Crucible support vertical type deposition reaction tool
By designing a vertical deposition reaction fixture for crucible holders, the problems of uneven gas permeation and preform deformation in the traditional carbon-carbon crucible holder CVD deposition process were solved, achieving uniform densification and efficient deposition of the crucible holders and reducing costs.
Patent Information
- Application Number
- CN202520353136.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-03
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2035-03-03
AI Technical Summary
In the traditional carbon-carbon crucible tray process of CVD deposition densification, the gas diffusion path is blocked, forming a 'bottleneck effect'. The surface is sealed prematurely, resulting in uneven deposition density. Furthermore, when placed horizontally, the single furnace loading is low, increasing costs. Stacking the preforms causes deformation and reduces the yield.
The crucible-supported vertical deposition reaction fixture is adopted. Through vertical placement and vertical directional airflow, the carbon source gas is axially permeated, which can meet the uniform densification requirements of complex structures, avoid stacking and compression, and increase the single furnace loading capacity.
This method achieves uniform densification of the crucible holder, improves product qualification rate, reduces the number of densification cycles and time, and lowers the cost of vapor deposition.
Smart Images
Figure CN223951174U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of crucible support processing, in particular to a vertical deposition reaction frock of crucible support. BACKGROUND
[0002] The crucible support is a core bearing component of a single crystal silicon growth furnace, and needs to work for a long time under a high temperature of more than 1600 DEG C, strong thermal shock and a corrosive silicon vapor environment, so that the crucible support made of carbon / carbon composite material has excellent properties such as high purity, high strength, high thermal conductivity and low thermal expansion coefficient.
[0003] However, in the CVD densification process of the traditional carbon / carbon crucible support, the preform is prone to form a 'bottleneck effect' due to the obstruction of the gas diffusion path, and the surface is closed too early to hinder the internal densification and form a 'carbon black shell'; the crucible support is often designed as a thick-walled, multi-curved and complex structure as a load-bearing component in a single crystal furnace, and the gas flow field and temperature field distribution of the traditional CVD process are difficult to adapt to the complex geometric characteristics, which is easy to cause uneven deposition density; the crucible support is placed horizontally, the single loading capacity is low, and the CVD deposition cost is increased; if the crucible support is placed by stacking, the preform of the bottom layer of the crucible support will be pressed and deformed, and the product yield is reduced. UTILITY MODEL CONTENT
[0004] In view of the deficiencies of the prior art, the utility model provides a vertical deposition reaction frock of crucible support, which solves the problems that the traditional carbon / carbon crucible support is placed in disorder or horizontally in the CVD densification process, the preform is prone to form a 'bottleneck effect' due to the obstruction of the gas diffusion path, and the surface is closed too early to hinder the internal densification and form a 'carbon black shell'; the crucible support is often designed as a thick-walled, multi-curved and complex structure as a load-bearing component in a single crystal furnace, and the gas flow field and temperature field distribution of the traditional CVD process are difficult to adapt to the complex geometric characteristics, which is easy to cause uneven deposition density; the crucible support is placed horizontally, the single loading capacity is low, and the CVD deposition cost is increased; if the crucible support is placed by stacking, the preform of the bottom layer of the crucible support will be pressed and deformed, and the product yield is reduced.
[0005] The utility model provides the following technical scheme: a vertical deposition reaction frock of crucible support, including support base, the number of support base is two, the upper surface of two support base all is set with a plurality of threaded holes, the internal thread of a plurality of threaded holes all installs interval cylinder, the opposite side surface of two support base all is installed screw rod, the one end between two screw rod is all installed with threaded sleeve, the one end of two support base all is fixedly connected with plug -in block, the other end of two support base all is fixedly connected with fixed block, the surface of two fixed block all is set with and plug -in block matched insertion slot.
[0006] Preferably, the bottom end of each of the spacing cylinders is fixedly connected with a screw rod, and the spacing cylinder is screw-mounted in the threaded hole through the screw rod.
[0007] Preferably, the screw directions of the two screw rods are opposite, and a telescopic rod is fixedly connected between the two support bases.
[0008] Preferably, the surface of each of the fixing blocks is provided with a group of movable grooves, each of the movable grooves is slidably sleeved with a clamping rod, the surface of each of the insertion blocks is provided with two clamping grooves matched with the clamping rods, and the outer side of one end of each of the clamping rods is sleeved with a spring.
[0009] Preferably, the outer side of one end of each group of clamping rods is fixedly connected with a pull plate.
[0010] Preferably, the two screw rods are fixedly installed on the two support bases through carbon-carbon bolts.
[0011] Compared with the prior art, the utility model provides a kind of pot support vertical deposition reaction tool, with following beneficial effects: the reaction tool is placed by vertical pot support, realizes the efficient penetration of carbon source gas along the axial direction of preform by vertical directional airflow and axial temperature gradient control, inhibits the premature closure of surface layer;Utilize the directional penetration characteristics of vertical deposition, adapt to the uniform densification needs of complex structures such as thin-walled, curved surface of pot support;Preform is arranged in order, increase single furnace loading, place vertically without stacking extrusion, reduce deformation problems in preform deposition, increase single deposition efficiency, reduce densification frequency and time, improve product qualification rate, reduce vapor deposition cost. BRIEF DESCRIPTION OF DRAWINGS
[0012] Figure 1 It is the structure schematic diagram of the utility model;
[0013] Figure 2 It is the structure split diagram of the utility model;
[0014] Figure 3 It is the fixed block structure split diagram of the utility model;
[0015] Figure 4 It is the use state schematic diagram of the utility model.
[0016] In the drawing: 1, support base;2, threaded hole;3, spacing cylinder;4, screw rod;5, threaded sleeve;6, insertion block;7, fixed block;8, insertion slot;9, screw rod;10, telescopic rod;11, movable groove;12, clamping rod;13, clamping groove;14, spring;15, pull plate. DETAILED DESCRIPTION
[0017] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described, obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.
[0018] Please refer to Figures 1-4 ,
[0019] Embodiment one: a pedestal vertical deposition reaction tool, comprising a support base 1, the number of support bases 1 is two, the upper surfaces of the two support bases 1 are provided with a plurality of threaded holes 2, the inner threads of the plurality of threaded holes 2 are all provided with spacing cylinders 3, the opposite sides of the two support bases 1 are both provided with screw rods 4, one end of the two screw rods 4 is threadedly sleeved with a threaded sleeve 5, one end of the two support bases 1 is both fixedly connected with an insertion block 6, the other end of the two support bases 1 is both fixedly connected with a fixed block 7, the surfaces of the two fixed blocks 7 are both provided with insertion grooves 8 matched with the insertion blocks 6.
[0020] Embodiment two: the difference between the present embodiment and embodiment one is that the bottom end of each spacing cylinder 3 is fixedly connected with a lead screw 9, and the spacing cylinder 3 is threadedly installed in the inner part of the threaded hole 2 through the lead screw 9.
[0021] Embodiment three: the difference between the present embodiment and embodiment one is that the directions of rotation of the two screw rods 4 are opposite, and a telescopic rod 10 is fixedly connected between the two support bases 1.
[0022] Embodiment four: the difference between the present embodiment and embodiment one is that the surface of each fixed block 7 is provided with a group of movable grooves 11, the inner part of each movable groove 11 is slidably sleeved with a clamping rod 12, the surface of each insertion block 6 is provided with two clamping grooves 13 matched with the clamping rod 12, and the outer side of one end of each clamping rod 12 is sleeved with a spring 14.
[0023] Embodiment five: the difference between the present embodiment and embodiment one is that the outer side of one end of each group of clamping rods 12 is fixedly connected with a pull plate 15.
[0024] Embodiment six: the difference between the present embodiment and embodiment one is that the two screw rods 4 are respectively fixedly installed on the two support bases 1 through carbon-carbon bolts.
[0025] In summary, the pot support vertical deposition reaction tool, when in use, the spacing column 3 can be installed on the support base 1 through the lead screw 9, then the pot support is placed between the plurality of spacing columns 3 on the support base 1, at the same time, the spacing between the two support bases 1 can be adjusted through the rotation of the threaded sleeve 5, which is suitable for different pot supports, when more pot supports are placed, a plurality of tools can be assembled, by pulling the two pull plates 15 on one tool outward, then inserting the two insertion blocks 6 on another tool into the insertion slot 8 of the tool fixing block 7, then releasing the pull plate 15 to make the clamping rod 12 inserted into the clamping slot 13 under the elastic force of the spring 14, so as to complete the assembly of the two tools, which is convenient and fast.
[0026] It should be noted that the terms "comprising", "including", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements, but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without more limitations, the element defined by the statement "comprising a" does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.
[0027] Although the embodiments of the present application have been shown and described, it is understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.
Claims
1. A pedestal-type deposition reaction tool including a support base (1), characterized by: The number of the support base (1) is two, the upper surface of two support bases (1) is provided with a plurality of threaded holes (2), the internal thread of a plurality of threaded holes (2) is installed with a spacing cylinder (3), the opposite side of two support bases (1) is installed with a screw rod (4), the end of two screw rods (4) is threaded with a threaded sleeve (5), one end of two support bases (1) is fixedly connected with an insertion block (6), the other end of two support bases (1) is fixedly connected with a fixed block (7), the surface of two fixed blocks (7) is provided with an insertion slot (8) matched with the insertion block (6).
2. The pedestal reaction deposition apparatus of claim 1, wherein: The bottom end of each spacing cylinder (3) is fixedly connected with a lead screw (9), and the spacing cylinder (3) is threaded in the inside of the threaded hole (2) through the lead screw (9).
3. The pedestal reaction deposition apparatus of claim 2, wherein: The screw direction of two screw rods (4) is opposite, and the telescopic rod (10) is fixedly connected between two support bases (1).
4. The pedestal reactor of claim 3 wherein: The surface of each fixed block (7) is provided with a group of movable grooves (11), the inside of each movable groove (11) is slidably connected with a clamping rod (12), the surface of two insertion blocks (6) is provided with two clamping grooves (13) matched with the clamping rod (12), and the outer side of each clamping rod (12) is provided with a spring (14).
5. The pedestal reactor of claim 4 wherein: the pedestal is formed of a material having a thermal conductivity of at least 100 W / m-K. The outer side of each group of clamping rods (12) is fixedly connected with a pull plate (15).
6. The pedestal reactor of claim 5 wherein: Two screw rods (4) are respectively fixedly installed on two support bases (1) through carbon-carbon bolts.