Exhaust assembly for single crystal furnace and single crystal furnace

Abstract

The utility model provides an exhaust assembly for a single crystal furnace and the single crystal furnace. The exhaust assembly for the single crystal furnace comprises a bottom plate assembly and an exhaust assembly, wherein the bottom plate assembly is provided with an air guide hole; the heat preservation cylinder is arranged on the bottom plate assembly, an exhaust cavity is formed between the heat preservation cylinder and the bottom plate assembly, and the air guide hole is communicated with the exhaust cavity; the baffle structure is arranged in the exhaust cavity, a flow passing gap is formed between the periphery of the baffle structure and the inner cylinder wall of the heat preservation cylinder, the exhaust cavity is divided into a first cavity and a second cavity by the baffle structure, the first cavity is arranged far away from the bottom plate assembly relative to the second cavity, and the first cavity, the flow passing gap, the second cavity and the air guide hole are sequentially communicated. The utility model solves the problem that the air guide hole of the single crystal furnace equipment in the prior art is easy to block, so that the single crystal quality is reduced.

Description

Technical Field

[0001] This utility model relates to the field of hot zone technology for single crystal furnaces, and more specifically, to an exhaust assembly for a single crystal furnace and a single crystal furnace. Background Technology

[0002] In the field of single crystal furnace hot zone technology, the traditional bottom direct exhaust structure, while widely used to control gas circulation within the hot zone, suffers from significant energy waste and production efficiency issues due to its design limitations. Specifically, the vent holes in the direct exhaust structure face directly to the bottom of the crucible. This layout causes direct heat loss, and even with conventional insulation measures, it is impossible to effectively prevent rapid heat loss through the vent holes, increasing the energy burden on the heating components and thus raising production costs. Furthermore, volatiles generated during single crystal furnace operation are exhausted through the vent holes under the blowing of argon gas, but the vent holes' tendency to clog poses a significant challenge. In particular, the reduced inner diameter of the vent holes, intended for energy saving, exacerbates the clogging problem, affecting normal gas flow, causing hot zone pressure fluctuations, and consequently impacting the environmental stability of single crystal growth, thus reducing single crystal quality. Even worse, the vent hole layout also poses a risk of increased electrode arcing. The accumulation and exhaust of volatile gases around the electrodes can easily trigger arcing between the electrodes and graphite components, threatening production safety and potentially causing production interruptions due to equipment failure, increasing maintenance costs.

[0003] As can be seen from the above, the existing technology has the problem that the gas guide holes of the single crystal furnace equipment are easily blocked, which leads to a decrease in the quality of the single crystal. Utility Model Content

[0004] The main objective of this invention is to provide an exhaust assembly and a single crystal furnace for use in a single crystal furnace, in order to solve the problem that the air vents of the single crystal furnace equipment in the prior art are easily blocked, leading to a decrease in the quality of the single crystal.

[0005] To achieve the above objectives, this utility model provides an exhaust assembly for a single crystal furnace, comprising: a bottom plate assembly with an exhaust vent; an insulation cylinder disposed on the bottom plate assembly, forming an exhaust chamber between the insulation cylinder and the bottom plate assembly, the exhaust vent communicating with the exhaust chamber; and a baffle structure disposed within the exhaust chamber, with a flow gap formed between the outer periphery of the baffle structure and the inner wall of the insulation cylinder, the exhaust chamber being divided into a first chamber and a second chamber by the baffle structure, the first chamber being disposed away from the bottom plate assembly relative to the second chamber, and the first chamber, the flow gap, the second chamber, and the exhaust vent being sequentially connected.

[0006] Furthermore, the baffle structure protrudes to the side facing the base plate assembly to form an abutment portion, which contacts the surface of the base plate assembly and avoids the air guide hole. The area on the side surface of the baffle structure facing the base plate assembly, excluding the abutment portion, forms a second cavity with the base plate assembly.

[0007] Furthermore, the baffle structure also has mounting holes located within the area of ​​the contact portion.

[0008] Furthermore, the surface of the base plate assembly facing the exhaust chamber has a first sink groove, and the air guide hole is connected to the bottom of the first sink groove. The wall surface of the first sink groove has the same diameter as the wall surface of the insulation cylinder and is aligned with it.

[0009] Furthermore, the exhaust assembly also includes an air guide tube, which is disposed on the inner wall of the air guide hole.

[0010] Furthermore, the exhaust assembly also includes a first pressure plate component, which is disposed on the bottom of the first sink. The first pressure plate component has a through hole that corresponds to and communicates with the air guide hole. One end of the air guide cylinder is located inside the through hole and is limited and stopped by the inner wall of the through hole. The second cavity communicates with the air guide hole through the through hole.

[0011] Furthermore, the dimension D1 of the flow gap and the diameter D2 of the baffle structure satisfy the following condition: 0.01≤D1 / D2≤0.03.

[0012] Furthermore, the baffle structure includes a fixed felt member and a second pressure plate member, the second pressure plate member being disposed on the side of the fixed felt member away from the base plate assembly.

[0013] Furthermore, the base plate assembly includes: a base plate, on which a second settling groove is provided; a support cylinder, which is located at the second settling groove, with an air guide hole penetrating the support cylinder and the base plate, and the inner wall of the support cylinder being flush with the inner wall of the insulation cylinder.

[0014] This utility model also provides a single crystal furnace, including: the above-mentioned exhaust assembly for a single crystal furnace; and a crucible, which is disposed on the exhaust assembly.

[0015] The exhaust assembly for a single crystal furnace, applying the technical solution of this utility model, includes a bottom plate assembly, an insulation cylinder, and a baffle structure. The bottom plate assembly has an air guide hole. The insulation cylinder is mounted on the bottom plate assembly, forming an exhaust chamber between the insulation cylinder and the bottom plate assembly. The air guide hole communicates with the exhaust chamber. The baffle structure is disposed within the exhaust chamber, and a flow gap is formed between the outer periphery of the baffle structure and the inner wall of the insulation cylinder. The exhaust chamber is divided into a first chamber and a second chamber by the baffle structure. The first chamber is positioned away from the bottom plate assembly relative to the second chamber. The first chamber, the flow gap, the second chamber, and the air guide hole are sequentially connected. By placing the baffle structure within the exhaust chamber, the exhaust chamber is effectively divided into two parts, forming the first chamber and the second chamber. In this invention, when a single crystal furnace is generating single crystals, the gas introduced into the furnace can enter the second chamber from the first chamber along the flow gap between the baffle structure and the inner wall of the insulation cylinder, and then exit through the gas guide hole. This optimizes the gas flow path. Compared to the traditional method of directly discharging gas into the gas guide hole along the axial direction of the insulation cylinder, this invention blows dust along the flow path into the second chamber and disperses the dust, thus preventing the gas from blowing the dust of the single crystal into the gas guide hole and causing blockage. This avoids pressure instability in the single crystal furnace, which can interfere with the growth quality of the single crystal and reduce its quality. This invention solves the problem in the prior art where the gas guide hole of the single crystal furnace is easily blocked, leading to a decrease in the quality of the single crystal. Attached Figure Description

[0016] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0017] Figure 1 A schematic diagram of the exhaust assembly from one angle is shown in an embodiment of the present invention; and

[0018] Figure 2 An exploded view of the exhaust assembly in an embodiment of the present invention is shown;

[0019] Figure 3 A schematic diagram of the structure of the felt fixing component in an embodiment of this utility model is shown;

[0020] Figure 4 A structural schematic diagram of the exhaust assembly in an embodiment of the present invention is shown from another angle;

[0021] Figure 5 It shows Figure 4 Cross-sectional view of AA.

[0022] The above figures include the following reference numerals:

[0023] 10. Base plate assembly; 11. Air guide hole; 12. First settling tank; 13. Base plate; 131. Second settling tank; 14. Support cylinder; 20. Insulation cylinder; 30. Baffle structure; 31. Abutment part; 32. Mounting hole; 33. Felt fixing part; 34. Second pressure plate part; 341. Second clearance hole; 40. Exhaust chamber; 41. First cavity; 42. Second cavity; 50. Flow gap; 60. Air guide cylinder; 61. Stop edge; 70. First pressure plate part; 71. Through hole; 72. First clearance hole; 80. Electrode assembly; 81. Electrode part; 82. Quartz sheath; 83. Electrode sheath. Detailed Implementation

[0024] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0025] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0026] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0027] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0028] To address the problem that the air vents of existing single crystal furnaces are easily blocked, leading to a decrease in single crystal quality, this invention provides an exhaust assembly and a single crystal furnace for use in single crystal furnaces.

[0029] like Figures 1 to 5 As shown, the single crystal furnace includes an exhaust assembly and a crucible. The crucible is mounted on the exhaust assembly, and silicon material is placed inside the crucible.

[0030] Specifically, the single crystal furnace also includes a support component that passes through the exhaust assembly to support the bottom of the crucible component. In actual use, argon gas is introduced into the single crystal furnace to ensure the reaction of the silicon material and the stability of the gas pressure inside the single crystal furnace. At the same time, the volatiles are carried by the argon gas and discharged through the gas guide hole 11 on the exhaust assembly.

[0031] The exhaust system will now be explained in detail.

[0032] like Figures 1 to 5 As shown, the exhaust assembly for a single crystal furnace includes a base plate assembly 10, an insulation cylinder 20, and a baffle structure 30. The base plate assembly 10 has an exhaust port 11. The insulation cylinder 20 is mounted on the base plate assembly 10, forming an exhaust chamber 40 between the insulation cylinder 20 and the base plate assembly 10. The exhaust port 11 communicates with the exhaust chamber 40. The baffle structure 30 is disposed within the exhaust chamber 40, and a flow gap 50 is formed between the outer periphery of the baffle structure 30 and the inner wall of the insulation cylinder 20. The exhaust chamber 40 is divided into a first chamber 41 and a second chamber 42 by the baffle structure 30. The first chamber 41 is disposed away from the base plate assembly 10 relative to the second chamber 42. The first chamber 41, the flow gap 50, the second chamber 42, and the exhaust port 11 are sequentially connected.

[0033] By setting the baffle structure 30 inside the exhaust chamber 40, the exhaust chamber 40 is divided into two parts to form a first chamber 41 and a second chamber 42. When the single crystal furnace is generating single crystals, the gas introduced into the single crystal furnace can enter the second chamber 42 from the first chamber 41 along the flow gap 50 between the baffle structure 30 and the inner wall of the insulation cylinder 20, and be discharged through the gas guide hole 11. This optimizes the gas flow path. Compared with the traditional method of directly discharging gas into the gas guide hole 11 along the axial direction of the insulation cylinder 20, this invention blows the dust into the second chamber 42 along the flow path and disperses the dust, thereby avoiding the gas blowing the dust of the single crystal into the gas guide hole 11 and causing blockage of the gas guide hole 11. This avoids the pressure instability inside the single crystal furnace, which may interfere with the growth quality of the single crystal and reduce its quality, thus improving the quality of the single crystal generated by the single crystal furnace.

[0034] In this embodiment, the main idea is to change the exhaust path and move the exhaust port from the bottom to the side. By using the combination of the baffle structure 30 and the flow gap 50, the direct loss of heat can be effectively prevented, while avoiding the accumulation and blockage of volatiles in the air guide hole 11.

[0035] like Figures 2 to 3 As shown, the baffle structure 30 protrudes to the side facing the base plate assembly 10 to form an abutment portion 31. The abutment portion 31 contacts the surface of the base plate assembly 10 and avoids the air guide hole 11. A second cavity 42 is formed between the area of ​​the baffle structure 30 on the side facing the base plate assembly 10, excluding the abutment portion 31, and the base plate assembly 10.

[0036] Specifically, there are two air guide holes 11, which are spaced apart on the base plate assembly 10. The abutment portion 31 is approximately gourd-shaped, and the waist of the gourd shape can avoid the two air guide holes 11. The edge of the abutment portion 31 is spaced apart from the edge of the baffle structure 30, thereby forming a second cavity 42 that is circumferentially connected along the baffle structure 30. After entering the flow gap 50, the gas can move along the inner wall of the second cavity 42 and then enter one of the two air guide holes 11.

[0037] In another embodiment of this utility model (not shown), the cross-section of the baffle structure 30 is approximately rectangular, and the two short sides of the baffle structure 30 are connected to the inner wall of the insulation cylinder 20. Correspondingly, the abutment part 31 separates the two air guide holes 11, thereby dividing the second cavity 42 into two parts. This allows the gas to enter the two downward-moving second cavities 42 along the flow gap 50 formed between the long side of the baffle structure 30 and the inner wall of the insulation cylinder 20 after entering the first cavity 41, thus limiting the path of gas flow.

[0038] like Figures 2 to 3 As shown, the baffle structure 30 also has a mounting hole 32, which is located in the area of ​​the abutment portion 31.

[0039] Specifically, the exhaust assembly also includes an electrode assembly 80, which is partially mounted on the base plate assembly 10. The electrode assembly 80 passes through the mounting hole 32, enabling rapid installation of the baffle structure 30. Because the baffle structure 30 and the inner wall of the insulation cylinder 20 are spaced apart to form a flow gap 50, the mounting hole 32 prevents the baffle structure 30 from moving within the single crystal furnace, thus avoiding changes in the flow gap 50 or even blocking the gas guide hole 11. This prevents pressure changes within the single crystal furnace from causing a decrease in the quality of single crystal formation.

[0040] In another optional embodiment of the present invention, the abutment portion 31 is a cylindrical protrusion, and the mounting hole 32 is opened in the non-abutment portion 31 area of ​​the baffle structure 30.

[0041] In this embodiment, the diameter of the mounting hole 32 is slightly larger than the diameter of the electrode assembly 80, thereby facilitating installation.

[0042] In this embodiment, there are four mounting holes 32, which are respectively arranged at intervals along the circumference of the abutment portion 31, thereby improving the connection effect.

[0043] like Figure 2 As shown, the bottom plate assembly 10 has a first sink 12 on the surface facing the exhaust chamber 40, and the air guide hole 11 is connected to the bottom of the first sink 12. The wall surface of the first sink 12 has the same diameter as the wall surface of the heat insulation cylinder 20 and is aligned.

[0044] Specifically, by aligning the wall of the first settling tank 12 with the wall of the insulation cylinder 20, gaps can be avoided between the bottom plate assembly 10 and the insulation cylinder 20 due to their different diameters, preventing heat loss. The vent 11, which passes through the first settling tank 12, allows gas to be discharged from the inside of the insulation cylinder 20 through the bottom plate assembly 10. Furthermore, the arrangement of the first settling tank 12 facilitates the installation of the baffle structure 30.

[0045] like Figure 2 and Figure 5 As shown, the exhaust assembly also includes an air guide tube 60, which is disposed on the inner wall of the air guide hole 11.

[0046] Specifically, the number of air guide tubes 60 and the number of air guide holes 11 are the same and correspond one-to-one, and the air guide tubes 60 are at least partially installed inside the air guide holes 11. By using the method of partially extending the air guide tubes 60 into the air guide holes 11, it is possible to quickly replace the air guide tubes 60 when single-crystal dust or crystals appear during long-term use, thereby improving the maintenance efficiency of the exhaust assembly.

[0047] like Figure 2 and Figure 5 As shown, the exhaust assembly also includes a first pressure plate 70, which is disposed on the bottom of the first sink 12. The first pressure plate 70 has a through hole 71 that corresponds to and communicates with the air guide hole 11. One end of the air guide cylinder 60 is located inside the through hole 71 and is limited and stopped by the inner wall of the through hole 71. The second cavity 42 communicates with the air guide hole 11 through the through hole 71.

[0048] Specifically, the first pressure plate 70 is adapted to the first sink 12. One end of the air guide cylinder 60 has a stop edge 61, and the through hole 71 has a stepped surface. The stop edge 61 of the air guide cylinder 60 cooperates with the stepped surface to limit the air guide cylinder 60, preventing it from falling out of the air guide hole 11. The base plate assembly 10 is placed horizontally. When the air guide cylinder 60 needs to be replaced, it can be disassembled by clamping the stop edge 61 with a hand or pliers and pulling the air guide cylinder 60 upward. Installation is the opposite. Optionally, the outer wall surface of the air guide cylinder 60 is threaded to the inner wall surface of the air guide hole 11.

[0049] In this embodiment, the dimension D1 of the flow gap 50 and the diameter D2 of the baffle structure 30 satisfy the following condition: 0.01≤D1 / D2≤0.03.

[0050] Specifically, the flow gap 50 should not be too large, as an excessively large flow gap 50 would hinder the use of the exhaust assembly. Within this range, a good flow effect can be achieved.

[0051] In one specific embodiment, the diameter D2 of the baffle structure 30 is between 1000mm and 1300mm, and the size D1 of the flow gap 50 is between 15mm and 30mm, within which the flow effect can be guaranteed.

[0052] like Figures 2 to 3 as well as Figure 5 As shown, the baffle structure 30 includes a felt fixing member 33 and a second pressure plate member 34, with the second pressure plate member 34 disposed on the side of the felt fixing member 33 away from the base plate assembly 10.

[0053] Specifically, the felt fixing part 33 has an abutment part 31, which is adapted to the second pressure plate part 34 to improve the structural strength of the baffle structure 30. The felt fixing part 33 can be at least one of ceramic fiber material, high-purity alumina, and silicon carbide. By setting the felt fixing part 33, it can play a role in heat insulation when forming the first cavity 41 and the second cavity 42. When the gas flows along the flow gap 50 and the second cavity 42 and flows out through the atmospheric vent, the setting of the felt fixing part 33 can prevent the heat radiation generated at the bottom of the crucible from being directly lost through the gas guide hole 11. The good heat insulation of the felt fixing part 33 can effectively isolate the heat radiation from the communication between the gas guide hole 11, thus eliminating the need to reheat the single crystal furnace and reducing the production cost.

[0054] In this embodiment, the second pressure plate 34 also provides a certain degree of heat insulation, thereby working with the felt fixing component 33 to improve the heat preservation effect of the single crystal furnace. In other words, the arrangement of the felt fixing component 33 and the second pressure plate 34 can prevent the heat radiation of the crucible from being directly lost through the gas guide hole 11, and can also prevent gas from flowing out of the gas guide hole 11 from the bottom of the crucible, thereby further preventing heat loss from the crucible.

[0055] In this embodiment, the second pressure plate 34 is made of one of the following materials: metal, graphite, ceramic and composite materials. It can improve the heat insulation effect of the baffle structure 30 and reflect heat radiation to a certain extent after being subjected to heat radiation, thereby making better use of the heat from the crucible.

[0056] like Figure 2 and Figure 5 As shown, the base plate assembly 10 includes a base plate 13 and a support cylinder 14, with a second settling groove 131 provided on the base plate 13. The support cylinder 14 is located at the second settling groove 131, and an air guide hole 11 passes through the support cylinder 14 and the base plate 13. The inner wall of the support cylinder 14 is flush with the inner wall of the insulation cylinder 20.

[0057] Specifically, the second recess 131 on the base plate 13 is adapted to the support cylinder 14, thereby limiting the position of the support cylinder 14. The first recess is formed on the support cylinder 14, so that the support cylinder 14 and the insulation cylinder 20 are coplanar.

[0058] like Figures 1 to 2 as well as Figure 5 As shown, the electrode assembly 80 includes an electrode element 81, a quartz sheath 82, and an electrode sheath 83. The electrode sheath 83 and the quartz sheath 82 are sequentially fitted onto the electrode element 81, thereby forming an insulating protection for the electrode element 81. The electrode assembly 80 only partially extends out of the base plate assembly 10. The mounting hole 32 is opened on the felt fixing element 33, the second pressure plate element 34 has a second clearance hole 341, and the first pressure plate element 70 has a first clearance hole 72, thereby ensuring that the felt fixing element 33, the second pressure plate element 34, and the first pressure plate element 70 all avoid the electrode assembly 80.

[0059] In this embodiment, the baffle structure 30 is partially or entirely made of graphite. The quartz sheath 82 and the electrode sheath 83 prevent the electrode 81 from directly contacting the volatiles on the baffle structure 30 or the crucible, thereby preventing sparking and improving the safety of the single crystal furnace.

[0060] Specifically, the electrode assembly 80 is mounted on the base plate 13, and the support cylinder 14, the first pressure plate 70, and the baffle structure 30 are sequentially fitted onto the electrode assembly 80. There are four electrode assemblies 80, which are spaced apart on the base plate assembly 10 and correspond to the four mounting holes 32 on the baffle structure 30.

[0061] From the above description, it can be seen that the above embodiments of this utility model achieve the following technical effects: By setting the exhaust assembly including a bottom plate assembly 10, a heat insulation cylinder 20, and a baffle structure 30, the bottom plate assembly 10 is provided with a vent hole 11, the heat insulation cylinder 20 is disposed on the bottom plate assembly 10, and an exhaust chamber 40 is formed between the heat insulation cylinder 20 and the bottom plate assembly 10. The vent hole 11 is connected to the exhaust chamber 40, the baffle structure 30 is disposed in the exhaust chamber 40, and a flow gap 50 is formed between the outer periphery of the baffle structure 30 and the inner wall of the heat insulation cylinder 20. The exhaust chamber 40 is divided into a first cavity 41 and a second cavity 42 by the baffle structure 30. The first cavity 41 is disposed away from the bottom plate assembly 10 relative to the second cavity 42. The first cavity 41, the flow gap 50, the second cavity 42, and the vent hole 11 are sequentially connected. The plate structure 30 is set inside the exhaust chamber 40, thereby dividing the exhaust chamber 40 into two parts to form a first chamber 41 and a second chamber 42. When the single crystal furnace is generating single crystals, the gas introduced into the single crystal furnace can enter the second chamber 42 from the first chamber 41 along the flow gap 50 between the baffle structure 30 and the inner wall of the insulation cylinder 20, and be discharged through the gas guide hole 11, thereby optimizing the gas flow path. Compared with the traditional method of directly discharging gas into the gas guide hole 11 along the axial direction of the insulation cylinder 20, this utility model blows the dust into the second chamber 42 along the flow path and disperses the dust, thereby avoiding the gas blowing the dust of the single crystal into the gas guide hole 11 and causing blockage of the gas guide hole 11. This avoids the pressure instability in the single crystal furnace, which may interfere with the growth quality of the single crystal and reduce its quality, thus improving the quality of the single crystal generated by the single crystal furnace.

[0062] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0063] It should be noted that the terms "upper" and "lower," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0064] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An exhaust assembly for a single crystal furnace, characterized in that, include: A base plate assembly (10) is provided with an air guide hole (11); A heat insulation cylinder (20) is disposed on the base plate assembly (10), and an exhaust chamber (40) is formed between the heat insulation cylinder (20) and the base plate assembly (10), and the air guide hole (11) is connected to the exhaust chamber (40); A baffle structure (30) is disposed in the exhaust chamber (40), and a flow gap (50) is formed between the outer periphery of the baffle structure (30) and the inner wall of the insulation cylinder (20). The exhaust chamber (40) is divided into a first cavity (41) and a second cavity (42) by the baffle structure (30). The first cavity (41) is disposed away from the bottom plate assembly (10) relative to the second cavity (42). The first cavity (41), the flow gap (50), the second cavity (42), and the air guide hole (11) are sequentially connected.

2. The exhaust assembly for a single crystal furnace according to claim 1, characterized in that, The baffle structure (30) protrudes to one side of the base plate assembly (10) to form an abutment portion (31), the abutment portion (31) contacts the surface of the base plate assembly (10), and the abutment portion (31) avoids the air guide hole (11). The area of ​​the baffle structure (30) on the side surface of the base plate assembly (10) other than the abutment portion (31) forms a second cavity (42) between the baffle structure (30) and the base plate assembly (10).

3. The exhaust assembly for a single crystal furnace according to claim 2, characterized in that, The baffle structure (30) also has a mounting hole (32) located in the area of ​​the abutment portion (31).

4. The exhaust assembly for a single crystal furnace according to claim 1, characterized in that, The bottom plate assembly (10) has a first sink groove (12) on the surface facing the exhaust chamber (40), and the air guide hole (11) is connected to the bottom of the first sink groove (12). The wall surface of the first sink groove (12) has the same diameter as the wall surface of the heat preservation cylinder (20) and is aligned.

5. The exhaust assembly for a single crystal furnace according to claim 4, characterized in that, The exhaust assembly also includes an air guide tube (60), which is disposed on the inner wall of the air guide hole (11).

6. The exhaust assembly for a single crystal furnace according to claim 5, characterized in that, The exhaust assembly further includes a first pressure plate (70), which is disposed on the bottom of the first sink (12). The first pressure plate (70) has a through hole (71) corresponding to and communicating with the air guide hole (11). One end of the air guide cylinder (60) is located in the through hole (71) and is limited and stopped by the inner wall of the through hole (71). The second cavity (42) is connected to the air guide hole (11) through the through hole (71).

7. The exhaust assembly for a single crystal furnace according to claim 1, characterized in that, The dimension D1 of the flow gap (50) and the diameter D2 of the baffle structure (30) satisfy the following condition: 0.01≤D1 / D2≤0.

03.

8. The exhaust assembly for a single crystal furnace according to claim 1, characterized in that, The baffle structure (30) includes a felt fixing member (33) and a second pressure plate member (34), the second pressure plate member (34) being disposed on the side of the felt fixing member (33) away from the base plate assembly (10).

9. The exhaust assembly for a single crystal furnace according to any one of claims 1 to 8, characterized in that, The base plate assembly (10) includes: A base plate (13) is provided with a second sink trough (131); A support cylinder (14) is provided at the second settling trough (131). The air guide hole (11) passes through the support cylinder (14) and the bottom plate (13). The inner wall of the support cylinder (14) is flush with the inner wall of the heat preservation cylinder (20).

10. A single crystal furnace, characterized in that, include: The exhaust assembly for a single crystal furnace according to any one of claims 1 to 9; A crucible assembly, which is disposed on the exhaust assembly.

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