Groove type vacuum drying equipment

Abstract

The utility model relates to groove type vacuum drying equipment, and belongs to the technical field of silicon wafer drying equipment. Groove type vacuum drying equipment comprises an equipment body with a groove body structure, at least one pair of flower basket placement assemblies arranged at the bottom in a groove of the equipment body, a plurality of heating elements arranged below a flower basket bearing area and a protection structure. The protection structure comprises a protection piece, the bearing surface of the protection piece is located above the heating element, and the longitudinal projection of the protection piece at least partially covers the heating element. According to the groove type vacuum drying equipment, the protection structure provides physical protection for the heating element arranged below the bearing area, and when the flower basket accidentally falls off, the flower basket falls on the bearing surface of the protection structure firstly, so that the heating element is prevented from being damaged, the production efficiency is ensured, and meanwhile, the safety is improved.

Description

Technical Field

[0001] This utility model belongs to the technical field of silicon wafer drying equipment, specifically relating to a trough-type vacuum drying equipment. Background Technology

[0002] In silicon wafer production, robotic arms are used to lift and place the wafer-loading carriers (such as baskets) into various containers for cleaning. After cleaning, the wafers and carriers often need to be dried to obtain clean and dry wafers. A common type of equipment used is a trough-type vacuum dryer. During production, the robotic arm picks up the baskets filled with wet wafers and places them on basket mounting brackets within the dryer. Heating elements (such as lamps) located at the bottom of the dryer act as the heat source to heat and dry the wafers. However, existing equipment lacks effective protection for the bottom heating elements. If a basket accidentally falls during handling, it could break the heating elements, causing a safety accident. Utility Model Content

[0003] To address the aforementioned problems, this invention provides a trough-type vacuum drying device. This device can prevent heating elements from being damaged by falling flower baskets, thus improving safety while ensuring production efficiency.

[0004] The technical solution of this utility model to solve the above problems is as follows:

[0005] A trough-type vacuum drying device includes a main body with a trough structure, at least one pair of flower basket placement assemblies disposed at the bottom of the trough of the main body, and a plurality of heating elements disposed below the flower basket support area, wherein the flower basket support area is the space occupied when the flower basket is placed on the flower basket assembly;

[0006] It also includes a protective structure disposed below the flower basket bearing area; the protective structure includes a protective member, the side of the protective member facing the flower basket bearing area forming a bearing surface, the bearing surface being located above the heating element, and the protective member at least partially covering the heating element in its longitudinal projection.

[0007] In the above-mentioned technical solution of this utility model, when the flower basket in the flower basket bearing area accidentally falls, it will first fall onto the protective component. The bearing surface is used to bear the fallen flower basket, thereby achieving the purpose of protecting the heating element.

[0008] Preferably, the flower basket placement assembly includes a bracket fixed to the main body of the device, an adjustable member fixed to the bracket and adjustable in height relative to the bracket, and a support member fixed to the adjustable member for supporting the flower basket.

[0009] Preferably, the top of the bracket is provided with a limiting step; the adjusting member has a locking platform that matches the limiting step;

[0010] The adjusting member is fixed at a variable height relative to the bracket by means of a vertical waist hole provided thereon, a first mounting hole provided on the bracket, and a first fastener;

[0011] The support member is fixed based on the adjustment member by means of a transverse waist hole provided thereon, a second mounting hole provided on the adjustment member, and a second fastener.

[0012] In the above technical solution of this utility model, the first fastener can fix the adjusting member to the bracket in the horizontal direction. When the longitudinal position of the adjusting member is adjusted, it can be displaced in the vertical direction along the vertical waist hole. By adjusting the longitudinal position of the adjusting member, the distance between the flower basket placed on the support member and the bottom surface of the trough vacuum drying equipment can be adjusted.

[0013] Preferably, the length direction of each flower basket placement component is perpendicular to the length direction of the heating element, and at least two pairs of flower basket placement components are provided along the length direction of the heating element. Each pair of flower basket placement components is used to place at least two flower baskets arranged along the length direction of the flower basket placement component.

[0014] In the above-mentioned technical solution of this utility model, this setting is beneficial to improving the uniformity of heating of silicon wafers in the flower basket and the space utilization rate of the tank.

[0015] Preferably, the protective element is a protective mesh or a transparent plate with a light transmittance greater than 99%, which covers all the heating elements in the longitudinal projection.

[0016] In the above-described technical solution of this utility model, this setting is beneficial to improving drying efficiency.

[0017] Preferably, the protective component is secured by the aforementioned flower basket mounting assembly.

[0018] Alternatively, the protective component can be secured in another manner, specifically:

[0019] a) The protective structure also includes a second bracket and an adjustment seat;

[0020] b) The second bracket and the adjusting seat are fixed together by horizontal bolts;

[0021] c) The second bracket is used to support the protective component;

[0022] d) The second bracket is positioned close to the flower basket placement assembly, and a channel is formed on its body for the heating element to pass through;

[0023] e) The adjusting seat is used to adjust the horizontal distance between the second bracket and the flower basket placement component and to fix the second bracket to the groove structure;

[0024] f) The adjusting seat is provided with a second transverse waist hole that is perpendicular to the second bracket in the length direction. The adjusting seat is fixed to the groove structure through the second transverse waist hole and by means of a third fastener.

[0025] As another preferred embodiment, the protective component is a protective bracket; the protective bracket is positioned close to the flower basket placement assembly, with its upper surface forming the bearing surface, and a channel is formed on the body of the protective bracket for the heating element to pass through.

[0026] Preferably, the protective structure further includes an adjustment seat, which is used to adjust the horizontal distance between the protective bracket and the flower basket placement assembly and to fix the protective bracket to the groove structure.

[0027] Preferably, the protective bracket and the adjusting seat are fixed together by horizontal bolts;

[0028] The adjusting seat is provided with a second transverse waist hole that is perpendicular to the length direction of the protective bracket. The adjusting seat is fixed to the groove structure through the second transverse waist hole and by means of a third fastener.

[0029] In summary, this utility model has the following effects:

[0030] This utility model of a trough-type vacuum drying equipment is equipped with a heating element protection structure. The protection structure is located below the flower basket bearing area and has a bearing surface higher than the heating element. It is used to provide physical protection for the heating element located below the bearing area. When the flower basket accidentally falls, it will fall onto the bearing surface of the protection structure first, thereby avoiding damage to the heating element, ensuring production efficiency, and improving safety. Attached Figure Description

[0031] Figure 1 This is a three-dimensional structural diagram of the trough-type vacuum drying equipment in Example 1;

[0032] Figure 2 This is an end view of the trough-type vacuum drying equipment in Example 1;

[0033] Figure 3 This is a three-dimensional structural diagram of the support frame in the trough-type vacuum drying equipment of Example 1;

[0034] Figure 4 This is a three-dimensional structural diagram of the flower basket placement component (excluding support components) in the trough-type vacuum drying equipment of Example 1;

[0035] Figure 5 This is a magnified view of a portion of Example 3 after the transparent plate has been removed;

[0036] Figure 6This is a partial enlarged view of Example 4;

[0037] In the diagram, the component names represented by each label are as follows:

[0038] 1-Trench structure,

[0039] 2-Flower basket placement components,

[0040] 3-Heating element,

[0041] 5-Flower basket,

[0042] 21-Staff

[0043] 22-Adjusting component,

[0044] 23-Supporting component,

[0045] 41a - Transparent Flat Panel

[0046] 41b - Protective bracket,

[0047] 42-Second support,

[0048] 43-Adjusting seat,

[0049] 211-Limiting Step,

[0050] 212 - First mounting hole,

[0051] 221-Card Table,

[0052] 222-Vertical waist hole,

[0053] 223 - Second mounting hole,

[0054] 231-Horizontal waist hole,

[0055] 431 - Second transverse waist hole. Detailed Implementation

[0056] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will now be described in further detail with reference to the embodiments. It should be understood that the specific embodiments described herein are only for explaining this utility model and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0057] Example 1

[0058] Tank-type vacuum drying equipment, such as Figures 1-2 As shown, it includes:

[0059] -The main body of the equipment has a tank structure 1;

[0060] - Flower basket placement component 2, which has two sets, is set at the bottom of the equipment main body groove to support the flower basket 5;

[0061] - Heating element 3 is located below the basket support area in the main body of the equipment and is used to heat the basket 5 carrying the silicon wafer; the basket support area is the area occupied by the basket 5 when it is placed on the basket placement assembly 2;

[0062] - A protective structure, disposed below the flower basket support area, includes a protective component; in this embodiment, the protective component is a transparent plate 41a, which horizontally covers all heating elements 3. The side of the transparent plate 41a facing the flower basket support area forms a support surface, which is located above the heating elements 3.

[0063] like Figure 1 As shown, the length direction of each flower basket placement component 2 is perpendicular to the length direction of the heating element 3. Two pairs of flower basket placement components 2 are arranged along the length direction of the heating element 3. Each pair of flower basket placement components 2 is used to place two flower baskets 5 arranged along the length direction of the flower basket placement component 2.

[0064] like Figure 2 As shown, the flower basket placement assembly 2 includes a bracket 21, an adjusting member 22, and a supporting member 23. The bracket 21 is fixed based on the main body of the device; the adjusting member 22 is fixed based on the bracket 21; and the supporting member 23 is fixed based on the adjusting member 22.

[0065] The installation structure of flower basket placement component 2, such as Figures 2-4 As shown, the details are as follows:

[0066] a. A limit step 211 is provided at the top of the bracket 21;

[0067] b. The adjusting component 22 has a locking platform 221 that matches the limiting step 211;

[0068] c. The adjusting member 22 is fixed relative to the bracket 21 by means of the vertical waist hole 222 provided thereon, the first mounting hole 212 provided on the bracket 21, and the first fastener;

[0069] d. The support member 23 is fixed based on the adjustment member 22 by means of the transverse waist hole 231 provided thereon, the second mounting hole 223 provided on the adjustment member 22, and the second fastener.

[0070] Furthermore, when the first fastener is not tightened, the vertical waist hole 222 can be displaced relative to the first fastener, thus allowing the adjusting member 22 to be adjusted in height longitudinally; and the support member 23 is fixed based on the adjusting member 22. Therefore, the flower basket placement assembly 2 can adjust the flower basket placed on it as needed.

[0071] In this embodiment, both the first mounting hole 212 and the second mounting hole 223 are threaded holes, the first fastener is a fastening bolt, and the second fastener is a set screw.

[0072] Specifically, the adjustment method of the adjusting component 22 is as follows:

[0073] First, slightly loosen the first fastener to allow the adjusting member 22 to move longitudinally;

[0074] The second step is to rotate the second fastener, which can force the adjusting member 22 to move up or down;

[0075] Third, when the adjusting member 22 moves to the desired position, tighten the first locking member to complete the adjustment process.

[0076] Of course, other methods can be used to replace the second step to adjust the height of the adjusting component 22.

[0077] like Figures 1-2 As shown, a transparent plate 41a is disposed in the flower basket placement assembly 2, specifically installed between the height adjustment member 22 and the support member 23. Holes are drilled in the transparent plate 41a and the adjustment member 22, and it is fixed with bolts. The top surface of the transparent plate 41a is the bearing surface 41.

[0078] The material selection for the transparent plate 41a can be based on conventional methods for vacuum drying requirements in this field. Materials that are resistant to drying temperatures and acid / alkali corrosion can be selected.

[0079] Example 2

[0080] The only difference from Example 1 is that the transparent plate 41a is replaced with a protective net. The material of the protective net can be conventionally selected based on the requirements of vacuum drying in this field. Materials resistant to drying temperatures and acid / alkali corrosion can be chosen.

[0081] Example 3

[0082] The only difference from Embodiment 1 is that the transparent plate 41a is not disposed on the flower basket placement component 2, but rather as shown in the figure. Figure 5As shown, the installation is achieved through a second bracket 42 and an adjusting seat 43. Specifically, holes are drilled in the top surfaces of the transparent plate and the second bracket 42, and bolts are used for fixing. The second bracket 42 and the adjusting seat 43 are fixed horizontally with bolts. The second bracket 42 is positioned close to the flower basket placement assembly, and a channel for the heating element to pass through is formed on its body. The adjusting seat 43 fixes the second bracket 42 to the groove structure 1. The adjusting seat 43 has a second transverse waist hole 431 perpendicular to the length direction of the second bracket 42. The adjusting seat 43 is fixed to the groove structure 1 through the second transverse waist hole 431 and by means of a third fastener, so that the horizontal distance between the second bracket 42 and the flower basket placement assembly can be adjusted.

[0083] Example 4

[0084] The difference from Example 1 is that, as Figure 6 As shown, the protective component is a protective bracket 41b. The upper end of the protective bracket 41b has a bearing surface for supporting a flower basket that may accidentally fall; a channel is provided on the body through which a heating element passes and is partially disposed. The bearing surface is lower than the flower basket's bearing area.

[0085] As different types of protective components, the protective bracket 41b is positioned differently from the transparent plate 41a (the specific form of the protective plate). (Comparison) Figure 6 and Figure 1 In Example 1, as Figure 1 As shown, the transparent plate 41a horizontally covers all heating elements 3; and in this embodiment, as Figure 6 As shown, the protective bracket 41b is arranged in parallel on the inner side of each flower basket mounting component (the side of a pair of flower basket mounting components that are close to each other). It not only does not take up extra space, but also prevents the flower basket from falling off due to being placed off-center (to the left or right).

[0086] The material selection for the protective bracket 41b can be based on conventional requirements for vacuum drying in this field. Materials resistant to drying temperatures and acid / alkali corrosion can be selected.

[0087] In some embodiments, the protective bracket 41b can be directly mounted on the bottom drip tray. In this embodiment, as... Figure 6As shown, the protective structure also includes an adjustment seat 43, which is used to adjust the horizontal distance between the protective bracket 41b and the flower basket placement assembly 2 and to fix the protective bracket 41b to the groove structure 1. The protective bracket 41b and the adjustment seat 43 are fixed by horizontal bolts; the adjustment seat 43 is provided with a second transverse waist hole 431 perpendicular to the length direction of the protective bracket 41b, and the adjustment seat 43 is fixed to the groove structure 1 through the second transverse waist hole 431 and by means of a third fastener.

[0088] This configuration allows for adjustment of the horizontal distance between the flower basket mounting component 2 and the protective bracket 41b, maximizing the protection of the heating element 3.

[0089] The trough-type vacuum drying equipment of this utility model is equipped with a protective structure. When the flower basket 5 falls accidentally, it will fall onto the protective structure first, avoiding damage to the heating element 3, ensuring production efficiency, and improving safety.

Claims

1. A trough-type vacuum drying device, comprising a main body having a trough structure (1), at least one pair of flower basket placement assemblies (2) disposed at the bottom of the trough of the main body, and a plurality of heating elements (3) disposed below the flower basket bearing area, wherein the flower basket bearing area is the space occupied by the flower basket (5) when placed on the flower basket placement assembly; characterized in that: It also includes a protective structure disposed below the flower basket bearing area; the protective structure includes a protective member, the side of the protective member facing the flower basket bearing area forming a bearing surface, the bearing surface being located above the heating element (3), and the protective member at least partially covering the heating element (3) in its longitudinal projection.

2. The trough-type vacuum drying equipment according to claim 1, characterized in that: The flower basket placement assembly (2) includes a bracket (21) fixed to the main body of the device, an adjustment member (22) fixed to the bracket and adjustable in height relative to the bracket, and a support member (23) fixed to the adjustment member for supporting the flower basket.

3. The trough-type vacuum drying equipment according to claim 2, characterized in that: The top of the bracket (21) is provided with a limiting step (211); the adjusting member (22) has a locking platform (221) that matches the limiting step (211). The adjusting member (22) is fixed at a variable height relative to the bracket by means of a vertical waist hole (222) provided thereon, a first mounting hole (212) provided on the bracket (21) and a first fastener; The support member (23) is fixed based on the adjustment member by means of a transverse waist hole (231) provided thereon, a second mounting hole (223) provided on the adjustment member (22) and a second fastener.

4. A trough-type vacuum drying apparatus according to any one of claims 1 to 3, characterized in that: The length direction of each flower basket placement component (2) is perpendicular to the length direction of the heating element (3). At least two pairs of flower basket placement components (2) are provided along the length direction of the heating element (3). Each pair of flower basket placement components (2) is used to place at least two flower baskets (5) arranged along the length direction of the flower basket placement component (2).

5. A trough-type vacuum drying apparatus according to any one of claims 1 to 3, characterized in that: The protective element is a protective mesh or a transparent plate (41a) with a light transmittance greater than 99%, which covers all the heating elements (3) in the longitudinal projection.

6. The trough-type vacuum drying equipment according to claim 5, characterized in that: The protective component is secured by the flower basket mounting assembly (2).

7. A trough-type vacuum drying device according to claim 5, characterized in that: The protective structure also includes a second bracket (42) and an adjustment seat (43). The second bracket (42) and the adjusting seat (43) are fixed together by horizontal bolts; The second bracket (42) is used to support the protective component; The second bracket (42) is located close to the flower basket placement assembly (2), and a channel is formed on its body for the heating element (3) to pass through; The adjusting seat (43) is used to adjust the horizontal distance between the second bracket (42) and the flower basket placement assembly (2) and to fix the second bracket (42) to the groove structure (1); The adjusting seat (43) is provided with a second transverse waist hole (431) perpendicular to the second bracket (42) in the length direction. The adjusting seat (43) is fixed to the groove structure (1) through the second transverse waist hole (431) and by means of a third fastener.

8. A trough-type vacuum drying apparatus according to any one of claims 1 to 3, characterized in that: The protective component is a protective bracket (41b); the protective bracket (41b) is located close to the flower basket placement component (2), and the upper end surface forms the bearing surface. A channel for the heating element (3) to pass through is formed on the body of the protective bracket (41b).

9. A trough-type vacuum drying device according to claim 8, characterized in that: The protective structure also includes an adjustment seat (43), which is used to adjust the horizontal distance between the protective bracket (41b) and the flower basket placement assembly (2) and to fix the protective bracket (41b) to the groove structure (1).

10. A trough-type vacuum drying device according to claim 9, characterized in that: The protective bracket (41b) and the adjusting seat (43) are fixed together by horizontal bolts; The adjustment seat (43) is provided with a second transverse waist hole (431) perpendicular to the length direction of the protective bracket (41b). The adjustment seat (43) is fixed to the groove structure (1) through the second transverse waist hole (431) and by means of a third fastener.

Images