Flexible vacuum rotary positioning mechanism and chip steering station

Abstract

The utility model relates to a flexible vacuum rotation positioning mechanism and a chip steering station, and the mechanism comprises a suction nozzle, a fixed seat, a supporting block, an elastic part, and a rotation driving mechanism. The suction nozzle is arranged on the fixed seat, the suction nozzle is provided with an adsorption opening and a first extraction opening communicated with the adsorption opening, and the suction nozzle adsorbs a chip through the adsorption opening; the fixing base supports the supporting block through the elastic piece, so that the supporting block abuts against the suction nozzle, and a vacuum cavity is formed between the supporting block and the suction nozzle. A second extraction opening communicated with the vacuum cavity is formed in the supporting block; the rotary driving mechanism is used for driving the suction nozzle to rotate, and the first extraction opening keeps communicating with the vacuum cavity in the rotation process of the suction nozzle. Compared with a mode of clamping the chip by a clamping mechanism in the prior art, the chip is fixed in an adsorption mode, so that the chip is not damaged.

Description

Technical Field

[0001] This utility model relates to the field of chip transmission technology, and in particular to a flexible vacuum rotary positioning mechanism and a chip turning station. Background Technology

[0002] Currently, during chip transfer, the chip's orientation needs to be adjusted as required, such as rotating the chip by a set angle to meet the requirements of subsequent processes. This angle adjustment is typically performed at a chip turning station, which has a rotation drive mechanism and a clamping mechanism. The clamping mechanism holds the chip, and the rotation drive mechanism drives the clamping mechanism to rotate, causing the clamping mechanism to rotate along with the chip, thus achieving the purpose of adjusting the chip's angle. However, the clamping mechanism is prone to damaging the chip when holding it, so adjustments are needed to address this issue. Utility Model Content

[0003] In view of this, the present invention provides a flexible vacuum rotary positioning mechanism and a chip turning station, which mainly solves the technical problem that the chip is easily damaged when the existing clamping mechanism is used to clamp the chip.

[0004] To achieve the above objectives, this utility model mainly provides the following technical solutions:

[0005] An embodiment of this utility model provides a flexible vacuum rotary positioning mechanism, which includes a suction nozzle, a fixed base, a support block, an elastic element, and a rotary drive mechanism.

[0006] The suction nozzle is disposed on the fixed base. The suction nozzle has an adsorption port and a first air extraction port communicating with the adsorption port. The suction nozzle adsorbs the chip through the adsorption port.

[0007] The fixed base provides support to the support block through the elastic element, so that the support block abuts against the suction nozzle to form a vacuum cavity between them; the support block is provided with a second air extraction port communicating with the vacuum cavity;

[0008] The rotary drive mechanism is used to drive the nozzle to rotate, wherein the first suction port remains in communication with the vacuum chamber during the rotation of the nozzle.

[0009] Optionally, the support block is provided with an annular groove, and the suction nozzle has a first surface. The suction nozzle is fastened to the end face of the annular groove through the first surface to form the vacuum cavity at the annular groove.

[0010] The first suction port is disposed on the first surface and is opposite to different areas of the opening of the annular groove during the rotation of the suction nozzle, so as to maintain communication with the vacuum chamber.

[0011] Optionally, the suction nozzle has an adsorption plane for supporting the chip; the adsorption port is located in the middle of the adsorption plane.

[0012] Optionally, the adsorption port has a flared structure.

[0013] Optionally, the support block is fixed with an air extraction pipe that communicates with the second air extraction port. The air extraction pipe is a rigid pipe, and the fixed base is provided with a limiting groove through which the air extraction pipe passes. The limiting groove is used to limit the air extraction pipe so as to prevent the support block from rotating through the air extraction pipe.

[0014] Optionally, the suction nozzle has a guide cylinder, the support block has a guide hole, the guide cylinder passes through the guide hole and is rotatably engaged with the guide hole; the rotary drive mechanism drives the guide cylinder to rotate, causing the guide cylinder to drive the suction nozzle to rotate.

[0015] Optionally, when the support block has an annular groove, the suction nozzle has a first surface, and the suction nozzle is fastened to the groove end face of the annular groove through the first surface to form the vacuum cavity at the annular groove; and the first suction port is disposed on the first surface and is opposite to different areas of the opening of the annular groove during the rotation of the suction nozzle to maintain communication with the vacuum cavity, the support block has a first end plane, the guide hole and the annular groove are both disposed on the first end plane, and the guide hole is located inside the annular groove; wherein, the suction nozzle has a base, one end of the base has a boss, the suction port is disposed on the side of the boss away from the base, the guide cylinder is disposed on the side of the base away from the boss, the side of the base away from the boss forms the first surface, and the base abuts against the first end plane through the first surface.

[0016] Optionally, the guide cylinder and the base are integrally formed, and the two together form a base; the base is provided with a mounting hole, and the boss is provided with a connecting post, which is inserted into the mounting hole; the base is provided with a screw hole that extends through to the wall of the mounting hole; the flexible vacuum rotary positioning mechanism further includes a fixing screw, which is used to screw into the screw hole and to secure the connecting post in the mounting hole, so that the boss and the base remain relatively fixed.

[0017] The boss has a first segment along its own center line, the first segment has the adsorption port, and the outer edge of the first segment gradually thickens along the direction close to the base.

[0018] Optionally, the rotary drive mechanism has a rotating shaft, and the guide cylinder has a connecting hole for the rotating shaft to be inserted;

[0019] The guide cylinder has a two-half structure, consisting of a first half guide cylinder and a second half guide cylinder. One half of the connecting hole is located on the first half guide cylinder, and the other half is located on the second half guide cylinder. The first half guide cylinder and the second half guide cylinder are connected by screws to ensure an interference fit between the rotating shaft and the connecting hole. The rotary drive mechanism drives the rotating shaft to rotate, thereby causing the guide cylinder to rotate.

[0020] This utility model also provides a chip turning station, which includes the flexible vacuum rotary positioning mechanism described in any one of the above.

[0021] By employing the above technical solutions, the flexible vacuum rotary positioning mechanism and chip turning station of this utility model have at least the following beneficial effects:

[0022] 1. Compared with the existing technology that uses a clamping mechanism to hold the chip, this utility model uses an adsorption method to fix the chip, thus avoiding damage to the chip.

[0023] 2. When the fixing screws are loosened, the boss can be disassembled relative to the base, so that the boss and the base can be processed separately, reducing the processing difficulty.

[0024] 3. By designing the guide cylinder as a two-half structure, and connecting the two halves of the guide cylinder with screws, it is beneficial to make the rotating shaft and the connecting hole fit together with an interference fit, so that the rotating shaft can drive the guide cylinder to rotate.

[0025] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of a flexible vacuum rotary positioning mechanism provided in one embodiment of the present invention;

[0028] Figure 2 This is a partial structural diagram of a flexible vacuum rotary positioning mechanism;

[0029] Figure 3 yes Figure 2 Cross-sectional view of a flexible vacuum rotary positioning mechanism;

[0030] Figure 4 This is an exploded view of the suction nozzle.

[0031] Reference numerals: 1. Chip; 2. Nozzle; 3. Support block; 4. Fixing base; 5. Motor; 6. Elastic element; 7. Suction pipe; 8. Rotating shaft; 9. Screw; 21. Boss; 22. Base; 23. Guide cylinder; 30. First end plane; 31. Guide hole; 41. Limiting groove; 210. Adsorption plane; 201. Adsorption port; 202. First suction port; 203. Mounting hole; 204. Connecting post; 205. Screw hole; 211. First section; 220. First surface; 230. Connecting hole; 231. First semi-guide cylinder; 232. Second semi-guide cylinder; 301. Second suction port; 302. Annular groove. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0033] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0034] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0035] like Figure 1-3As shown in the figure, an embodiment of this utility model proposes a flexible vacuum rotary positioning mechanism, which includes a suction nozzle 2, a fixed base 4, a support block 3, an elastic element 6, and a rotary drive mechanism. The suction nozzle 2 is disposed on the fixed base 4. The suction nozzle 2 has an adsorption port 201 and a first suction port 202 communicating with the adsorption port 201. The suction nozzle 2 adsorbs the chip 1 through the adsorption port 201. The fixed base 4 provides support for the support block 3 through the elastic element 6, so that the support block 3 abuts against the suction nozzle 2 to form a vacuum cavity between them. The support block 3 is provided with a second suction port 301 communicating with the vacuum cavity. The rotary drive mechanism is used to drive the suction nozzle 2 to rotate. The first suction port 202 remains in communication with the vacuum cavity during the rotation of the suction nozzle 2.

[0036] In the above example, the external vacuuming mechanism is connected to the second suction port 301. The external vacuuming mechanism evacuates the inside of the vacuum chamber through the second suction port 301, and evacuates the suction port 201 through the vacuum chamber and the first suction port 202, so that the suction port 201 can adsorb the chip 1. When the suction nozzle 2 adsorbs and fixes the chip 1 through the suction port 201, the rotation drive mechanism can drive the suction nozzle 2 to rotate to adjust the angle of the chip 1. Compared with the prior art that uses a clamping mechanism to hold the chip 1, this utility model fixes the chip 1 by adsorption, thus avoiding damage to the chip 1.

[0037] In addition, the elastic element 6 makes the suction nozzle 2 and the support block 3 a floating structure, which can eliminate the assembly error between the support block 3 and the suction nozzle 2 and keep them sealed.

[0038] In order to ensure that the first suction port 202 remains in communication with the vacuum chamber during the rotation of the suction nozzle 2, in some embodiments, such as Figure 3 As shown, the aforementioned support block 3 may be provided with an annular groove 302. The aforementioned suction nozzle 2 has a first surface 220, which is fastened to the end face of the groove of the annular groove 302 to form the aforementioned vacuum cavity at the annular groove 302. The first air extraction port 202 is provided on the first surface 220 and is opposite to different areas of the opening of the annular groove 302 during the rotation of the suction nozzle 2 to maintain communication with the vacuum cavity.

[0039] In the above example, the first suction port 202 rotates around the rotation center line of the suction nozzle 2, which coincides with the center line of the annular groove 302. Thus, when the suction nozzle 2 drives the first suction port 202 to rotate around the rotation center line, the first suction port 202 can always remain opposite to different areas of the opening of the annular groove 302, so as to achieve the effect of keeping the first suction port 202 connected to the vacuum chamber during the rotation of the suction nozzle 2.

[0040] In some implementations, such as Figure 2As shown, the aforementioned suction nozzle 2 has an adsorption plane 210, which is used to provide support for the chip 1. The aforementioned adsorption port 201 is located in the middle of the adsorption plane 210.

[0041] In the above example, by providing support for the chip 1 by setting an adsorption plane 210 on the nozzle 2, the stability of the nozzle 2 adsorbing the chip 1 can be improved.

[0042] In some embodiments, the aforementioned adsorption port 201 can be an flared structure to increase the adsorption area and make the adsorption of the chip 1 by the nozzle 2 more stable.

[0043] In some implementations, such as Figure 1 As shown, the aforementioned support block 3 is fixed with an air extraction pipe 7 that communicates with the second air extraction port 301. The air extraction pipe 7 is a rigid pipe, for example, it can be made of rigid plastic. The aforementioned fixing base 4 is provided with a limiting groove 41, through which the air extraction pipe 7 passes. The limiting groove 41 is used to limit the air extraction pipe 7, so as to prevent the support block 3 from rotating through the air extraction pipe 7.

[0044] In the above example, the limiting groove 41 can limit the support block 3 through the air extraction pipe 7 to prevent the support block 3 from rotating with the suction nozzle 2.

[0045] In some implementations, such as Figure 3 As shown, the aforementioned suction nozzle 2 has a guide cylinder 23. The aforementioned support block 3 has a guide hole 31. The guide cylinder 23 passes through the guide hole 31 and is rotatably engaged with the guide hole 31. The aforementioned rotary drive mechanism drives the guide cylinder 23 to rotate, causing the guide cylinder 23 to drive the suction nozzle 2 to rotate.

[0046] In the above example, the guide hole 31 cooperates with the guide cylinder 23 to improve the stability of the nozzle 2 rotation.

[0047] In some implementations, such as Figure 3As shown, when the support block 3 has an annular groove 302, and the suction nozzle 2 has a first surface 220, the suction nozzle 2 is fastened to the end face of the groove of the annular groove 302 through the first surface 220 to form a vacuum cavity at the annular groove 302; and the first suction port 202 is provided on the first surface 220, and is opposite to different areas of the opening of the annular groove 302 during the rotation of the suction nozzle 2 to maintain communication with the vacuum cavity, the aforementioned support block 3 has a first end plane 30, and the aforementioned guide hole 31 and annular groove 302 are both provided on the first end plane 30, and the guide hole 31 is located inside the annular groove 302. The suction nozzle 2 has a base 22, one end of which has a boss 21, the aforementioned suction port 201 is provided on the side of the boss 21 away from the base 22, and the aforementioned guide cylinder 23 is provided on the side of the base 22 away from the boss 21. The first surface 220 is formed on the side of the base 22 away from the boss 21, and the base 22 abuts against the first end plane 30 through the first surface 220.

[0048] In the above example, the boss 21, the base 22 and the guide post can be combined to form the structure of the aforementioned suction nozzle 2, which is beneficial for the suction nozzle 2 to cooperate with the support block 3 to form the aforementioned vacuum cavity.

[0049] In some implementations, such as Figure 4 As shown, the aforementioned guide cylinder 23 and base 22 can be integrally formed, and together they form a base, which improves the connection stability between the guide cylinder 23 and base 22. The base has a mounting hole 203, and the aforementioned boss 21 has a connecting post 204, which is inserted into the mounting hole 203. The base has a screw hole 205 extending through the wall of the mounting hole 203. The aforementioned flexible vacuum rotary positioning mechanism also includes a fixing screw, which is screwed into the screw hole 205 and secures the connecting post 204 within the mounting hole 203, thus keeping the boss 21 and the base relatively fixed.

[0050] In the example above, when the fixing screws are loosened, the boss 21 can be disassembled relative to the base, so that the boss 21 and the base can be processed separately, reducing the processing difficulty.

[0051] In some implementations, such as Figure 3 As shown, the aforementioned boss 21 has a first segment 211 along its own center line direction. The first segment 211 has the aforementioned adsorption port 201. The outer edge contour of the first segment 211 gradually thickens along the direction close to the base 22, so as to facilitate the adsorption port 201 on the boss 21 to adsorb the chip 1 and prevent the boss 21 from interfering with the adsorption port 201 adsorbing the chip 1.

[0052] In some implementations, such as Figure 3-4As shown, the aforementioned rotary drive mechanism has a rotating shaft 8, and the aforementioned guide cylinder 23 has a connecting hole 230 for the rotating shaft 8 to be inserted. The guide cylinder 23 has a two-part structure, consisting of a first half guide cylinder 231 and a second half guide cylinder 232. One half of the connecting hole 230 is located on the first half guide cylinder 231, and the other half is located on the second half guide cylinder 232. The first half guide cylinder 231 and the second half guide cylinder 232 are connected by screws 9, so that the rotating shaft 8 and the connecting hole 230 are in an interference fit. The aforementioned rotary drive mechanism drives the rotating shaft 8 to rotate, which in turn drives the guide cylinder 23 to rotate.

[0053] In the above example, by designing the guide cylinder 23 as a two-half structure, and connecting the two halves of the guide cylinder 23 with screws 9, it is beneficial to make the rotating shaft 8 and the connecting hole 230 fit together with an interference fit, so that the rotating shaft 8 can drive the guide cylinder 23 to rotate.

[0054] like Figure 1 As shown, the aforementioned rotary drive mechanism may include a motor 5, which is used to drive the aforementioned rotating shaft 8 to rotate.

[0055] This invention also provides a chip turning station, which may include any of the flexible vacuum rotary positioning mechanisms described above. Because the chip turning station employs the aforementioned flexible vacuum rotary positioning mechanism, compared to the prior art method of using a clamping mechanism to hold the chip 1, this invention uses adsorption to fix the chip 1, thus preventing damage to the chip 1.

[0056] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A flexible vacuum rotary positioning mechanism, characterized by, The flexible vacuum rotary positioning mechanism comprises a suction nozzle (2), a fixing base (4), a supporting block (3), an elastic member (6) and a rotary driving mechanism. The suction nozzle (2) is arranged on the fixing base (4), and has a suction port (201) and a first suction port (202) communicating with the suction port (201); the suction nozzle (2) sucks the chip (1) through the suction port (201). The fixing base (4) supports the supporting block (3) through the elastic member (6), so that the supporting block (3) abuts against the suction nozzle (2) to form a vacuum cavity therebetween; the supporting block (3) is provided with a second suction port (301) communicating with the vacuum cavity. The rotary driving mechanism is used for driving the suction nozzle (2) to rotate, wherein the first suction port (202) keeps communicating with the vacuum cavity during the rotation of the suction nozzle (2).

2. The flexible vacuum rotary positioning mechanism according to claim 1, wherein the supporting block (3) is provided with an annular groove (302), the suction nozzle (2) has a first surface (220), and the suction nozzle (2) is buckled on the groove end surface of the annular groove (302) through the first surface (220) to form the vacuum cavity at the annular groove (302); wherein the first suction port (202) is arranged on the first surface (220) and opposite to different regions of the opening of the annular groove (302) during the rotation of the suction nozzle (2) to keep communicating with the vacuum cavity.

3. The flexible vacuum rotary positioning mechanism according to claim 1, wherein the suction nozzle (2) has a suction plane (210) for supporting the chip (1); and the suction port (201) is arranged at the middle part of the suction plane (210).

4. The flexible vacuum rotary positioning mechanism according to claim 3, wherein the suction port (201) is in a flared structure.

5. The flexible vacuum rotary positioning mechanism according to any one of claims 1-4, wherein the supporting block (3) is fixed with a suction pipe (7) communicating with the second suction port (301), the suction pipe (7) is a hard pipe, the fixing base (4) is provided with a limiting groove (41), and the suction pipe (7) passes through the limiting groove (41); the limiting groove (41) is used for limiting the suction pipe (7) to prevent the supporting block (3) from rotating through the suction pipe (7).

6. The flexible vacuum rotary positioning mechanism according to any one of claims 1-4, wherein the suction nozzle (2) has a guide cylinder (23), the supporting block (3) has a guide hole (31), the guide cylinder (23) passes through the guide hole (31) and rotationally cooperates with the guide hole (31); the rotary driving mechanism drives the guide cylinder (23) to rotate, so that the guide cylinder (23) drives the suction nozzle (2) to rotate. ​ ​ ​ ​ ​ 7. The flexible vacuum rotary indexing mechanism of claim 6, wherein, When the support block (3) is provided with an annular groove (302), the suction nozzle (2) has a first face (220), the suction nozzle (2) is buckled on the slot end face of the annular groove (302) through the first face (220) to form the vacuum cavity at the annular groove (302); and the first suction port (202) is arranged on the first face (220) and opposite to different regions of the opening of the annular groove (302) in the process of rotation of the suction nozzle (2) to keep communication with the vacuum cavity, The support block (3) has a first end plane (30), the guide hole and the annular groove (302) are arranged on the first end plane (30), and the guide hole (31) is located on the inner side of the annular groove (302); Wherein, the suction nozzle (2) has a base (22), one end of the base (22) is provided with a boss (21), the suction port (201) is arranged on the side of the boss (21) away from the base (22), the guide cylinder (23) is arranged on the side of the base (22) away from the boss (21), the side of the base (22) away from the boss (21) forms the first face (220), and the base (22) is abutted on the first end plane (30) through the first face (220).

8. The flexible vacuum rotary positioning mechanism according to claim 7, wherein, The guide cylinder (23) and the base (22) are integrally formed and form a base body, the base body is provided with a mounting hole (203), the boss (21) is provided with a connecting column (204), the connecting column (204) is inserted into the mounting hole (203), the base body is provided with a screw hole (205) penetrating the hole wall of the mounting hole (203), and the flexible vacuum rotary positioning mechanism further comprises a fixing screw, the fixing screw is used for being screwed into the screw hole (205) and abutting and fixing the connecting column (204) in the mounting hole (203) to keep the boss (21) and the base body relatively fixed; Wherein, the boss (21) has a first section (211) along the center line direction of the boss (21), the first section (211) has the suction port (201), and the outer edge profile of the first section (211) gradually thickens in the direction close to the base (22).

9. The flexible vacuum rotary positioning mechanism according to claim 6, wherein, The rotary driving mechanism has a rotating shaft (8), and the guide cylinder (23) has a connecting hole (230) for inserting the rotating shaft (8). The guiding cylinder (23) is a two-half structure, and the first half guiding cylinder (231) and the second half guiding cylinder (232) are respectively provided; one half of the connecting hole (230) is located on the first half guiding cylinder (231), and the other half is located on the second half guiding cylinder (232); the first half guiding cylinder (231) and the second half guiding cylinder (232) are connected through the screw (9), so that the rotating shaft (8) and the connecting hole (230) are in interference fit; the rotating driving mechanism drives the rotating shaft (8) to rotate, so that the rotating shaft (8) drives the guiding cylinder (23) to rotate.

10. A chip steering station, characterized by A flexible vacuum rotary positioning mechanism according to any one of claims 1-9.

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