Device for removing static electricity of mask

Abstract

The utility model provides a device for removing static electricity of a mask plate, which comprises a carrying table, a plurality of supporting parts and a plurality of telescopic conductive parts, and each supporting part is arranged on the carrying table and is used for supporting the mask plate to be processed which is inversely buckled on the carrying table; the conductive part is arranged on the carrying table, one end of the conductive part abuts against the non-key pattern area on the mask and is communicated with the key pattern area, and the other end of the conductive part is grounded. According to the utility model, static electricity accumulated on the surface of the key pattern area of the mask can be effectively transferred to the ground through the conductive part, so that the static electricity can be quickly and thoroughly removed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a device for removing static electricity from a photomask. Background Technology

[0002] A photomask, also known as a photomask or photomask for short, uses quartz glass as a substrate. A layer of chromium is deposited on the quartz glass substrate, and then photoresist (a photosensitive material whose chemical properties change under specific wavelengths of light) is coated on top of the chromium layer. The designed circuit pattern is then exposed to the photoresist using an electron laser device. The exposed areas are then processed (photoresist development, chromium layer etching) to form the design. Figure One The circuit pattern is thus transformed into a photomask master, similar to an exposed film. However, during the photomask production process, factors such as the high-cleanliness environment of dry etching and developing processes, and the dielectric properties of the material surface, inevitably lead to the accumulation of static charges in layers on the photomask. When the local potential difference exceeds the dielectric's tolerance limit, it will induce electrostatic discharge (ESD), specifically manifested as the generation of micron-sized arc channels at the metal / dielectric film interface edge region, resulting in dielectric breakdown damage or metal wire melting in the pattern structure, causing quality defects such as out-of-tolerance critical dimensions of the photomask.

[0003] In existing technologies, DC or pulsed hybrid ion generators are typically used to neutralize the static charge on the mask. However, this method suffers from several drawbacks. First, the space charge shielding effect limits the penetration depth of the ion beam, slowing down the electrostatic removal process. Second, the field-induced electron migration causes non-uniform bipolar charge distribution, leading to a redistribution of charge within the material rather than direct release from the surface, resulting in incomplete electrostatic removal. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the technical problem to be solved by this utility model is to provide a device for removing static electricity from a photomask, which can completely remove static electricity from the photomask, avoid damage to the photomask material and pattern caused by electrostatic discharge, and thus reduce the scrap rate of the photomask.

[0005] The utility model provides a device of removing static electricity of mask, including stage, a plurality of support parts and a plurality of telescopic conductive parts, each support part sets up on the stage, is used for supporting the mask to be handled upside down on the stage, the conductive part sets up on the stage, one end of the conductive part and the non -critical figure area on the mask abut and with critical figure area intercommunication, the other end of the conductive part is grounded.

[0006] Preferably, the top of the support part is fixed with a first limiting part and a second limiting part, and a gap capable of accommodating a corner of the mask is arranged between the first limiting part and the second limiting part to position and limit the mask.

[0007] Preferably, a plurality of through holes for mounting the conductive part are arranged on the stage, and the conductive part is detachably connected to the stage through the through holes, so that the position of the conductive part can be adjusted to adapt to different patterns on the mask.

[0008] Preferably, the conductive part includes a conductive sleeve, a telescopic member and a spring, the spring is arranged in the sleeve, the telescopic member is movably sleeved in the sleeve, one end of the telescopic member abuts against the spring, and the other end of the telescopic member extends to the outside of the sleeve in the axial direction for abutting against the mask.

[0009] Preferably, the end of the telescopic member extending to the outside of the sleeve is in a conical structure.

[0010] Preferably, the conical structure is made of copper.

[0011] Preferably, the support parts are arranged on the stage in the circumferential direction.

[0012] Preferably, a wiring groove is arranged on the back of the stage for grounding of the conductive part.

[0013] As described above, the device for removing static electricity of the mask has the following beneficial effects:

[0014] The utility model discloses a plurality of telescopic conductive parts and support parts are arranged on the stage, the mask is inverted on the support part, one end of the conductive part abuts against the non-critical figure area of the mask, and the conductive part is in communication with the critical figure area, and the other end of the conductive part is grounded. The utility model can effectively transfer the static electricity accumulated on the surface of the critical figure area of the mask to the ground through the conductive part, so as to realize rapid and complete removal of static electricity. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 The assembly diagram of the device for removing static electricity of the mask according to an embodiment of the utility model is shown.

[0016] Figure 2The utility model provides a three -dimensional schematic view of the device of removing mask static electricity of an embodiment of the utility model.

[0017] Figure 3 The utility model provides a bottom view of the device of removing mask static electricity of an embodiment of the utility model.

[0018] Figure 4 The utility model provides a partial close -up view of the conductive part of an embodiment of the utility model.

[0019] Figure 5 The utility model provides a side view of the device of removing mask static electricity of an embodiment of the utility model.

[0020] Figure 6 For Figure 5 Partial close -up view.

[0021] Mark explanation:

[0022] 100, platform, 110, wiring slot, 200, support part, 210, first limit part, 220, second limit part, 300, conductive part, 310, sleeve, 320, telescopic piece, 321, conical structure, 330, spring, 400, mask. Specific implementation

[0023] The following specific embodiment illustrates the embodiment of the utility model, and the person skilled in the art can easily understand other advantages and effects of the utility model from the content disclosed in the specification.

[0024] It is known that the structure, ratio, size and the like shown in the drawings attached to the specification are only used to cooperate with the content disclosed in the specification for the person skilled in the art to understand and read, and not used to limit the limiting conditions that the utility model can be implemented, so it does not have the technical essence, any modification of structure, change of ratio relationship or adjustment of size, under the condition that the effect and the purpose that the utility model can produce and can achieve are not affected, should still fall in the range that the technical content disclosed in the utility model can cover.At the same time, the terms such as "upper", "lower", "left", "right", "middle" and the like cited in the specification, are only for the clear understanding of the specification, and not used to limit the range that the utility model can be implemented, the change or adjustment of relative relationship, when the technical content is not substantially changed, is also regarded as the scope that the utility model can be implemented.

[0025] For example, Figures 1 to 6As shown in the device for removing static electricity of a mask plate, an embodiment includes a carrier 100, a plurality of supporting portions 200 and a plurality of conductive portions 300. Each supporting portion 200 is detachably or fixedly connected to the carrier 100, and the supporting portion 200 is used for supporting the mask plate 400 inverted on the carrier 100. The supporting portion 200 includes but is not limited to a circumferential distribution. The shape of the carrier 100 includes but is not limited to a rectangle, and also includes a circle, a polygon and the like. The distribution position of the supporting portion 200 can be determined according to the shape of the carrier 100, and the height of each supporting portion 200 is at the same level to avoid the falling of the mask plate 400. The conductive portion 300 can be fixedly or detachably connected to the carrier 100. The layout of the conductive portion 300 on the carrier 100 is determined according to the pattern on the mask plate 400, that is, the skilled person can determine the layout of the conductive portion 300 according to the area where the key pattern and the non-key pattern on the mask plate 400 are located, so that the distribution area of the conductive portion 300 avoids the key pattern area to prevent the conductive portion 300 from causing mechanical damage to the key pattern, and covers the area where the non-key pattern is located and the potential static electricity is accumulated. The conductive portion 300 is grounded through a wire at the end far away from the contact with the mask plate, so as to guide the static electricity on the mask plate to the ground, thereby achieving the complete elimination of the static electricity on the mask plate.

[0026] It should be noted that before removing the static electricity, the entire chromium layer on the mask plate 400 needs to be electrified, that is, the non-key pattern area and the key pattern area are connected. In use, the mask plate 400 is inverted and placed on the supporting portion 200, so that the conductive portion 300 abuts against the non-key pattern area of the mask plate 400, and the chromium layer of the conductive portion 300 and the non-key pattern area of the mask plate 400 is connected. The static electricity on the chromium layer of the key pattern area of the mask plate 400 is guided to the conductive portion 300 through the chromium layer of the non-key pattern area, and then the static electricity is completely guided to the ground through the conductive portion 300 and the wire, thereby achieving the quick and complete elimination of the static electricity on the mask plate.

[0027] In an embodiment, as shown in Figure 1 , Figure 5 and Figure 6 , in this embodiment, the external shape of the mask plate 400 is preferably rectangular, and the top of the supporting portion 200 is fixedly provided with a first limiting portion 210 and a second limiting portion 220. It should be noted that the first limiting portion 210 and the second limiting portion 220 are not limited to the same structure, and a gap capable of accommodating one foot of the mask plate 400 is provided between the first limiting portion 210 and the second limiting portion 220 to satisfy the limitation and positioning of the mask plate 400. In use, the mask plate 400 is inverted and placed on the supporting portion 200, and the first limiting portion 210 and the second limiting portion 220 abut against the two adjacent side walls of the mask plate, on the one hand, the non-key pattern area of the mask plate 400 can abut against the conductive portion 300; on the other hand, the falling of the mask plate 400 can be effectively prevented.

[0028] In an embodiment, as shown in Figure 2 The plurality of through holes are arranged on the carrier 100, and the conductive parts 300 are detachably connected to the carrier 100 through the through holes. The through holes can be arranged on the carrier 100 in a full area manner, and the layout of the conductive parts 300 can be flexibly adjusted according to different patterns on the mask plate 400, so that the layout of the conductive parts 300 on the carrier 100 does not need to be redesigned when the mask plate with different patterns is replaced.

[0029] In an embodiment, as shown in Figure 3 The carrier 100 is provided with a wiring groove 110 at the back, and the fixed end of the conductive part 300 protrudes to the bottom of the wiring groove 110. A plurality of wires are arranged in the wiring groove 110 and used for connecting the conductive part 300. The conductive part 300 is connected to the ground through the wires, so that the static electricity of the mask plate can be effectively guided to the ground, and the static electricity can be completely eliminated.

[0030] In an embodiment, as shown in Figures 4 to 6 The conductive part 300 includes a conductive sleeve 310, an extension piece 320 and a spring 330. The sleeve 310 is arranged on the carrier 100 in a vertical direction at the through hole. One end of the sleeve 310 is provided with an opening, and the other end is provided with a closed end. The closed end of the sleeve 310 penetrates through the main body of the carrier 100 and is located in the wiring groove 110 and connected to the ground through the wires. The spring 330 is arranged in the sleeve 310, and the bottom end of the spring 330 abuts against the closed end of the sleeve 310. The extension piece 320 is movably sleeved on the sleeve 310, so that the extension piece 320 moves up and down along the axial direction of the sleeve 310. One end of the extension piece 320 abuts against the top end of the spring 330, and the other end of the extension piece 320 extends to the outside of the sleeve 310 in the axial direction and is used for abutting against the non-key pattern area of the mask plate 400.

[0031] In use, the mask plate 400 to be processed is placed on the support part 200. Under the action of the gravity of the mask plate 400, the non-key pattern area slightly presses the extension piece 320 downward, so that the extension piece 320 moves downward by a certain distance against the spring force, until the mask plate 400 is in a force balance state. Through the buffering effect of the spring, the mechanical damage of the mask plate 400 caused by the extension piece 320 is reduced. In the process of eliminating static electricity, the static electricity charges are conducted from the mask plate 400 to the end of the extension piece 320 in contact with the extension piece 320, and then transmitted to the ground through the spring 330 and the sleeve 310 via the wires, so that the static electricity is eliminated. When the static electricity of the mask plate 400 is eliminated, the mask plate 400 is removed, and the extension piece 320 returns to the initial state under the action of the spring force, so that the static electricity of the next mask plate can be eliminated, and the working efficiency of the static electricity elimination is improved.

[0032] Further, as shown in Figure 4As shown, in the embodiment, the telescopic member 320 extends to one end outside the sleeve 310, that is, the one end of the telescopic member 320 in contact with the mask 400 is provided with a tapered structure 321, the tapered structure can enhance the local electric field intensity, help to break down the possible thin insulation layer (such as natural oxide film) on the surface of the chromium layer, and ensure the efficient discharge of static electricity. Wherein, the tapered structure 321 includes but is not limited to being prepared by copper material, and a gold-plated copper needle can also be used to enhance the conductivity.

[0033] The above embodiments only exemplarily illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the present application should be covered by the claims of the present application.

Claims

1. A device for removing static electricity from a mask, characterized by, The application relates to a mask plate supporting device, which comprises a supporting base (100), a plurality of supporting parts (200) and a plurality of conductive parts (300), wherein each supporting part (200) is arranged on the supporting base (100) and used for supporting a mask plate (400) to be processed which is invertedly buckled on the supporting base; the conductive part (300) is arranged on the supporting base (100), one end of the conductive part (300) abuts against a non-key pattern area on the mask plate (400), the non-key pattern area is communicated with a key pattern area, and the other end of the conductive part (300) is grounded.

2. The apparatus for removing static electricity of a mask according to claim 1, wherein, The top of the supporting part (200) is fixed with a first limiting part (210) and a second limiting part (220), a gap capable of accommodating one corner of the mask plate is arranged between the first limiting part (210) and the second limiting part (220), so as to position and limit the mask plate (400).

3. The apparatus for removing static electricity of a mask according to claim 1, wherein, A plurality of through holes for mounting the conductive part (300) are arranged on the supporting base (100), the conductive part (300) is detachably connected to the supporting base (100) through the through holes, and the position of the conductive part (300) is adjusted to adapt to different patterns on the mask plate.

4. The apparatus for removing static electricity of a mask according to claim 1, wherein, The conductive part (300) comprises a conductive sleeve (310), an expansion part (320) and a spring (330), the spring (330) is arranged in the sleeve (310), the expansion part (320) is movably sleeved in the sleeve (310), one end of the expansion part (320) abuts against the spring (330), and the other end of the expansion part (320) extends to the outside of the sleeve (310) in the axial direction and is used for abutting against the mask plate (400).

5. The apparatus for removing static electricity of a mask according to claim 4, wherein The end of the expansion part (320) extending to the outside of the sleeve (310) is provided in a conical structure (321).

6. The apparatus for removing static electricity of a mask according to claim 5, wherein The conical structure (321) is made of copper.

7. The apparatus for removing static electricity of a mask according to any one of claims 1 to 6, wherein The supporting parts (200) are arranged on the supporting base (100) in the circumferential direction.

8. The apparatus for removing static electricity of a mask according to any one of claims 1 to 6, wherein The back of the supporting base (100) is provided with a wiring groove (110) for grounding the conductive part (300).

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