylinder 61. A cleaning collar 63 and a cleaning brush 64 are evenly distributed around the circumference of the cleaning plate 62. The cleaning collar 63 is detachably connected to the cleaning plate 62, and the cleaning brush 64 is fixedly connected to the side of the cleaning collar 63 opposite to the cleaning plate 62. The cleaning collar 63 is made of rubber.

[0035] The cleaning cylinder 61 drives the cleaning plate 62 to move back and forth along the connecting pipe 3. The cleaning plate 62 drives the cleaning collar 63 and the cleaning brush 64 to move. The cleaning brush 64 cleans the inner wall of the pipe. The cleaning collar 63 is detachable. After a period of use, the cleaning brush 64 is easy to replace after it wears out. The cleaning plate 62 scrapes and cleans the inner wall of the connecting pipe 3.

[0036] like Figure 2 and 5As shown, it also includes an air curtain device 7, which includes an air inlet plate 72 and a first air pipe 71. The air inlet plate 72 is sleeved on the air curtain pipe 4, and the first air pipe 71 is fixedly connected to the air inlet plate 72. Nitrogen gas is connected to the end of the first air pipe 71 furthest from the air inlet plate 72. A first cavity 73 communicating with the first air pipe 71 is formed in the air inlet plate 72. Several air holes 74 for connecting the first cavity 73 and the air curtain pipe 4 are formed on the side of the air inlet plate 72 near the air curtain pipe 4. The axial direction of the several air holes 74 intersects the radial direction of the air inlet plate 72.

[0037] Nitrogen gas enters the first cavity 73 of the air inlet plate 72 through the first air pipe 71, and enters the air curtain pipe 4 through the air hole 74, forming an air curtain inside the pipe. The airflow passing through the multiple air holes 74 intersects with each other, making the air curtain more evenly distributed, which is beneficial to improving the blocking effect on water vapor.

[0038] like Figure 2 and 4 As shown, the cleaning device 6 also includes a second cleaning assembly, which includes a double-headed cylinder 65, a cleaning motor 67, and a scraper 68. The double-headed cylinder 65 is located on the inner wall of the cleaning pipe 5. Cleaning rods 66 are fixedly connected to the ends of the piston rods of the double-headed cylinder 65. The cleaning motor 67 is fixed to one end of the cleaning rod 66. The scraper 68 is fixedly connected to the output shaft of the cleaning motor 67. The scraper 68 is made of rubber and fits against the inner wall of the cleaning pipe 5. The double-headed cylinder 65 is a waterproof cylinder, and the cleaning motor 67 is a waterproof motor. The double-headed cylinder 65 drives the cleaning rods 66 to move back and forth. The cleaning motor 67 operates, driving the scraper 68 to rotate, and cooperating with the double-headed cylinder 65 to clean the inner wall of the cleaning pipe 5.

[0039] like Figure 1 As shown, in order to facilitate the cleaning and discharge of impurities, a sewage pipe 8 is connected to the cleaning pipe 5, and a control valve 81 is provided on the sewage pipe 8.

[0040] The implementation principle of an anti-clogging gas treatment device for dry etching equipment according to an embodiment of this application is as follows:

[0041] During the purification process of exhaust gas, the cleaning device 6 automatically cleans the impurities attached to the inner wall of the pipe, and the air curtain device 7 forms an air curtain inside the pipe to block the water vapor escaping from the exhaust gas treatment box 1, which helps to reduce the formation of impurities attached to the inner wall of the pipe and effectively improves the convenience of cleaning.

[0042] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A gas treatment device for preventing clogging in dry etching equipment, characterized in that: It includes an air intake pipe (2) and an exhaust gas treatment box (1). The air intake pipe (2) is connected to the exhaust gas treatment box (1). The exhaust gas treatment box (1) contains liquid for purifying exhaust gas. The air intake pipe (2) is equipped with a cleaning device (6) and an air curtain device (7). The cleaning device (6) is used to clean the impurities attached to the inner wall of the air intake pipe (2). The air curtain device (7) uses gas to form an air curtain to prevent water vapor from moving into the air intake pipe (2).

2. The anti-clogging gas treatment device for dry etching equipment according to claim 1, wherein: The cleaning device (6) includes a first cleaning component. The air intake pipe (2) is provided with a connecting pipe (3). The end of the connecting pipe (3) away from the air intake pipe (2) is connected to the exhaust gas treatment box (1). The first cleaning component includes a cleaning cylinder (61) and a cleaning plate (62). The cleaning cylinder (61) is located at the end of the connecting pipe (3) away from the exhaust gas treatment box (1). The piston rod of the cleaning cylinder (61) extends into the connecting pipe (3). The cleaning plate (62) is located at the end of the piston rod of the cleaning cylinder (61). The cleaning plate (62) is located in the connecting pipe (3), and the circumferential surface of the cleaning plate (62) abuts against the inner wall of the connecting pipe (3).

3. The anti-clogging gas treatment device for dry etching equipment according to claim 2, wherein: The cleaning plate (62) is evenly provided with a cleaning collar (63) and a cleaning brush (64) around its perimeter. The cleaning collar (63) is detachably connected to the cleaning plate (62), and the cleaning brush (64) is located on the side of the cleaning collar (63) away from the cleaning plate (62).

4. The anti-clogging gas treatment device for dry etching equipment according to claim 1, wherein: The cleaning device (6) also includes a second cleaning component. The air intake pipe (2) is also provided with a cleaning pipe (5). The cleaning pipe (5) is connected to the connecting pipe (3) and the air intake pipe (2). The cleaning pipe (5) is connected to the exhaust gas treatment box (1). The second cleaning component includes a double-headed cylinder (65), a cleaning motor (67), and a scraper (68). The double-headed cylinder (65) is located on the inner wall of the cleaning pipe (5). The piston rod of the double-headed cylinder (65) is provided with a cleaning rod (66) at the end. The cleaning motor (67) is located at one end of the cleaning rod (66). The scraper (68) is located on the output shaft of the cleaning motor (67). The scraper (68) is in contact with the inner wall of the cleaning pipe (5).

5. The anti-blocking gas handling device for dry etching equipment according to claim 4, wherein: The cleaning pipe (5) is connected to a sewage pipe, and the sewage pipe is equipped with a control valve.

6. The anti-blocking gas handling device for dry etching equipment according to claim 4, wherein: The air intake pipe (2) is also provided with an air curtain pipe (4). The air curtain pipe (4) is located between the connecting pipe (3) and the cleaning pipe (5). The air curtain device (7) includes an air intake plate (72) and a first air pipe (71). The air intake plate (72) is sleeved on the air curtain pipe (4). The first air pipe (71) is connected to the air intake plate (72). Nitrogen gas is connected to the end of the first air pipe (71) away from the air intake plate (72). A first cavity (73) communicating with the first air pipe (71) is opened in the air intake plate (72). Several air holes (74) for connecting the first cavity (73) and the air curtain pipe (4) are opened on the side of the air intake plate (72) near the air curtain pipe (4).

7. The anti-blocking gas handling device for dry etching equipment according to claim 6, wherein: The axial direction of the air hole (74) intersects with the radial direction of the air intake plate (72).

8. The anti-blocking gas handling device for dry etching equipment according to claim 4, wherein: The dual-head cylinder (65) is a waterproof cylinder, and the cleaning motor (67) is a waterproof motor.

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