Equipment internal part for increasing flux of chlorosilane

Abstract

The utility model discloses an equipment internal part for increasing the flux of chlorosilane, which relates to the technical field of polycrystalline silicon equipment and comprises a distribution plate, four filter elements are detachably mounted on the lower surface of the distribution plate, the bottom ends of the filter elements are inserted into the inner side of a circular tube of a support frame, the outer surfaces of the filter elements are wrapped with filter screens, and the filter screens are arranged in the distribution plate. The bottom end of the filter screen is inserted into the inner side of the round pipe of the support frame; the distribution disc and the support frame are mounted in the shell of the filter; the utility model has the advantages that the distribution disc, the filter elements and the support frame are improved again, the quantity of the filter elements is reduced, the diameters of the filter holes are increased, the flux of slurry passing through the filter elements is greatly improved, the filter elements can be effectively protected from being blocked easily by wrapping the filter screens outside the filter elements, and the maintenance cost is reduced by replacing the filter screens.

Description

Technical fields:

[0001] This utility model relates to the field of polycrystalline silicon equipment technology, specifically to an internal component of an equipment for increasing the throughput of chlorosilanes. Background technology:

[0002] In the polysilicon production process, the slurry (chlorosilane) discharged from cold hydrogenation is allowed to settle. The supernatant still contains microsilica powder and metal impurities that are invisible to the naked eye. If it is directly sent to the next process, the microsilica powder and metal impurities will gradually encapsulate into large lumps under the action of complexing agents, clogging equipment and pipelines and affecting the long-term stable operation of the equipment.

[0003] The existing patent authorization announcement number CN220676960U discloses a liquid phase filter, the main purpose of which is to improve the cleaning efficiency of metal sintered filter elements, avoid frequent replacement, isolation, disassembly and cleaning of metal sintered filter elements, and solve the problem of short service life of metal sintered filter elements.

[0004] The current problem is that the filter element uses micron-sized pores, and the application uses 55 filter elements, which increases the resistance surface and reduces the flow rate of slurry (chlorosilane) through the filter element. At the same time, the micron-sized pores are too small and the lumpy material is large, which can easily cause the pores to become clogged. This leads to the need for frequent replacement and maintenance. Each maintenance requires lifting the filter element and distribution plate at the same time, which is risky and requires a lot of manpower and resources. Utility Model Content:

[0005] The purpose of this invention is to provide an internal component of a device that increases the throughput of chlorosilanes, thereby solving the problems mentioned in the background art.

[0006] This utility model is implemented by the following technical solution:

[0007] An internal component of a device for increasing the throughput of chlorosilane includes a distribution disc with four filter elements detachably mounted on its lower surface. The bottom ends of the filter elements are inserted into the inner side of a circular tube of a support frame. The outer surfaces of the filter elements are covered with filter screens, the bottom ends of which are inserted into the inner side of the circular tube of the support frame. The distribution disc and the support frame are installed inside the housing of the filter.

[0008] Preferably, the surface of the distribution plate has four circumferentially distributed through holes, and the flange end of the top of the filter element is fixed to the lower surface of the distribution plate by bolts, with the filter element located below the through holes.

[0009] Preferably, the diameter of the through hole is 230mm, the diameter of the filter element is 225mm, the length of the filter element is 800mm, the surface of the filter element is provided with filter holes with a diameter of 8mm, the spacing between the filter holes is 10mm, and the mesh count of the filter screen is 1000.

[0010] Preferably, the support frame includes an annular plate, a cross support rod, and four circular tubes; the cross support rod is fixed to the inner surface of the center of the annular plate, and the four circular tubes are circumferentially distributed and fixed on the cross support rod.

[0011] The advantages of this utility model are: by redesigning the distribution plate, filter element, and support frame, by reducing the number of filter elements and increasing the diameter of the filter holes, the slurry throughput through the filter element is greatly improved. By wrapping the filter element with a filter screen, the filter element can be effectively protected from clogging. By replacing the filter screen, maintenance costs are reduced. Attached image description:

[0012] Figure 1 This is a schematic diagram of the internal structure of the present invention;

[0013] Figure 2 This is a schematic diagram of the distribution disk structure;

[0014] Figure 3 This is a schematic diagram of the filter element structure;

[0015] Figure 4 This is a schematic diagram of the support frame.

[0016] In the diagram: 1. Distribution plate, 1.1. Through hole, 2. Filter element, 3. Support frame, 3.1. Annular plate, 3.2. Cross support rod, 3.3. Round tube, 4. Filter screen. Detailed implementation method:

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Please see Figure 1-4 This utility model provides a technical solution for increasing the throughput of chlorosilane internals in an equipment:

[0019] An internal component for increasing the throughput of chlorosilane includes a distribution plate 1, filter elements 2, and a support frame 3; the distribution plate 1 and the support frame 3 are installed inside the filter housing. Four filter elements 2 are detachably mounted on the lower surface of the distribution plate 1. Specifically, the surface of the distribution plate 1 has four circumferentially distributed through holes 1.1. The flange ends of the filter elements 2 are bolted to the lower surface of the distribution plate 1, and the filter elements 2 are located below the through holes 1.1 for easy disassembly and replacement.

[0020] The bottom end of filter element 2 is inserted into the inner side of the round tube 3.3 of support frame 3. The outer surface of filter element 2 is covered with filter screen 4, and the bottom end of filter screen 4 is also inserted into the inner side of the round tube 3.3 of support frame 3. This achieves a double-layer filtration effect. The slurry is first filtered through filter screen 4, and then filtered a second time through filter element 2. This significantly reduces the occurrence of filter clogging. During maintenance, only filter screen 4 needs to be replaced, reducing maintenance costs.

[0021] The support frame 3 includes: an annular plate 3.1, a cross support rod 3.2, and four round tubes 3.3; the cross support rod 3.2 is fixed to the inner surface of the center of the annular plate 3.1, and the four round tubes 3.3 are circumferentially distributed and fixed on the cross support rod 3.2. The support frame 3 can prevent the filter element 2 from accidentally falling off.

[0022] Both the distribution plate 1 and the support frame 3 have a diameter of 900 mm. The diameter of the through hole 1.1 is 230 mm, the diameter of the filter element 2 is 225 mm, the length of the filter element 2 is 800 mm, and the surface of the filter element 2 has filter holes with a diameter of 8 mm. The spacing between the filter holes is 10 mm, and the filter screen 4 has a mesh count of 1000 and a pore size of 5-8 mm. By increasing the pore size, the flow rate of the slurry (chlorosilane) through the filter element is increased.

[0023] Based on the liquid phase filter mentioned in the background art, the purpose of the device components in this application is to replace the distribution plate, fixed plate, and sintered metal filter element in the existing liquid phase filter in order to improve the filter's performance.

[0024] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An internal component of a device for increasing the throughput of chlorosilanes, comprising a distribution disk (1), characterized in that: The lower surface of the distribution plate (1) is detachably equipped with four filter elements (2). The bottom end of the filter element (2) is inserted into the inner side of the round tube (3.3) of the support frame (3). The outer surface of the filter element (2) is wrapped with a filter screen (4). The bottom end of the filter screen (4) is inserted into the inner side of the round tube (3.3) of the support frame (3). The distribution plate (1) and the support frame (3) are installed inside the housing of the filter.

2. The internal component of the device for increasing the throughput of chlorosilanes according to claim 1, characterized in that: The surface of the distribution plate (1) has four through holes (1.1) arranged in a circle. The flange end of the top of the filter element (2) is fixed to the lower surface of the distribution plate (1) by bolts. The filter element (2) is located below the through holes (1.1).

3. The internal component of the device for increasing the throughput of chlorosilanes according to claim 2, characterized in that: The diameter of the through hole (1.1) is 230mm, the diameter of the filter element (2) is 225mm, the length of the filter element (2) is 800mm, the surface of the filter element (2) is provided with filter holes with a diameter of 8mm, the spacing between the filter holes is 10mm, and the mesh number of the filter screen (4) is 1000.

4. The internal component of the device for increasing the throughput of chlorosilanes according to claim 1, characterized in that: The support frame (3) includes an annular plate (3.1), a cross support rod (3.2), and four round tubes (3.3); the cross support rod (3.2) is fixed on the inner surface of the center of the annular plate (3.1), and the four round tubes (3.3) are circumferentially distributed and fixed on the cross support rod (3.2).

Images