Polishing device for processing silicon carbide ceramic vacuum chuck

Abstract

The utility model discloses a polishing device for processing a silicon carbide ceramic vacuum chuck, and relates to the technical field of ceramic vacuum chucks, the polishing device comprises a base, the outer wall of the top of the base is fixedly connected with a processing box, the outer wall of the processing box is fixedly connected with an air pump, and the output end of the air pump is fixedly connected with a connecting pipe; the polishing disc is arranged, the driven rod drives the polishing disc to move so that the polishing disc can be attached to the surface of the wafer, then the first motor is started, the first motor drives the transmission rod to rotate, the transmission rod drives one end of the connecting shaft block to rotate, the connecting shaft block drives the driven rod to rotate around the transmission rod, and the transmission rod drives the polishing disc and the gear to rotate around the transmission rod. The fluted disc drives the transmission rod to rotate, the transmission rod drives the polishing disc to rotate, and the effects that the machined wafer can be polished at multiple angles, so that the wafer is machined more completely and comprehensively, and the polishing efficiency is greatly improved while the quality of a finished product is guaranteed are achieved.

Description

Technical Field

[0001] This utility model belongs to the field of ceramic vacuum chuck technology, and in particular relates to a grinding device for processing silicon carbide ceramic vacuum chucks. Background Technology

[0002] In wafer manufacturing equipment, vacuum chucks are used to firmly fix the wafers to ensure that the wafers do not slip or warp during processing. During operation, the air between the silicon wafer and the ceramic surface is extracted by the internal flow channel on the silicon carbide ceramic, so that the silicon wafer and the ceramic surface are under low pressure. The silicon wafer is adsorbed on the surface of the chuck due to the air pressure, thereby fixing the silicon wafer.

[0003] Existing equipment has limitations in its use. When processing wafers, the fixed and single angle may make it difficult for the grinding surface to cover all areas of the wafer surface. The wafer processing is not complete and comprehensive enough to guarantee the quality of the finished product, and the processing efficiency is relatively low. Therefore, we propose a grinding device for processing silicon carbide ceramic vacuum chucks. Utility Model Content

[0004] The purpose of this utility model is to provide a grinding device for processing silicon carbide ceramic vacuum chucks. Through the grinding mechanism and the cleaning mechanism, it solves the problem that when processing wafers, the grinding surface may not be able to cover all areas of the wafer surface due to the fixed and single angle, resulting in incomplete and insufficient wafer processing, which is not enough to guarantee the quality of the finished product, and the processing efficiency is relatively low.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model relates to a grinding device for processing silicon carbide ceramic vacuum suction cups, comprising a base, a processing box fixedly connected to the top outer wall of the base, an air pump fixedly connected to the outer wall of the processing box, a connecting pipe fixedly connected to the output end of the air pump, a grinding seat fixedly connected to the outer wall of the connecting pipe, a ceramic vacuum suction cup fixedly connected to the inner wall of the grinding seat, a collection drawer slidably connected to the inner wall of the processing box, and a grinding mechanism provided on the top outer wall of the base.

[0007] The grinding mechanism includes several hydraulic telescopic rods. The outer walls of the hydraulic telescopic rods are fixedly connected to the top outer wall of the base. A fixing plate is fixedly connected to the top outer wall of the several hydraulic telescopic rods. A first motor is fixedly connected to the top outer wall of the fixing plate. A transmission rod is fixedly connected to the bottom output shaft of the first motor via a coupling. A connecting block is fixedly connected to the outer wall of the end of the transmission rod away from the first motor. A driven rod is rotatably connected to the inner wall of the connecting block. A grinding disc is fixedly connected to the bottom outer wall of the driven rod. A gear is fixedly connected to the outer wall of the end of the driven rod away from the grinding disc. A gear plate is fixedly connected to the bottom outer wall of the fixing plate. The outer wall of the gear plate meshes with the outer wall of the gear.

[0008] Furthermore, the outer wall of the processing box is provided with a cleaning mechanism, which includes a second motor. The outer wall of the second motor is fixedly connected to the outer wall of the processing box, and the bottom output shaft of the second motor is fixedly connected to a transmission rod two via a coupling.

[0009] Furthermore, a transmission wheel is fixedly connected to the outer wall of the end of the transmission rod away from the second motor, and a transmission belt is connected to the outer wall of the transmission wheel.

[0010] Furthermore, a second transmission wheel is connected to the inner wall of the end of the transmission belt away from the transmission wheel, and a second gear is fixedly connected to the outer wall of the second transmission wheel.

[0011] Furthermore, the outer wall of the second gear is rotatably connected to the outer wall of the processing box, and the inner wall of the processing box is fixedly connected with several slide rails.

[0012] Furthermore, each of the inner walls of several slide rails is slidably connected to a displacement block, and the outer wall of the displacement block is fixedly connected to a scraper.

[0013] Furthermore, a rack is fixedly connected to the outer wall of the displacement block near the second gear, and the outer wall of the rack meshes with the outer wall of the second gear.

[0014] This utility model has the following beneficial effects:

[0015] 1. This utility model incorporates a grinding disc. A driven rod moves the grinding disc to fit the surface of the wafer. Then, a first motor is activated, which drives a transmission rod to rotate. The transmission rod drives one end of a connecting block to rotate, which in turn drives the driven rod to rotate around the transmission rod. The transmission rod then drives the grinding disc and gear to rotate around the transmission rod. The gear plate drives the transmission rod to rotate, and the transmission rod drives the grinding disc to rotate. The grinding disc rotates around the transmission rod while simultaneously rotating on its own axis to grind the wafer. This allows for multi-angle grinding of the wafer, resulting in more complete and comprehensive wafer processing. This ensures the quality of the finished product while significantly improving the efficiency of the grinding process.

[0016] 2. This utility model incorporates a scraper. After grinding, debris accumulates on the surface of the grinding seat and the ceramic vacuum suction cup. The second motor is then activated, causing the second transmission rod to rotate. This rotation drives the transmission wheel, which in turn drives the transmission belt. The belt then drives the second transmission wheel to rotate, which in turn drives the second gear to rotate. This gear, in turn, moves the rack, which in turn moves the displacement block. The displacement block 308 then moves the scraper, thus scraping off and collecting the large amount of debris generated during grinding for easy transfer and disposal later.

[0017] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the grinding mechanism of this utility model;

[0021] Figure 3 This is a schematic diagram of the cleaning mechanism of this utility model;

[0022] Figure 4 This is a cross-sectional view of the grinding seat structure of this utility model;

[0023] Figure 5 This utility model Figure 4 Enlarged view of point A in the middle.

[0024] The attached diagram lists the components represented by each number as follows:

[0025] 1. Base; 101. Processing box; 102. Air pump; 103. Connecting pipe; 104. Grinding seat; 105. Ceramic vacuum suction cup; 106. Collection drawer; 2. Grinding mechanism; 201. Hydraulic telescopic rod; 202. Fixing plate; 203. First motor; 204. Transmission rod; 205. Coupling block; 206. Driven rod; 207. Grinding disc; 208. Gear; 209. Gear plate; 3. Cleaning mechanism; 301. Second motor; 302. Transmission rod two; 303. Transmission wheel; 304. Transmission belt; 305. Transmission wheel two; 306. Gear two; 307. Slide rail; 308. Displacement block; 309. Scraper; 310. Rack. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figure 1-5 As shown, this utility model is a grinding device for processing silicon carbide ceramic vacuum suction cups, including a base 1, a processing box 101 fixedly connected to the top outer wall of the base 1, an air pump 102 fixedly connected to the outer wall of the processing box 101, the processing box 101 mainly serves to fix and limit the air pump 102, the air pump 102 can only be fixed in the position on the base 1, the air pump 102 cannot be moved independently, a connecting pipe 103 is fixedly connected to the output end of the air pump 102, a grinding seat 104 is fixedly connected to the outer wall of the connecting pipe 103, a ceramic vacuum suction cup 105 is fixedly connected to the inner wall of the grinding seat 104, the grinding seat 104 mainly serves to fix and limit the ceramic vacuum suction cup 105, the grinding seat 104 can only be fixed in the position on the ceramic vacuum suction cup 105, the grinding seat 104 cannot be moved independently, a collection drawer 106 is slidably connected to the inner wall of the processing box 101, and a grinding mechanism 2 is provided on the top outer wall of the base 1;

[0028] The grinding mechanism 2 includes several hydraulic telescopic rods 201. The outer walls of the hydraulic telescopic rods 201 are fixedly connected to the top outer wall of the base 1. A fixing plate 202 is fixedly connected to the top outer walls of the several hydraulic telescopic rods 201. The several hydraulic telescopic rods 201 mainly serve to fix and limit the fixing plate 202. When the several hydraulic telescopic rods 201 are activated, they will drive the fixing plate 202 to move simultaneously. A first motor 203 is fixedly connected to the top outer wall of the fixing plate 202. The bottom output shaft of the first motor 203 is fixedly connected to a transmission rod 204 through a coupling. A connecting block 205 is fixedly connected to the outer wall of the end of the transmission rod 204 away from the first motor 203. The first motor 203 mainly provides kinetic energy to the transmission rod 204. When the first motor 203 starts, it drives the transmission rod 204 to rotate simultaneously. The inner wall of the connecting block 205 is rotatably connected to the driven rod 206. The bottom outer wall of the driven rod 206 is fixedly connected to the grinding disc 207. The outer wall of the end of the driven rod 206 away from the grinding disc 207 is fixedly connected to the gear 208. The driven rod 206 mainly serves to fix and limit the gear 208. When the gear 208 rotates, it drives the driven rod 206 to rotate together. The bottom outer wall of the fixed plate 202 is fixedly connected to the gear 209. The outer wall of the gear 209 meshes with the outer wall of the gear 208.

[0029] A cleaning mechanism 3 is provided on the outer wall of the processing box 101. The cleaning mechanism 3 includes a second motor 301. The outer wall of the second motor 301 is fixedly connected to the outer wall of the processing box 101. The processing box 101 mainly serves to fix and limit the second motor 301. The second motor 301 can only be fixed in the position on the processing box 101 and cannot move independently. The bottom output shaft of the second motor 301 is fixedly connected to a transmission rod 302 through a coupling. The outer wall of the end of the transmission rod 302 away from the second motor 301 is fixedly connected to a transmission rod. The outer wall of the transmission wheel 303 is connected to the transmission belt 304. The second transmission rod 302 mainly plays the role of transmitting kinetic energy to the transmission wheel 303. When the second transmission rod 302 rotates, it will drive the transmission wheel 303 to rotate simultaneously. The inner wall of the end of the transmission belt 304 away from the transmission wheel 303 is connected to the second transmission wheel 305. The outer wall of the second transmission wheel 305 is fixedly connected to the second gear 306. The transmission belt 304 mainly plays the role of transmitting kinetic energy to the second transmission wheel 305. When the transmission belt 304 rotates, it will drive the second transmission wheel 305 to rotate simultaneously.

[0030] The outer wall of the second gear 306 is rotatably connected to the outer wall of the processing box 101. Several slide rails 307 are fixedly connected to the inner wall of the processing box 101. Displacement blocks 308 are slidably connected to the inner walls of the slide rails 307. The slide rails 307 mainly play a sliding limiting role for the displacement blocks 308. The displacement blocks 308 can only slide within the slide rails 307 at a fixed angle. A scraper 309 is fixedly connected to the outer wall of the displacement block 308 near the second gear 306. A rack 310 is fixedly connected to the outer wall of the second gear 306. The outer wall of the rack 310 meshes with the outer wall of the second gear 306. The second gear 306 mainly plays a role in transmitting kinetic energy to the rack 310. When the second gear 306 rotates, it will drive the rack 310 to move simultaneously.

[0031] One specific application of this embodiment is:

[0032] When the equipment is needed, the wafer can be placed directly on the surface of the ceramic vacuum chuck 105. The air pump 102 is then activated, drawing air out of the grinding base 104 through the connecting pipe 103. The ceramic vacuum chuck 105 then holds the wafer in place. Several hydraulic telescopic rods 201 are activated, causing the fixing plate 202 to move up and down. The fixing plate 202 then moves the first motor 203, which in turn moves the transmission rod 204. The transmission rod 204 moves the connecting block 205, which in turn moves the driven rod 206. The driven rod 206 then moves the grinding disc 207 to fit against the wafer surface. The first motor 203 is then activated again, causing the transmission rod 204 to rotate. The transmission rod 204 then rotates one end of the connecting block 205, which in turn moves the driven rod 206 around the transmission rod 204. The transmission rod 204 then moves the grinding disc 207 and the gear 208 around the transmission rod 204. The transmission rod 204 rotates, and the gear plate 209 drives the transmission rod 204 to rotate. The transmission rod 204 drives the grinding disc 207 to rotate. The grinding disc 207 rotates around the transmission rod 204 while rotating on its own axis to grind the wafer. After the grinding process is completed, debris will accumulate on the surface of the grinding seat 104 and the ceramic vacuum suction cup 105. The second motor 301 is started. The second motor 301 drives the second transmission rod 302 to rotate. The second transmission rod 302 drives the transmission wheel 303 to rotate. The transmission wheel 303 drives the transmission belt 304 to rotate. The transmission belt 304 drives the second transmission wheel 305 to rotate. The second transmission wheel 305 drives the second gear 306 to rotate. The second gear 306 drives the rack 310 to move. The rack 310 drives the displacement block 308 to move. The displacement block 308 drives the scraper 309 to move. During the displacement process, the scraper 309 scrapes the debris into the inside of the collection drawer 106. The collection drawer 106 can be directly pulled out from the processing box 101 to transfer and dump the collected debris.

[0033] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0034] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A grinding device for processing silicon carbide ceramic vacuum chucks, comprising a base (1), characterized in that: A processing box (101) is fixedly connected to the top outer wall of the base (1), an air pump (102) is fixedly connected to the outer wall of the processing box (101), a connecting pipe (103) is fixedly connected to the output end of the air pump (102), a grinding seat (104) is fixedly connected to the outer wall of the connecting pipe (103), a ceramic vacuum suction cup (105) is fixedly connected to the inner wall of the grinding seat (104), a collection drawer (106) is slidably connected to the inner wall of the processing box (101), and a grinding mechanism (2) is provided on the top outer wall of the base (1). The grinding mechanism (2) includes several hydraulic telescopic rods (201). The outer wall of each hydraulic telescopic rod (201) is fixedly connected to the top outer wall of the base (1). A fixing plate (202) is fixedly connected to the top outer wall of each hydraulic telescopic rod (201). A first motor (203) is fixedly connected to the top outer wall of the fixing plate (202). A transmission rod (204) is fixedly connected to the bottom output shaft of the first motor (203) via a coupling. The transmission rod (204) is located away from the first motor. A connecting block (205) is fixedly connected to the outer wall of one end of (203). A driven rod (206) is rotatably connected to the inner wall of the connecting block (205). A grinding disc (207) is fixedly connected to the bottom outer wall of the driven rod (206). A gear (208) is fixedly connected to the outer wall of the driven rod (206) away from the grinding disc (207). A gear disc (209) is fixedly connected to the bottom outer wall of the fixing plate (202). The outer wall of the gear disc (209) meshes with the outer wall of the gear (208).

2. The grinding device for processing silicon carbide ceramic vacuum chucks according to claim 1, characterized in that, The outer wall of the processing box (101) is provided with a cleaning mechanism (3), which includes a second motor (301). The outer wall of the second motor (301) is fixedly connected to the outer wall of the processing box (101). The bottom output shaft of the second motor (301) is fixedly connected to a transmission rod (302) through a coupling.

3. The grinding device for processing silicon carbide ceramic vacuum chucks according to claim 2, characterized in that, A transmission wheel (303) is fixedly connected to the outer wall of the end of the transmission rod (302) away from the second motor (301), and a transmission belt (304) is connected to the outer wall of the transmission wheel (303).

4. The grinding device for processing silicon carbide ceramic vacuum chucks according to claim 3, characterized in that, The inner wall of the end of the transmission belt (304) away from the transmission wheel (303) is connected to the transmission wheel two (305), and the outer wall of the transmission wheel two (305) is fixedly connected to the gear two (306).

5. A grinding device for processing silicon carbide ceramic vacuum chucks according to claim 4, characterized in that, The outer wall of the gear 2 (306) is rotatably connected to the outer wall of the machining box (101), and a number of slide rails (307) are fixedly connected to the inner wall of the machining box (101).

6. A grinding device for processing silicon carbide ceramic vacuum chucks according to claim 5, characterized in that, The inner walls of several slide rails (307) are slidably connected with displacement blocks (308), and the outer walls of the displacement blocks (308) are fixedly connected with scrapers (309).

7. A grinding device for processing silicon carbide ceramic vacuum chucks according to claim 6, characterized in that, A rack (310) is fixedly connected to the outer wall of one end of the displacement block (308) near the gear two (306), and the outer wall of the rack (310) meshes with the outer wall of the gear two (306).

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