Semiconductor lamination production equipment

Abstract

The utility model relates to the technical field of semiconductor production, in particular to semiconductor laminating production equipment which comprises a laminating machine body, and a rotating assembly is arranged on the inner side of the laminating machine body. The discharging assembly is fixedly installed on the lower surface in the overlying machine body, the detection assembly is fixedly installed on the upper surface in the overlying machine body, the detection assembly comprises a supporting frame, a limiting plate is slidably connected into a sliding rail, and a pressure sensor is fixedly installed at one end of the upper surface of the limiting plate in an embedded mode. According to the utility model, the flange above the upper pressure plate abuts against the pressure sensor to detect the pressing pressure, and meanwhile, when the pressure is relatively large, the limiting plate abuts against the lower part of the flange to limit the maximum downward moving distance of the upper pressure plate, so that the damage to materials due to overlarge pressure caused by the reduction of the precision of the hydraulic cylinder is avoided, and the pressing precision of the materials is improved; and the lower pressing disc is turned over after moving downwards, and the pressed materials are turned over towards one side, so that the pressed materials can be discharged more smoothly.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically a semiconductor lamination production equipment. Background Technology

[0002] Semiconductors are materials whose conductivity at room temperature is between that of conductors and insulators. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors.

[0003] The announcement number is CN117423638A, which discloses "a semiconductor stacking production equipment, which relates to the field of semiconductor production equipment technology, including a support component, a rotating component installed at the bottom of the support component, and a feeding component for automatically feeding semiconductor materials installed at the top of the support component".

[0004] There are still some drawbacks in its use. The stacking equipment uses the upper hydraulic cylinder to apply pressure to press the material together, tightly pressing these material layers together. However, after a period of use, the accuracy of the hydraulic cylinder will decrease. Excessive pressure can easily damage the material, while insufficient pressure will not achieve a tight connection. It is also difficult to monitor and control the accuracy of the hydraulic cylinder. After the material is pressed, it is discharged by moving down through the lower pressure plate. However, the material is placed flat on the lower pressure plate, which makes it difficult for the material to be discharged smoothly. Utility Model Content

[0005] The purpose of this invention is to provide a semiconductor lamination production equipment to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A semiconductor lamination manufacturing apparatus includes a lamination machine body, comprising:

[0008] The rotating assembly is located inside the stacking press body.

[0009] The feeding assembly is fixedly installed on the lower surface inside the stacking press body. The feeding assembly includes a stepped tube fixedly embedded in the lower surface inside the stacking press body. A second hydraulic cylinder is fixedly installed at the bottom of the stacking press body. A lower pressure plate is slidably connected inside the stepped tube.

[0010] The detection component is fixedly installed on the upper surface inside the body of the stacking machine. The detection component includes a support frame, a slide rail is fixedly installed on the upper end of the support frame, a limit plate is slidably connected inside the slide rail, and a pressure sensor is fixedly embedded at one end of the upper surface of the limit plate.

[0011] Furthermore, a feeding pipe is fixedly embedded in the upper surface of the stacking press body, a solenoid valve is fixedly installed at the lower end of the feeding pipe, a No. 1 hydraulic cylinder is fixedly embedded in the upper surface of the stacking press body, and the output end of the No. 1 hydraulic cylinder is fixedly connected to an upper pressure plate through a flange.

[0012] Furthermore, a rack is fixedly installed on the lower surface of the limiting plate, a gear that meshes with and is connected to the rack is rotatably connected inside the support frame, and a second motor capable of driving the gear to rotate is fixedly installed on one side surface of the support frame.

[0013] Furthermore, the rotating assembly includes:

[0014] The turntable is rotatably connected inside the stacking press body;

[0015] Multiple mounting holes are equally spaced on one side of the turntable surface;

[0016] Multiple compression tubes are movably inserted into multiple mounting holes.

[0017] Preferably, the pressing tube is symmetrically fixedly installed with connecting ears inside, and the connecting ears are detachably connected to the turntable by bolts. The lower surface of the press body is fixedly installed with a No. 1 motor that can drive the turntable to rotate.

[0018] Furthermore, a feed pipe is fixedly embedded on the outer surface of the stepped tube, and a T-shaped rotating shaft is fixedly installed at the output end of the second hydraulic cylinder through a flange. A connecting seat is rotatably connected to the outer side of the T-shaped rotating shaft, and the connecting seat is fixedly connected to the lower pressure plate.

[0019] Preferably, a pin is fixedly installed at the lower end of the stepped tube, and coil springs are fixedly installed on both sides of the connecting seat. The two ends of the coil springs are fixedly connected to the T-shaped rotating shaft and the connecting seat, respectively. Arc-shaped support plates are symmetrically fixedly installed on the outer surface of the T-shaped rotating shaft.

[0020] Compared with the prior art, the beneficial effects of this utility model are:

[0021] 1. When the upper pressure plate moves downward for pressing, the second motor operates, causing the rack to drive the limit plate to slide inside the slide rail. This moves the pressure sensor between the upper pressure plate and the flange above it. When the flange moves downward, it presses against the pressure sensor to detect pressure changes and assists in controlling the extension accuracy of the first hydraulic cylinder. Thus, the flange above the upper pressure plate presses against the pressure sensor to detect the pressing pressure. At the same time, when the pressure is high, the limit plate presses against the bottom of the flange to limit the maximum downward movement distance of the upper pressure plate. This prevents excessive pressure caused by a decrease in the accuracy of the first hydraulic cylinder from damaging the material and improves the accuracy of material pressing.

[0022] 2. The second hydraulic cylinder extends, pushing the lower pressure plate upward. The elasticity of the coil spring itself gives the lower pressure plate the force to flip to one side, causing the lower pressure plate to flip to a horizontal state and slide into the upper part of the stepped tube. After the material is pressed, the lower pressure plate moves down and abuts against the ejector pin, causing the lower pressure plate to drive the pressed material to flip to one side, flipping the pressed material into the feed tube, causing the pressed material to tilt and move downward, so that the pressed material can be discharged more smoothly. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0024] Figure 2 This is a schematic diagram of the vertical cross-sectional structure of the turntable and feeding assembly of this utility model;

[0025] Figure 3 This is a schematic diagram of the vertical cross-sectional structure of the feeding component in this utility model;

[0026] Figure 4 This is a schematic diagram of the disassembled structure of the feeding component in this utility model;

[0027] Figure 5 This is a schematic diagram of the detection component structure in this utility model.

[0028] In the diagram: 1. Stacking press body; 101. Feeding pipe; 102. Solenoid valve; 103. Hydraulic cylinder No. 1; 104. Upper pressure plate; 2. Rotating assembly; 201. Turntable; 202. Mounting hole; 203. Pressing pipe; 204. Connecting ear; 205. Motor No. 1; 3. Discharging assembly; 301. Stepped pipe; 302. Discharging pipe; 303. Ejector pin; 304. Hydraulic cylinder No. 2; 305. T-shaped rotating shaft; 306. Arc-shaped support plate; 307. Lower pressure plate; 308. Connecting seat; 309. Coil spring; 4. Detection assembly; 401. Support frame; 402. Slide rail; 403. Limit plate; 404. Pressure sensor; 405. Rack; 406. Gear; 407. Motor No. 2. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] Please see Figure 1-5In this embodiment of the present invention, a semiconductor lamination production equipment includes a lamination machine body 1, a rotating component 2 disposed inside the lamination machine body 1, a feeding component 3 fixedly installed on the lower inner surface of the lamination machine body 1, the feeding component 3 including a stepped tube 301 fixedly embedded in the lower inner surface of the lamination machine body 1, a second hydraulic cylinder 304 fixedly installed at the bottom of the lamination machine body 1, a lower pressure plate 307 slidably connected inside the stepped tube 301, and a detection component 4 fixedly installed on the upper inner surface of the lamination machine body 1, the detection component 4 including a support frame 401, a slide rail 402 fixedly installed at the upper end of the support frame 401, a limit plate 403 slidably connected inside the slide rail 402, and a pressure sensor 404 fixedly embedded at one end of the upper surface of the limit plate 403.

[0031] Specifically, the rotating component 2 adjusts the position of multiple pressing tubes 203 so that the material moves below the upper pressing plate 104, and the lower pressing plate 307 presses the material. The detection component 4 detects and limits the position and pressure of the lower pressing plate. After pressing, the material is smoothly discharged through the feeding component 3.

[0032] Example 1

[0033] like Figure 1-4 As shown, in this embodiment, a feeding pipe 101 is fixedly embedded in the upper surface of the press body 1, a solenoid valve 102 is fixedly installed at the lower end of the feeding pipe 101, a hydraulic cylinder 103 is fixedly embedded in the upper surface of the press body 1, and the output end of the hydraulic cylinder 103 is fixedly connected to the upper pressure plate 104 through a flange; the rotating assembly 2 includes: a turntable 201 rotatably connected to the inside of the press body 1, multiple mounting holes 202 are equally angled on one side surface of the turntable 201, multiple pressing pipes 203 are movably inserted into the multiple mounting holes 202 respectively, a motor 205 capable of driving the turntable 201 to rotate is fixedly installed on the lower surface inside the press body 1, and connecting ears 204 are symmetrically fixedly installed inside the pressing pipes 203, and the connecting ears 204 are detachably connected to the turntable 201 by bolts.

[0034] In this embodiment, the material to be pressed is filled inside the feeding pipe 101, the solenoid valve 102 controls the feeding of the material, the first hydraulic cylinder 103 pushes the upper pressure plate 104 to move down, so that the upper pressure plate 104 presses the material inside the pressing pipe 203. After pressing, the first motor 205 runs, driving the turntable 201 to rotate and adjust the position of multiple pressing pipes 203 to facilitate continuous pressing of materials. The pressing pipe 203 is detachably connected to the turntable 201 by bolts, so that it is easy to disassemble.

[0035] like Figure 5As shown, in this embodiment, a rack 405 is fixedly installed on the lower surface of the limiting plate 403, and a gear 406 that meshes and drives the rack 405 is rotatably connected inside the support frame 401. A second motor 407 that can drive the gear 406 to rotate is fixedly installed on one side surface of the support frame 401.

[0036] In specific implementation, when the upper pressure plate 104 moves down for pressing, the second motor 407 operates, driving the gear 406 to rotate. Through the meshing transmission of the gear 406 and the rack 405, the rack 405 drives the limiting plate 403 to slide inside the slide rail 402, moving the pressure sensor 404 between the upper pressure plate 104 and the flange above it. When the flange moves down, it abuts against the pressure sensor 404 to detect pressure changes and assist in controlling the extension accuracy of the first hydraulic cylinder 103. Thus, the flange above the upper pressure plate 104 abuts against the pressure sensor 404 to detect the pressing pressure. At the same time, when the pressure is high, the limiting plate 403 abuts against the bottom of the flange to limit the maximum downward movement distance of the upper pressure plate 104, thereby avoiding excessive pressure caused by the decrease in the accuracy of the first hydraulic cylinder 103 and damaging the material, thus improving the accuracy of material pressing.

[0037] Example 2

[0038] Based on Example 1, in order to compensate for the problem that the pressing material is placed horizontally above the lower pressure plate 307 and is not easy to discharge smoothly.

[0039] like Figure 2-4 As shown, in this embodiment, a feed pipe 302 is fixedly embedded on the outer surface of the stepped tube 301. A T-shaped rotating shaft 305 is fixedly installed at the output end of the second hydraulic cylinder 304 through a flange. A connecting seat 308 is rotatably connected to the outer side of the T-shaped rotating shaft 305. The connecting seat 308 is fixedly connected to the lower pressure plate 307. A ejector pin 303 is fixedly installed at the lower end of the stepped tube 301. Coil springs 309 are fixedly installed on both sides of the connecting seat 308. The two ends of the coil springs 309 are fixedly connected to the T-shaped rotating shaft 305 and the connecting seat 308, respectively. An arc-shaped support plate 306 is symmetrically fixedly installed on the outer surface of the T-shaped rotating shaft 305.

[0040] In practice, the second hydraulic cylinder 304 extends, pushing the lower pressure plate 307 upward. The spring force of the coil spring 309 gives the lower pressure plate 307 the force to flip to one side. Through the limiting of the arc-shaped support plate 306, the lower pressure plate 307 flips to a horizontal state and slides in connection with the upper half of the stepped tube 301. After the material is pressed, the limiting plate 403 moves out, the lower pressure plate 307 moves down, and the upper pressure plate 104 moves down accordingly, so that the lower pressure plate 307 drives the pressed material to move down to the lower half of the stepped tube 301. Then the upper pressure plate 104 moves up, and when the lower pressure plate 307 moves down, it abuts against the ejector pin 303, so that the lower pressure plate 307 drives the pressed material to flip to one side, flipping the pressed material into the feed tube 302, so that the pressed material moves downward at an angle, thus making it easier for the pressed material to be discharged smoothly.

[0041] In this utility model, in order to facilitate the operator's control of the utility model, a PLC controller can be set up, and the solenoid valve 102, hydraulic cylinder 103, motor 205, hydraulic cylinder 304, pressure sensor 404 and motor 407 are all electrically connected to the PLC controller. The PLC controller is existing technology and will not be described in detail here.

[0042] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0043] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A semiconductor lamination production apparatus comprising a lamination machine body (1), characterized in that, Include: Rotary assembly (2) is arranged in the inside of the laminating machine body (1); Blanking assembly (3) is fixedly installed on the lower surface of the laminating machine body (1), the blanking assembly (3) includes a stepped pipe (301) fixedly embedded on the lower surface of the laminating machine body (1), the bottom of the laminating machine body (1) is fixedly installed with a No. 2 hydraulic cylinder (304), and the stepped pipe (301) is slidably connected with a lower pressing disc (307) inside; Detection assembly (4) is fixedly installed on the upper surface of the laminating machine body (1), the detection assembly (4) includes a support frame (401), the upper end of the support frame (401) is fixedly installed with a sliding rail (402), the sliding rail (402) is slidably connected with a limiting plate (403) inside, and the upper surface of the limiting plate (403) is fixedly embedded with a pressure sensor (404) at one end.

2. The semiconductor laminate production apparatus according to claim 1, characterized by The upper end surface of the laminating machine body (1) is fixedly embedded with a feeding pipe (101), the lower end of the feeding pipe (101) is fixedly installed with a solenoid valve (102), the upper end surface of the laminating machine body (1) is fixedly embedded with a No. 1 hydraulic cylinder (103), and the output end of the No. 1 hydraulic cylinder (103) is fixedly connected with an upper pressing disc (104) through a flange.

3. The semiconductor laminate production apparatus according to claim 1, characterized by The lower surface of the limiting plate (403) is fixedly installed with a rack (405), the support frame (401) is rotatably connected with a gear (406) in meshing transmission connection with the rack (405) inside, and the side surface of the support frame (401) is fixedly installed with a No. 2 motor (407) capable of driving the gear (406) to rotate.

4. The semiconductor laminate production apparatus according to claim 1, characterized by The rotary assembly (2) comprises: Rotary disc (201) is rotatably connected to the inside of the laminating machine body (1); A plurality of mounting holes (202) are formed at equal angles on the side surface of the rotary disc (201); A plurality of pressing pipes (203) are respectively movably inserted into the plurality of mounting holes (202).

5. The semiconductor laminate production apparatus according to claim 4, characterized by The inside of the pressing pipe (203) is fixedly installed with a connecting lug (204) symmetrically, the connecting lug (204) is detachably connected with the rotary disc (201) through bolts, and the lower surface of the laminating machine body (1) is fixedly installed with a No. 1 motor (205) capable of driving the rotary disc (201) to rotate.

6. The semiconductor laminate production apparatus according to claim 1, characterized by The lower surface of the limiting plate (403) is fixedly installed with a rack (405), the support frame (401) is rotatably connected with a gear (406) in meshing transmission connection with the rack (405) inside, and the side surface of the support frame (401) is fixedly installed with a No. 2 motor (407) capable of driving the gear (406) to rotate.

7. The semiconductor laminate production apparatus according to claim 6, wherein The inside of the stepped pipe (301) is fixedly installed with a thimble (303) at the lower end, the side surfaces of the connecting seat (308) are fixedly installed with a coil spring (309), the two ends of the coil spring (309) are respectively fixedly connected with the T-shaped rotating shaft (305) and the connecting seat (308), and the outer side surface of the T-shaped rotating shaft (305) is fixedly installed with an arc-shaped supporting plate (306) symmetrically.

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