Substrate clamping device

Abstract

The utility model discloses a substrate clamping device and belongs to the technical field of coating equipment. The substrate clamping device comprises a load frame, at least one first sliding piece and a second sliding piece, and a clamping through hole is formed in the load frame; the length of the first sliding piece extends along the X axis, and the first sliding piece is located in the clamping through hole and slidably connected to the load frame along the Y axis. The first sliding piece is provided with at least one second sliding piece, the second sliding piece comprises a sliding connecting piece and a bearing plate, one end of the sliding connecting piece is connected to the first sliding piece in a sliding mode along the X axis, the bearing plate is used for containing a substrate, and the bearing plate is connected to the other end of the sliding connecting piece in a height-adjustable mode along the Z axis. The substrate clamping device can ensure that the target-substrate distance is kept at a relatively fixed numerical value in the whole coating process so as to ensure the uniformity of substrate coating; and the substrate clamping device can be suitable for clamping and fixing various substrates with different sizes and shapes, and the applicability and universality of the whole substrate clamping device are guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a substrate clamping device. Background Technology

[0002] Currently, during the coating process on substrates, the target material connected to the cathode is continuously consumed, causing the target thickness to gradually decrease. Consequently, the target-substrate distance between the target and the substrate increases as the target material is consumed, affecting the quality of thin film deposition and leading to uneven coating on the substrate. Furthermore, the clamping devices in existing coating equipment can only be used to clamp and fix substrates of a single size and shape, resulting in a waste of resources for the entire coating equipment and poor applicability and versatility.

[0003] To address the above problems, a substrate clamping device is urgently needed. Utility Model Content

[0004] The purpose of this invention is to provide a substrate clamping device that can ensure that the target-substrate distance remains at a relatively fixed value throughout the entire coating process, thereby ensuring the uniformity of substrate coating and the applicability and versatility of the entire substrate clamping device.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] The substrate clamping device includes:

[0007] A load rack with clamping through holes;

[0008] At least one first slider, the length of the first slider extending along the X-axis and located within the clamping through hole, the first slider being slidably connected to the load frame along the Y-axis;

[0009] The second sliding member is provided on the first sliding member. The second sliding member includes a sliding connector and a support plate. One end of the sliding connector is slidably connected to the first sliding member along the X-axis. The support plate is used to place the substrate. The support plate is height-adjustably connected to the other end of the sliding connector along the Z-axis.

[0010] As an optional solution, the first slider includes:

[0011] A connecting rod extends along the X-axis;

[0012] The sliding seat is connected to both ends of the connecting rod along the X-axis, and the sliding seat is slidably connected to the load frame along the Y-axis.

[0013] A connecting support extends along the X-axis and is connected to one side of the connecting rod along the Y-axis. The sliding connector is slidably connected to the connecting support along the X-axis.

[0014] As an optional solution, the clamping through hole has protrusions on both inner sidewalls along the X-axis, and the length of the protrusions extends along the Y-axis; the sliding seat is provided with a sliding groove, and the protrusions are slidably disposed in the sliding groove.

[0015] As an alternative, along the X-axis and in the direction close to the connecting rod, the thickness of the protrusion gradually decreases along the Z-axis, and the width of the sliding groove gradually decreases, so that a wedge-shaped fit structure is formed between the protrusion and the sliding groove.

[0016] As an optional solution, the sliding seat is provided with two first threaded holes opposite each other along the Z-axis. Both first threaded holes are connected to the sliding groove. A first bolt can be screwed into one of the first threaded holes and pressed against the upper or lower outer surface of the protrusion.

[0017] As an optional solution, the sliding connector includes:

[0018] The frame plate is arranged in a V-shape facing the connecting support, and the frame plate is fitted to the outside of the connecting support;

[0019] A bent connecting plate is provided, wherein the frame plate is connected to the opposite ends of the frame plate along the Z-axis, the bent connecting plate is used to hook and connect with the connecting support, and the bent connecting plate is slidable relative to the connecting support along the X-axis.

[0020] A support plate is connected to the side of the frame plate away from the connecting support, and a bearing plate is connected to the top of the support plate with adjustable height along the Z-axis.

[0021] As an optional solution, the bending connecting plate is provided with a second threaded hole, and the second bolt can be screwed into the second threaded hole and pressed against the outer surface of the connecting support.

[0022] As an optional solution, the substrate clamping device further includes an adjustment assembly for adjusting the setting height of the carrier plate relative to the support plate along the Z-axis; the adjustment assembly includes:

[0023] The third bolt slides downward along the Z-axis through the bearing plate and is threadedly connected to the support plate;

[0024] An elastic element is sleeved on the third bolt, and the opposite ends of the elastic element abut against the support plate and the bearing plate, respectively.

[0025] As an optional solution, the substrate clamping device further includes a limiting component for limiting and fixing the substrate to the carrier plate; the limiting component includes:

[0026] Two limiting plates are perpendicularly disposed on the bearing plate. One of the two limiting plates is used to limit and abut against the substrate along the X-axis, and the other is used to limit and abut against the substrate along the Y-axis.

[0027] A pressing member is disposed on the bearing plate and located between the two limiting plates. The pressing member is used to press against or detach from the substrate.

[0028] As an optional solution, the pressing member includes:

[0029] A stepped column, one end of which is limited and abuts against the bottom of the bearing plate, and the other end extends upward along the Z-axis through the bearing plate;

[0030] A rotating ring and a pressing plate are connected together. The rotating ring is sleeved on the part of the stepped column that extends out of the bearing plate. The rotating ring can rotate about the Z-axis relative to the stepped column. The pressing plate is used to press against the substrate.

[0031] The fourth bolt is threaded into the stepped column and presses against the rotating ring.

[0032] The beneficial effects of this utility model are as follows:

[0033] The substrate clamping device of this invention features a clamping through-hole on the load frame, allowing a first sliding member to be positioned within the through-hole and slidably connected to the load frame along the Y-axis. One end of a sliding connector of the second sliding member is slidably connected to the first sliding member along the X-axis, and a support plate is height-adjustably connected to the other end of the sliding connector along the Z-axis. This allows adjustment of the target-substrate distance by adjusting the height of the support plate relative to the sliding connector along the Z-axis, thereby enabling adjustment of the target-substrate distance. This ensures the target-substrate distance is not limited to a fixed distance but can be adjusted to match the gradually decreasing target thickness, maintaining a consistent target-substrate distance throughout the coating process. A relatively fixed value is used to ensure the quality of thin film deposition and the uniformity of substrate coating. Furthermore, by setting at least one first sliding member and at least one second sliding member on the first sliding member, the first sliding members can slide along the Y-axis and the second sliding members on the first sliding members can slide along the X-axis. This allows for the adjustment of the positions of each carrier plate on the Y-axis and X-axis, so that the size and shape of each carrier plate are matched with the size and shape of the substrate. This enables the substrate clamping device to be adapted to clamp and fix substrates of various sizes and shapes, thus improving the applicability and versatility of the entire substrate clamping device. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the substrate clamping device provided by this utility model;

[0035] Figure 2 yes Figure 1 A partially enlarged structural diagram of point A (the pressure plate is not shown);

[0036] Figure 3 This is a schematic diagram of the assembly structure between the first sliding member (excluding part of the structure) and a second sliding member provided by this utility model;

[0037] Figure 4 This is a structural schematic diagram of the first sliding member (excluding part of the structure) provided by this utility model;

[0038] Figure 5 This is a schematic diagram of the assembly structure between the second sliding member, the adjusting component, and the limiting component provided by this utility model.

[0039] Explanation of reference numerals in the attached figures:

[0040] 1-Load bracket; 11-Clamping through hole; 12-Protrusion;

[0041] 2-First sliding member; 21-Connecting rod; 22-Sliding seat; 221-Sliding groove; 222-First threaded hole; 23-Connecting support; 231-Rectangular seat; 232-First vertical plate; 233-First inclined plate; 24-First bolt;

[0042] 3-Second sliding member; 31-Sliding connector; 311-Frame plate; 312-Bent connecting plate; 3122-Second inclined plate; 3123-Second vertical plate; 3124-Third inclined plate; 313-Support plate; 32-Bearing plate; 33-Second bolt;

[0043] 4-Limiting assembly; 41-Limiting plate; 42-Pressure piece; 421-Stepped column; 422-Rotating ring; 423-Pressure piece; 4231-Straight piece; 4232-Inclined piece; 424-Fourth bolt;

[0044] 5-Adjusting component; 51-Third bolt; 52-Elastic element. Detailed Implementation

[0045] All features disclosed in this specification, or all steps in all disclosed methods or processes, may be combined in any way, except for mutually exclusive features and / or steps.

[0046] Any feature disclosed in this specification, unless specifically stated otherwise, may be replaced by other equivalent or similar features. That is, unless specifically stated otherwise, each feature is merely one example of a series of equivalent or similar features. Throughout this specification, the same reference numerals indicate the same elements.

[0047] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0048] This embodiment proposes a substrate clamping device and a coating apparatus including the substrate clamping device. The coating apparatus also includes a coating body and a target material. The substrate clamping device can clamp and fix substrates of various sizes and shapes, so that the target material can be deposited by the coating body, thereby forming a film on the substrate and realizing the coating operation on the substrate. Specifically, the coating body can be a magnetron sputtering coating body structure or a vacuum coating body structure commonly used in the prior art. The structure and working principle of the coating body will not be described in detail here.

[0049] Specifically, such as Figures 1 to 3As shown, the substrate clamping device includes a load frame 1, at least one first sliding member 2, and a second sliding member 3; wherein, a clamping through hole 11 is provided on the load frame 1; the length of the first sliding member 2 extends along the X-axis and is located in the clamping through hole 11, and the first sliding member 2 is slidably connected to the load frame 1 along the Y-axis, that is, the first sliding member 2 is slidably connected to the inner sidewall of the clamping through hole 11 along the Y-axis; at least one second sliding member 3 is provided on the first sliding member 2, the second sliding member 3 includes a sliding connector 31 and a support plate 32, one end of the sliding connector 31 is slidably connected to the first sliding member 2 along the X-axis, the support plate 32 is used to place the substrate, and the support plate 32 is height-adjustably connected to the other end of the sliding connector 31 along the Z-axis.

[0050] Compared with the prior art, the substrate clamping device in this embodiment is equipped with a first sliding member 2 and a second sliding member 3 that cooperate with each other. The first sliding member 2 is located in the clamping through hole 11 of the load frame 1 and is slidably connected to the load frame 1 along the Y-axis. One end of the sliding connector 31 of the second sliding member 3 is slidably connected to the first sliding member 2 along the X-axis, and the bearing plate 32 is height-adjustably connected to the other end of the sliding connector 31 along the Z-axis. By adjusting the height of the bearing plate 32 relative to the sliding connector 31 along the Z-axis, the distance between the substrate and the target on the bearing plate 32 along the Z-axis can be adjusted, thereby achieving the adjustment of the target-substrate distance. This makes the target-substrate distance not limited to a certain fixed distance, but can be adjusted to match the gradual decrease in the thickness of the target material, ensuring that the target-substrate distance can maintain a relatively fixed value throughout the coating process, thereby ensuring the quality of thin film deposition and ensuring the uniformity of substrate coating.

[0051] Furthermore, by providing at least one first sliding member 2 and at least one second sliding member 3 on the first sliding member 2, each first sliding member 2 can slide along the Y-axis and each second sliding member 3 on the first sliding member 2 can slide along the X-axis. This enables the position adjustment of each carrier plate 32 on the Y-axis and X-axis, so that the size and shape of each carrier plate 32 are matched with the size and shape of the substrate. This allows the substrate clamping device to be adapted to clamp and fix substrates of various sizes and shapes, thus improving the applicability and versatility of the entire substrate clamping device.

[0052] The coating equipment in this embodiment, because it includes the aforementioned substrate clamping device, can ensure that the target-substrate distance remains at a relatively fixed value throughout the coating process, thereby ensuring the coating quality of the substrate. Furthermore, the substrate clamping device can clamp and fix substrates of various sizes and shapes, making the entire coating equipment applicable to coating substrates of various sizes and shapes, avoiding resource waste in the coating equipment, and improving the applicability and versatility of the coating equipment, thus making it suitable for various coating scenarios.

[0053] Specifically, such as Figure 1 As shown, this embodiment includes two first sliding members 2, which are arranged opposite to and parallel to each other along the Y-axis. Two second sliding members 3 are slidably connected to each first sliding member 2 along the X-axis. Therefore, this embodiment includes a total of four support plates 32. This allows the substrate to be positioned on one or more support plates 32 according to its specific size. Furthermore, the specific positions of each support plate 32 can be adjusted along the X and Y axes, enabling the support plates 32 to be arbitrarily combined to form various shapes. This allows for the placement of substrates matching the shapes formed by the support plates 32, thus ensuring the applicability and versatility of the entire substrate clamping device. Here, the specific number of the first sliding members 2 and the number of second sliding members 3 on each first sliding member 2 are not limited and need to be determined based on the shape and size of the substrate and the actual clamping conditions.

[0054] It is worth noting that, such as Figure 1 As shown, the shape and size of the load frame 1, as well as the shape and size of the clamping through hole 11, can be flexibly adjusted and changed according to specific clamping requirements, as long as a stable connection and installation of the first sliding member 2 and the second sliding member 3 can be guaranteed.

[0055] The first slider 2 is described in detail below:

[0056] Furthermore, such as Figures 1 to 4 As shown, the first sliding member 2 includes a connecting rod 21, a sliding seat 22, and a connecting support 23; wherein, the length of the connecting rod 21 extends along the X-axis, and sliding seats 22 are connected to both ends of the connecting rod 21 along the X-axis, and the sliding seats 22 are slidably connected to the load frame 1 along the Y-axis; the length of the connecting support 23 extends along the X-axis, and the connecting support 23 is connected to one side of the connecting rod 21 along the Y-axis, and the sliding connector 31 is slidably connected to the connecting support 23 along the X-axis.

[0057] Specifically, such as Figure 4As shown, the connecting rod 21 can be a cylindrical rod to facilitate rapid processing of the connecting rod 21 and to provide stable support for the connecting support 23 and the sliding seat 22; the sliding seat 22 can specifically be a square block structure.

[0058] Furthermore, such as Figures 2 to 4 As shown, protrusions 12 are provided on the two inner sidewalls of the clamping through hole 11 along the X-axis. The length of the protrusions 12 extends along the Y-axis and along the Z-axis. The thickness of the protrusions 12 is less than the thickness of the load frame 1. The sliding seat 22 is provided with a sliding groove 221. The protrusions 12 are slidably disposed in the sliding groove 221 so that the first sliding member 2 can be adjusted relative to the load frame 1 along the Y-axis through the sliding engagement between the protrusions 12 and the sliding groove 221.

[0059] Specifically, such as Figures 2 to 4 As shown, along the X-axis and close to the connecting rod 21, the thickness of the protrusion 12 gradually decreases along the Z-axis, and the width of the sliding groove 221 gradually decreases, so that the protrusion 12 and the sliding groove 221 are inserted to form a wedge-shaped fit structure. On the one hand, it can provide installation guidance, which is conducive to the sliding insertion between the sliding groove 221 of the sliding seat 22 and the protrusion 12. On the other hand, it can provide sliding guidance, so that the sliding between the protrusion 12 and the sliding groove 221 is relatively smooth and stable, thereby ensuring the smoothness of the sliding between the sliding groove 221 and the protrusion 12.

[0060] Furthermore, such as Figures 2 to 4 As shown, two first threaded holes 222 are arranged opposite each other on the sliding seat 22 along the Z-axis. Both first threaded holes 222 are connected to the sliding groove 221. That is, along the Z-axis, the sliding groove 221 is located in the middle of the two first threaded holes 222. A first bolt 24 can be screwed into a first threaded hole 222 and pressed against the upper or lower outer surface of the protrusion 12 to fix the sliding seat 22 and the protrusion 12 and prevent the position of the sliding seat 22 and the protrusion 12 from moving.

[0061] Specifically, when the connecting rod 21 is pushed along the Y-axis, the sliding groove 221 of the sliding seat 22 slides relative to the protrusion 12 along the Y-axis to the desired position. Then, a first bolt 24 is screwed into a first threaded hole 222 and contacts and abuts against the upper or lower outer surface of the protrusion 12, thereby fixing the sliding seat 22 and the protrusion 12 to fix and restrict the position of the entire first sliding member 2 on the Y-axis.

[0062] Furthermore, such as Figures 2 to 4As shown, the connecting support 23 includes a rectangular base 231, a first vertical plate 232, and a first inclined plate 233; wherein, the length of the rectangular base 231 extends along the X-axis, and the rectangular base 231 is connected to one side of the connecting rod 21; the first vertical plate 232 extends along the Z-axis, and the rectangular base 231 is connected to the first vertical plate 232 on opposite sides along the Z-axis, and the first inclined plate 233 is inclinedly connected to the first vertical plate 232.

[0063] Specifically, such as Figures 2 to 4 As shown, the connecting rod 21, sliding seat 22, rectangular seat 231, first vertical plate 232 and first inclined plate 233 are integrally structured to reduce assembly and connection steps and reduce the processing cost of the first sliding member 2; and to ensure the overall connection stability of the first sliding member 2.

[0064] The second slider 3 is described in detail below:

[0065] Specifically, such as Figure 2 , Figure 3 and Figure 5 As shown, the sliding connector 31 includes a frame plate 311, a bent connecting plate 312, and a support plate 313. The frame plate 311 is arranged in a V-shape facing the connecting support 23. The frame plate 311 is fitted to the outside of the rectangular seat 231 and the first vertical plate 232 of the connecting support 23. The bent connecting plates 312 are respectively connected to the opposite ends of the frame plate 311 along the Z-axis. One bent connecting plate 312 is used to hook and connect with a first inclined plate 233 of the connecting support 23, and the bent connecting plate 312 can slide relative to the connecting support 23 along the X-axis. The support plate 313 is connected to the side of the frame plate 311 away from the connecting support 23, and the bearing plate 32 is connected to the top of the support plate 313 with adjustable height along the Z-axis.

[0066] Furthermore, such as Figure 2 , Figure 3 and Figure 5 As shown, the bending connecting plate 312 includes a second inclined plate 3122, a second vertical plate 3123, and a third inclined plate 3124. The second inclined plate 3122 is inclinedly connected to one end of the frame plate 311. The second vertical plate 3123 extends along the Z-axis. The opposite ends of the second vertical plate 3123 are respectively connected to the second inclined plate 3122 and the third inclined plate 3124. The second vertical plate 3123 and the third inclined plate 3124 are spaced above the rectangular base 231 to avoid interference between the second vertical plate 3123 and the third inclined plate 3124 and the rectangular base 231, thus ensuring the smooth sliding of the entire sliding connector 31 along the X-axis. Furthermore, the first inclined plate 233 is positioned between the second inclined plate 3122 and the third inclined plate 3124, and the first inclined plate 233 abuts against the second vertical plate 3123, thereby enabling the hook connection between the bending connecting plate 312 and the connecting support 23.

[0067] like Figure 2 , Figure 3 and Figure 5 As shown, the hook connection between the bent connecting plate 312 and the connecting support 23 is achieved through the above connection structure. On the one hand, it can make the connection between the sliding connecting piece 31 and the connecting support 23 more stable, avoiding the problem of the sliding connecting piece 31 separating from the connecting support 23 during the sliding along the X-axis. On the other hand, it can facilitate the sliding guide cooperation between the bent connecting plate 312 and the first inclined plate 233, thereby ensuring the smooth sliding of the bent connecting plate 312 relative to the first inclined plate 233, and thus ensuring the sliding guidance and stability of the entire second sliding piece 3 relative to the first sliding piece 2.

[0068] Furthermore, such as Figure 2 , Figure 3 and Figure 5 As shown, a second threaded hole is provided on the second inclined plate 3122 of the bent connecting plate 312. The second bolt 33 can be threaded into the second threaded hole and pressed against the outer surface of the first inclined plate 233 of the connecting support 23. That is, when the sliding connecting member 31 is pushed along the X-axis to drive the bent connecting plate 312 to slide relative to the first inclined plate 233 along the X-axis to the desired position, a second bolt 33 is then threaded into a second threaded hole and pressed against the outer surface of the first inclined plate 233, thereby fixing the bent connecting plate 312 and the first inclined plate 233, so as to fix and restrict the position of the entire second sliding member 3 on the X-axis.

[0069] Specifically, such as Figure 2 and Figure 5 As shown, each second inclined plate 3122 is provided with two second threaded holes so that the bending connecting plate 312 and the first inclined plate 233 can be fixed by two second bolts 33 at the same time, thereby better ensuring the stability and reliability of the entire second sliding member 3 on the X-axis.

[0070] Specifically, such as Figure 2 , Figure 3 and Figure 5 As shown, the frame plate 311, the second inclined plate 3122, the second vertical plate 3123, the third inclined plate 3124, and the support plate 313 are all integral structures, which can reduce assembly and connection steps and reduce the processing cost of the second sliding member 3; and can ensure the overall connection stability of the second sliding member 3.

[0071] The following is a detailed description of adjustment component 5:

[0072] Furthermore, such as Figure 2 , Figure 3 and Figure 5As shown, the substrate clamping device also includes an adjustment component 5, which is used to adjust the setting height of the carrier plate 32 relative to the support plate 313 along the Z-axis, thereby enabling the adjustment of the spacing between the substrate and the target material on the carrier plate 32.

[0073] Specifically, such as Figure 2 , Figure 3 and Figure 5 As shown, the adjusting assembly 5 includes a third bolt 51 and an elastic element 52; wherein, the third bolt 51 slides downward along the Z-axis through the bearing plate 32 and is threaded to the support plate 313, that is, a smooth through hole is provided on the bearing plate 32, and a third threaded hole is provided on the support plate 313, and the third bolt 51 slides downward along the Z-axis through the smooth through hole and is threaded to the third threaded hole; the elastic element 52 is sleeved on the third bolt 51, and the opposite ends of the elastic element 52 abut against the support plate 313 and the bearing plate 32 respectively.

[0074] By setting up a third bolt 51 and an elastic element 52 that work together, on the one hand, the elastic element 52 can elastically support the bearing plate 32, and the third bolt 51 can achieve an adjustable connection between the support plate 313 and the bearing plate 32; on the other hand, by adjusting the length of the support plate 313 by rotating the third bolt 51 downward along the Z-axis, the relative distance between the bearing plate 32 and the support plate 313 can be adjusted to perform the first adjustment of the bearing plate 32, thereby realizing the adjustment of the distance between the substrate and the target on the bearing plate 32. This makes the adjustment method simple and convenient, without the need for additional adjustment structures and operations, saving time and effort, and improving the coating efficiency of the substrate.

[0075] Furthermore, by providing the elastic element 52, on the one hand, it can provide elastic buffer margin for a second fine-tuning of the support plate 32, ensuring that the support plate 32 remains horizontal and that all support plates 32 are located on the same horizontal plane, thereby ensuring a more accurate spacing between the substrate and the target material on the support plate 32; on the other hand, when the thickness of the substrate on the support plate 32 is uneven, one of the third bolts 51 can be fine-tuned to adjust the elastic buffer margin of the elastic element 52 accordingly, thereby ensuring that the uneven substrate is kept horizontal, making the adjustment of the support plate 32 more flexible and convenient. In this embodiment, the elastic element 52 can specifically be a spring.

[0076] Furthermore, such as Figure 2 , Figure 3 and Figure 5As shown, each carrier plate 32 is provided with two smooth through holes, which are arranged diagonally. Correspondingly, each support plate 313 is provided with two third threaded holes, which are also arranged diagonally. That is, one smooth through hole corresponds to one third threaded hole, so that the carrier plate 32 can be connected and elastically adjusted simultaneously through two diagonally arranged third bolts 51 and two corresponding elastic elements 52. This ensures the stability and reliability of the support connection and spacing adjustment of the carrier plate 32. Furthermore, it reduces the number of third bolts 51 and elastic elements 52, making the structure of the entire substrate clamping device simple, compact, and low-cost. Here, the specific number and location of the smooth through holes and third threaded holes are not limited.

[0077] The following is a detailed description of the limiting component 4:

[0078] Specifically, such as Figure 2 , Figure 3 and Figure 5 As shown, the substrate clamping device also includes a limiting component 4, which is used to limit and fix the substrate to the carrier plate 32, ensuring the stability of the substrate's position on the carrier plate 32 and preventing positional displacement. This, in turn, better ensures the stability and reliability of the spacing between the substrate and the target.

[0079] Furthermore, such as Figure 2 , Figure 3 and Figure 5 As shown, the limiting assembly 4 includes two limiting plates 41 and a pressing member 42; wherein, the two limiting plates 41 are perpendicularly disposed on the support plate 32, one of the two limiting plates 41 is used to limit and abut the substrate along the X-axis, and the other is used to limit and abut the substrate along the Y-axis, so as to limit the position of the substrate on the X-axis and the Y-axis; the pressing member 42 is disposed on the support plate 32 and located between the two limiting plates 41, and the pressing member 42 is used to press against or detach from the substrate, so as to limit the position of the substrate on the Z-axis; thereby enabling the substrate to be stably disposed on the support plate 32.

[0080] Specifically, such as Figure 2 , Figure 3 and Figure 5As shown, the pressing component 42 includes a stepped column 421, a rotating ring 422, a pressing plate 423, and a fourth bolt 424. One end of the stepped column 421 is positioned and abuts against the bottom of the bearing plate 32; that is, the stepped surface of the stepped column 421 abuts against and limits the bottom surface of the bearing plate 32. The other end of the stepped column 421 extends upward through the bearing plate 32 along the Z-axis. The pressing plate 423 is connected to the outer circumferential surface of the rotating ring 422, which is fitted onto the portion of the stepped column 421 that extends through the bearing plate 32. The rotating ring 422 can rotate relative to the stepped column 421 around the Z-axis, thereby causing the pressing plate 423 to rotate around the Z-axis to press against or detach from the base plate. The fourth bolt 424 is threaded into the stepped column 421 and presses against the rotating ring 422, thereby limiting the contact of the rotating ring 422 along the Z-axis. The rotating ring 422 and the pressing plate 423 can be a single integrated structure.

[0081] Furthermore, the material of the pressing sheet 423 is an elastic material, so that the pressing sheet 423 can undergo elastic deformation, thereby ensuring that the pressing sheet 423 elastically presses against or detaches from the substrate, and avoiding the problem of the pressing sheet 423 breaking during the pressing or detachment from the substrate.

[0082] Specifically, such as Figure 3 and Figure 5 As shown, the pressure plate 423 includes a straight plate 4231 and an inclined plate 4232. One end of the straight plate 4231 is connected to the outer circumferential surface of the rotating ring 422, and the other end of the straight plate 4231 is bent and connected to the inclined plate 4232. The inclined plate 4232 is inclined downwards and close to the substrate. On the one hand, this allows the inclined plate 4232 to directly contact and press against or detach from the substrate when the pressure plate 423 undergoes a small elastic deformation, thus avoiding damage to the pressure plate 423 due to excessive pulling. On the other hand, the bent connection between the straight plate 4231 and the inclined plate 4232 increases the elastic deformation range of the entire pressure plate 423, which is beneficial for the operation of the inclined plate 4232 pressing against or detaching from the substrate. Specifically, the straight plate 4231 and the inclined plate 4232 can be an integral structure.

[0083] Specifically, when the substrate is placed on the support plate 32, the tilting piece 4232 is pulled up and the rotating ring 422 is rotated to drive the pressing piece 423 to rotate around the Z-axis to above the substrate; then the tilting piece 4232 is released so that the tilting piece 4232 automatically presses down along the Z-axis to the substrate under its own elasticity, thereby pressing the substrate onto the support plate 32.

[0084] The specific working process of the substrate clamping device in this embodiment is as follows:

[0085] First, according to the specific shape and size of the substrate, push the connecting rod 21 along the Y-axis to drive the sliding groove 221 of the sliding seat 22 to slide relative to the protrusion 12 along the Y-axis to the desired position. Then, screw a first bolt 24 into a first threaded hole 222 of the sliding seat 22 and press it against the upper or lower outer surface of the protrusion 12 to fix and restrict the specific position of the entire first sliding member 2 on the Y-axis.

[0086] Then, according to the specific shape and size of the substrate, push the sliding connector 31 along the X-axis to drive the bent connecting plate 312 to slide relative to the first inclined plate 233 along the X-axis to the desired position. Then, screw a second bolt 33 into a second threaded hole of the bent connecting plate 312 and press it against the outer surface of the first inclined plate 233 to fix and restrict the specific position of the entire second sliding member 3 on the X-axis.

[0087] Finally, the substrate is placed on one or more corresponding support plates 32, and the two limiting plates 41 are pressed against the substrate from the X-axis and Y-axis respectively; then the tilting plate 4232 is pulled up, and the rotating ring 422 is rotated to drive the pressing plate 423 to rotate around the Z-axis to above the substrate; then the tilting plate 4232 is released, so that the tilting plate 4232 automatically presses down along the Z-axis against the substrate under its own elasticity, so as to fix and restrict the substrate on the support plate 32; thus realizing the entire clamping process of the substrate.

[0088] The substrate clamping device in this embodiment, by setting a third bolt 51 and an elastic element 52 that work together, can make a first adjustment and a second fine adjustment to the height of the carrier plate 32 relative to the support plate 313. This ensures that the carrier plate 32 is kept horizontal, realizes accurate adjustment of the distance between the substrate and the target material on the carrier plate 32, facilitates the improvement of the uniformity of the coating layer on the substrate, and makes the adjustment of the carrier plate 32 more flexible and convenient.

[0089] The substrate clamping device in this embodiment, by setting a first sliding member 2 and a second sliding member 3 that cooperate with each other, can adjust the position of each carrier plate 32 on the Y-axis and X-axis according to the specific size and shape of the substrate. This allows the substrate clamping device to be adapted to clamp and fix substrates of various sizes and shapes, resulting in good applicability and versatility of the entire substrate clamping device.

[0090] The substrate clamping device in this embodiment, by setting the first sliding member 2 and the second sliding member 3 of the above structure, can make the structure of the entire substrate clamping device simple and the cost low, and the adjustment of the distance between the substrate and the target on the support plate 32 is relatively simple and convenient; in addition, the first sliding member 2, the second sliding member 3, the adjustment component 5 and the limiting component 4 are all relatively independent and do not interfere with each other, which facilitates quick maintenance and replacement.

[0091] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A substrate clamping device, characterized in that, include: The load rack (1) is provided with a clamping through hole (11); At least one first sliding member (2), the length of the first sliding member (2) extends along the X-axis and is located in the clamping through hole (11), and the first sliding member (2) is slidably connected to the load frame (1) along the Y-axis; The second sliding member (3) is provided on the first sliding member (2). The second sliding member (3) includes a sliding connector (31) and a support plate (32). One end of the sliding connector (31) is slidably connected to the first sliding member (2) along the X-axis. The support plate (32) is used to place the substrate. The support plate (32) is height-adjustably connected to the other end of the sliding connector (31) along the Z-axis.

2. The substrate clamping device as described in claim 1, characterized in that, The first slider (2) includes: A connecting rod (21) extends along the X-axis; The sliding seat (22) is connected to both ends of the connecting rod (21) along the X-axis, and the sliding seat (22) is slidably connected to the load frame (1) along the Y-axis; A connecting support (23) extends along the X-axis and is connected to one side of the connecting rod (21) along the Y-axis. The sliding connector (31) is slidably connected to the connecting support (23) along the X-axis.

3. The substrate clamping device as described in claim 2, characterized in that, The clamping through hole (11) has protrusions (12) on both inner sidewalls along the X-axis, and the length of the protrusions (12) extends along the Y-axis; the sliding seat (22) is provided with a sliding groove (221), and the protrusions (12) are slidably disposed in the sliding groove (221).

4. The substrate clamping device as described in claim 3, characterized in that, Along the X-axis and in the direction close to the connecting rod (21), the thickness of the protrusion (12) gradually decreases along the Z-axis, and the width of the sliding groove (221) gradually decreases, so that a wedge-shaped fit structure is formed between the protrusion (12) and the sliding groove (221).

5. The substrate clamping device as described in claim 4, characterized in that, The sliding seat (22) has two first threaded holes (222) arranged opposite each other along the Z-axis. Both first threaded holes (222) are connected to the sliding groove (221). A first bolt (24) can be screwed into one of the first threaded holes (222) and abut against the upper or lower outer surface of the protrusion (12).

6. The substrate clamping device according to any one of claims 2-5, characterized in that, The sliding connector (31) includes: The frame plate (311) is arranged in a V-shape facing the connecting support (23), and the frame plate (311) is attached to the outside of the connecting support (23); The frame plate (311) is connected to the two opposite ends of the frame plate (311) along the Z-axis. The bending connecting plate (312) is used to hook and connect with the connecting support (23), and the bending connecting plate (312) can slide relative to the connecting support (23) along the X-axis. A support plate (313) is connected to the side of the frame plate (311) away from the connecting support (23), and a bearing plate (32) is connected to the top of the support plate (313) with adjustable height along the Z-axis.

7. The substrate clamping device as described in claim 6, characterized in that, The bent connecting plate (312) is provided with a second threaded hole, and the second bolt (33) can be screwed into the second threaded hole and pressed against the outer surface of the connecting support (23).

8. The substrate clamping device as described in claim 6, characterized in that, The substrate clamping device further includes an adjustment component (5) for adjusting the setting height of the carrier plate (32) relative to the support plate (313) along the Z-axis; the adjustment component (5) includes: The third bolt (51) slides downward along the Z-axis through the bearing plate (32) and is threaded to the support plate (313); An elastic element (52) is sleeved on the third bolt (51), and the opposite ends of the elastic element (52) abut against the support plate (313) and the bearing plate (32) respectively.

9. The substrate clamping device according to any one of claims 1-5, characterized in that, The substrate clamping device further includes a limiting component (4) for limiting and fixing the substrate to the carrier plate (32); the limiting component (4) includes: Two limiting plates (41) are perpendicularly disposed on the bearing plate (32). One of the two limiting plates (41) is used to limit and block the substrate along the X-axis, and the other is used to limit and block the substrate along the Y-axis. A pressing member (42) is disposed on the bearing plate (32) and located between the two limiting plates (41). The pressing member (42) is used to press against or detach from the substrate.

10. The substrate clamping device as described in claim 9, characterized in that, The pressing element (42) includes: A stepped column (421) has one end that is limited and abuts against the underside of the bearing plate (32), and the other end that extends upward through the bearing plate (32) along the Z-axis. A rotating ring (422) and a pressing plate (423) are connected. The rotating ring (422) is sleeved on the part of the stepped column (421) that protrudes from the bearing plate (32). The rotating ring (422) can rotate about the Z-axis relative to the stepped column (421). The pressing plate (423) is used to press against the substrate. The fourth bolt (424) is threaded into the stepped column (421) and presses against the rotating ring (422).

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