Vacuum performance verification equipment

Abstract

The utility model provides vacuum performance verification equipment, which comprises a verification mechanism, a mounting machine shell and a control mechanism, and is characterized in that the verification mechanism is used for verifying the vacuumizing performance of a vacuum pump and the pressure maintaining performance of an equipment cavity; the installation machine shell is used for installing the verification mechanism. The control mechanism is used for controlling the working mode of the verification mechanism; the verification mechanism comprises a test assembly and a connector assembly connected with the test assembly, and the connector assembly can be connected with the vacuum pump and the equipment cavity. According to the vacuum performance verification device, after the test assembly and the connector assembly are reasonably connected and matched, the vacuumizing performance of the vacuum pump can be detected, the pressure maintaining performance of the device cavity can be verified, the function of one machine with two purposes is achieved, operation of workers is facilitated, cost is saved, and the occupied space of the vacuum performance verification device is reduced; and the control mechanism is arranged, so that a worker can conveniently select a mode required by the vacuum performance verification equipment, the operation is simple and convenient, and the automation degree is high.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum performance verification equipment, in particular to a vacuum performance verification equipment. BACKGROUND

[0002] In the prior art, there are many fields with strict requirements for air tightness, and a vacuum pump is mostly used to extract the vacuum degree in the application equipment, so that the equipment can be kept at a certain vacuum degree. After long-term use, the vacuum pumping performance of the vacuum pump will decrease, therefore, a verification equipment is needed to test the vacuum pumping performance, and the pressure maintaining performance of the application equipment also needs to be periodically verified to avoid affecting the use effect of the application equipment.

[0003] However, in the prior art, different devices are needed to test the vacuum pumping performance of the vacuum pump and the pressure maintaining effect of the application equipment, which increases the manufacturing cost, and the detection procedure is complex and the equipment occupies a large space.

[0004] Therefore, there is an urgent need in the prior art for an equipment that can simultaneously verify the vacuum pumping performance and the pressure maintaining performance. CONTENT OF THE INVENTION

[0005] Therefore, in view of the technical problem in the prior art that different devices are needed to verify the vacuum pumping performance and the pressure maintaining performance, the present application provides a vacuum performance verification equipment, which can verify the vacuum pumping performance of the vacuum pump and the pressure maintaining performance of the equipment, is multi-purpose, simplifies the verification procedure, reduces the equipment occupied space, and reduces the cost.

[0006] The present application provides a vacuum performance verification equipment, comprising:

[0007] A verification mechanism for verifying the vacuum pumping performance of the vacuum pump and the pressure maintaining performance of the equipment cavity;

[0008] A mounting shell for mounting the verification mechanism;

[0009] A control mechanism for controlling the working mode of the verification mechanism;

[0010] The verification mechanism comprises a test assembly and a connector assembly connected with the test assembly, and the connector assembly can be connected with the vacuum pump and the equipment cavity.

[0011] Compared with the prior art, the vacuum performance verification device provided by the application comprises a test assembly and a joint assembly, and the test assembly and the joint assembly are reasonably connected and matched, so that the vacuum performance of the vacuum pump can be detected, and the pressure maintaining performance of the equipment cavity can be verified, thereby realizing the functions of one machine with two purposes, facilitating the operation of the staff, saving the cost, and reducing the occupied space of the vacuum performance verification device; and the control mechanism is arranged, so that the staff can conveniently select the mode required by the vacuum performance verification device, and the operation is simple and the degree of automation is high.

[0012] Preferably, the joint assembly comprises a vacuum pump connecting joint and an equipment cavity connecting joint, and the vacuum pump connecting joint and the equipment cavity connecting joint are connected in parallel.

[0013] In the embodiment, the joint connected with the vacuum pump and the equipment cavity is arranged, so that the vacuum performance verification device can be conveniently connected with the vacuum pump and the equipment cavity; the two joints are arranged in parallel, so that when any joint is used, the joint can be connected with the test assembly to realize the corresponding function; and after being connected in parallel, the interference of the two joints on each other is reduced, so that the anti-interference of the vacuum performance verification and the pressure maintaining performance verification functions is ensured.

[0014] Preferably, a first valve is arranged between the vacuum pump connecting joint and the test assembly, and the first valve is used to control the communication relationship between the vacuum pump connecting joint and the test assembly.

[0015] In the embodiment, the first valve is arranged, so that the communication relationship between the vacuum pump connecting joint and the test assembly is realized, and the communication relationship between the vacuum pump connecting joint and the equipment cavity connecting joint is also realized, thereby ensuring the independence and the anti-interference of the vacuum performance verification and the pressure maintaining performance verification functions.

[0016] Preferably, the vacuum pump connecting joint comprises a first joint and a second joint, and the first joint and the second joint are connected in parallel.

[0017] In the embodiment, the vacuum pump connecting joint comprises two joints, so that the connection with the vacuum pump can be better realized.

[0018] Preferably, a second valve is arranged between the joint assembly and the test assembly, and the second valve is used to control the communication relationship between the test assembly and the external environment.

[0019] In the embodiment, the second valve can control the communication relationship between the inside of the test assembly and the external environment, so that the atmospheric pressure in the test assembly can be restored, and the precision during verification is ensured.

[0020] Preferably, the test assembly comprises a vacuum gauge, a pressure maintaining tank and a connecting pipeline, the vacuum gauge, the pressure maintaining tank and the connecting pipeline are connected, and the vacuum gauge and the pressure maintaining tank are connected in parallel.

[0021] In the embodiment, the vacuum gauge can test the vacuum degree in the connecting pipeline, when the vacuum pump connecting joint is connected with the test assembly and the pressure maintaining tank is communicated with the vacuum gauge, the load test can be simulated, when the pressure maintaining tank is disconnected with the vacuum gauge, the no-load test can be simulated, so as to check the vacuum performance of the vacuum pump, and when the equipment cavity connecting joint is connected with the test assembly, the pressure maintaining tank is communicated with the vacuum gauge, so as to check the pressure maintaining performance of the equipment cavity.

[0022] Preferably, a control valve is arranged between the vacuum gauge and the pressure maintaining tank, and the control valve is used to control the communication relationship between the pressure maintaining tank and the joint assembly.

[0023] The vacuum pump connecting joint is communicated with the vacuum gauge, and is used to check the no-load vacuum performance of the vacuum pump.

[0024] The vacuum pump connecting joint is communicated with the vacuum gauge and the pressure maintaining tank at the same time, and is used to check the load vacuum performance of the vacuum pump.

[0025] The equipment cavity connecting joint is communicated with the vacuum gauge and the pressure maintaining tank at the same time, and is used to check the pressure maintaining performance of the equipment cavity.

[0026] In the embodiment, the control valve can flexibly control the communication relationship between the pressure maintaining tank and the vacuum gauge, so as to flexibly switch the load test and the no-load test during the vacuum performance checking.

[0027] Preferably, the checking mechanism comprises a first mounting support and a second mounting support, the connecting pipeline is connected with the mounting cabinet through the first mounting support, and the pressure maintaining tank is connected with the mounting cabinet through the second mounting support.

[0028] In the embodiment, the first mounting support and the second mounting support can realize the stable connection between the checking mechanism and the mounting cabinet.

[0029] Preferably, the control mechanism comprises a control panel, and the control panel is arranged on the mounting cabinet.

[0030] The mounting cabinet comprises a cabinet body and a top plate, the top plate is hinged to the open end of the cabinet body, and the top plate is used to shield the opening of the cabinet body.

[0031] Preferably, the control panel is arranged on the top plate, and a handle is arranged on the top plate.

[0032] In the embodiment, the control panel is arranged to facilitate the user to control the operation mode of the checking mechanism, so as to facilitate the user to use different functions; the top plate can make the installation shell detachable, so as to facilitate the worker to observe the checking mechanism in the box by opening the top plate; the handle can facilitate the user to pull open the top plate.

[0033] Preferably, the installation shell is provided with a handle.

[0034] The bottom of the installation shell is provided with a roller.

[0035] The joint assembly is exposed to the outside of the installation shell.

[0036] In the embodiment, the roller can make the vacuum performance checking device movable, the handle can facilitate the user to push, and the joint assembly is exposed to facilitate the user to connect with the device to be measured. BRIEF DESCRIPTION OF DRAWINGS

[0037] Figure 1 is a schematic diagram of the vacuum performance checking device according to an embodiment of the present application;

[0038] Figure 2 is a schematic diagram of the checking mechanism of the vacuum performance checking device according to an embodiment of the present application.

[0039] Reference signs: 1, vacuum performance checking device;

[0040] 11, checking mechanism; 12, installation shell;

[0041] 1101, vacuum pump connecting joint; 1102, device cavity connecting joint; 1103, first valve; 1104, second valve; 1105, control valve; 1106, first mounting support; 1107, second mounting support; 1108, vacuum gauge; 1109, pressure maintaining tank; 1110, connecting pipeline; 1101.1, first joint; 1101.2, second joint;

[0042] 121, handle; 122, handle; 123, box; 124, top plate; 125, control panel; 126, roller. DETAILED DESCRIPTION

[0043] In order to enable those skilled in the art to better understand the technical solutions of the present disclosure, the present disclosure will be described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present disclosure and do not limit the present disclosure.

[0044] In the description of the present application, if the first, second are described for the purpose of distinguishing technical features, it cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the sequence of indicated technical features.

[0045] Those skilled in the art should understand that in the disclosure of the present application, the orientation or positional relationship indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore the above terms cannot be understood as a limitation of the present application.

[0046] The present application will be further described in detail below with reference to the accompanying drawings, see as Figures 1 to 2 Description.

[0047] The present application provides a vacuum performance verification device 1 (hereinafter referred to as verification device 1), which is used for vacuum performance verification of a vacuum pump and pressure maintaining performance verification of a device cavity, one machine with multiple functions, multifunctional, can facilitate user operation, reduce the number of verification devices 1 purchased and the space occupied by the verification devices 1.

[0048] Specifically, as Figures 1 to 2 shown, the verification device 1 includes a mounting shell 12, a control mechanism and a verification mechanism 11, the mounting shell 12 is used to install the verification mechanism 11, and the verification mechanism 11 is arranged in the mounting shell 12 to avoid the verification mechanism 11 from contacting the external environment, so as to affect the verification accuracy. The verification mechanism 11 is used to verify the vacuum performance of the vacuum pump and the pressure maintaining performance of the device cavity; the control mechanism is installed on the mounting shell 12, and the control mechanism is connected with the verification mechanism 11, the control mechanism can control the verification mechanism 11, so as to select the working mode of the verification mechanism 11, and the control mechanism can collect the data of the verification mechanism 11, so as to judge the vacuum performance and the pressure maintaining performance, to judge whether the performance is qualified.

[0049] As Figures 1 to 2As shown, the mounting shell 12 is substantially cuboid structure, the upper end of the mounting shell 12 is inclined surface; the mounting shell 12 includes a box body 123 and a top plate 124, the box body 123 is substantially cuboid structure, the box body 123 is provided with an installation space, the control mechanism and the calibration mechanism 11 are arranged in the box body 123, wherein the upper end of the box body 123 is provided with an opening; the top plate 124 is plate structure, the top plate 124 is arranged at the opening of the upper end of the box body 123 in an inclined manner, so as to shield the opening of the box body 123; wherein the upper end of the top plate 124 is higher than the lower end, so that the top plate 124 is arranged in an inclined manner; the long side of the upper end of the top plate 124 is hinged to the opening of the box body 123, so that the top plate 124 can rotate relative to the box body 123, so that the staff can pull the top plate 124 to rotate, so as to open the opening of the box body 123, and observe or maintain the calibration mechanism 11 and the control mechanism arranged in the box body 123.

[0050] Further, as shown in the figure, Figure 1 The control mechanism includes a control panel 125, the control panel 125 is arranged on the top plate 124, and the control panel 125 can be a key control or a touch screen control; by arranging the control panel 125, the staff can conveniently select the working mode of the calibration mechanism 11, including power control, running indication and the like, and the control panel 125 can directly display the data of the test of the calibration mechanism 11, so as to facilitate the staff to directly know the performance calibration result.

[0051] The control panel 125 can display the real-time vacuum curve and the pressure maintaining curve, and the related data table can be directly exported.

[0052] As shown in the figure, Figure 1 The top plate 124 is provided with a handle 121, the handle 121 is arranged on both sides of the control panel 125, and the two handles 121 are arranged along the long side of the top plate 124; by increasing the stress point of the top plate 124 through the handle 121, the user can easily pull up the top plate 124, which is convenient for operation.

[0053] Further, as shown in the figure, Figure 1 The bottom of the compartment of the mounting shell 12 is provided with four rollers 126, which are arranged at the four corners of the compartment; the rollers 126 are universal wheels; by arranging the rollers 126, the calibration device 1 can be moved flexibly, so that the staff can move the calibration device 1 to the required place for calibration, which greatly improves the use flexibility.

[0054] As shown in the figure, Figure 1 The mounting shell 12 is provided with a handle 122, the handle 122 is arranged at the short side end of the mounting shell 12, and the handle 122 protrudes outward, so that the staff can have a leverage point to easily push the calibration device 1.

[0055] As shown in Figure 1 The side end of the box 123 is provided with an opening for the joint to extend out, so that the joint of the joint assembly is exposed outside the installation shell 12, thereby facilitating the worker to connect the vacuum pump or the equipment cavity.

[0056] Based on any of the above embodiments, the verification mechanism 11 is further described; as shown in Figure 2 The verification mechanism 11 includes a test assembly and a joint assembly, the joint assembly is connected with the test assembly, the test assembly is used to assist in performing the vacuum performance verification, and the joint assembly is used to connect the device to be tested with the test assembly; wherein the joint assembly can be connected with the vacuum pump and the equipment cavity, so that the verification device 1 has a station for connecting with the vacuum pump and the equipment cavity at the same time, thereby facilitating the verification mechanism 11 to verify the vacuum performance of the vacuum pump and the pressure maintaining performance of the equipment cavity.

[0057] As shown in Figure 2 The second valve 1104 is provided between the joint assembly and the test assembly, the second valve 1104 is an electromagnetic valve, and the second valve 1104 is used to control the communication relationship between the test assembly and the external environment, that is, by opening the second electromagnetic valve, the test assembly can be communicated with the external environment, and the external air enters the test assembly to restore the air pressure in the test assembly, thereby preparing for the next test. Before each test, the air pressure in the test assembly needs to be restored, so the second valve 1104 can be opened to restore the air pressure in the test assembly; after the air pressure in the test assembly is restored, the second valve 1104 needs to be closed to avoid affecting the test result.

[0058] Further, as shown in Figure 2 The joint assembly includes a vacuum pump connecting joint 1101 and an equipment cavity connecting joint 1102, the vacuum pump connecting joint 1101 is used to connect with the vacuum pump, and the equipment cavity connecting joint 1102 is used to connect with the equipment cavity. By providing the joint for connecting with the vacuum pump and the equipment cavity separately, the vacuum performance verification device 1 can be conveniently connected with the vacuum pump and the equipment cavity; wherein the vacuum pump connecting joint 1101 is connected above the equipment cavity connecting joint 1102, the vacuum pump connecting joint 1101 and the equipment cavity connecting joint 1102 are connected in parallel, when any joint is used, it can be connected with the test assembly, and interference and influence between each other are avoided, so as to ensure independent implementation of the corresponding function, and ensure anti-interference of the vacuum performance verification and the pressure maintaining performance verification function.

[0059] As shown in Figure 2As shown, the equipment cavity connection connector 1102 is connected to the test component via a straight pipe, and the vacuum pump connection connector 1101 is connected to the test component via a right-angle bend. A first valve 1103, a solenoid valve, is installed at the right-angle bend of the vacuum pump connection connector 1101. The first valve 1103 controls the connection between the vacuum pump connection connector 1101 and the test component / equipment connection connector. When the first valve 1103 is closed, the vacuum pump connection connector 1101 is not connected to the test component, and the calibration mechanism 11 can be used to verify the pressure holding performance of the equipment cavity. When the first valve 1103 is open, the vacuum pump connection connector 1101 is connected to the test component, and the calibration mechanism 11 can be used to verify the vacuum pumping performance. The first valve 1103 allows the calibration mechanism 11 to flexibly switch between the two performance verification methods, ensuring integration while facilitating functional switching of the calibration mechanism 11, and guaranteeing the independence and anti-interference capabilities of the vacuum performance verification and pressure holding performance verification functions.

[0060] Among them, such as Figure 2 As shown, the vacuum pump connection connector 1101 includes a first connector 1101.1 and a second connector 1101.2. The first connector 1101.1 and the second connector 1101.2 are connected in parallel and are used to connect to the vacuum pump. The first connector 1101.1 and the second connector 1101.2 are self-sealing. The equipment connection connector is also self-sealing and automatically seals when it is not connected.

[0061] Based on any of the above embodiments, the test components will be further described; such as Figure 2 As shown, the test assembly includes a vacuum gauge 1108, a pressure tank 1109, and a connecting pipe 1110. The vacuum gauge 1108 can detect the air pressure value inside the test assembly and transmit the value to the control mechanism. The pressure tank 1109 provides a test chamber. The connecting pipe 1110 has an approximately L-shaped structure and includes a first pipe and a second pipe. The first pipe and the second pipe are arranged perpendicularly and connected. One end of the first pipe is connected to the straight pipe of the equipment chamber connection joint 1102, and the other end is connected to the vacuum gauge 1108. One end of the second pipe is connected to the first pipe, and the other end is connected to the pressure tank 1109. A second valve 1104 is installed on the first pipe and is connected to the first pipe. The vacuum gauge 1108 is normally connected to the first pipe.

[0062] In the embodiment, the vacuum gauge 1108 and the pressure maintaining tank 1109 are connected in parallel, a control valve 1105 is arranged between the second pipe body and the pressure maintaining tank 1109, the control valve 1105 is an electromagnetic valve, the control valve 1105 can control the communication relationship between the pressure maintaining tank 1109 and the vacuum gauge 1108 and the joint assembly; when the control valve 1105 is opened, the joint assembly and the vacuum gauge 1108 are both in communication with the pressure maintaining tank 1109; when the control valve 1105 is closed, the joint assembly and the vacuum gauge 1108 are both disconnected from the pressure maintaining tank 1109. The vacuum gauge 1108 and the pressure maintaining tank 1109 are connected in parallel, so that the pressure maintaining tank 1109 can play a role without affecting the vacuum gauge 1108, and the influence between different calibration functions is avoided.

[0063] As shown in Figure 2 , the calibration mechanism 11 comprises a first mounting support 1106 and a second mounting support 1107, the first mounting support 1106 is of an L-shaped structure, the first mounting support 1106 is provided with a clamping groove, and the connecting pipeline 1110 is located in the clamping groove to realize the connection between the connecting pipeline 1110 and the first mounting support 1106; the first mounting support 1106 is provided with a mounting hole at the bottom to facilitate the insertion of a connecting piece, so as to realize the connection between the first mounting support 1106 and the bottom plate of the cabinet 123, and realize the stable connection between the connecting pipeline 1110 and the mounting shell 12.

[0064] As shown in Figure 2 , the second mounting support 1107 is of an L-shaped structure, the side end of the second mounting support 1107 is connected with the side end of the pressure maintaining tank 1109, and the bottom of the second mounting support 1107 is provided with a mounting hole to facilitate the insertion of a connecting piece, so as to realize the connection between the second mounting support 1107 and the bottom plate of the cabinet 123, and realize the stable connection between the pressure maintaining tank 1109 and the mounting shell 12 through the second mounting support 1107.

[0065] Specifically, in actual use, the calibration principle of the calibration device 1 for the vacuum pumping performance of the vacuum pump is as follows:

[0066] No-load calibration: the vacuum pump connection joint 1101 is connected with the vacuum pump, the first valve 1103 is opened, the second valve 1104 is closed, and the control valve 1105 is closed, at this time, the vacuum gauge 1108 is in communication with the vacuum pump, the pressure maintaining tank 1109 is not in communication with the vacuum pump, and the equipment cavity connection joint 1102 is in a self-closing state, the calibration mechanism 11 is started through the control panel 125 to realize the no-load vacuum pumping performance test of the vacuum pump.

[0067] Load verification: the vacuum pump connection joint 1101 is connected with the vacuum pump, the first valve 1103 is opened, the second valve 1104 is closed, the control valve 1105 is opened, and the equipment cavity connection joint 1102 is in a self-closing state. At this time, the vacuum gauge 1108, the pressure maintaining tank 1109 and the vacuum pump are connected, the verification mechanism 11 is started through the control panel 125 to realize the load vacuum pumping performance test of the vacuum pump.

[0068] Further, the verification principle of the pressure maintaining performance of the test equipment to the equipment cavity is as follows:

[0069] The equipment cavity connection joint 1102 is connected with the equipment cavity, the first valve 1103 is closed, the second valve 1104 is closed, the control valve 1105 is opened, and the vacuum pump connection joint 1101 is disconnected with the test assembly and the equipment cavity connection joint 1102. At this time, the vacuum gauge 1108, the pressure maintaining tank 1109 and the equipment cavity are connected, the verification mechanism 11 is started through the control panel 125 to realize the pressure maintaining performance verification of the equipment cavity. The vacuum gauge 1108 feeds back the detected value to the control mechanism to detect the pressure change of the equipment cavity. According to the pressure maintaining pressure value within the specified time, the possible leakage point is inferred, and the troubleshooting opinion is given. When the pressure maintaining performance is verified, the pressure maintaining tank 1109 is always in an open state, which can compensate for the pipe leakage rate of the pressure maintaining system itself to improve the effect of the pressure maintaining performance verification.

[0070] It should be noted that after any performance verification, the control mechanism can set a self-starting program for the second valve 1104 to open the second valve 1104. When the vacuum gauge 1108 detects that the air pressure in the test assembly is restored, the control mechanism controls the second valve 1104 to be closed. Thus, it is ensured that the air pressure in the test assembly is restored before any performance verification is performed, so as to reduce the verification error.

[0071] It should be noted that the embodiments of the present application can be arbitrarily combined into new embodiments when the technical solutions do not conflict and can coexist.

[0072] The above has introduced the present application in detail, and the principle and implementation mode of the present application have been described by applying specific examples. The above embodiment description is only used to help understand the present application and the core idea. It should be noted that the ordinary skilled in the art can make some improvements and modifications to the present application without departing from the principle of the present application. These improvements and modifications also fall within the protection scope of the claims of the present application.

Claims

1. A vacuum performance verification apparatus, characterized by, The vacuum performance verification device comprises: a verification mechanism (11) for verifying the vacuum pumping performance of a vacuum pump and the pressure maintaining performance of a device cavity; a mounting shell (12) for mounting the verification mechanism (11); a control mechanism for controlling the working mode of the verification mechanism (11); wherein the verification mechanism (11) comprises a test assembly and a joint assembly connected with the test assembly, and the joint assembly can be connected with the vacuum pump and the device cavity.

2. The vacuum performance verification device according to claim 1, wherein: the joint assembly comprises a vacuum pump connecting joint (1101) and a device cavity connecting joint (1102), and the vacuum pump connecting joint (1101) and the device cavity connecting joint (1102) are connected in parallel.

3. The vacuum performance verification device according to claim 1, wherein: a first valve (1103) is arranged between the vacuum pump connecting joint (1101) and the test assembly, and the first valve (1103) is used to control the communication relationship between the vacuum pump connecting joint (1101) and the test assembly.

4. The vacuum performance verification device according to claim 3, wherein: the vacuum pump connecting joint (1101) comprises a first joint (1101.1) and a second joint (1101.2), and the first joint (1101.1) and the second joint (1101.2) are connected in parallel.

5. The vacuum performance verification device according to claim 1, wherein: a second valve (1104) is arranged between the joint assembly and the test assembly, and the second valve (1104) is used to control the communication relationship between the test assembly and the external environment.

6. The vacuum performance verification device according to any one of claims 2 to 5, wherein: the test assembly comprises a vacuum gauge (1108), a pressure maintaining tank (1109) and a connecting pipeline (1110), the vacuum gauge (1108), the pressure maintaining tank (1109) and the connecting pipeline (1110) are connected, and the vacuum gauge (1108) and the pressure maintaining tank (1109) are connected in parallel.

7. The vacuum performance verification device according to claim 6, wherein: a control valve (1105) is arranged between the vacuum gauge (1108) and the pressure maintaining tank (1109), and the control valve (1105) is used to control the communication relationship between the pressure maintaining tank (1109) and the joint assembly; the vacuum pump connecting joint (1101) communicates with the vacuum gauge (1108) to verify the no-load vacuum pumping performance of the vacuum pump; the vacuum pump connecting joint (1101) simultaneously communicates with the vacuum gauge (1108) and the pressure maintaining tank (1109) to verify the load vacuum pumping performance of the vacuum pump; the device cavity connecting joint (1102) simultaneously communicates with the vacuum gauge (1108) and the pressure maintaining tank (1109) to verify the pressure maintaining performance of the device cavity.

8. The vacuum performance verification device according to claim 6, wherein: The check mechanism (11) comprises a first mounting support (1106) and a second mounting support (1107), the connecting pipeline (1110) is connected with the mounting shell (12) through the first mounting support (1106), and the pressure maintaining tank (1109) is connected with the mounting shell (12) through the second mounting support (1107).

9. The vacuum performance check device according to claim 1, characterized in that, The control mechanism comprises a control panel (125), and the control panel (125) is arranged on the mounting shell (12); The mounting shell (12) comprises a box body (123) and a top plate (124), the top plate (124) is hinged to an open end of the box body (123), and the top plate (124) is used for shielding the opening of the box body (123); The control panel (125) is arranged on the top plate (124), and a handle (121) is arranged on the top plate (124).

10. The vacuum performance check device according to claim 1, characterized in that, A handle (122) is arranged on the mounting shell (12); A roller (126) is arranged at the bottom of the mounting shell (12); The joint assembly is exposed to the outside of the mounting shell (12).

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