Improved angle adjusting device

Abstract

The utility model relates to the technical field of detection, in particular to an improved angle adjusting device which comprises a base plate, a first rotating disc, a rotating plate and a second rotating disc which are sequentially connected, and the second rotating disc can rotate along a first axial direction relative to the rotating plate. The bearing mechanism is arranged on the side, away from the rotating plate, of the second rotating disc through a supporting arm, and the bearing mechanism can rotate in the second axial direction relative to the second rotating disc and the supporting arm; the rotating plate is connected with the second rotating disc through the first sliding ring, and the central axis of the first sliding ring coincides with the first axial direction; the bearing mechanism is connected with the supporting arm through the second sliding ring, and the central axis of the second sliding ring coincides with the second axial direction; the first pipeline penetrates through the rotating plate and the second rotating disc through the first sliding ring, and the second pipeline penetrates through the supporting arm through the second sliding ring and extends into the bearing mechanism. The angle adjusting device is at least beneficial to improving the reliability and stability of the angle adjusting device.

Description

Technical Field

[0001] This utility model belongs to the field of detection technology, and in particular relates to an improved angle adjustment device. Background Technology

[0002] When inspecting wafer defects, the wafer needs to be adjusted to multiple different angles to enable multi-angle and all-round inspection. If the wafer angle is rotated manually, it will result in high labor costs and the precision of the angle adjustment cannot be controlled, which will affect the effectiveness and efficiency of wafer defect inspection.

[0003] When multi-dimensional rotation is achieved mechanically, cable wear and air pipe pulling are likely to occur at the rotating shaft. Utility Model Content

[0004] In view of this, the present invention aims to provide an improved angle adjustment device, which at least helps to improve the reliability and stability of the angle adjustment device.

[0005] To achieve the above objectives, the technical solution of this utility model is implemented as follows:

[0006] This utility model provides an improved angle adjustment device, comprising: a base plate, a first turntable, a rotating plate, and a second turntable connected in sequence, wherein the first turntable is rotatable relative to the base plate, the rotating plate is rotatable relative to the first turntable, and the second turntable is rotatable relative to the rotating plate along a first axial direction; a carrying mechanism, which is disposed on the side of the second turntable away from the rotating plate via a support arm, and is used to carry the object to be measured, and is rotatable relative to the second turntable and the support arm along a second axial direction, wherein the first axial direction and the second axial direction are different; a first slip ring, which connects the rotating plate to the second turntable, and the central axis of the first slip ring coincides with the first axial direction; a second slip ring, which connects the carrying mechanism to the support arm, and the central axis of the second slip ring coincides with the second axial direction; and a transmission pipeline, which includes a first pipeline and a second pipeline arranged along its extension direction, wherein the first pipeline passes through the rotating plate and the second turntable via the first slip ring, and the second pipeline passes through the support arm via the second slip ring and extends into the carrying mechanism.

[0007] Furthermore, the first turntable can rotate relative to the substrate along the third axis, and the rotating plate can rotate relative to the first turntable along the fourth axis. The first axis, the second axis, the third axis, and the fourth axis are all different.

[0008] Furthermore, the first axis and the second axis intersect, and the first axis and the second axis are perpendicular to each other.

[0009] Furthermore, the first slip ring includes a first stator and a first rotor connected to each other. The first rotor is rotatable relative to the first stator along the central axis of the first slip ring. A first pipeline passes through the first stator. The first stator is fixed to the rotating plate, and the first rotor is fixed to the second turntable.

[0010] Furthermore, the second slip ring includes a second stator and a second rotor connected to each other. The second rotor is rotatable relative to the second stator along the central axis of the second slip ring. A second pipeline passes through the second stator. The second stator is fixed to the support arm, and the second rotor is fixed to the bearing mechanism.

[0011] Furthermore, the support arm includes a first support portion and a second support portion, a load-bearing mechanism is disposed between the first support portion and the second support portion, and a second turntable is disposed between the first support portion and the second support portion. The load-bearing mechanism is connected to the first support portion through a second slip ring, and a second pipeline passes through the first support portion through the second slip ring and extends into the load-bearing mechanism.

[0012] Furthermore, the second turntable has a first cavity, the first support part has a second cavity, the first cavity and the second cavity are connected, a first pipe passing through the second turntable is disposed in the first cavity, and a second pipe passing through the first support part is disposed in the second cavity.

[0013] Furthermore, the second stator is fitted with an L-shaped fastener inside the second cavity.

[0014] Furthermore, the first pipeline includes multiple first sub-pipelines, and the second pipeline includes multiple second sub-pipelines. The first sub-pipelines and the second sub-pipelines are connected in a one-to-one correspondence. The correspondingly connected first sub-pipelines and second sub-pipelines constitute a sub-pipeline. A portion of the multiple sub-pipelines is used for conducting electricity, and another portion of the multiple sub-pipelines is used for transmitting gas.

[0015] Compared with the prior art, the present invention can achieve the following beneficial effects: The present invention provides a first slip ring at the pivot of the relatively rotatable rotating plate and the second turntable, and a second slip ring at the pivot of the relatively rotatable bearing mechanism and the support arm. The first and second slip rings are used to set up the transmission pipeline, which is the cable and the air pipe. In this way, when the second turntable rotates relative to the rotating plate, the first slip ring can ensure that the transmission pipeline passing through the second turntable and the rotating plate remains stationary relative to the rotating plate. When the bearing mechanism rotates relative to the support arm, the second slip ring can ensure that the transmission pipeline passing through the support arm and part of the bearing mechanism also remains stationary relative to the support arm. This avoids the rotation from affecting the cable and the air pipe, which helps to alleviate the pulling phenomenon of the cable and the air pipe, and also helps to alleviate the wear phenomenon of the cable and the air pipe, thereby improving the reliability and stability of the angle adjustment device. Attached Figure Description

[0016] The accompanying drawings, which form part of this utility model, are used to provide a further understanding of the utility model. The illustrative embodiments of the utility model and their descriptions are used to explain the utility model and do not constitute an undue limitation of the utility model. In the drawings:

[0017] Figure 1 This is a schematic diagram of the structure of the improved angle adjustment device described in an embodiment of the present invention;

[0018] Figure 2 This is a schematic diagram of the improved angle adjustment device described in this embodiment of the invention when some parts of the structure are in a separated state;

[0019] Figure 3 This is a schematic diagram of a portion of the structure of the improved angle adjustment device described in an embodiment of the present invention;

[0020] Figure 4 This is an enlarged structural schematic diagram of the mounting position of the first slip ring of the improved angle adjustment device described in this embodiment of the present invention;

[0021] Figure 5 This is a schematic diagram of the structure of the first slip ring of the improved angle adjustment device according to an embodiment of the present invention;

[0022] Figure 6 This is a schematic diagram of the structure of the first fixing member of the improved angle adjustment device according to an embodiment of the present invention;

[0023] Figure 7 This is an exploded structural diagram of the second slip ring mounting position of the improved angle adjustment device according to an embodiment of the present invention;

[0024] Figure 8 This is a schematic diagram of the second drive mechanism of the improved angle adjustment device described in this embodiment of the present invention.

[0025] Explanation of reference numerals in the attached drawings: 10, base plate; 11, first turntable; 12, rotating plate; 13, second turntable; 15, bearing mechanism; 20, first slip ring; 21, second slip ring; 22, transmission pipeline; 201, first stator; 202, first rotor; 30, first fixing member; 40, second fixing member; 211, second stator; 212, second rotor; 50, L-shaped fixing member; 60, third fixing member; 14, first support; 24, second support. Part; 141, First housing; 142, Second housing; 103, First drive mechanism; 105, Second drive mechanism; 107, Third drive mechanism; 109, Fourth drive mechanism; 1041, Guide rail mounting plate; 1043, Curved guide rail; 1051, Second driver; 1052, Linear guide rail; 1053, First slider; 1054, First connecting block; 1055, Connecting rod; 1056, Second connecting block; 1057, Second slider. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and do not constitute a limitation thereof.

[0027] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments of the present invention can be combined with each other.

[0028] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0031] refer to Figures 1 to 8 This utility model provides an improved angle adjustment device, comprising: a base plate 10, a first turntable 11, a rotating plate 12, and a second turntable 13 connected in sequence, wherein the first turntable 11 is rotatable relative to the base plate 10, the rotating plate 12 is rotatable relative to the first turntable 11, and the second turntable 13 is rotatable relative to the rotating plate 12 along a first axial direction; and a supporting mechanism 15, which is disposed on the side of the second turntable 13 away from the rotating plate 12 via a support arm, the supporting mechanism 15 being used to support the object to be measured, and the supporting mechanism 15 being rotatable relative to the second turntable 13 and the support arm along a second axial direction. The first axis and the second axis are different; the first slip ring 20 connects the rotating plate 12 to the second turntable 13, and the central axis of the first slip ring 20 coincides with the first axis; the second slip ring 21 connects the bearing mechanism 15 to the support arm, and the central axis of the second slip ring 21 coincides with the second axis; the transmission pipeline 22 includes a first pipeline and a second pipeline arranged along its extension direction, the first pipeline passes through the rotating plate 12 and the second turntable 13 through the first slip ring 20, and the second pipeline passes through the support arm and extends into the bearing mechanism 15 through the second slip ring 21.

[0032] In some embodiments, the improved angle adjustment device further includes a first driving mechanism, a second driving mechanism, a third driving mechanism, and a fourth driving mechanism. The first driving mechanism is connected to the first turntable 11 and is used to drive the first turntable 11 to rotate relative to the substrate 10. The second driving mechanism is connected to the rotating plate 12 and is used to drive the rotating plate 12 to rotate relative to the first turntable 11. The third driving mechanism is connected to the second turntable 13 and is used to drive the second turntable 13 to rotate relative to the rotating plate 12. The fourth driving mechanism is connected to the bearing mechanism 15 and is used to drive the bearing mechanism 15 to rotate relative to the support arm.

[0033] In some embodiments, the first turntable 11 is rotatable relative to the substrate 10 along a third axis, and the rotating plate 12 is rotatable relative to the first turntable 11 along a fourth axis. The first, second, third, and fourth axes are all different. Through the first, second, third, and fourth driving mechanisms, multi-dimensional rotation of the object to be tested on the bearing mechanism 15 can be realized. Since the first, second, third, and fourth axes are all different, multi-dimensional and omnidirectional rotation of the object to be tested on the bearing mechanism 15 can be realized in a more flexible manner. This mechanical method replaces manual rotation angles, which not only reduces labor costs but also improves the detection accuracy and efficiency of the object to be tested.

[0034] In some embodiments, the third axis is a direction that is orthogonal to the plane where the substrate 10 is located, the fourth axis may coincide with the yaw axis of the rotating plate 12, the first axis may be orthogonal to the plane where the second turntable 13 is located, and the second axis may be parallel to the plane where the second turntable 13 is located.

[0035] like Figure 1 The improved angle adjustment device shown is assumed to be in its initial position, where the surfaces of the first turntable 11, rotating plate 12, second turntable 13, and bearing mechanism 15 are all parallel. At this point, the third axis and the first axis may coincide. However, in actual use, the angle of the object to be measured on the bearing mechanism 15 is adjusted by modifying the first, second, third, and fourth drive mechanisms to facilitate the detection of the object. Therefore, the aforementioned statement that the first, second, third, and fourth axes are all different refers to the fact that in actual use, the first, second, third, and fourth axes are all different.

[0036] In some embodiments, position triggering components are provided on the first drive mechanism 103, the second drive mechanism 105, the third drive mechanism 107, and the fourth drive mechanism 109. The position triggering component on the first drive mechanism 103 is configured to detect whether the first turntable 11 is in the initial starting position. The position triggering component on the second drive mechanism 105 is configured to detect whether the rotating plate 12 is in the initial starting position. The position triggering component on the third drive mechanism 107 is configured to detect whether the second turntable 13 is in the initial starting position. The position triggering component on the fourth drive mechanism is configured to detect whether the supporting mechanism 15 is in the initial starting position.

[0037] In some embodiments, the improved angle adjustment device further includes: a pair of guide rail mounting plates 1041, on which curved guide rails 1043 are provided on one side close to each other, a rotating plate 12 is located between the pair of guide rail mounting plates 1041, and a second drive mechanism 105 is configured to drive the rotating plate 12 to move along the curved guide rails 1043 to change the angle of the rotating plate 12.

[0038] Specifically, in some examples, the second drive mechanism 105 converts linear motion into curved movement or oscillation via linear moving parts and linkage mechanisms. The second drive mechanism includes a second driver 1051, a linear guide rail 1052, a first slider 1053, a first connecting block 1054, a connecting rod 1055, a second connecting block 1056, and a second slider 1057. One side of the first slider 1053 is movably connected to the linear guide rail 1052, and the other side is fixedly connected to the first connecting block 1054. One end of the connecting rod 1055 is rotatably connected to the first connecting block 1054, and the other end is rotatably connected to the second connecting block 1056. The second connecting block 1056 is fixedly connected to the second slider 1057, and the second slider 1057 is movably connected to the curved guide rail 1043. The second driver 1051 is configured to drive the first slider 1053 to move linearly along the linear guide rail 1052; the fixed connection may be detachable or non-detachable.

[0039] In some embodiments, the second drive mechanism 105 is located on one side near either of the pair of guide rail mounting plates 1041. The other guide rail mounting plate 1041 is also provided with a second connecting block 1056 and a second slider 1057. That is, both sides of the rotating plate 12 are provided with a second connecting block 1056 and a second slider 1057, and both sides of the rotating plate 12 are fixedly connected to the second connecting blocks 1056 on both sides. When it is necessary to change the angle of the rotating plate 1042 through the operation of the second drive mechanism 105, the second driver 1051 drives the first slider 1053 to move linearly on the linear guide rail 1052. The first slider 1053 drives one end of the connecting rod 1055 to rotate relative to the first connecting block 1054, and the other end of the connecting rod 1055 to rotate relative to the second connecting block 1056. Simultaneously, the connecting rod 1055 exerts a force on the second slider 1057, causing the second slider 1057 to move along the curved guide rail 1043 to change the angle of the rotating plate 12. When the second driver 1051 moves the second slider 1057 that is relatively close to the side, it also moves the second slider 1057 that is relatively far away from the side. Furthermore, corresponding curved guide rails 1043, second connecting blocks 1056, and second sliders 1057 are provided on both sides of the rotating plate 12, so that the rotating plate 12 obtains more sufficient support and also helps the rotating plate 12 to rotate more stably.

[0040] In some embodiments, the first axis and the second axis intersect, and the first axis and the second axis are perpendicular to each other.

[0041] In some embodiments, the first slip ring 20 and the second slip ring 21 can both be pneumatic-electric hybrid slip rings. The pneumatic ring of the pneumatic-electric hybrid slip ring mainly solves the problem of air pipe twisting when the shaft rotates, reducing air pipe wear and pipe compression. The electrical ring mainly solves the problem of cable twisting when the shaft rotates, reducing cable wear. Ultimately, the air pipe and cable remain stationary relative to the fixed part during rotation, which helps to improve the reliability and stability of the angle adjustment device.

[0042] In some embodiments, the first slip ring 20 includes a first stator 201 and a first rotor 202 connected to each other. The first rotor 202 is rotatable relative to the first stator 201 along the central axis of the first slip ring 20. A first pipeline passes through the first stator 201. The first stator 201 is fixed to the rotating plate 12, and the first rotor 202 is fixed to the second turntable 13.

[0043] In some embodiments, the first stator 201 is fixed to the rotating plate 12 by a first fixing member 30, the first fixing member 30 being L-shaped, and the first rotor 202 is fixed to the second turntable 13 by a second fixing member 40. The L-shaped first fixing member 30 can improve the stability of the first stator 201 and the rotating plate 12.

[0044] In some embodiments, the second slip ring 21 includes a second stator 211 and a second rotor 212 connected to each other. The second rotor 212 is rotatable relative to the second stator 211 along the central axis of the second slip ring 21. A second pipe is provided through the second stator 211. The second stator 211 is fixed to the support arm, and the second rotor 212 is fixed to the bearing mechanism 15.

[0045] In some embodiments, the second stator 211 is fixed to the support arm by an L-shaped fastener 50, and the second rotor 212 is fixed to the bearing mechanism 15 by a third fastener 60. The L-shaped fastener 50 can improve the stability of the fixation between the second stator 211 and the support arm.

[0046] In some examples, the third fastener 60 can be a screw.

[0047] In some embodiments, the support arm includes a first support portion 14 and a second support portion 24, a bearing mechanism 15 is disposed between the first support portion 14 and the second support portion 24, and a second turntable 13 is disposed between the first support portion 14 and the second support portion 24. The bearing mechanism 15 is connected to the first support portion 14 through a second slip ring 21, and a second pipeline passes through the first support portion 14 and extends into the bearing mechanism 15 through the second slip ring 21.

[0048] In some embodiments, the second turntable 13 has a first cavity, and the first support portion 14 has a second cavity. The first cavity and the second cavity are connected. A first conduit passing through the second turntable 13 is disposed in the first cavity, and a second conduit passing through the first support portion 14 is disposed in the second cavity. Thus, by encapsulating the transmission conduit 22 with the second turntable 13 and the first support portion 14, the complex wiring problems caused by the exposed transmission conduit 22 are avoided, and the transmission conduit 22 also avoids occupying additional space.

[0049] In some embodiments, the first support portion 14 includes a first housing 141 and a second housing 142 forming a second cavity, and the second stator 211 is fixed to the surface of the first housing 141 facing the second cavity by an L-shaped fastener 50.

[0050] In some embodiments, the second stator 211 is disposed in the second cavity using an L-shaped fastener 50.

[0051] In some embodiments, the first pipeline includes a plurality of first sub-pipelines, the second pipeline includes a plurality of second sub-pipelines, the first sub-pipelines and the second sub-pipelines are connected in a one-to-one correspondence, the correspondingly connected first sub-pipelines and second sub-pipelines constitute a sub-pipeline, a portion of the plurality of sub-pipelines are used for conducting electricity, and another portion of the plurality of sub-pipelines are used for transmitting gas.

[0052] In some embodiments, the first slip ring 20 is a double-input double-output slip ring, and the second slip ring 21 is a double-input single-output slip ring. It can be understood that the transmission pipeline includes multiple sub-pipelines. The multiple sub-pipelines entering the double-input double-output slip ring are divided into two clusters of sub-pipelines. The two clusters of sub-pipelines enter the double-input double-output slip ring separately and independently. When the two clusters of sub-pipelines extend out of the double-input double-output slip ring, they are also in a state of being separate and independent. The two clusters of sub-pipelines then separate and independently enter the double-input single-output slip ring again. When the two clusters of sub-pipelines extend out of the double-input single-output slip ring, they merge into one cluster.

[0053] In some embodiments, the tail end of the first support portion 14 is fixed to one side of the second turntable 11, and the tail end of the second support portion 24 is fixed to the other side directly opposite the second turntable 11. The bearing mechanism 15 is positioned between the head end of the first support portion 14 and the head end of the second support portion 24.

[0054] In some embodiments, the first drive mechanism 103 is fixed to the base plate 10, and the first turntable 11 is connected to the first drive mechanism 103. Specifically, the first drive mechanism includes a drive motor, a meshing drive gear, and a driven gear. The drive gear is connected to the transmission shaft of the drive motor, and the driven gear is connected to the first turntable 11. When the first drive mechanism 103 needs to work, the drive motor operates, the transmission shaft rotates, synchronously driving the drive gear to rotate, the drive gear drives the meshing driven gear to rotate, and the driven gear then synchronously drives the first turntable 11 to rotate.

[0055] In some embodiments, the linear guide rail 1052 and the second driver 1051 in the second drive mechanism are both fixed on the first turntable 11.

[0056] In some embodiments, the third drive mechanism 107 and the first drive mechanism 103 have the same structural principle, which will not be described again.

[0057] It should be noted that the object to be tested can only be placed or removed on the carrier mechanism 15 when the first turntable 11, the rotating plate 12, the second turntable 13 and the carrier mechanism 15 are all in their initial positions.

[0058] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this utility model disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this utility model can be achieved, and this is not limited herein.

[0059] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. An improved angle adjustment device, characterized by, include: A substrate (10), a first turntable (11), a rotating plate (12), and a second turntable (13) are connected in sequence. The first turntable (11) is rotatable relative to the substrate (10), the rotating plate (12) is rotatable relative to the first turntable (11), and the second turntable (13) is rotatable relative to the rotating plate (12) along a first axis. The carrying mechanism (15) is provided on the side of the second turntable (13) away from the rotating plate (12) by means of a support arm. The carrying mechanism (15) is used to carry the object to be tested. The carrying mechanism (15) can rotate relative to the second turntable (13) and the support arm along a second axis, wherein the first axis and the second axis are different. The first slip ring (20) is used to connect the rotating plate (12) to the second turntable (13), and the central axis of the first slip ring (20) coincides with the first axial direction. The second slip ring (21) is used to connect the bearing mechanism (15) to the support arm, and the central axis of the second slip ring (21) coincides with the second axial direction. The transmission pipeline (22) includes a first pipeline and a second pipeline arranged along its extension direction. The first pipeline passes through the rotating plate (12) and the second turntable (13) through the first slip ring (20), and the second pipeline passes through the support arm and extends into the bearing mechanism (15) through the second slip ring (21).

2. The improved angle adjustment device according to claim 1, wherein The first turntable (11) is rotatable relative to the substrate (10) along a third axis, and the rotating plate (12) is rotatable relative to the first turntable (11) along a fourth axis. The first axis, the second axis, the third axis and the fourth axis are all different.

3. The improved angle adjustment device of claim 1, wherein The first axial direction and the second axial direction intersect each other, and the first axial direction and the second axial direction are perpendicular to each other.

4. The improved angle adjustment device of claim 1, wherein The first slip ring (20) includes a first stator (201) and a first rotor (202) connected to each other. The first rotor (202) is rotatable relative to the first stator (201) along the central axis of the first slip ring (20). The first pipeline passes through the first stator (201). The first stator (201) is fixed to the rotating plate (12). The first rotor (202) is fixed to the second turntable (13).

5. The improved angle adjustment device of claim 1, wherein The second slip ring (21) includes a second stator (211) and a second rotor (212) connected to each other. The second rotor (212) is rotatable relative to the second stator (211) along the central axis of the second slip ring (21). The second pipeline passes through the second stator (211). The second stator (211) is fixed to the support arm. The second rotor (212) is fixed to the bearing mechanism (15).

6. The improved angle adjustment device of claim 5, wherein The support arm comprises a first support part (14) and a second support part (24), the bearing mechanism (15) is arranged between the first support part (14) and the second support part (24), and the second rotating disc (13) is arranged between the first support part (14) and the second support part (24), the bearing mechanism (15) is connected with the first support part (14) through the second sliding ring (21), and the second pipeline passes through the first support part (14) through the second sliding ring (21) and extends into the bearing mechanism (15).

7. The improved angle adjustment device of claim 6, wherein The second rotating disc (13) has a first cavity, the first support part (14) has a second cavity, the first cavity is communicated with the second cavity, the first pipeline penetrating through the second rotating disc (13) is arranged in the first cavity, and the second pipeline penetrating through the first support part (14) is arranged in the second cavity.

8. The improved angle adjustment device of claim 7, wherein, The second stator (211) is arranged in the second cavity by adopting an L-shaped fixing piece (50).

9. The improved angle adjustment device of claim 1, wherein The first pipeline comprises a plurality of first sub-pipelines, the second pipeline comprises a plurality of second sub-pipelines, the first sub-pipeline and the second sub-pipeline are connected in one-to-one correspondence, the first sub-pipeline and the second sub-pipeline in correspondence are connected to form a sub-pipeline, a part of the plurality of sub-pipelines are used for conducting electricity, and another part of the plurality of sub-pipelines are used for transmitting gas.

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