Novel crystal control probe

Abstract

The utility model relates to a novel crystal control probe which comprises a probe body and a pipeline connected to the probe body, the pipeline comprises a pneumatic driving pipe and a water cooling pipe, the water cooling pipe comprises a water inlet pipe and a water return pipe, and the pipeline is provided with a penetrating piece used for installing the pipeline on a vacuum cavity; the probe body comprises a cooling shell and a crystal oscillation disc arranged in the cooling shell, the water inlet pipe and the water return pipe are respectively communicated into the cooling shell, the top of the cooling shell is provided with a driving module, the driving module drives the crystal oscillation disc in the cooling shell, and the pneumatic driving pipe is connected to the top of the driving module. A single-gas-path type structure is adopted, a corresponding rotating mechanism is combined, a plurality of crystal oscillation pieces can be integrated at the same time, the crystal oscillation pieces are directly selected and replaced in the using process, compared with a mode of replacing the crystal oscillation pieces through pressure relief, efficiency is greatly improved, and the energy consumption is greatly reduced through the single-gas-path type structure.

Description

Technical Field

[0001] This utility model relates to equipment for vacuum coating, specifically a novel crystal control probe. Background Technology

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under vacuum conditions, causing them to evaporate and condense onto the surface of the workpiece to form a thin film.

[0003] In the coating process, the crystal control probe plays a crucial role. It is primarily used to detect the distance and temperature between the substrate and the evaporation source to ensure that the thickness and properties of the coated film meet predetermined requirements. The crystal control probe is also required for real-time monitoring during vacuum coating.

[0004] Existing crystal oscillator probes have several shortcomings in vacuum coating applications. Current equipment uses external cylinders, which are heavy and bulky, and suffer from complex gas path issues. In practical use, there is a risk of leakage at multiple points, and the gas path direction limits its installation angle to a single angle. When replacing the crystal oscillator, vacuum breaking is required, involving depressurization, chip removal, replacement, and vacuuming before proceeding to the next stage. This process is time-consuming and inefficient. Furthermore, the dual-cylinder structure results in relatively high energy consumption, accounting for a significant portion of the equipment's total power consumption. Summary of the Invention

[0005] This utility model is a novel crystal control probe. It adopts a single air path structure and, combined with a corresponding rotating mechanism, can integrate multiple crystal oscillators at the same time. During use, the crystal oscillators can be directly selected and replaced, which greatly improves efficiency compared to the method of replacing crystal oscillators by depressurization. The single air path structure also greatly improves energy saving.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A novel crystal-controlled probe includes a probe body and a conduit connected to the probe body. The conduit includes a pneumatic drive tube and a water-cooling tube. The water-cooling tube includes an inlet tube and a return tube. A penetrating element for mounting the probe body on a vacuum chamber is provided on the conduit. The probe body includes a cooling housing and a crystal oscillator disk disposed within the cooling housing. The inlet tube and the return tube are respectively connected to the cooling housing. A drive module is provided on the top of the cooling housing. The drive module drives the crystal oscillator disk within the cooling housing. The pneumatic drive tube is connected to the top of the drive module.

[0008] The cooling housing includes an annular housing, an upper end cover at the top of the annular housing, and a lower end cover at the bottom of the annular housing. The upper end cover and the lower end cover are respectively connected to the top and bottom of the annular housing by bolts to form a closed cavity. The water inlet pipe and the water return pipe are connected from the upper end cover to the cooling housing.

[0009] The crystal oscillator disk includes a crystal oscillator tray and an indexing plate. The crystal oscillator disk has multiple stepped holes evenly distributed in a ring. The crystal oscillator is installed in the stepped holes. The indexing plate is installed above the crystal oscillator disk. The indexing plate and the crystal oscillator disk are connected by screws. A drive rod is provided at the center of the indexing plate. The drive rod extends out of the upper end cover and is connected to the drive module. The lower end cover has eccentric holes corresponding to the crystal oscillator. The bottom surface of the crystal oscillator tray is close to the upper surface of the lower end cover.

[0010] The drive module includes a cylinder, which is driven by a pneumatic drive tube and drives the driven rod.

[0011] The drive rod is equipped with a ratchet, and the cylinder drives the ratchet, thereby causing the drive rod to rotate.

[0012] The cylinder is equipped with a U-shaped clamp, and a connecting plate is hinged inside the U-shaped clamp. A hinge pin that drives the ratchet is located at the center of the connecting plate. A torsion spring is located at the hinge point between the connecting plate and the U-shaped clamp. The torsion spring applies force to the connecting plate to bring the hinge pin closer to the ratchet. The cylinder extends and retracts, causing the connecting plate to move back and forth. The connecting plate drives the ratchet to rotate, thus achieving the driving function.

[0013] Furthermore, the drive rod is equipped with a gear, which is located above the ratchet. The U-shaped clip has a horizontal plate at a position corresponding to the gear. The cylinder drives the U-shaped clip to extend to the horizontal plate and mesh with the gear to lock the gear, thereby locking the drive rod.

[0014] The drive rod and the indexing plate are separate structures. A pressure head is provided below the drive rod, and an eccentric guide rod is provided at the bottom of the pressure head. An eccentric guide hole is provided above the corresponding indexing plate. The pressure head presses the crystal oscillator disk downwards to the upper surface of the lower end cover. The eccentric guide rod is inserted into the eccentric guide hole to achieve driving.

[0015] A protective box, which is installed by screws, is provided at the center of the upper cover, and the protective box covers the drive module outside the upper cover.

[0016] The present invention, by adopting the above-described technical solution, has the following beneficial effects:

[0017] This device adopts a single air-path drive module structure, which can save some energy consumption during use. The overall structure is compact and has a significant reduction in size and weight compared to existing systems.

[0018] This device adopts a fully compatible embedded installation and has a crystal oscillator disk structure with a start-up drive, which can accommodate multiple crystal oscillators at the same time. During use, the switching operation of the crystal oscillators can be realized without disassembly and depressurization. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the present invention.

[0020] Figure 2 This is a schematic diagram of the drive module.

[0021] Figure 3 This is a schematic diagram of a crystal oscillator.

[0022] Figure 4 This is a schematic diagram showing the disassembly of the crystal oscillator.

[0023] Figure 5 for Figure 4 A diagram from another angle.

[0024] Figure 6 This is a schematic diagram of the U-shaped card and the connecting plate. Detailed Implementation

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments. It should be understood that the following embodiments are only one or more manifestations of the present invention and are not a complete limitation on the invention content recorded in this application. Any improvements made based on the invention content or technical solution recorded in this application that are known to those skilled in the art should fall within the scope of protection claimed in this application.

[0026] Furthermore, the descriptions of directions such as up, down, left, right, front, and back presented in the specific embodiments are merely for the purpose of describing the technical solutions and are not absolute limitations unless otherwise stated.

[0027] like Figures 1-6 The novel crystal-controlled probe shown includes a probe body 1 and a conduit 2 connected to the probe body 1. The conduit 2 includes a pneumatic drive pipe 201 and a water-cooling pipe 202. The water-cooling pipe 202 includes an inlet pipe 2021 and a return pipe 2022. The conduit 2 is provided with a penetrating element 203 for mounting it on a vacuum chamber. The probe body 1 includes a cooling housing 101 and a crystal oscillator 102 disposed within the cooling housing 101. The inlet pipe 2021 and the return pipe 2022 are respectively connected to the cooling housing 101. A drive module 103 is provided on the top of the cooling housing 101. The drive module 103 drives the crystal oscillator 102 within the cooling housing 101. The pneumatic drive pipe 201 is connected to the top of the drive module 103.

[0028] The cooling housing 101 includes an annular housing 1011, an upper end cover 1012 at the top of the annular housing 1011, and a lower end cover 1013 at the bottom of the annular housing 1011. The upper end cover 1012 and the lower end cover 1013 are respectively connected to the top and bottom of the annular housing 1011 by bolts to form a closed cavity. The water inlet pipe 2021 and the water return pipe 2022 are connected from the upper end cover 1012 to the cooling housing 1011.

[0029] The crystal oscillator disk 102 includes a crystal oscillator tray 1021 and an indexing disk 1022. The crystal oscillator tray 1021 has a plurality of stepped holes 1023 evenly distributed in a ring. The crystal oscillator 1024 is installed in the stepped holes 1023. The indexing disk 1022 is installed above the crystal oscillator disk 1021. The indexing disk 1022 and the crystal oscillator disk 1021 are connected by screws. A drive rod 1025 is provided at the center of the indexing disk 1022. The drive rod 1025 extends out of the upper end cover 1012 and is connected to the drive module 103. The lower end cover 1013 has an eccentric hole 1014 corresponding to the crystal oscillator 1024. The bottom surface of the crystal oscillator tray 1021 is close to the upper surface of the lower end cover 1013.

[0030] The drive module 103 includes a cylinder 1031, which is driven by a pneumatic drive tube 201 and drives the driven rod 1025.

[0031] The drive rod 1025 is equipped with a ratchet 1032, and the cylinder 1031 drives the ratchet 1032, thereby causing the drive rod 1025 to rotate.

[0032] The cylinder 1031 is provided with a U-shaped clip 1033, and a connecting plate 1034 is hinged inside the U-shaped clip 1033. A hinge pin 1035 is provided at the center of the connecting plate 1034 to drive the ratchet 1032. A torsion spring 1038 is provided at the hinge point between the connecting plate 1034 and the U-shaped clip 1033. The torsion spring 1038 applies force to the connecting plate 1034, causing the hinge pin 1035 to move closer to the ratchet 1032. The cylinder 1031 extends and retracts, causing the connecting plate 1034 to move back and forth. The connecting plate 1034 drives the ratchet 1032 to rotate, thereby achieving the drive.

[0033] Furthermore, the drive rod 1025 is provided with a gear 1036, which is located above the ratchet 1032. The U-shaped clip 1033 is provided with a horizontal plate 1037 at a position corresponding to the gear 1036. The cylinder 1031 drives the U-shaped clip 1033 to extend to the horizontal plate 1037 and mesh with the gear 1036 to lock the gear 1036, thereby locking the drive rod 1025.

[0034] The drive rod 1025 and the indexing plate 1022 are separate structures. A pressure head 1026 is provided below the drive rod 1025. An eccentric guide rod 1027 is provided at the bottom of the pressure head 1026. An eccentric guide hole 1028 is provided above the indexing plate 1022. The pressure head 1026 presses the crystal oscillator 102 downward to the upper surface of the lower end cover 1013. The eccentric guide rod 1027 is inserted into the eccentric guide hole 1028 to achieve driving.

[0035] The upper cover 1012 has a protective box 1015 installed at its center by screws, and the protective box 1015 covers the drive module 103 outside the upper cover 1012.

[0036] During use, this device is mounted on a vacuum chamber via a penetrating element. The probe body is placed inside the vacuum chamber, and cooling water is introduced into the cooling housing through a water-cooling pipe to cool the internal crystal oscillator assembly.

[0037] The pneumatic drive tube drives the cylinder, causing the cylinder to reciprocate and extend. During the extension and retraction, the connecting plate moves back and forth, driving the ratchet to rotate in one direction, which in turn drives the drive rod, thereby realizing the rotation switching of the crystal oscillator, so that different crystal oscillators correspond to the eccentric holes. After the switching is completed, the cylinder can be controlled to extend, so that the horizontal plate on the U-shaped card meshes with the gear, realizing the locking operation.

Claims

1. A novel crystal control probe characterized by: It includes a probe body and a pipeline connected to the probe body, the pipeline includes a pneumatic drive pipe and a water cooling pipe, the water cooling pipe includes a water inlet pipe and a water return pipe, the pipeline is provided with a penetrating member for mounting the pipeline on a vacuum cavity; the probe body includes a cooling shell and a crystal oscillator plate arranged in the cooling shell, the water inlet pipe and the water return pipe are respectively communicated to the cooling shell, a driving module is arranged on the top of the cooling shell, the driving module drives the crystal oscillator plate, and the pneumatic drive pipe is connected to the top of the driving module.

2. A novel crystal controlled probe according to claim 1, characterized in that: The cooling shell includes an annular shell, an upper end cover on the top of the annular shell and a lower end cover on the bottom of the annular shell, the upper end cover and the lower end cover are respectively connected to the top and the bottom of the annular shell by bolts and form a closed cavity; the water inlet pipe and the water return pipe are communicated to the cooling shell from the upper end cover.

3. A novel crystal control probe as claimed in claim 2, wherein: The crystal oscillator plate includes a crystal oscillator plate tray and a dividing disc, a plurality of stepped holes are uniformly distributed in a ring shape on the crystal oscillator plate, a crystal oscillator plate is arranged in the stepped hole, the dividing disc is arranged above the crystal oscillator plate, and the dividing disc and the crystal oscillator plate are connected by screws; a driving rod is arranged at the center of the top of the dividing disc, the driving rod penetrates out of the upper end cover and is connected with the driving module; an eccentric hole corresponding to the crystal oscillator plate is arranged on the lower end cover; the bottom surface of the crystal oscillator plate tray is attached to the upper surface of the lower end cover.

4. A novel crystal control probe according to claim 3, characterized in that: The driving module includes a pneumatic cylinder, the pneumatic cylinder is driven by the pneumatic drive pipe, and the pneumatic cylinder drives the driving rod.

5. A novel crystal controlled probe according to claim 4, characterized in that: The driving rod is provided with a ratchet wheel, and the pneumatic cylinder drives the ratchet wheel to drive the driving rod to rotate.

6. A novel crystal controlled probe according to claim 5, characterized in that: A U-shaped clamp is arranged on the pneumatic cylinder, a connecting plate is hinged in the U-shaped clamp, a hinge column for driving the ratchet wheel is arranged at the center of the connecting plate, a torsional spring is arranged at the hinged point of the connecting plate and the U-shaped clamp, the torsional spring applies force to the connecting plate to make the hinge column close to the ratchet wheel, the pneumatic cylinder drives the connecting plate to reciprocate, the connecting plate drives the ratchet wheel to rotate to achieve driving.

7. A novel crystal controlled probe according to claim 6, characterized in that: A gear is arranged on the driving rod, the gear is arranged above the ratchet wheel, a horizontal plate corresponding to the gear is arranged on the U-shaped clamp, the pneumatic cylinder drives the U-shaped clamp to extend out to the horizontal plate to mesh with the gear to lock the gear, that is, to lock the driving rod.

8. A novel crystal controlled probe according to claim 7, characterized in that: The driving rod and the dividing disc are in a split structure, a pressing head is arranged below the driving rod, an eccentric guide rod is arranged at the bottom of the pressing head, an eccentric guide hole is arranged above the corresponding dividing disc, the pressing head presses the crystal oscillator plate tightly to the upper surface of the lower end cover, and the eccentric guide rod is inserted into the eccentric guide hole to achieve driving.

9. A novel crystal control probe as claimed in claim 8, wherein: A protection box is arranged at the center of the upper end cover and is installed by screws, and the protection box covers the driving module outside the upper end cover.

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