Thermal gas mass flow controller

Abstract

The utility model discloses a thermal type gas mass flow controller, and particularly relates to the technical field of gas monitoring regulation and control, which comprises a controller main body and a gas monitoring regulation and control system arranged on the controller main body, a gas channel is arranged in the controller main body, one end of the controller main body is fixedly connected with a connecting gas disc, and the other end of the controller main body is fixedly connected with a gas outlet. An air inlet hole, a pair of first air distribution holes, a pair of second air distribution holes and an air outlet hole are sequentially formed in the connecting air disc from left to right, and a pair of first air closing assemblies are arranged in the air inlet hole and used for blocking the first air distribution holes and the second air distribution holes. The controller body is provided with a lifting unit connected with the pair of first air closing assemblies, each first air closing assembly is provided with a mounting frame, the mounting frame is provided with a filter screen plate, and the mounting frame is provided with a second air closing assembly used for blocking the first air distribution hole. According to the technical scheme provided by the utility model, the technical problem that a monitoring source is shut down when the filter screen in the thermal gas mass flow controller is maintained can be solved.

Description

Technical Field

[0001] This utility model relates to the field of gas monitoring and control technology, and more specifically, to a thermal gas mass flow controller. Background Technology

[0002] A thermal mass flow controller is an instrument primarily used for the precise measurement and control of the mass flow rate of gases or liquids. As the name suggests, a thermal mass flow controller calculates the fluid's mass flow rate by measuring the heat change generated as the fluid flows past a sensor. It controls the gas flow rate through PID control of the valve opening and uses thermal diffusion technology for measurement. Its main characteristic is the application of the law of conservation of heat, hence the name thermal mass flow controller. Thermal mass flow controllers are widely used in various industrial, scientific research, and medical fields.

[0003] For example, the utility model patent with publication number CN215374091U discloses a novel thermal gas mass flow controller, which includes a straight pipe, a filter screen, a sensor module, a measurement and control circuit, a solenoid valve, a gas path opening and closing component, an external interface, and a control system. The filter screen is horizontally laid on the inner side of the straight pipe, and the sensor module is installed on the top of the straight pipe.

[0004] In the aforementioned patent, the inventor believes that although the patent uses a filter to filter and protect the gas in the pipeline for gas mass flow control, the filter's internal location means that the operation of the thermal gas mass flow controller must be stopped for a long time before it can be removed for maintenance, which would cause the monitoring source to stop working.

[0005] Therefore, in view of this, we will study and improve the existing structure and its shortcomings to provide a thermal gas mass flow controller, in order to achieve a more practical purpose. Utility Model Content

[0006] To overcome the shortcomings mentioned above, this utility model aims to provide a technical solution that can solve the technical problem of monitoring source shutdown caused by filter maintenance in thermal gas mass flow controllers.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a thermal gas mass flow controller, comprising a controller body and a gas monitoring and control system disposed on the controller body. The controller body has an internal gas channel, and a connecting gas plate is fixedly connected to one end of the controller body. The connecting gas plate has an air inlet, a pair of gas distribution holes one, a pair of gas distribution holes two, and an air outlet arranged sequentially from left to right inside. A pair of air-sealing components one is disposed in the air inlet, and the air-sealing components one is used to block the gas distribution holes one and two. A lifting unit connected to the pair of air-sealing components one is disposed on the controller body.

[0008] Each air-sealing component is equipped with a mounting bracket, a filter plate is mounted on the mounting bracket, and an air-sealing component 2 for sealing the air distribution port is mounted on the mounting bracket.

[0009] In a preferred embodiment, the air inlet, air distribution port one, air distribution port two, air outlet and air passage are sequentially connected, and the opposite ends of a pair of air distribution ports one extend to the top and bottom of the connecting air plate, respectively.

[0010] In a preferred embodiment, each air-tightening component 1 includes a sealing disc 1, on which a sealing plate is fixedly connected. The sealing disc 1 is used to seal one end of the air distribution port 1, and the sealing plate is used to seal one end of the air distribution port 2.

[0011] In a preferred embodiment, the lifting unit includes an electric actuator, which is fixedly connected to the top of the connecting air plate. The output end of the electric actuator passes through the connecting air plate and extends into the air inlet. A pull plate is fixedly connected to the output end of the electric actuator. A light rod is fixedly connected inside the air inlet. The pull plate is slidably connected to the light rod. A pair of sealing discs are fixedly connected to the pull plate.

[0012] In a preferred embodiment, the mounting bracket includes a pair of limiting rings, with a fixed half-ring fixedly connected to each pair of limiting rings, and an assembly cavity reserved between the limiting rings and the fixed half-ring, into which the filter plate is inserted.

[0013] In a preferred embodiment, a support rod is fixedly connected to the opposite sides of a pair of limiting rings, and a pull rod is fixedly connected to one of the support rods. The second air-tightening component is disposed on the pull rod. The second air-tightening component includes a second sealing disc, which is fixedly connected to one end of the pull rod. The second sealing disc is used to seal the other end of the first air distribution hole, and a rotating block is fixedly connected to the second sealing disc.

[0014] In a preferred embodiment, a screw is fixedly connected to another support rod, and a threaded sleeve is threadedly connected to the screw, which is fixedly connected to the sealing disc.

[0015] The technical effects and advantages of this utility model are as follows:

[0016] This thermal gas mass flow controller connects to a connecting gas plate at the end of the controller body and sets up a pair of air-sealing components in the connecting gas plate. This allows for flexible control of the pair of air-sealing components to adjust their sealing positions, providing corresponding channels for a pair of filter plates and filtering the gas. This enables the pair of filter plates to be used quickly and alternately, thus reducing downtime for monitoring personnel when maintaining any filter plate and ensuring the reliability of production operations.

[0017] This thermal gas mass flow controller utilizes the configuration where the second air-sealing component is fixed on the mounting frame, and the mounting frame is connected to the first air-sealing component via screws. This allows for quick removal of the mounting frame during filter plate maintenance, and because the filter plate is inserted into the mounting frame, it is easy to remove the filter plate for maintenance, making it quite practical. Attached Figure Description

[0018] To more clearly illustrate the embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0019] Figure 1 This is a three-dimensional structural diagram of the entire utility model;

[0020] Figure 2 This utility model Figure 1 A planar sectional view;

[0021] Figure 3 This is a planar sectional view of the connecting air disc of this utility model;

[0022] Figure 4 This is a planar sectional view of the lifting unit and sealing component one of this utility model;

[0023] Figure 5 This is a three-dimensional structural diagram of the assembly frame and filter plate of this utility model.

[0024] The attached diagram is labeled as follows: 1. Controller body; 2. Gas monitoring and control system; 3. Gas duct; 4. Connecting gas plate; 41. Inlet; 42. Outlet; 43. Gas distribution port one; 44. Gas distribution port two; 5. Air-sealing component one; 51. Sealing plate one; 52. Sealing plate; 6. Lifting unit; 61. Electric push rod; 62. Pull plate; 63. Smooth rod; 7. Mounting bracket; 71. Limiting ring; 72. Fixed half ring; 8. Filter plate; 9. Sealing plate two; 91. Rotating block; 10. Support rod; 11. Screw; 12. Threaded sleeve; 13. Pull rod. Detailed Implementation

[0025] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0026] See also Figures 1-5 This utility model provides a thermal gas mass flow controller, including a controller body 1 and a gas monitoring and control system 2 installed on the controller body 1. The controller body 1 has a gas channel 3 inside.

[0027] The gas channel 3 allows the gas that needs to be monitored and regulated to be introduced into the controller body 1, and the gas monitoring and regulation system 2 can monitor and regulate the gas introduced into the controller body 1.

[0028] The gas monitoring and control system 2 in this embodiment is a mature existing technology. Its main application principles can be divided into: thermal principle, differential pressure principle, and Coriolis principle. In this embodiment, the thermal principle is taken as an example. The gas monitoring and control system 2 mainly consists of a flow sensor, a flow regulating valve, and an amplifier controller. The flow sensor uses the capillary heat transfer thermocalorimetry principle to sense the gas flow rate. The flow regulating valve can adjust the valve opening according to the sensor signal, thereby controlling the gas flow rate. The amplifier controller amplifies the flow signal measured by the flow sensor and compares it with a set voltage to obtain a difference signal. This difference signal is amplified again and used to control the regulating valve to achieve closed-loop control. When the gas flows through the sensor, it carries away a certain amount of heat. The flow sensor detects this change in heat and converts it into an electrical signal. This signal is amplified and compared with the set flow value. Then, the flow rate is adjusted by regulating the valve until the actual flow rate is equal to the set flow rate. In this way, the thermal gas mass flow controller can achieve precise control of the gas flow rate. Since the gas monitoring and control system 2 is a mature existing technology, it will not be described in detail here.

[0029] In this embodiment: One end of the controller body 1 is fixedly connected to a connecting air plate 4. The interior of the connecting air plate 4 is provided with an air inlet 41, a pair of air distribution holes 43, a pair of air distribution holes 44 and an air outlet 42 from left to right. The air inlet 41, air distribution holes 43, air distribution holes 44, air outlet 42 and air passage 3 are connected in sequence. The opposite ends of the pair of air distribution holes 43 extend to the top and bottom of the connecting air plate 4 respectively.

[0030] The connecting air plate 4 can expand the space at the end of the controller body 1 to provide an operating range for subsequent gas filtration. The end of the air inlet 41 can be connected to the monitoring and control air inlet pipe, while the end of the air passage 3 facing away from the air inlet 41 can be connected to the monitoring and control air outlet pipe. The arrangement of the air inlet 41, a pair of air distribution holes 1 43, a pair of air distribution holes 2 44 and the air outlet 42, together with the air passage 3, can form two independent channels. The two channels can independently provide selective gas introduction for the air passage 3.

[0031] In this embodiment: a pair of air-sealing components 5 are provided in the air inlet 41. The air-sealing components 5 are used to block the air distribution port 43 and the air distribution port 44. Each air-sealing component 5 includes a blocking plate 51. A blocking plate 52 is fixedly connected to the blocking plate 51. The blocking plate 51 is used to block one end of the air distribution port 43, and the blocking plate 52 is used to block one end of the air distribution port 44.

[0032] The sealing disc 51 is cone-shaped. Both the sealing disc 51 and the sealing plate 52 are made of rubber for sealing. Because a pair of air-sealing components 5 are provided, and the connecting gas plate 4 forms two independent channels, the sealing disc 51 and the sealing plate 52 can block and move away from the corresponding gas distribution holes 43 and 44. Specifically, when one of the combined sealing discs 51 and 52 blocks one of the gas distribution holes 43 and 44, the other combined sealing discs 51 and 52 can move away from the other gas distribution holes 43 and 44. In this way, the two independent channels can alternately conduct gas. When the structure in either channel needs maintenance, this can ensure the continuity of gas mass flow control.

[0033] In this embodiment: The controller body 1 is provided with a lifting unit 6 connected to a pair of air-sealing components 5. The lifting unit 6 includes an electric push rod 61, which is fixedly connected to the top of the connecting air plate 4. The output end of the electric push rod 61 passes through the connecting air plate 4 and extends into the air inlet 41. The output end of the electric push rod 61 is fixedly connected to a pull plate 62. A light rod 63 is fixedly connected inside the air inlet 41. The pull plate 62 is slidably connected to the light rod 63. A pair of sealing discs 51 are both fixedly connected to the pull plate 62.

[0034] In this application, the electric actuator 61 adopts a DYX miniature electric actuator, which has a self-locking function and high safety during telescopic operation. In this application, the top of the connecting air plate 4 is provided with a telescopic groove, and the telescopic groove is connected to the air inlet 41. When the electric actuator 61 is fixedly assembled on the top of the connecting air plate 4, the electric actuator 61 should be sealed with a sealing material at the top of the telescopic groove to ensure the connection is sealed. In this way, the output end of the electric actuator 61 can pass through the telescopic groove to control the lifting plate 62 to move up and down in the air inlet 41. The bare rod 63 can play a guiding role in the lifting and lowering of the lifting plate 62.

[0035] In use, since the connecting gas plate 4 has two independent channels, when it is necessary to block one channel to allow gas flow in the other channel, the piston of the electric actuator 61 can be controlled to rise or fall. The smooth rod 63 provides a sliding guide for the pull plate 62, allowing the pull plate 62 to rise and fall. Since a pair of sealing discs 51 are fixedly installed at the top and bottom of the pull plate 62, one sealing disc 51 can block one of the gas distribution holes 43, while the other sealing disc 51 can block the other. 1. It can be moved away from another air distribution port 43. At this time, the sealing plate 51 on the sealing port 43 can slide along the inner wall of the sealing port 43 until it corresponds to the port of one of the air distribution ports 44. In this way, the air distribution port 44 can be sealed. This setting can prevent the gas flowing in the other air distribution port 44 from entering one of the air distribution ports 44. In this way, the air inlet 41, one air distribution port 43, one air distribution port 44, the air outlet 42 and the air passage 3 can be independently connected.

[0036] In this embodiment: each air-tight component 5 is provided with a mounting frame 7, the mounting frame 7 includes a pair of limiting rings 71, a fixed half ring 72 is fixedly connected to the pair of limiting rings 71, an assembly cavity is reserved between the limiting rings 71 and the fixed half ring 72, and a filter plate 8 is provided on the mounting frame 7, the filter plate 8 is inserted into the assembly cavity.

[0037] A pair of limiting rings 71 allows both ends of the filter plate 8 to have effective gas flow surfaces, while the setting of the fixed half ring 72, together with the pair of limiting rings 71, can easily form an assembly cavity, which makes it easy to put and take off the filter plate 8. The filter plate 8 is composed of a ring plate structure and a filter screen set in the ring plate structure. The filter screen uses at least one of HEPA, activated carbon, stainless steel, polyester, etc. as the filter material, which can effectively filter dust impurities in the monitored and regulated gas.

[0038] In this embodiment: the mounting frame 7 is provided with an air-tightening component 2 for sealing the air distribution hole 43. A pair of limit rings 71 are fixedly connected to the opposite sides of each other with a support rod 10. A pull rod 13 is fixedly connected to one of the support rods 10. The air-tightening component 2 is set on the pull rod 13. The air-tightening component 2 includes a sealing disc 2 9. The sealing disc 2 9 is fixedly connected to one end of the pull rod 13. The sealing disc 2 9 is used to seal the other end of the air distribution hole 43. A rotating block 91 is fixedly connected to the sealing disc 2 9.

[0039] Because the air distribution port 43 has a double-opening structure (upper and lower), and the air-sealing component 5 can only seal one end of one air distribution port 43 and one end of the other air distribution port 44, when a pair of air-sealing components 5 move up and down, while one sealing plate 51 seals one end of one air distribution port 43, the other sealing plate 51 moves away from the other end of the other air distribution port 43. The sealing principle of the sealing plate 52 in conjunction with the second air distribution port 44 is the same as that of the sealing plate 51 and the air distribution port 43. In principle, the first air distribution port 43 can introduce the gas in the air inlet port 41 into the second air distribution port 44. The gas can be filtered by the filter screen plate 8. During this process, the first air distribution port 43, which is not blocked at one end, can be blocked at the other end of the first air distribution port 43 by the blocking plate 51 at that position through the support rod 10, the support rod 10, and the pull rod 13. The blocking plate 29 and the blocking plate 51 are made of the same material. The setting of the rotating block 91 can easily drive the blocking plate 29 to rotate.

[0040] In this embodiment: a screw 11 is fixedly connected to another support rod 10, and a threaded sleeve 12 is threadedly connected to the screw 11. The threaded sleeve 12 is fixedly connected to the sealing disc 51.

[0041] When the end of the air distribution port 43 near the air inlet port 41 is blocked, the second air distribution port 44 is also blocked by the blocking plate 52. At the same time, the other end of the first air distribution port 43 can be opened by the second blocking plate 9. Thus, the position of the first air distribution port 43 is idle. The user drives the second blocking plate 9 to rotate by rotating block 91. The second blocking plate 9 can drive the mounting bracket 7 to rotate by pulling rod 13. The mounting bracket 7 can be screwed out on the threaded sleeve 12 by screw rod 11. Thus, the second blocking plate 9 can remove the mounting bracket 7. Since the filter screen plate 8 is inserted on the mounting bracket 7, it is easy to remove the filter screen plate 8 for cleaning and maintenance.

[0042] It is worth noting that, in order to promptly obtain the filtration status of the filter plate 8, pressure detection components can be installed in the two sets of channels formed by the air inlet 41, a pair of air distribution holes 43, a pair of air distribution holes 44, and the air outlet 42. The pressure detection components can be pressure sensors, specifically the SM9541 series sensors. The connecting air plate 4 can control the display module connected to the pressure sensors, which can be a display screen. By setting pressure sensors in two corresponding directions on the filter plate 8, a pair of pressure sensors can detect the clogging status of the filter by detecting the internal and external pressure difference through which the gas passes through the filter plate 8. This facilitates timely maintenance of the filter plate 8. The technology of detecting the internal and external pressure difference through pressure sensors is a mature existing technology, so it will not be elaborated further here.

Claims

1. A thermal gas mass flow controller, comprising a controller body (1) and a gas monitoring and control system (2) disposed on the controller body (1), characterized in that: The controller body (1) is provided with an air passage (3) inside. One end of the controller body (1) is fixedly connected to a connecting air plate (4). The connecting air plate (4) is provided with an air inlet (41), a pair of air distribution holes (43), a pair of air distribution holes (44) and an air outlet (42) from left to right. A pair of air-sealing components (5) are provided in the air inlet (41). The air-sealing components (5) are used to block the air distribution holes (43) and the air distribution holes (44). The controller body (1) is provided with a lifting unit (6) connected to the pair of air-sealing components (5). Each air-sealing component 1 (5) is provided with a mounting bracket (7), the mounting bracket (7) is provided with a filter plate (8), and the mounting bracket (7) is provided with an air-sealing component 2 for sealing the air distribution hole 1 (43).

2. The thermal gas mass flow controller according to claim 1, characterized in that: The air inlet (41), air distribution port one (43), air distribution port two (44), air outlet (42) and air passage (3) are connected in sequence, and the opposite ends of a pair of air distribution ports one (43) respectively penetrate to the top and bottom positions of the connecting air plate (4).

3. The thermal gas mass flow controller according to claim 1, characterized in that: Each air-sealing component 1 (5) includes a sealing disc 1 (51), on which a sealing plate (52) is fixedly connected. The sealing disc 1 (51) is used to seal one end of the air distribution hole 1 (43), and the sealing plate (52) is used to seal one end of the air distribution hole 2 (44).

4. The thermal gas mass flow controller according to claim 3, characterized in that: The lifting unit (6) includes an electric push rod (61), which is fixedly connected to the top of the connecting air plate (4). The output end of the electric push rod (61) passes through the connecting air plate (4) and extends into the air inlet (41). The output end of the electric push rod (61) is fixedly connected to a pull plate (62). A light rod (63) is fixedly connected inside the air inlet (41). The pull plate (62) is slidably connected to the light rod (63). A pair of sealing discs (51) are fixedly connected to the pull plate (62).

5. The thermal gas mass flow controller according to claim 3, characterized in that: The mounting bracket (7) includes a pair of limiting rings (71), and a fixed half ring (72) is fixedly connected to the pair of limiting rings (71). An assembly cavity is reserved between the limiting rings (71) and the fixed half ring (72), and the filter plate (8) is inserted into the assembly cavity.

6. The thermal gas mass flow controller according to claim 5, characterized in that: A pair of limiting rings (71) are fixedly connected to each other with a support rod (10). A pull rod (13) is fixedly connected to one of the support rods (10). The second air-tightening component is set on the pull rod (13). The second air-tightening component includes a second sealing disc (9). The second sealing disc (9) is fixedly connected to one end of the pull rod (13). The second sealing disc (9) is used to seal the other end of the first air distribution hole (43). A rotating block (91) is fixedly connected to the second sealing disc (9).

7. The thermal gas mass flow controller according to claim 6, characterized in that: Another support rod (10) is fixedly connected to a screw (11), and a threaded sleeve (12) is threadedly connected to the screw (11), and the threaded sleeve (12) is fixedly connected to the sealing disc (51).

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