Quartz boat loader

Abstract

The utility model discloses a quartz boat loader which comprises a lower bottom plate and an upper top plate, three bearing frames distributed in a triangular shape are arranged between the lower bottom plate and the upper top plate, and a protective cover is arranged on the outer side of each bearing frame; each bearing frame comprises a first rotating frame body, an upper connecting rotating head and a lower connecting rotating head are arranged at the upper end and the lower end of each first rotating frame body respectively, a plurality of first bearing pieces are vertically arranged on each first rotating frame body at intervals, and first spherical contact pieces are arranged on the first bearing pieces; the lower connecting rotating heads are rotationally installed in the lower bottom plate, the upper connecting rotating heads are rotationally installed in the upper top plate, a plurality of transmission shafts connected with the upper connecting rotating heads in a one-to-one correspondence mode are arranged on the upper top plate, the transmission shafts are connected through synchronous belts, and any transmission shaft is driven by a motor to rotate. According to the utility model, the original four contact points are changed into three contact points, the spherical contact piece is utilized to reduce the scratch to the wafer, the application range is wide, the contact piece can be suitable for wafers with different sizes, and the use cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a quartz crystal boat carrier. Background Technology

[0002] Currently, the quartz crystal boat in the load lock of 12-inch epitaxial wafers carries the wafers using four contact points, which can easily cause scratches on the back of the wafers. Moreover, most existing carriers can only be used for wafers of the same size. If the wafer size needs to be changed due to special requirements, a different carrier needs to be configured, which is inconvenient in actual use and increases the cost of the carrier. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a quartz crystal boat carrier, which aims to solve the technical problems of existing quartz crystal boat carriers easily causing scratches on the back of the crystal, the limited use of existing carriers and crystals, inconvenience in use, and increased cost.

[0004] The technical solution of this utility model is as follows: a quartz crystal boat carrier, comprising a lower base plate and an upper top plate, wherein three carrier frames are arranged in a triangular distribution between the lower base plate and the upper top plate, and each carrier frame is provided with a protective cover on its outer side; each carrier frame includes a first rotating frame body, wherein the upper and lower ends of the first rotating frame body are respectively provided with an upper connecting rotating head and a lower connecting rotating head, and a plurality of first bearing plates are arranged vertically at intervals on the first rotating frame body, wherein the first bearing plates are provided with first spherical contact members; each lower connecting rotating head is rotatably installed in the lower base plate, and each upper connecting rotating head is rotatably installed in the upper top plate; the upper top plate is provided with a plurality of transmission shafts that are connected one-to-one with each of the upper connecting rotating heads, and the transmission shafts are connected to each other by a synchronous belt, wherein any one of the transmission shafts is driven to rotate by a motor.

[0005] Furthermore, the protective cover described in this utility model is detachably connected to the lower base plate and the upper top plate, and the interior of the protective cover has a hollow structure.

[0006] Furthermore, in this utility model, a plurality of the first bearing plates are arranged at equal intervals, and the first spherical contact member is movably embedded in the outer end of the first bearing plate.

[0007] Furthermore, in this utility model, a second rotating frame is detachably connected to the first rotating frame, and a plurality of second bearing plates are arranged vertically at intervals on the second rotating frame, and the second bearing plates are provided with second spherical contact members.

[0008] Furthermore, in this utility model, the second rotating frame has the same height and width as the first rotating frame, and the length of the second rotating frame is longer than the length of the first rotating frame.

[0009] Furthermore, in this utility model, a plurality of the second bearing plates are arranged at equal intervals, and the second spherical contact member is movably embedded in the outer end of the second bearing plate.

[0010] Furthermore, in this utility model, a third rotating frame is detachably connected to the first rotating frame, and a plurality of third bearing plates are arranged vertically at intervals on the third rotating frame, and the third bearing plates are provided with third spherical contact members.

[0011] Furthermore, in this utility model, the third rotating frame has the same height and width as the second rotating frame, and the length of the third rotating frame is longer than the length of the second rotating frame.

[0012] Furthermore, in this utility model, several of the third bearing plates are arranged at equal intervals, and the third spherical contact member is movably embedded in the outer end of the third bearing plate.

[0013] Furthermore, in this invention, the outer edges of the first support plate, the second support plate, and the third support plate are on the same circumference.

[0014] Compared with the prior art, this utility model has the following advantages: The carrier of this utility model changes the original four contact points to three contact points, and the design of the spherical contact can reduce scratches on the wafer; at the same time, multiple detachable rotating frames are designed on the three sides of the carrier frame, and the structure of the carrier plate and the spherical contact is replicated on the rotating frame, thereby expanding the scope of application, making it suitable for wafers of different sizes and specifications, improving the convenience of use, and reducing the cost of use to a certain extent; in addition, the design of the protective cover can also play a role in storage and protection, avoiding accidental damage to the carrier. Attached Figure Description

[0015] Figure 1 This is a perspective view of the present utility model;

[0016] Figure 2 This is a schematic diagram of the specific structure of the support frame described in this utility model;

[0017] Figure 3 for Figure 2 A magnified view of part A in the middle;

[0018] Figure 4 for Figure 2 A magnified view of part B in the middle section;

[0019] Figure 5This is a schematic diagram of the first usage state of this utility model;

[0020] Figure 6 This is a schematic diagram of the second usage state of this utility model;

[0021] Figure 7 This is a schematic diagram of the third usage state of this utility model.

[0022] The components are as follows: 1. Lower base plate; 2. Upper top plate; 3. Support frame; 301. First rotating frame; 302. Upper connecting rotating head; 303. Lower connecting rotating head; 304. First support plate; 305. First spherical contact element; 306. Second rotating frame; 307. Second support plate; 308. Second spherical contact element; 309. Third rotating frame; 310. Third support plate; 311. Third spherical contact element; 4. Protective cover; 5. Drive shaft; 6. Synchronous belt; 7. Motor. Detailed Implementation

[0023] The specific embodiments of this utility model are described in detail below with reference to the accompanying drawings.

[0024] Example:

[0025] The accompanying drawings illustrate a specific embodiment of the quartz crystal boat carrier of this utility model. Figure 1 It mainly includes a lower base plate 1 and an upper top plate 2. Three support frames 3 are arranged in a triangular pattern between the lower base plate 1 and the upper top plate 2. The three support frames 3 are used to place the wafer.

[0026] Each support frame 3 is equipped with a protective cover 4 on its outer side. The protective cover 4 is detachably connected to the lower base plate 1 and the upper top plate 2 for easy disassembly and maintenance. The protective cover 4 has a hollow structure inside to accommodate part of the support frame 3 and to provide a certain degree of protection.

[0027] Each support frame 3 includes a first rotating frame body 301, combined with Figure 2 The first rotating frame 301 has an upper connecting rotating head 302 and a lower connecting rotating head 303 at its upper and lower ends, respectively. Each lower connecting rotating head 303 is rotatably mounted in the lower base plate 1, and each upper connecting rotating head 302 is rotatably mounted in the upper top plate 2. The upper top plate 2 has multiple drive shafts 5 that are connected one-to-one with each upper connecting rotating head 302. Each drive shaft 5 is connected to the others by a synchronous belt 6, and any drive shaft 5 is driven to rotate by a motor 7. The motor 7 can drive one of the drive shafts 5 to rotate, and the synchronous belt 6 makes all the drive shafts 5 rotate synchronously, thereby driving each upper connecting rotating head 302 to rotate synchronously, so that each first rotating frame 301 rotates synchronously.

[0028] A plurality of first bearing plates 304 are vertically spaced on the first rotating frame 301, and the plurality of first bearing plates 304 are equally spaced. Each first bearing plate 304 is provided with a first spherical contact element 305, such as… Figure 3 The first spherical contact 305 is movably embedded at the outer end of the first bearing plate 304.

[0029] Each of the three first rotating frames 301 is detachably connected to a second rotating frame 306. The second rotating frame 306 has the same height and width as the first rotating frame 301, but its length is longer than that of the first rotating frame 301. Several second bearing plates 307 are vertically spaced on the second rotating frame 306. Each second bearing plate 307 has a second spherical contact member 308, which is movably fitted into the outer end of the second bearing plate 307.

[0030] Each of the three first rotating frames 301 is detachably connected to a third rotating frame 309. The third rotating frame 309 has the same height and width as the second rotating frame 306, but its length is longer than that of the second rotating frame 306. Several third bearing plates 310 are vertically spaced on the third rotating frame 309. Each third bearing plate 310 has a third spherical contact member 311, which is movably embedded in the outer end of the third bearing plate 310. Figure 4 As shown.

[0031] In this embodiment, the outer edges of the first support plate 304, the second support plate 307, and the third support plate 310 are on the same circumference. That is, the distance between the outer edges of the first support plate 304, the second support plate 307, and the third support plate 310 and the rotation axis of the support frame 3 is the same.

[0032] In this embodiment, the initial state of the carrier is as follows: Figure 5 As shown, the first rotating frame 301 and the first support plate 304 of the three support frames 3 point inwards from the inside of the support. The wafer is placed on the three first support plates 304 at the same height. The three-point contact of the first spherical contact member 305 can reduce scratches on the wafer. Figure 5 The contact point between the dashed area and the first rotating frame 301 is the outermost position of the wafer edge, at which point a larger wafer can be placed.

[0033] The motor 7 drives the transmission shaft 5 to rotate counterclockwise, which in turn drives each transmission shaft 5 to rotate synchronously via the synchronous belt 6. This causes each first rotating frame 301 to rotate synchronously counterclockwise, thereby causing the three second rotating frames 306 to rotate out of the protective cover 4. Figure 6As shown, the three second rotating frames 306 and the second carrier plate 307 point inwards from the carrier. The wafer can be placed on the three second carrier plates 307 at the same height. The three-point contact of the second spherical contact member 308 can reduce scratches on the wafer. Figure 6 The contact point between the dotted line area and the second rotating frame 306 is the outermost position of the wafer edge, at which point a standard-sized wafer can be placed.

[0034] Similarly, by using motor 7 to drive transmission shaft 5 to rotate further counterclockwise, the three third rotating frames 309 can be further rotated out of the protective cover 4, such as... Figure 7 As shown, the three third rotating frames 309 and the third support plate 310 point inwards from the carrier. The wafer can be placed on the three third support plates 310 at the same height. The three-point contact of the third spherical contact member 311 can reduce scratches on the wafer. Figure 7 The contact point between the dotted line area and the third rotating frame 309 is the outermost position of the wafer edge, at which point a smaller wafer can be placed.

[0035] Of course, the above embodiments are only for illustrating the technical concept and features of this utility model, and their purpose is to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be used to limit the protection scope of this utility model. All modifications made in accordance with the spirit and essence of the main technical solution of this utility model should be covered within the protection scope of this utility model.

Claims

1. A quartz boat carrier, characterized by: The utility model provides a kind of three-dimensional bearing frame, including lower bottom plate (1) and upper top plate (2), and the lower bottom plate (1) is equipped with three bearing frames (3) in triangular distribution between the upper top plate (2), and the outer side of each bearing frame (3) is equipped with protective cover (4);Each bearing frame (3) includes first rotating frame body (301), and the upper and lower ends of the first rotating frame body (301) are equipped with upper connection rotating head (302) and lower connection rotating head (303) respectively, and a plurality of first bearing sheets (304) are vertically spaced apart on the first rotating frame body (301), and the first bearing sheet (304) is equipped with first spherical contact piece (305);Each lower connection rotating head (303) is rotatably installed in the lower bottom plate (1), and each upper connection rotating head (302) is rotatably installed in the upper top plate (2), and the upper top plate (2) is equipped with a plurality of transmission shafts (5) corresponding to each upper connection rotating head (302), and each transmission shaft (5) is connected by synchronous belt (6), and any transmission shaft (5) is driven to rotate by motor (7).

2. The quartz boat carrier of claim 1, wherein: The protective cover (4) is detachably connected with the lower bottom plate (1) and the upper top plate (2), and the interior of the protective cover (4) has a hollow structure.

3. The quartz boat carrier of claim 1, wherein: A plurality of first bearing sheets (304) are equally spaced, and the first spherical contact piece (305) is movably embedded at the outer end of the first bearing sheet (304).

4. The quartz boat carrier of claim 1, wherein: The first rotating frame body (301) is detachably connected with a second rotating frame body (306), the second rotating frame body (306) is vertically spaced apart with a plurality of second bearing sheets (307), and the second bearing sheet (307) is equipped with a second spherical contact piece (308).

5. The quartz boat carrier of claim 4, wherein: The second rotating frame body (306) has the same height and width as the first rotating frame body (301), and the length of the second rotating frame body (306) is longer than the length of the first rotating frame body (301).

6. The quartz boat carrier of claim 4, wherein: A plurality of second bearing sheets (307) are equally spaced, and the second spherical contact piece (308) is movably embedded at the outer end of the second bearing sheet (307).

7. The quartz boat carrier of claim 4, wherein: The first rotating frame body (301) is detachably connected with a third rotating frame body (309), the third rotating frame body (309) is vertically spaced apart with a plurality of third bearing sheets (310), and the third bearing sheet (310) is equipped with a third spherical contact piece (311).

8. The quartz boat carrier of claim 7, wherein: The third rotating frame body (309) has the same height and width as the second rotating frame body (306), and the length of the third rotating frame body (309) is longer than the length of the second rotating frame body (306).

9. The quartz boat carrier of claim 7, wherein: A plurality of third bearing sheets (310) are equally spaced, and the third spherical contact piece (311) is movably embedded at the outer end of the third bearing sheet (310).

10. The quartz boat carrier of claim 7, wherein: The outer edges of the first bearing sheet (304), the second bearing sheet (307) and the third bearing sheet (310) are on the same circumference.

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