Stack type multi-cavity vacuum heating device

Abstract

The utility model relates to a stack type multi-chamber vacuum heating device which comprises a shell, a plurality of independent vacuum heating assemblies which are stacked up and down are arranged in the shell, and each vacuum heating assembly comprises a vacuum chamber, a substrate conveying assembly, an inlet cabin door assembly and an outlet cabin door assembly. An inlet end and an outlet end communicated with the outside of the shell are arranged at the two ends of the vacuum chamber respectively, the inlet cabin door assembly is arranged at the inlet end and used for controlling opening and closing of the inlet end, the outlet cabin door assembly is arranged at the outlet end and used for controlling opening and closing of the outlet end, and heating pipelines are arranged in the peripheral side walls of the vacuum chamber. The device disclosed by the utility model is compact in structure, high in substrate heating speed, small in vacuum chamber volume, high in vacuum speed and capable of obviously reducing the heating energy consumption.

Description

Technical Field

[0001] This utility model pertains to vacuum heating equipment, and specifically relates to a stacked multi-chamber vacuum heating device. Background Technology

[0002] Vacuum heating devices are frequently used in the thin-film solar cell industry. Heating in a vacuum environment avoids oxidation or nitriding of the film layer due to contact with air at high temperatures. Common vacuum heating devices include long vacuum tunnel furnaces, long vacuum transmission chambers, and cartridge-type vacuum heating chambers. Long vacuum tunnel furnaces and long vacuum transmission chambers can ensure that each sample can be vacuum heat-treated in a timely manner. However, their disadvantages include the long heating area and the need for frequent evacuation and venting of the sample entry and exit chambers, resulting in significant energy costs and high requirements for the vacuum system. Cartridge-type vacuum heating chambers can process multiple samples at once, with a single heating and evacuation cycle, saving considerable costs. However, the first and last samples require different storage times in air, making them unsuitable for many demanding processes. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a stacked multi-chamber vacuum heating device, which sets each vacuum chamber independently to ensure that the vacuum heating process of each sample is consistent, and can quickly reach the target vacuum with very little vacuum power consumption, and requires very little compressed air when exposing the vacuum.

[0004] This invention is implemented as follows: a stacked multi-chamber vacuum heating device is provided, including a housing, within which multiple independent vacuum heating components are arranged, stacked one on top of the other. Each vacuum heating component includes a vacuum chamber, a substrate conveying component, an inlet door component, and an outlet door component. The substrate conveying component is located inside the vacuum chamber and is used to input and output the substrate into and out of the vacuum chamber. An inlet end and an outlet end, which communicate with the outside of the housing, are respectively provided at both ends of the vacuum chamber. The inlet door component is located at the inlet end and is used to control the opening and closing of the inlet end. The outlet door component is located at the outlet end and is used to control the opening and closing of the outlet end. Heating pipes for heating the substrate located inside the vacuum chamber are arranged in the four side walls of the vacuum chamber.

[0005] Furthermore, the import hatch assembly includes an import hatch, a first rotating shaft, and an import hatch drive component. The first rotating shaft is mounted on the import hatch, and one end of the import hatch drive component is mounted on the housing, while the other end is mounted on the import hatch. The import hatch drive component drives the import hatch to rotate around the first rotating shaft, thereby enabling the import hatch to close and open at the import end.

[0006] Furthermore, the imported hatch drive component is a first cylinder.

[0007] Furthermore, the exit hatch assembly includes an exit hatch, a second rotating shaft, and an exit hatch drive component. The second rotating shaft is mounted on the exit hatch, and one end of the exit hatch drive component is mounted on the housing, while the other end is mounted on the exit hatch. The exit hatch drive component drives the exit hatch to rotate around the second rotating shaft, thereby enabling the exit hatch to close and open at the exit end.

[0008] Furthermore, the exit hatch drive component is a second cylinder.

[0009] Furthermore, the substrate conveying assembly includes a substrate heating platform, a conveying platform, and a lifting assembly. The lifting assembly drives the conveying platform to move up and down. A set of conveying platforms and lifting assemblies are respectively arranged on the front and rear sides of the substrate heating platform. The conveying platform includes multiple rollers. The two sides of the substrate are placed on the rollers for support and conveying. When the lifting assembly descends to the lowest position, the height of the conveying platform is lower than the height of the substrate heating platform, and the substrate is placed on the substrate heating platform for heating.

[0010] Furthermore, multiple sets of suction valves and venting valves are provided on the housing, and each set of suction valves and venting valves is connected to a corresponding vacuum chamber.

[0011] Furthermore, heat transfer oil is introduced into the heating pipeline to heat the substrate inside the vacuum chamber.

[0012] Furthermore, a heating element is installed inside the heating pipeline to heat the substrate inside the vacuum chamber.

[0013] Compared with existing technologies, the stacked multi-chamber vacuum heating device of this invention includes a housing, within which multiple independent, stacked vacuum heating components are arranged. Each vacuum heating component includes a vacuum chamber, a substrate conveying component, an inlet door component, and an outlet door component. An inlet end and an outlet end, communicating with the outside of the housing, are respectively located at both ends of the vacuum chamber. The inlet door component is located at the inlet end to control the opening and closing of the inlet end, and the outlet door component is located at the outlet end to control the opening and closing of the outlet end. Heating pipes are arranged within the four side walls of the vacuum chamber. This invention uses multiple independent, stacked vacuum heating components, each including a vacuum chamber, a substrate conveying component, an inlet door component, and an outlet door component. The vacuum of each vacuum chamber is individually controlled, and the entry and exit methods are individually controlled, ensuring consistent vacuum heating processes for each substrate. It can quickly reach the target vacuum with minimal vacuum power consumption, and requires very little compressed air when exposing the vacuum. Moreover, the device has a compact structure, a fast substrate heating rate, a small vacuum chamber volume, and a fast vacuum speed, which can significantly reduce heating energy consumption. Attached Figure Description

[0014] Figure 1 This is a perspective view of a preferred embodiment of the stacked multi-chamber vacuum heating device of this utility model;

[0015] Figure 2 This is a three-dimensional schematic diagram of the substrate delivery assembly of this utility model. Detailed Implementation

[0016] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0017] Please refer to the following at the same time Figure 1 as well as Figure 2 As shown, a preferred embodiment of the stacked multi-chamber vacuum heating device of this utility model includes a housing 1, within which multiple independent vacuum heating components 2 are arranged, and the multiple vacuum heating components 2 are stacked together to form a stacked structure. Figure 1 As shown, four independent vacuum heating components 2 are installed inside the housing 1.

[0018] Each vacuum heating assembly 2 includes a vacuum chamber (not shown in the figure), a substrate conveying assembly 3, an inlet door assembly 4, and an outlet door assembly 5. The substrate conveying assembly 3 is disposed inside the vacuum chamber and is used to input and output the substrate into and out of the vacuum chamber. An inlet end 6 and an outlet end (not shown in the figure) communicating with the outside of the housing are respectively provided at both ends of the vacuum chamber, and the inlet end 6 and the outlet end are located on the left and right sides of the vacuum chamber, respectively.

[0019] An inlet door assembly 4 is located at the inlet end 6 to control the opening and closing of the inlet end 6, and an outlet door assembly 5 is located at the outlet end to control the opening and closing of the outlet end. Heating pipes (not shown in the figure) for heating the substrate located inside the vacuum chamber are installed in the four side walls of the vacuum chamber.

[0020] The import hatch assembly 4 includes an import hatch 41, a first rotating shaft 42, and an import hatch drive component 43. The first rotating shaft 42 is mounted on the import hatch 41. One end of the import hatch drive component 43 is mounted on the housing 1, and the other end is mounted on the import hatch 41. The import hatch drive component 43 drives the import hatch 41 to rotate around the first rotating shaft 42, thereby enabling the import hatch 41 to close and open the import end 6. In this embodiment, the import hatch drive component 43 is a first cylinder.

[0021] The outlet hatch assembly 5 includes an outlet hatch 51, a second rotating shaft 52, and an outlet hatch drive 53. The second rotating shaft 52 is mounted on the outlet hatch, and one end of the outlet hatch drive 53 is mounted on the housing 1, while the other end is mounted on the outlet hatch 51. The outlet hatch drive 53 drives the outlet hatch 51 to rotate around the second rotating shaft 52, thereby enabling the outlet hatch 51 to close and open at the outlet end. In this embodiment, the outlet hatch drive 53 is a second cylinder.

[0022] Please refer to Figure 2 As shown, the substrate conveying assembly 3 includes a substrate heating platform 31, a conveying platform 32, and a lifting assembly 33. The lifting assembly 33 drives the conveying platform 32 to move up and down. A set of conveying platforms 32 and lifting assemblies 33 are respectively arranged on the front and rear sides of the substrate heating platform 31. The conveying platform 32 includes multiple rollers 34, on which the two sides of the substrate are placed and supported for conveying. When the lifting assembly 33 descends to its lowest position, the height of the conveying platform 33 is lower than the height of the substrate heating platform 31, and the substrate is placed on the substrate heating platform 31 for heating. The substrate is in direct contact with the substrate heating platform 31, resulting in rapid heating. Heating pipes are installed inside the substrate heating platform 31, and heat-conducting oil is placed inside the heating pipes. Heat is transferred to the substrate through the heat-conducting oil.

[0023] Please refer to again Figure 1 As shown, multiple sets of suction valves 7 and venting valves 8 are installed on the housing 1, each set of suction valves 7 and venting valves 8 being connected to a corresponding vacuum chamber. Each set of suction valves 7 is sequentially connected to a screw mechanical pump and a high-vacuum Roots pump (not shown in the figure) via pipelines. When the vacuum chamber is initially evacuated, the screw mechanical pump is used for evacuation. When the vacuum level reaches 100 Pa, the system switches to a shared high-vacuum Roots pump for evacuation. The high-vacuum Roots pump is equipped with a PCW (Potentially Calcium Heater) for cooling.

[0024] Venting valve 8 is connected to the gas supply system. If the substrate sample only needs to be heated before removal, the gas source for this gas supply system can be compressed air; if temperature control is required when exposed to the atmosphere, the gas source for this gas supply system can be nitrogen.

[0025] Heat transfer oil is introduced into the heating pipeline to heat the substrate inside the vacuum chamber. A heat transfer oil inlet connector 9 and a heat transfer oil outlet connector 10 are respectively installed on the housing 1. All vacuum chambers are heated by the same hot oil circulation heating system. Each vacuum chamber is equipped with a flow meter around its perimeter, and the temperature of the vacuum chamber is controlled to remain constant by adjusting the hot oil flow rate around the perimeter.

[0026] A heating element is installed inside the heating pipeline to heat the substrate inside the vacuum chamber. Correspondingly, a conductive connector for the heating element is provided on the housing 1.

[0027] To facilitate automatic feeding and discharging, a feeding lifting system (not shown in the figure) is installed on the side of the inlet door assembly 4. The substrates to be vacuum heat-treated are automatically fed into the corresponding vacuum heating components 2 sequentially through the feeding lifting system. A discharging lifting system (not shown in the figure) is installed on the side of the outlet door assembly 5. The substrates that have completed vacuum heat treatment are automatically output from the corresponding vacuum heating components 2 to the discharging lifting system through the discharging lifting system.

[0028] The stacked multi-chamber vacuum heating device is also equipped with a control system. The control system PLC controls the automated feeding of the vacuum heating component 2, including: controlling the selection and allocation of vacuum chambers during feeding, controlling the temperature process parameters of each vacuum chamber, and controlling the vacuum system and heating system of each vacuum chamber.

[0029] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A stacked multi-chamber vacuum heating device, comprising a housing, characterized in that, Multiple independent vacuum heating components are arranged inside the housing, stacked one on top of the other. Each vacuum heating component includes a vacuum chamber, a substrate conveying component, an inlet door component, and an outlet door component. The substrate conveying component is located inside the vacuum chamber and is used to input and output the substrate into and out of the vacuum chamber. An inlet end and an outlet end, which are connected to the outside of the housing, are respectively provided at both ends of the vacuum chamber. The inlet door component is located at the inlet end to control the opening and closing of the inlet end, and the outlet door component is located at the outlet end to control the opening and closing of the outlet end. Heating pipes for heating the substrate located inside the vacuum chamber are arranged in the four side walls of the vacuum chamber.

2. The stacked multi-chamber vacuum heating device as described in claim 1, characterized in that, The import hatch assembly includes an import hatch, a first rotating shaft, and an import hatch drive component. The first rotating shaft is mounted on the import hatch, and one end of the import hatch drive component is mounted on the housing, while the other end is mounted on the import hatch. The import hatch drive component drives the import hatch to rotate around the first rotating shaft, thereby enabling the import hatch to close and open at the import end.

3. The stacked multi-chamber vacuum heating device as described in claim 2, characterized in that, The imported hatch drive component is the first cylinder.

4. The stacked multi-chamber vacuum heating device as described in claim 1, characterized in that, The exit hatch assembly includes an exit hatch, a second rotating shaft, and an exit hatch drive. The second rotating shaft is mounted on the exit hatch, and one end of the exit hatch drive is mounted on the housing, while the other end is mounted on the exit hatch. The exit hatch drive drives the exit hatch to rotate around the second rotating shaft, thereby enabling the exit hatch to close and open at the exit end.

5. The stacked multi-chamber vacuum heating device as described in claim 4, characterized in that, The exit hatch drive component is the second cylinder.

6. The stacked multi-chamber vacuum heating device as described in claim 1, characterized in that, The substrate conveying assembly includes a substrate heating platform, a conveying platform, and a lifting assembly. The lifting assembly drives the conveying platform to move up and down. A set of conveying platforms and lifting assemblies are respectively set on the front and rear sides of the substrate heating platform. The conveying platform includes multiple rollers. The two sides of the substrate are placed on the rollers for support and conveying. When the lifting assembly descends to the lowest position, the height of the conveying platform is lower than the height of the substrate heating platform, and the substrate is placed on the substrate heating platform for heating.

7. The stacked multi-chamber vacuum heating device as described in claim 1, characterized in that, Multiple sets of suction valves and vent valves are provided on the housing, and each set of suction valves and vent valves is connected to a corresponding vacuum chamber.

8. The stacked multi-chamber vacuum heating device as described in claim 1, characterized in that, Heat transfer oil is introduced into the heating pipeline to heat the substrate inside the vacuum chamber.

9. The stacked multi-chamber vacuum heating device as described in claim 1, characterized in that, A heating element is installed inside the heating pipeline to heat the substrate inside the vacuum chamber.

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