Clamp for growing single crystal film by liquid phase epitaxy method

Abstract

The utility model discloses a clamp for growing a single crystal thin film by a liquid phase epitaxy method, and relates to the technical field of liquid phase epitaxy, the clamp comprises a main clamp and an auxiliary clamp; the main clamp comprises at least an upper frame, a lower frame, two fixing claws and a matching claw. The two fixing claws and the matching claw are fixed between the upper frame and the lower frame and are circumferentially distributed at intervals; a fixing cavity for fixing an epitaxial substrate is defined by the two fixing claws and one matching claw; the matching claw comprises an upper claw arm connected with the upper frame and a lower claw arm connected with the lower frame; the upper claw arm and the lower claw arm are arranged at an interval to form a broken opening for inserting an epitaxial substrate into the fixed cavity; the auxiliary clamp is used for blocking the broken opening after the epitaxial substrate is inserted into the fixing cavity; first clamping grooves for clamping the edge of the epitaxial substrate are formed in the inner side faces of the fixing claws. According to the design, the fixing claws do not need to be pulled, the growth stability of the substrate slice can be improved, unnecessary damage to the clamp can be avoided, and the service life of the clamp is prolonged.

Description

Technical Field

[0001] This application relates to the field of liquid phase epitaxy technology, and in particular to a fixture for fixing an epitaxial substrate during the growth of single crystal thin films by liquid phase epitaxy. Background Technology

[0002] Bismuth-doped rare-earth iron garnet crystals, as Faraday magneto-optical single-crystal thin films, are essential materials for optical communication isolators and are key crystal materials for optical isolators. Bismuth-doped rare-earth iron garnet crystals are often grown using liquid-phase epitaxy to obtain high-quality single-crystal thin films. Liquid-phase epitaxy technology uses low-melting-point metals or oxides as solvents, and the material to be grown and dopants as solutes, saturating or supersaturating the solute in the solvent.

[0003] In the liquid phase epitaxy method for growing single crystal thin films, fixtures are required to fix the epitaxial substrate. Existing fixtures are mainly bayonet-type and slot-type, which require frequent bending of the fixing claws during loading and unloading, causing some damage to the fixing claws. This affects the service life of the fixture and reduces the efficiency of loading and unloading.

[0004] Therefore, there is an urgent need to provide a solution to address the above problems. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a fixture for growing single crystal thin films by liquid phase epitaxy, so as to solve the technical problems of low wafer loading and unloading efficiency and short service life of existing fixtures.

[0006] To achieve the above-mentioned technical objectives, this application provides a fixture for growing single-crystal thin films by liquid phase epitaxy, including a main fixture and a secondary fixture;

[0007] The main clamp includes at least an upper frame, a lower frame, two fixed jaws, and a mating jaw;

[0008] The upper frame is arranged parallel to the lower frame above it, and its center line coincides with the center line of the lower frame.

[0009] The two fixing claws and one mating claw are fixed between the upper frame and the lower frame, and are distributed circumferentially at intervals;

[0010] The two fixing claws and the one mating claw form a fixing cavity for fixing the epitaxial substrate;

[0011] The mating claw includes an upper claw arm that connects to the upper frame and a lower claw arm that connects to the lower frame.

[0012] The upper claw arm and the lower claw arm are spaced apart to form a break opening, which is used to allow the epitaxial substrate to be inserted into the fixing cavity;

[0013] The auxiliary clamp is used to seal the break opening after the epitaxial substrate is inserted into the fixing cavity;

[0014] The inner side of the fixing claw is provided with a first slot for the edge of the epitaxial substrate to be inserted.

[0015] Furthermore, the inner side of the sub-clamp is provided with a second slot for the edge of the epitaxial substrate to be inserted.

[0016] Furthermore, the auxiliary clamp includes a blocking part and a locking part;

[0017] The sealing part is adapted to the disconnection opening and is used to seal the disconnection opening;

[0018] The locking part is connected to the sealing part, and when the sealing part blocks the disconnection, it is located outside the mating claw;

[0019] A first clamping groove is formed between the locking part and the sealing part, for the lower end of the upper claw arm to be inserted;

[0020] A second clamping groove is also formed between the locking part and the sealing part for the upper end of the lower claw arm to be inserted.

[0021] Furthermore, the lower end of the upper claw arm is provided with a first inclined surface;

[0022] The upper end of the lower claw arm is provided with a second inclined surface;

[0023] The first inclined surface and the second inclined surface together form the break opening that expands outward from the center of the fixed cavity.

[0024] The sealing part is provided with a third inclined surface that cooperates with the first inclined surface;

[0025] The first clamping groove is formed between the third inclined surface and the locking part;

[0026] The sealing part is also provided with a fourth inclined surface that cooperates with the second inclined surface;

[0027] The second clamping groove is formed between the fourth inclined surface and the locking part.

[0028] Furthermore, the lower end of the upper claw arm is provided with a first step portion;

[0029] The upper end of the lower claw arm is provided with a second step;

[0030] A T-shaped break is formed between the first stepped portion and the second stepped portion.

[0031] Furthermore, the locking part has fixing protrusions at both ends;

[0032] The outer surfaces of the upper claw arm and the lower claw arm are provided with slots for inserting the fixing protrusion.

[0033] Furthermore, the upper frame includes three claw connecting rods;

[0034] One end of each of the three claw connecting rods is connected together, and the three claw connecting rods are distributed circumferentially around a common connection point;

[0035] The other ends of the three claw connecting rods are respectively connected to two of the fixed claws and one of the mating claws.

[0036] Furthermore, the lower frame is ring-shaped.

[0037] Furthermore, it also includes support rods;

[0038] The support rod is set vertically, and its lower end is connected to the center of the upper frame.

[0039] Furthermore, a handle is connected to the upper end of the support rod.

[0040] As can be seen from the above technical solutions, the fixture designed in this application for growing single-crystal thin films using liquid phase epitaxy allows for rapid wafer loading and unloading by simply removing the secondary fixture from the break point, effectively reducing the difficulty of wafer loading and unloading and improving efficiency. Compared to existing slot-type fixtures, there is no need to bend the fixing claws, which improves the stability of substrate growth, avoids unnecessary damage to the fixture, and extends the service life of the fixture. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 This is a front view of a fixture for growing single-crystal thin films by liquid phase epitaxy provided in this application, without a secondary fixture;

[0043] Figure 2 This is a side view of a fixture for growing single-crystal thin films by liquid phase epitaxy provided in this application, with a support rod but without a secondary fixture;

[0044] Figure 3 This is a top view of a fixture with support rods for growing single-crystal thin films by liquid phase epitaxy as provided in this application;

[0045] Figure 4This is a top view of a secondary fixture of a fixture for growing single-crystal thin films using a liquid-phase epitaxy method provided in this application;

[0046] In the diagram: 1. Upper frame; 10. Main clamp; 11. Claw connecting rod; 2. Lower frame; 3. Fixed claw; 31. First slot; 4. Mating claw; 41. Upper claw arm; 411. First inclined plane; 42. Lower claw arm; 421. Second inclined plane; 43. Disconnection port; 44. Slot; 5. Secondary clamp; 51. Sealing part; 511. Third inclined plane; 512. Fourth inclined plane; 52. Locking part; 53. Second slot; 54. First clamping groove; 55. Second clamping groove; 56. Fixed protrusion; 6. Support rod; 61. Handle. Detailed Implementation

[0047] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0048] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0049] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0050] This application discloses a fixture for growing single-crystal thin films using a liquid phase epitaxy method.

[0051] Please see Figure 1 as well as Figure 4 One embodiment of a fixture for growing single-crystal thin films using a liquid-phase epitaxy method provided in this application includes:

[0052] Main clamp 10 and auxiliary clamp 5.

[0053] The main clamp 10 includes at least an upper frame 1, a lower frame 2, two fixed claws 3 and a mating claw 4.

[0054] The upper frame is positioned parallel to the lower frame above it, and its center line coincides with the center line of the lower frame 2.

[0055] Two fixed claws 3 and one mating claw 4 are fixed between the upper frame 1 and the lower frame 2, and are evenly spaced around the circumference.

[0056] The two fixing claws 3 and the mating claw 4 form a fixing cavity for fixing the epitaxial substrate.

[0057] The mating claw 4 includes an upper claw arm 41 connected to the upper frame 1 and a lower claw arm 42 connected to the lower frame 2; the upper claw arm 41 and the lower claw arm 42 are spaced apart to form a break opening 43 for inserting the epitaxial substrate into the fixing cavity.

[0058] Sub-clamp 5 is used to seal the disconnection port 43 after the epitaxial substrate is inserted into the fixing cavity.

[0059] The inner side of the fixing claw 3 is provided with a first slot 31 for the edge of the epitaxial substrate to be inserted.

[0060] The fixture designed in this application for growing single-crystal thin films using liquid phase epitaxy allows for rapid wafer loading and unloading by simply unblocking the disconnection port 43 on the secondary fixture 5. This effectively reduces the difficulty of wafer loading and unloading and improves efficiency. Compared to existing slot-type fixtures, there is no need to bend the fixing claw 3, which improves the stability of substrate growth, avoids unnecessary damage to the fixture, and extends its service life.

[0061] This application uses only three claw structures and the first slot 31 to fix the epitaxial substrate, which enables the epitaxial substrate to be repeatedly exposed, thereby increasing the contact area with the raw materials and improving growth efficiency.

[0062] The above is Embodiment 1 of a fixture for growing single-crystal thin films using a liquid phase epitaxy method provided in this application. The following is Embodiment 2 of a fixture for growing single-crystal thin films using a liquid phase epitaxy method provided in this application. Please refer to the following for details. Figures 1 to 4 .

[0063] Based on the solution of Embodiment 1 above:

[0064] Furthermore, such as Figure 4 As shown, in order to better support and fix the epitaxial substrate located in the fixed cavity, the inner side of the sub-clamp 5 is provided with a second slot 53 for the edge of the epitaxial substrate to be inserted.

[0065] Furthermore, such as Figure 4 As shown, the auxiliary clamp 5 includes a blocking part 51 and a locking part 52.

[0066] The sealing part 51 is adapted to the disconnection opening 43 and is used to seal the disconnection opening 43.

[0067] The locking part 52 is connected to the sealing part 51, and is located outside the mating claw 4 when the sealing part 51 blocks the disconnection opening 43.

[0068] A first clamping groove 54 is formed between the locking part 52 and the sealing part 51 for the lower end of the upper claw arm 41 to be inserted; a second clamping groove 55 is also formed between the locking part 52 and the sealing part 51 for the upper end of the lower claw arm 42 to be inserted.

[0069] The first clamping groove 54 and the second clamping groove 55 are configured to clamp and engage with the upper claw arm 41 and the lower claw arm 42, thereby ensuring that the auxiliary clamp 5 is securely installed on the disconnection port 43 and sealing the disconnection port 43. The installation method involves placing the auxiliary clamp 5 into the disconnection port 43 from the side. During installation, the upper claw arm 41 and the lower claw arm 42 are inserted into the corresponding first clamping groove 54 and second clamping groove 55. Once installed in place, the disconnection port 43 is sealed.

[0070] Furthermore, such as Figure 2 As shown, the lower end of the upper claw arm 41 is provided with a first inclined surface 411, and the upper end of the lower claw arm 42 is provided with a second inclined surface 421.

[0071] The first inclined surface 411 and the second inclined surface 421 form a break opening 43 that expands outward from the center of the fixed cavity, which can be an isosceles trapezoidal opening.

[0072] Correspondingly, the sealing part 51 is provided with a third inclined surface 511 that cooperates with the first inclined surface 411, and a first clamping groove 54 is formed between the third inclined surface 511 and the locking part 52; the sealing part 51 is also provided with a fourth inclined surface 512 that cooperates with the second inclined surface 421, and a second clamping groove 55 is formed between the fourth inclined surface 512 and the locking part 52.

[0073] The sealing part 51 corresponds to a trapezoidal block structure, while the locking part 52 can be a straight plate. The two inclined surfaces of the sealing part 51 and one side of the straight plate can form the required first clamping groove 54 and second clamping groove 55.

[0074] Furthermore, a first step can be provided at the lower end of the upper claw arm 41, and correspondingly, a second step can be provided at the upper end of the lower claw arm 42; a T-shaped break 43 is formed between the first step and the second step. In this design, the corresponding sealing part 51 is a T-shaped block, and the required first clamping groove 54 and second clamping groove 55 can also be formed between it and the locking part 52 of the straight plate.

[0075] In addition to the two methods mentioned above for forming the first clamping groove 54 and the second clamping groove 55, other methods may also be used. Those skilled in the art can make appropriate design changes based on these methods without limitation.

[0076] Furthermore, the locking part 52 has fixing protrusions 56 at both ends; the outer sides of the upper claw arm 41 and the lower claw arm 42 are provided with slots 44 for the fixing protrusions 56 to be inserted. By cooperating with the protrusions and slots 44, the connection between the sub-clamp 5 and the mating claw 4 is further strengthened, making it less likely to come out.

[0077] Furthermore, such as Figure 3 As shown, for the design of the upper frame 1, it can include three claw connecting rods 11;

[0078] One end of the three claw connecting rods 11 is connected together, and the three claw connecting rods 11 are distributed around the common connection point in a circle; the other end of the three claw connecting rods 11 is respectively connected to two fixed claws 3 and one mating claw 4.

[0079] Of course, the upper frame 1 can also be a ring design; there are no specific restrictions.

[0080] Furthermore, the lower frame 2 is ring-shaped. Similarly, the lower frame 2 can also be designed as a three-connecting rod structure, without any specific restrictions.

[0081] Furthermore, in order to facilitate the movement of the clamp, this application also includes a support rod 6; the support rod 6 is vertically arranged and its lower end is connected to the center of the upper frame 1.

[0082] The design of support rod 6 facilitates the movement of the clamp, allowing it to move within the solution and ensuring full contact between the epitaxial substrate and the solution. This enables simultaneous stirring and growth, further improving the quality of the grown film.

[0083] Taking the design with support rod 6 as an example, the upper frame 1 of this application is preferably designed with three claw connecting rods 11, so as to facilitate the connection of support rod 6.

[0084] Furthermore, for ease of gripping, a handle 61 is connected to the upper end of the support rod 6.

[0085] The foregoing has provided a detailed description of a fixture for growing single-crystal thin films using a liquid-phase epitaxy method. For those skilled in the art, based on the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A holder for growing a single-crystal thin film by a liquid phase epitaxy method, characterized by comprising: The main clamp (10) and the auxiliary clamp (5) are included. The main clamp (10) includes at least an upper frame (1), a lower frame (2), two fixed claws (3) and a matching claw (4). The upper frame is arranged above the lower frame in parallel, and the center line of the upper frame is coincident with the center line of the lower frame (2). The two fixed claws (3) and the matching claw (4) are fixed between the upper frame (1) and the lower frame (2) and are distributed in a circumferential interval. The two fixed claws (3) and the matching claw (4) form a fixed cavity for fixing an epitaxial substrate. The matching claw (4) includes an upper claw arm (41) connected to the upper frame (1) and a lower claw arm (42) connected to the lower frame (2). The upper claw arm (41) and the lower claw arm (42) are arranged in an interval to form a disconnection opening (43) for inserting the epitaxial substrate into the fixed cavity. The auxiliary clamp (5) is used to block the disconnection opening (43) after the epitaxial substrate is inserted into the fixed cavity. The inner side of the fixed claw (3) is provided with a first clamping groove (31) for clamping the edge of the epitaxial substrate.

2. The holder for growing a single-crystal thin film by a liquid phase epitaxy method according to claim 1, wherein The inner side of the auxiliary clamp (5) is provided with a second clamping groove (53) for clamping the edge of the epitaxial substrate.

3. The holder for growing a single-crystal thin film by a liquid phase epitaxy method according to claim 1, wherein The auxiliary clamp (5) includes a blocking part (51) and a locking part (52). The blocking part (51) is matched with the disconnection opening (43) and is used to block the disconnection opening (43). The locking part (52) is connected with the blocking part (51) and is located outside the matching claw (4) when the blocking part (51) blocks the disconnection opening (43). The locking part (52) and the blocking part (51) form a first clamping groove (54) for inserting the lower end of the upper claw arm (41). The locking part (52) and the blocking part (51) further form a second clamping groove (55) for inserting the upper end of the lower claw arm (42).

4. The holder for growing a single-crystal thin film by a liquid phase epitaxy method according to claim 3, wherein The lower end of the upper claw arm (41) is provided with a first inclined surface (411). The upper end of the lower claw arm (42) is provided with a second inclined surface (421). The first inclined surface (411) and the second inclined surface (421) form the disconnection opening (43) which expands outward from the center of the fixed cavity. The blocking part (51) is provided with a third inclined surface (511) matched with the first inclined surface (411). The third inclined surface (511) and the locking part (52) form the first clamping groove (54). The blocking part (51) is further provided with a fourth inclined surface (512) matched with the second inclined surface (421). The fourth inclined surface (512) and the locking part (52) form the second clamping groove (55).

5. The holder for growing a single-crystal thin film by a liquid phase epitaxy method according to claim 3, wherein The lower end of the upper claw arm (41) is provided with a first step part. The upper end of the lower claw arm (42) is provided with a second step part. The first step part and the second step part form the disconnection opening (43) in a T shape.

6. The holder for growing a single-crystal thin film by a liquid phase epitaxy method according to claim 3, wherein The locking part (52) is provided with a fixed protrusion (56) at both ends. The outer side of the upper claw arm (41) and the lower claw arm (42) is provided with an insertion groove (44) for inserting the fixed protrusion (56).

7. The holder for growing a single-crystal thin film by a liquid phase epitaxy method according to claim 1, wherein The upper frame (1) comprises three claw connecting rods (11); One end of each of the three claw connecting rods (11) is connected together, and the three claw connecting rods (11) are circumferentially distributed around a common connection point; The other end of each of the three claw connecting rods (11) is connected to two fixed claws (3) and one matching claw (4) respectively.

8. The holder for growing a single-crystal thin film by a liquid phase epitaxy method according to claim 1, wherein The lower frame (2) is annular.

9. The holder for growing a single-crystal thin film by a liquid phase epitaxy method according to claim 1, wherein A support rod (6) is further included; The support rod (6) is vertically arranged, and a lower end thereof is connected to the center of the upper frame (1).

10. The holder for growing a single-crystal thin film by a liquid phase epitaxy method according to claim 9, wherein An upper end of the support rod (6) is connected to a handle (61).

Images