Silicon wafer basket

Abstract

The utility model relates to a silicon wafer flower basket which comprises a fixing body with a hollow cavity, a first toothed bar and a second toothed bar, the first toothed bar and the second toothed bar are connected to the fixing body and located in the hollow cavity, a silicon wafer containing cavity is formed between the second toothed bar and the first toothed bar, and the second toothed bar is arranged on the two sides of the first toothed bar at intervals; slicing teeth are arranged on the two sides, facing the second toothed bar, of the bar wall of the first toothed bar; at least two groups of fragmented tooth areas are arranged on the rod wall of the second toothed rod on one side of the first toothed rod and are rotationally connected to the fixed main body, so that different fragmented tooth areas can face the first toothed rod, and silicon wafer accommodating cavities with different widths are formed when the different fragmented tooth areas face the first toothed rod. Therefore, the silicon wafer flower basket can be compatible with silicon wafers with different widths and sizes.

Description

Technical Field

[0001] This application relates to the field of silicon wafer processing technology, and in particular to a silicon wafer flower basket. Background Technology

[0002] Silicon wafer baskets are used to carry photovoltaic silicon wafers to facilitate cleaning, transportation, and storage. They are an indispensable tool in the silicon wafer production process.

[0003] Silicon wafer baskets are generally customized according to the specifications of silicon wafers. However, with the rapid development of the photovoltaic industry, the demand for cell transportation has increased, requiring silicon wafer baskets to be compatible with silicon wafers of different widths, such as two different types of split cells. Utility Model Content

[0004] Therefore, it is necessary to propose a silicon wafer basket that is compatible with silicon wafers of different widths.

[0005] A silicon wafer basket includes a fixed body with a hollow cavity, a first toothed rod and a second toothed rod connected to the fixed body and located within the hollow cavity, a silicon wafer receiving cavity formed between the second toothed rod and the first toothed rod, and second toothed rods spaced apart on both sides of the first toothed rod; the rod wall of the first toothed rod is provided with segmented teeth on both sides facing the second toothed rod; at least two sets of segmented tooth areas are provided on the rod wall of the second toothed rod on at least one side of the first toothed rod and are rotatably connected to the fixed body, so that different segmented tooth areas can face the first toothed rod, and different segmented tooth areas form silicon wafer receiving cavities of different widths when facing the first toothed rod.

[0006] In some embodiments, the fixing body includes two end plates disposed opposite each other, and the first toothed rod and the second toothed rod are connected between the two end plates.

[0007] In some embodiments, a limiting structure is provided at the connection between the end plate and the second toothed rod. The limiting structure includes an intersecting first limiting wall and a second limiting wall, and a positioning space is formed between the second limiting wall and the first limiting wall. The rod wall of the second toothed rod includes an intersecting first edge and a second edge, with the first edge abutting against the first limiting wall and the second edge abutting against the second limiting wall.

[0008] In some embodiments, two sets of segmented tooth regions are evenly distributed circumferentially on the bar wall of the second tooth bar.

[0009] In some embodiments, the end plate is provided with two sets of limiting structures that are 180 degrees apart in the rotation direction of the second rack.

[0010] In some embodiments, the limiting structure is an even-numbered side groove formed on the end plate, the first limiting wall and the second limiting wall are two adjacent inner side walls of the even-numbered side groove; the second toothed rod is rotatably connected to the bottom of the even-numbered side groove.

[0011] In some embodiments, the even-numbered side groove is a hexagonal groove, and the limiting structure is provided at each of a pair of opposite corners of the hexagonal groove.

[0012] In some embodiments, an elastic element is provided between the end plate and the second toothed bar, the elastic element applying an elastic force to press the second toothed bar against the bottom of the even-numbered side groove.

[0013] In some embodiments, a fastening bolt is also included, the head of which abuts against the outer side of the end plate, and the tail of which passes through the end plate and is threadedly connected to the second toothed rod.

[0014] In some embodiments, the threaded connection length between the tail of the fastening bolt and the second toothed rod is greater than the height of the first limiting wall and the second limiting wall.

[0015] In the aforementioned silicon wafer basket, the second toothed rod is rotatably connected to the fixed body, allowing different slab toothed areas to face the first toothed rod. When the different slab toothed areas face the first toothed rod, they together with the slab teeth on the first toothed rod define silicon wafer receiving cavities of different widths. By rotating the second toothed rod at a certain angle, the second toothed rod can form silicon wafer receiving cavities of different widths with the first toothed rod. Thus, the silicon wafer basket of this application can accommodate silicon wafers of different widths. Furthermore, the silicon wafer basket can also hold two silicon wafers of different widths simultaneously. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a silicon wafer basket according to some embodiments of this application.

[0017] Figure 2 This is a partial structural schematic diagram of the first toothed rod of a silicon wafer basket according to some embodiments of this application.

[0018] Figure 3 This is a partial structural schematic diagram of the second toothed rod of a silicon wafer basket according to some embodiments of this application.

[0019] Figure 4 This is a schematic diagram of the end plate of a silicon wafer basket according to some embodiments of this application.

[0020] Figure 5 This is a schematic diagram of the limiting structure on the end plate of this application.

[0021] Figure label:

[0022] 100. Silicon wafer basket; 10. Fixing body; 110. End plate; 111. Inner side; 112. Connecting hole; 113. Limiting structure; 1131. First limiting wall; 1132. Second limiting wall; 120. Limiting rod; 20. First toothed rod; 30. Second toothed rod; 301. Positioning hole; 310. First edge; 320. Second edge; 40. Segmentation tooth; 50. Segmentation tooth area. Detailed Implementation

[0023] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0024] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0025] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0026] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0027] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0028] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0029] See Figures 1 to 3 This application proposes a silicon wafer basket 100 for placing silicon wafers. The silicon wafer basket 100 includes a fixed body 10 with a hollow cavity, a first toothed rod 20 and a second toothed rod 30 connected to the fixed body 10 and located within the hollow cavity. A silicon wafer receiving cavity is formed between the second toothed rod 30 and the first toothed rod 20. The second toothed rod 30 is spaced apart on both sides of the first toothed rod 20. The rod wall of the first toothed rod 20 is provided with slicing teeth 40 on both sides facing the second toothed rod 30. At least two sets of slicing tooth areas 50 are provided on the rod wall of at least one side of the first toothed rod 20 and are movably connected to the fixed body 10, so that different slicing tooth areas 50 can face the first toothed rod 20, and different slicing tooth areas 50 form silicon wafer receiving cavities of different widths when facing the first toothed rod 20.

[0030] The specific construction of the fixing body 10 is not limited, but it forms a hollow cavity, with a feeding port at the top of the hollow cavity. Silicon wafers can enter the hollow cavity through the feeding port. Optionally, the fixing body 10 is longitudinally elongated, with its length (X) dimension being greater than its width (Y) dimension. Silicon wafers can be arranged and placed into the silicon wafer receiving cavity along the length (X) direction of the fixing body 10.

[0031] For example, refer to Figure 1 The fixed body 10 includes two end plates 110 arranged opposite to each other, and the first toothed rod 20 and the second toothed rod 30 are connected between the two end plates 110.

[0032] The hollow cavity of this application is defined between the two end plates 110. The two ends of the first toothed rod 20 are respectively connected to the two end plates 110. The two ends of the second toothed rod 30 are also respectively connected to the two end plates 110. The fixing body 10 of this application has a simple structure, is lightweight, and is convenient for observing and placing silicon wafers.

[0033] The first toothed bar 20 and the second toothed bar 30 are specifically arranged along the width direction Y of the fixing body 10. The first toothed bar 20 is located in the middle, and the second toothed bars 30 are distributed on both sides of the first toothed bar 20. The length direction (hereinafter referred to as the axial direction) of the first toothed bar 20 and the second toothed bar 30 is consistent with the length direction X of the fixing body 10. A silicon wafer receiving cavity is formed between the first toothed bar 20 and the second toothed bars 30 on both sides.

[0034] refer to Figure 1 and Figure 2 The first toothed bar 20 is specifically a bidirectional toothed bar, meaning that multiple segmented teeth 40 are provided on both sides of the first toothed bar 20 in the width direction Y of the fixed body 10, and the multiple segmented teeth 40 are arranged along the axial direction of the first toothed bar 20. The segmented teeth 40 are used to separate adjacent silicon wafers to prevent stacking collisions. The silicon wafers are specifically placed in the gap between two adjacent segmented teeth 40.

[0035] For example, there are two first toothed rods 20, spaced up and down along the height of the fixing body 10. There are four second toothed rods 30, divided into two pairs: a pair of second toothed rods 30 is provided on each side of the pair of first toothed rods 20, and each pair of second toothed rods 30 includes two second toothed rods 30 arranged up and down. In this way, each pair of second toothed rods 30 and the middle pair of first toothed rods 20 each define a silicon wafer receiving cavity.

[0036] In this embodiment, the second toothed rods 30 on both sides of the first toothed rod 20 are rotatably connected to the fixed body 10. Furthermore, the structures of the second toothed rods 30 on both sides of the first toothed rod 20 can be completely identical. Alternatively, only one side of the second toothed rods 30 on both sides of the first toothed rod 20 can be rotatably connected to the fixed body 10, while the other side's second toothed rod 30 is fixedly disposed on the fixed body 10.

[0037] refer to Figure 1 and Figure 3 The second toothed bar 30 has at least two sets of segmented tooth regions 50 on its bar wall. The at least two sets of segmented tooth regions 50 are spaced apart in the circumferential direction defined by the axis of the second toothed bar 30. Each set of segmented tooth regions 50 includes a plurality of segmented teeth 40 along the axial direction of the second toothed bar 30.

[0038] In this application, the silicon wafer basket 100 has a second toothed bar 30 rotatably connected to a fixed body 10, allowing different slab toothed areas 50 to face the first toothed bar 20. When the different slab toothed areas 50 face the first toothed bar 20, they together with the slab teeth 40 on the first toothed bar 20 define silicon wafer receiving cavities of different widths. In other words, the width of the aforementioned silicon wafer receiving cavity is adjustable.

[0039] In this application, by rotating the second toothed rod 30 at a certain angle, the second toothed rod 30 and the first toothed rod 20 can form silicon wafer receiving cavities of different widths, thereby enabling the silicon wafer basket 100 of this application to accommodate silicon wafers of different widths. Furthermore, the silicon wafer basket 100 can simultaneously hold two silicon wafers of different widths.

[0040] Further, refer to Figure 1 The silicon wafer basket 100 also includes multiple limiting rods 120 connecting the two end plates 110. The limiting rods 120 can stably fix the main body 10. The limiting rods 120 are located below the first toothed rod 20 and the second toothed rod 30, so as not to affect the position of the silicon wafer placed into the silicon wafer receiving cavity.

[0041] In some embodiments, reference is made to Figures 3 to 5 A limiting structure 113 is provided at the connection between the end plate 110 and the second toothed rod 30. The limiting structure 113 includes an intersecting first limiting wall 1131 and a second limiting wall 1132, and a positioning space is formed between the second limiting wall 1132 and the first limiting wall 1131. The rod wall of the second toothed rod 30 includes an intersecting first edge 310 and a second edge 320. The first edge 310 abuts against the first limiting wall 1131, and the second edge 320 abuts against the second limiting wall 1132.

[0042] The limiting structure 113 is specifically disposed on the inner side 111 of the end plate 110. The inner side 111 of the end plate 110 refers to the side of the end plate 110 that participates in forming the silicon wafer receiving cavity. The limiting structure 113 is used to restrict the end plate 110 and the second toothed rod 30 from rotating freely, so that the end plate 110 and the second toothed rod 30 can be kept in relative positions. When it is necessary to rotate the second toothed rod 30, the second toothed rod 30 is first separated from the limiting structure 113 in the axial direction of the second toothed rod 30, and then the second toothed rod 30 is re-fixed. For example, the connecting screws between the end plate 110 and the second toothed rod 30 can be removed, then the angle of the second toothed rod 30 can be adjusted, and then the second toothed rod 30 can be re-fixed.

[0043] Specifically, refer to Figure 4 and Figure 5 The end plate 110 is specifically provided with a connecting hole 112. At least one side of the connecting hole 112 is provided with an intersecting first limiting wall 1131 and a second limiting wall 1132.

[0044] refer to Figure 3The second toothed rod 30 has a positioning hole 301 at its end, into which a connecting shaft (not shown) can be inserted. The second toothed rod 30 is rotatably connected to the end plate 110 through the engagement of the connecting shaft with the connecting hole 112. When the connecting shaft is inserted into the connecting hole 112, the end of the second toothed rod 30 extends into the aforementioned positioning space, and the first edge 310 of the second toothed rod 30 abuts against the first limiting wall 1131, and the second edge 320 abuts against the second limiting wall 1132, so that the second toothed rod 30 cannot rotate clockwise or counterclockwise relative to the end plate 110. It is easy to understand that the connecting shaft can be fixedly mounted on the second toothed rod 30 or the end plate 110.

[0045] In this embodiment, the end plate 110 and the second toothed bar 30 are configured such that after each rotation adjustment of the second toothed bar 30, the rotation can be locked by the contact between the first edge 310 and the second edge 320 and the first limiting wall 1131 and the second limiting wall 1132.

[0046] Optionally, the first limiting wall 1131 and the second limiting wall 1132 are provided as one set; the first edge 310 and the second edge 320 are provided as multiple sets, the number of sets being the same as the number of segmented tooth areas 50. In this way, after the second tooth bar 30 rotates a certain angle each time, one set of the first edge 310 and the second edge 320 will rotate to a position that can abut against the first limiting wall 1131 and the second limiting wall 1132.

[0047] Optionally, multiple sets of the first limiting wall 1131 and the second limiting wall 1132 are provided; multiple sets of the first edge 310 and the second edge 320 are provided. Each time the second toothed rod 30 rotates by a certain angle, each set of the first edge 310 and the second edge 320 no longer abuts against the previous set of the first limiting wall 1131 and the second limiting wall 1132, but instead switches to abutting against the next set of the first limiting wall 1131 and the second limiting wall 1132.

[0048] In some embodiments, two sets of slicing tooth regions 50 are evenly distributed circumferentially on the wall of the second toothed rod 30. The two sets of slicing tooth regions 50 are spaced 180 degrees apart, so that rotating the second toothed rod 30 180 degrees can achieve the purpose of adjusting the width of the silicon wafer receiving cavity.

[0049] In some embodiments, in the rotation direction of the second rack 30, the end plate 110 is provided with two sets of limiting structures 113 that are 180 degrees apart.

[0050] Specifically, refer to Figure 4 and Figure 5Two sets of limiting structures 113 are evenly distributed on the end plate 110 around the axis of the connecting hole 112. Each set of limiting structures 113 includes the aforementioned first limiting wall 1131 and second limiting wall 1132. Thus, even when one set is provided on the first edge 310 and the second edge 320, the second toothed rod 30 can be locked in position after rotating 180 degrees. When two or more sets are provided on the first edge 310 and the second edge 320, the second toothed rod 30 can be locked in position simultaneously by two limiting structures 113 after rotating 180 degrees, making the locking of the second toothed rod 30 more reliable.

[0051] In addition, the second rack 30 is designed to rotate 180 degrees. From the perspective of operating angle, the rotation of the second rack 30 can be clearly observed, which improves the ease of operation.

[0052] In some embodiments, reference is made to Figure 5 The limiting structure 113 is an even-numbered side groove formed on the end plate 110. The first limiting wall 1131 and the second limiting wall 1132 are the two adjacent inner side walls of the even-numbered side groove. The second toothed rod 30 is rotatably connected to the bottom of the even-numbered side groove. The even-numbered side groove can restrict the second toothed rod 30 from rotating, moving up, down, left, and right relative to the end plate 110.

[0053] Even-numbered-sided grooves are, for example, hexagonal grooves, with limiting structures 113 at each pair of opposite corners. A connecting hole 112 is provided at the bottom of the hexagonal groove. A connecting shaft is provided at the end of the second toothed rod 30. When the connecting shaft is inserted into the connecting hole 112, the end of the second toothed rod 30 extends into the hexagonal groove. In the hexagonal groove, the four groove walls of the two limiting structures 113 primarily restrict the rotation and lateral movement of the second toothed rod 30; simultaneously, the remaining two groove walls in the hexagonal groove are adjacent to the limiting structures 113, effectively restricting the vertical movement of the second toothed rod 30. Thus, the degrees of freedom of the second toothed rod 30 in all directions are reliably restricted.

[0054] In other embodiments, the limiting structure 113 may also be a protrusion protruding from the end plate 110. Specifically, both the first limiting wall 1131 and the second limiting wall 1132 protrude from the inner surface 111 of the end plate 110.

[0055] In some embodiments, an elastic element is provided between the end plate 110 and the second toothed bar 30, the elastic element applying an elastic force to press the second toothed bar 30 against the bottom of the even-numbered side groove. The elastic element is, for example, a spring.

[0056] For example, for ease of description, the two ends of the second toothed rod 30 in the axial direction are respectively a first end and a second end. The two end plates 110 are defined as a first plate and a second plate, respectively. The first end is rotatably connected to the first plate, and a limiting structure 113 is provided on the first plate. The second end is rotatably connected to the second plate, and an elastic element is provided between the two. The elastic element applies an elastic force, causing the first end to abut against the bottom of the even-numbered side groove.

[0057] When it is necessary to adjust the angle of the second rack 30, simply move the second rack 30 axially to compress the elastic element, thereby disengaging the first end of the second rack 30 from the even-numbered side grooves axially. It should be noted that when the second rack 30 compresses the elastic element, the maximum deformation of the elastic element should be greater than the depth of the even-numbered side grooves.

[0058] In this embodiment, an elastic element is used to press the second toothed rod 30. By compressing the elastic element, operating space can be made for the installation of the second toothed rod 30, and space can be made for the first end of the second toothed rod 30 to separate from the even-numbered side grooves in the axial direction. Therefore, it is more convenient to install and adjust the angle of the second toothed rod 30.

[0059] In other embodiments, the silicon wafer basket 100 also includes a fastening bolt, the head of which abuts against the outer side of the end plate 110, and the tail of which passes through the end plate 110 and is threadedly connected to the second toothed rod 30.

[0060] In this embodiment, a fastening bolt is used to connect the second gear 30 to ensure reliable connection. When it is necessary to adjust the angle of the second gear 30, the fastening bolt is unscrewed, the second gear 30 is rotated, and finally the fastening bolt is tightened again.

[0061] Furthermore, in order to quickly re-fix the second toothed rod 30 after the angle of the second toothed rod 30 is adjusted, in some embodiments, the threaded connection length between the tail of the fastening bolt and the second toothed rod 30 is greater than the height of the first limiting wall 1131 and the second limiting wall 1132.

[0062] In this embodiment, the height of the first limiting wall 1131 and the second limiting wall 1132 refers to the size of the first limiting wall 1131 and the second limiting wall 1132 that can be used to limit the second toothed rod 30 in the axial direction of the second toothed rod 30.

[0063] Wherein, when the first limiting wall 1131 and the second limiting wall 1132 are the groove walls of the groove, the height is the depth of the groove wall. When the first limiting wall 1131 and the second limiting wall 1132 are protrusions protruding from the inner surface 111 of the end plate 110, the height is the height by which the first limiting wall 1131 and the second limiting wall 1132 protrude from the inner surface 111 of the end plate 110.

[0064] When the angle of the second rack 30 needs to be adjusted, the fastening bolt is loosened so that there is a gap between the end of the fastening bolt and the end plate 110, and the length of this gap is greater than the height of the first limiting wall 1131 and the second limiting wall 1132 relative to the end plate 110. Next, the second rack 30 is moved axially. After the second rack 30 disengages from the first limiting wall 1131 and the second limiting wall 1132, it remains connected to the tail of the fastening bolt during rotation. In this way, once the angle of the second rack 30 is adjusted to the correct position, the fastening bolt can be tightened quickly.

[0065] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0066] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A silicon wafer flower basket, characterized in that, It includes a fixed body with a hollow cavity, a first toothed rod and a second toothed rod connected to the fixed body and located in the hollow cavity, a silicon wafer receiving cavity is formed between the second toothed rod and the first toothed rod, and the second toothed rod is provided on both sides of the first toothed rod at intervals; The first tooth bar has segmented teeth on both sides of its bar wall facing the second tooth bar; At least two sets of slicing tooth areas are provided on the bar wall of the second tooth bar on at least one side of the first tooth bar and are rotatably connected to the fixed body, so that different slicing tooth areas can face the first tooth bar, and different slicing tooth areas form silicon wafer receiving cavities with different widths when facing the first tooth bar.

2. The silicon wafer flower basket according to claim 1, characterized in that, The fixing body includes two end plates arranged opposite each other, and the first toothed rod and the second toothed rod are connected between the two end plates.

3. The silicon wafer flower basket according to claim 2, characterized in that, A limiting structure is provided at the connection between the end plate and the second toothed rod. The limiting structure includes an intersecting first limiting wall and a second limiting wall, and a positioning space is formed between the second limiting wall and the first limiting wall. The rod wall of the second toothed rod includes an intersecting first edge and a second edge, with the first edge abutting against the first limiting wall and the second edge abutting against the second limiting wall.

4. The silicon wafer flower basket according to claim 3, characterized in that, The second tooth bar has two sets of segmented tooth areas evenly distributed circumferentially on its bar wall.

5. The silicon wafer flower basket according to claim 3, characterized in that, In the rotation direction of the second rack, the end plate is provided with two sets of limiting structures that are 180 degrees apart.

6. The silicon wafer flower basket according to claim 3, characterized in that, The limiting structure is an even-numbered side groove formed on the end plate, and the first limiting wall and the second limiting wall are two adjacent inner side walls of the even-numbered side groove; the second toothed rod is rotatably connected to the bottom of the even-numbered side groove.

7. The silicon wafer flower basket according to claim 6, characterized in that, The even-numbered side groove is a hexagonal groove, and the limiting structure is provided at each of the two opposite corners of the hexagonal groove.

8. The silicon wafer flower basket according to claim 6, characterized in that, An elastic element is provided between the end plate and the second toothed rod, and the elastic element applies an elastic force to make the second toothed rod press against the bottom of the even-numbered side groove.

9. The silicon wafer flower basket according to claim 3, characterized in that, It also includes a fastening bolt, the head of which abuts against the outer side of the end plate, and the tail of which passes through the end plate and is threadedly connected to the second toothed rod.

10. The silicon wafer flower basket according to claim 9, characterized in that, The threaded connection length between the tail of the fastening bolt and the second toothed rod is greater than the height of the first limiting wall and the second limiting wall.

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