TFL lifting basket structure for preventing edge of wafer from being adhered to rack clamping fence
By designing a TFL basket structure to prevent wafer edge adhesion and using an inclined storage slot to tilt and lock the wafer holder, the problem of poor cleaning caused by wafer edge adhesion is solved, and the wafer cleaning and rinsing are made more thorough.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-07
- Publication Date
- 2026-04-03
AI Technical Summary
The edges of the wafers are prone to sticking to the wafer holders, resulting in poor cleaning performance and color differences and abnormal parameters.
Design a TFL basket structure to prevent wafer edges from adhering to the wafer holder rails, including a base frame, crossbars, vertical bars and support units. The support units are provided with inclined storage slots, and the wafer holders are inclinedly locked into the storage slots to ensure that the wafer edges are detached from the rails.
The tilted design prevents wafer edge adhesion, ensuring thorough wafer cleaning and rinsing, and improving cleaning effectiveness.
Smart Images
Figure CN224084013U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a TFL basket structure for preventing wafer edges from adhering to the wafer carrier rails, belonging to the field of integrated circuit or discrete device chip manufacturing technology. Background Technology
[0002] In discrete device manufacturing, the cleaning process is integral to the entire chip manufacturing process, and the quality of cleaning largely determines product performance. During the cleaning process, the edges of the wafers in the die holder are prone to adhering to the die holder rails. If the front edge of the wafer adheres to the die holder rails, it will lead to poor cleaning and rinsing effects in that adhered area, resulting in abnormal color differences and even abnormal parameters. Summary of the Invention
[0003] The technical problem to be solved by this utility model is to provide a TFL basket structure that prevents wafer edges from adhering to the wafer holder rails, which is simple in structure, easy to use, avoids wafer edges from adhering to the wafer holder rails, and improves the cleaning effect.
[0004] The technical solution adopted by this utility model to solve the above problems is as follows: a TFL basket structure for preventing wafer edges from adhering to the wafer rack tray, including a bottom frame, a horizontal bar above the bottom frame, and the two ends of the horizontal bar being fixedly connected to the bottom frame by vertical bars respectively; two symmetrically arranged support units are provided in the bottom frame, and each support unit has an inclined storage slot, the distance between the two storage slots is matched with the width of the wafer rack, and the wafer rack is placed in the storage slot, so that the wafer rack is inclined.
[0005] Each of the aforementioned support units includes a first support rod and a second support rod arranged in parallel front to back. The first support rod is located behind the second support rod. One end of the first support rod and one end of the second support rod are respectively aligned with the inner wall of the bottom frame. The first support rod and the second support rod are fixed to the bottom frame by connecting screws. An inclined first groove is formed at the top of the other end of the first support rod, and an inclined second groove is formed at the top of the other end of the second support rod.
[0006] The tilt angle of the second groove is greater than that of the first groove.
[0007] The depth of the first groove and the second groove is 0.3-0.6cm.
[0008] The bottom frame, crossbars, vertical bars, and support units are all made of TFL material.
[0009] Compared with the prior art, the advantages of this utility model are: a TFL basket structure that prevents wafer edges from adhering to the wafer holder rails is simple in structure and easy to use. The wafer holder is tilted and locked in the storage slot, so that the front or back edge of the wafer in the wafer holder is detached from the wafer holder rails, ensuring that the wafer is thoroughly cleaned and rinsed, and improving the cleaning effect. Attached Figure Description
[0010] Figure 1 This is a front view of a TFL basket structure (for placing wafer holders) according to an embodiment of the present invention to prevent wafer edges from adhering to the wafer holder tray.
[0011] Figure 2 for Figure 1 Side view;
[0012] Figure 3 for Figure 1 A cross-sectional view (without the film holder);
[0013] Figure 4 for Figure 2 A cross-sectional view (without the film holder);
[0014] In the figure, 1 is the base frame, 2 is the vertical rod, 3 is the horizontal rod, 4 is the plate frame, 5 is the connecting rod, 6 is the connecting screw, 7 is the first support rod, 7.1 is the first groove, 8 is the second support rod, and 8.1 is the second groove. Detailed Implementation
[0015] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.
[0016] like Figure 1-4 As shown in this embodiment, a TFL basket structure for preventing wafer edges from adhering to the wafer rack holder includes a hollow base frame 1. A horizontal bar 3 is positioned above the base frame 1, with both ends of the horizontal bar 3 fixedly connected to the base frame 1 via vertical bars 2, making the horizontal bar 3 and base frame 1 a single unit. The horizontal bar serves as a handle for easy lifting of the base frame. Two symmetrically arranged support units are located within the base frame 1. Each support unit has an inclined storage slot, the distance between which matches the width of the wafer rack. The wafer rack containing the wafers is secured within the storage slot, resulting in an inclined arrangement of the wafer rack. By adjusting the orientation of the wafer rack, different inclination directions are achieved, ensuring that the front or back edges of the wafers in the wafer rack are completely detached from the wafer rack holder, preventing wafer edges from adhering to the holder and ensuring thorough cleaning and rinsing of the wafer's cleaning surface.
[0017] Each support unit includes a first support rod 7 and a second support rod 8 arranged in parallel front to back. The first support rod 7 is located behind the second support rod 8, and the height of the first support rod 7 is higher than the height of the second support rod 8. One end of the first support rod 7 and one end of the second support rod 8 abut against the inner wall of the bottom frame. The other ends of the first support rod and the second support rod are respectively threaded with horizontally arranged connecting screws 6, which pass through the bottom frame 1. Nuts are then screwed onto the connecting screws 6, so that the first support rod 7 and the second support rod 8 are fastened to the bottom frame. A first groove 7.1 is inclinedly formed at the top of the other end of the first support rod 7, and a second groove 8.1 is inclinedly formed at the top of the other end of the second support rod. The first groove and the second groove on the same side form a storage groove.
[0018] The inclination angle of the second groove is greater than that of the first groove (i.e., the angle between the second groove and the horizontal plane is greater than the angle between the first groove and the horizontal plane). The depth of both the first and second grooves is 0.5 cm.
[0019] The aforementioned base frame, horizontal bar, vertical bar, first support rod, second support rod, screw, and nut are all made of TFL material.
[0020] This application has a simple structure and is easy to use. The wafer holder is tilted and locked in the storage slot, so that the front or back edge of the wafer in the wafer holder is detached from the wafer holder rail, ensuring that the wafer is thoroughly cleaned and rinsed, and improving the cleaning effect.
[0021] In addition to the above embodiments, this utility model also includes other implementation methods. All technical solutions formed by equivalent transformation or equivalent substitution should fall within the protection scope of the claims of this utility model.
Claims
1. A TFL basket structure to prevent wafer edge sticking to the slot of the cassette, characterized by: The utility model provides a bookshelf, including bottom frame, be equipped with crosspiece above the bottom frame, crosspiece both ends respectively pass through vertical rod and bottom frame fixed connection, be equipped with two symmetrical arrangement's support unit in bottom frame, the support unit is respectively set up and is arranged the inclinedly of thing groove, the interval between two thing grooves is matched with the width of the bookshelf, and the bookshelf is located in thing groove, makes the bookshelf be arranged obliquely.
2. The TFL basket structure to prevent wafer edge sticking on the slot of the cassette according to claim 1, wherein: Any support unit respectively includes first support rod and second support rod that are arranged in parallel before and after, first support rod is equipped with second support rod back side, first support rod one end, second support rod one end are respectively to the inner wall of bottom frame, first support rod, second support rod are fixed in the bottom frame through connecting screw rod, the other end top of first support rod is set up and is arranged the inclinedly of first recess, the other end top of second support rod is set up and is arranged the inclinedly of second recess.
3. The TFL basket structure to prevent wafer edge sticking on the slot of the cassette according to claim 2, wherein: The inclination angle of the second recess is greater than the inclination angle of the first recess.
4. The TFL basket structure to prevent wafer edge sticking to the slot of the cassette according to claim 2, wherein: The depth of the first recess and the second recess is 0.3-0.6cm.
5. The TFL basket structure to prevent wafer edge sticking to the slot of the cassette according to claim 1, wherein: The bottom frame, crosspiece, vertical rod, support unit are all made of TFL material.