Silicon core growth furnace

Abstract

The utility model discloses a silicon core growing furnace which comprises a main furnace body, an auxiliary furnace body, a lifting device, a synchronous lifting device and a thermal field, and a crucible is arranged in the main furnace body; the auxiliary furnace body is arranged above the main furnace body, and the auxiliary furnace body is communicated with the main furnace body to form a crystal pulling channel positioned above the crucible; the lifting device is arranged in the crystal pulling channel, the lifting device has the moving freedom degree of moving in the axial direction of the crystal pulling channel, the lifting device comprises a first installation part and a second installation part, the second installation part is configured to move in the axial direction of the crystal pulling channel relative to the first installation part, the number of the lifting heads is multiple, and the first installation part and the second installation part can move in the axial direction of the crystal pulling channel. And the plurality of lifting heads are respectively connected with the first mounting piece and the second mounting piece. The technical problem that the growth states of inner and outer ring silicon core rods are different in the silicon core drawing process in the prior art is solved, and the technical effect of improving the crystal drawing efficiency and quality of the silicon core growing furnace is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of crystal growth furnace, in particular to a silicon core growth furnace.

[0002] BACKGROUND .

[0003] The silicon core growth furnace is a special equipment for drawing silicon core from polycrystalline silicon rod by using the Czochralski method under the condition of filling gas (protective gas), which is mainly used for the production of silicon core as a polycrystalline silicon growth carrier and has important application value in the solar photovoltaic industry and semiconductor production.

[0004] In the prior art, when a plurality of silicon core rods are drawn at one time, the silicon core rods are generally divided into inner and outer circles, and the hot field is arranged outside the outermost silicon core rod, so that the growth states of the inner and outer circle silicon core rods are different during the drawing process, thereby causing the diameter difference of the silicon core rods and reducing the productivity and yield of the silicon core drawing.

[0005] Therefore, the problem in the prior art is that the growth states of the inner and outer circle silicon core rods are different. SUMMARY

[0006] In order to solve the problems in the prior art, the purpose of the present application is to provide a silicon core growth furnace, so that the growth states of the inner and outer circle silicon core rods are the same during the crystal pulling process, thereby improving the crystal pulling efficiency and quality of the silicon core growth furnace.

[0007] To achieve the above purpose, the technical scheme adopted by the present application is as follows:

[0008] A silicon core growth furnace comprises a main furnace body, a secondary furnace body, a pulling device, a synchronous lifting device and a hot field, wherein the main furnace body is provided with a crucible; the secondary furnace body is arranged above the main furnace body and communicates with the main furnace body to form a crystal pulling channel above the crucible; the pulling device is arranged in the crystal pulling channel and has a moving degree of freedom in the axial direction of the crystal pulling channel, and the pulling device comprises a first mounting member, a second mounting member and a plurality of pulling heads, the second mounting member is configured to move relative to the first mounting member in the axial direction of the crystal pulling channel, and the plurality of pulling heads are connected with the first mounting member and the second mounting member respectively.

[0009] As a preferred, the pulling head has a plurality of groups, and the plurality of groups of pulling heads are arranged in sequence from inside to outside, and each group of pulling heads has one of annular shape and regular polygonal shape.

[0010] As a preferred, the first mounting member is provided with a movable channel, the movable channel penetrates through the first mounting member in the axial direction of the crystal pulling channel, and the movable channel is used for the movement of the second mounting member.

[0011] As preferred, the first mounting member comprises: an upper plate body, a lower plate body, and a third guide rod, the lower plate body is arranged below the upper plate body, the lower plate body is provided with a movable channel; the third guide rod is arranged between the upper plate body and the lower plate body, and the first end and the second end of the third guide rod are fixedly connected with the upper plate body and the lower plate body respectively.

[0012] As preferred, the second mounting member comprises: a movable plate and a connecting rod, the movable plate is movably connected with the third guide rod, and the movable plate is configured to reciprocate along the axial direction of the third guide rod; the first end of the connecting rod is connected with the movable plate, the second end of the connecting rod is connected with the pulling head, and the connecting rod is configured to reciprocate along the vertical direction in the movable channel.

[0013] As preferred, the pulling device further comprises a rotary driving assembly, the rotary driving assembly is installed on the movable plate, and the rotary driving assembly comprises: an output member and a plurality of transmission members, the output member is located at the central part of the movable plate, the transmission members are arranged around the output member, and the transmission members are arranged correspondingly with the pulling head.

[0014] As preferred, the pulling device further comprises a lifting driving assembly, the lifting driving assembly is installed on the upper plate body, and the lifting driving assembly comprises at least one moving end, the moving end has a vertical movement degree of freedom, and the moving end is connected with the movable plate to drive the movement of the movable plate.

[0015] As preferred, a limiting unit is further included, the limiting unit is connected with the movable plate, and the limiting unit is used to limit the movement of the movable plate.

[0016] As preferred, a water-cooled heat shield body is further included, the water-cooled heat shield is located in the crystal pulling channel, and the water-cooled heat shield body comprises at least one cooling channel for the silicon core to pass through.

[0017] As preferred, the main furnace body further comprises an isolation valve, the isolation valve is arranged on the upper part of the main furnace body, the isolation valve is connected with the auxiliary furnace body, and the isolation valve is used to control the communication and closure of the main furnace body and the auxiliary furnace body.

[0018] As preferred, the rotary driving assembly comprises an output shaft and a plurality of gears, the gears are installed on the lower plate body, the gears are movably connected with the lower plate body, the gears have a rotation degree of freedom along the axis thereof, the gears are fixedly connected with the pulling head, and the gears are used to drive the pulling head to rotate synchronously.

[0019] Preferably, the lifting head includes a graphite connecting section and a counterweight arranged sequentially in a vertical direction. The graphite connecting section is used for installing the seed material, which is used to enter the crucible to grow silicon core rods.

[0020] Beneficial effects: This application provides a silicon core growth furnace, including a pulling device, wherein the pulling device includes at least a first mounting member and a second mounting member that can move vertically relative to the first mounting member. Multiple pulling heads are respectively mounted on the first mounting member and the second mounting member. During the crystal pulling process, the second mounting member can move relative to the first mounting member along the axial direction of the crystal pulling channel, so that the crystal growth state corresponding to the pulling heads of different heights is nearly consistent when pulling the silicon core rod, thereby reducing the diameter difference between the inner and outer rings during the growth of the silicon core rod and improving the productivity and yield of silicon core pulling. Attached Figure Description

[0021] Figure 1 This is a left view of a silicon core growth furnace according to an embodiment of this application;

[0022] Figure 2 This is a front view of a silicon core growth furnace according to an embodiment of this application;

[0023] Figure 3 for Figure 2 Enlarged view of section A in the middle;

[0024] Figure 4 This is a schematic diagram of the structure of a silicon core growth furnace according to an embodiment of this application;

[0025] Figure 5 This is a schematic diagram of the structure of the second auxiliary furnace body during installation in an embodiment of this application;

[0026] Figure 6 This is a schematic diagram of the structure of the second auxiliary furnace body during installation in an embodiment of this application;

[0027] Figure 7 This is a schematic diagram of the structure of the second auxiliary furnace body in the embodiments of this application;

[0028] Figure 8 for Figure 7 A cross-sectional view along the AA direction;

[0029] Figure 9 This is a schematic diagram of the structure of a furnace body driving device in an embodiment of this application;

[0030] Figure 10 This is a schematic diagram of the structure of a position adjustment device according to an embodiment of this application;

[0031] Figure 11 for Figure 8 A partial structural diagram of the mid-position adjustment device;

[0032] Figure 12 This is a schematic diagram of another position adjustment device in an embodiment of this application;

[0033] Figure 13 for Figure 10 Top view of the center position adjustment device;

[0034] Figure 14 This is a partial structural schematic diagram of a silicon core growth furnace according to an embodiment of this application;

[0035] Figure 15 This is a cross-sectional view of the water-cooled heat shield device in the embodiments of this application;

[0036] Figure 16 This is a front view of the lifting device in an embodiment of this application;

[0037] Figure 17 This is a cross-sectional view of the lifting device in the embodiments of this application;

[0038] Figure 18 This is a top view of the lifting device in the embodiments of this application;

[0039] Figure 19 This is a schematic diagram of the lifting device in the embodiments of this application;

[0040] Figure 20 This is a front view of the synchronous lifting device in the embodiments of this application;

[0041] Figure 21 This is a schematic diagram of crucible installation in an embodiment of this application;

[0042] Figure 22 This is a schematic diagram of the synchronous lifting device in the embodiments of this application.

[0043] In the attached drawings, the reference numerals are as follows: 100, main furnace body; 110, crucible; 120, first guide rod; 130, isolation valve; 200, auxiliary furnace body; 210, first auxiliary furnace body; 211, first part; 212, second part; 2121, cooling water channel; 210a, crystal pulling channel; 220, second auxiliary furnace body; 221, first flange; 222, water-cooled layer; 2221, water-cooled channel; 2222, water-cooled guide bar; 2223, connecting pipe head; 223. Second flange; 224, guide plate; 220a, re-feeding channel; 300, furnace body drive device; 310, rotating shaft; 320, first drive component; 330, second drive component; 331, bearing part; 400, lifting device; 410, first mounting component; 411, upper plate; 412, lower plate; 413, second guide rod; 410a, movable channel; 420, second mounting component; 421, movable plate; 422, connecting rod; 430, lifting head; 4 40. Rotary drive assembly; 441. Output component; 442. Transmission component; 450. Lifting drive assembly; 500. Water-cooled heating screen device; 510. Water-cooled heating screen body; 520. Lifting assembly; 600. Re-throwing component; 700. Position adjustment device; 710. Built-in drive block; 720. External drive component; 730. First drive assembly; 731. Mounting ring; 732. First moving component; 733. Second moving component; 800. Guide device; 810. Third guide rod; 811, First rod body; 812, Second rod body; 820, Mounting flange; 900, Limiting unit; 1000, Synchronous lifting device; 1010, First motor; 1020, Motor water-cooled section; 1030, Mounting plate; 1040, Support frame; 1041, Upper frame body; 1042, Lower frame body; 1043, Flexible connector; 1050, Telescopic sleeve; 1100, Hot zone; 1110, Heater; 1120, Second motor. Detailed Implementation

[0044] To enable those skilled in the art to better understand the present application, the technical solutions in specific embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings.

[0045] It should be noted that the terms "first," "second," and similar terms used in this application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, "a" or "one," and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. "A plurality" or "several" indicates at least two. Unless otherwise stated, terms such as "front," "back," "left," "right," "lower," and / or "upper" are for illustrative purposes only and are not limited to a location or spatial orientation. Terms such as "comprising" or "including" indicate that the elements or objects preceding "comprising" encompass the elements or objects listed following "comprising" or "including" and their equivalents, and do not exclude other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect.

[0046] The singular forms “a,” “the,” and “the” used in this application specification and appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0047] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

[0048] like Figure 1 As shown, the silicon core growth furnace includes a main furnace body 100, a furnace body 200, a pulling head 430, and a water-cooled heat shield body 510. A crucible 110 is housed within the main furnace body 100. The auxiliary furnace body 200 is located above the main furnace body 100 and is detachably connected to the main furnace body 100. Specifically, the main furnace body 100 includes a main furnace body and a furnace chamber. The main furnace body is used to form the crystal pulling environment. At least one crucible 110 is disposed within the main furnace body 100. The crucible 110 is preferably made of quartz material and is used to hold silicon material. A heating field 1100 is also included, disposed within the main furnace body 100, for heating the crucible 110. Heating by the heating field 1100 melts the solid silicon material within the crucible 110, forming liquid silicon material.

[0049] The lifting head 430 has multiple lifting heads, with two or more, so that the silicon core growth furnace in this application can process multiple silicon core rods at one time by setting multiple lifting heads 430. The lifting head 430 includes a steel wire rope, a graphite connecting section and a counterweight arranged in sequence along the vertical direction. The graphite connecting section is used for the installation of the seed material, which can enter the solution in the crucible 110 for growing silicon core rods.

[0050] A water-cooled hot shield device 500 includes a water-cooled hot shield body 510 and cooling channels disposed on the water-cooled hot shield body 510. The cooling channels are used for the pulled silicon cores to pass through. In one embodiment, the cooling channels are vertically arranged and adapted to the silicon core rod, allowing the grown silicon core rod to pass through. In one embodiment, multiple cooling channels are provided, and the number of cooling channels is greater than or equal to the number of lifting heads 430. The auxiliary furnace body 200 is connected to the main furnace body 100 and is used to temporarily accommodate the silicon core rod during the pulling process, while also serving to observe and adjust the growth state of the silicon core rod.

[0051] In existing technologies, conventional silicon core growth furnaces typically consist of only a single auxiliary furnace body 200, which handles crystal pulling, growth, and refeeding operations. To avoid contamination of the silicon core material, the crystal pulling process usually needs to be paused before the refeeding operation can proceed. Performing both operations within the same auxiliary furnace body 200 wastes a significant amount of time.

[0052] In existing technologies, the lifting head 430 of a silicon core growth furnace is generally built into the auxiliary furnace body 200. The water-cooled heat shield structure mostly adopts a combination structure of water-cooled cylinder and water-cooled plate. When processing multiple silicon core rods at one time, as the number of processing increases, the volume of the water-cooled heat shield body 510 also increases, and the gap between the water-cooled heat shield body 510 and the inner wall of the auxiliary furnace body 200 will also become smaller. Since the water-cooled heat shield body needs to be moved during the silicon material refeeding step, if the gap between the water-cooled heat shield body and the inner wall of the auxiliary furnace body becomes smaller and smaller, it will make it very difficult to replace the water-cooled heat shield body 510. This leads to the problems of unsuccessful silicon core refeeding or low refeeding efficiency and long refeeding time in existing technologies. Meanwhile, it is necessary to consider that since the silicon-growing furnace needs to pull multiple silicon core rods at once, the straightness between the main furnace body 100 and the auxiliary furnace body 200 is extremely important. Unlike single crystal furnaces, the silicon core growth furnace in this application needs to consider how to ensure the straightness during the replacement of different furnace bodies. If the straightness deviation is too large, it will lead to a large difference in the diameter of silicon core rods at different positions when producing multiple silicon core rods at once, which will affect the quality and efficiency of the product. However, there is no good solution in the existing technology to solve the problem that the straightness between the two may be too large.

[0053] In existing silicon core growth furnaces, the lifting head 430 is generally built into the auxiliary furnace body 200, and the existing water-cooled heat shield structure mostly adopts a combination of water-cooling cylinder and water-cooling plate. In the existing technology, when processing multiple silicon core rods at once, as the number of silicon core rods processed at one time increases, the volume of the water-cooled heat shield body 510 also increases, resulting in a smaller gap between the water-cooled heat shield body 510 and the inner wall of the auxiliary furnace body 200. The smaller gap creates obstacles during silicon material refeeding operations, leading to unsuccessful refeeding or low refeeding efficiency. Therefore, the existing technology suffers from difficulties in refeeding silicon material in a single auxiliary furnace body, and the refeeding process is time-consuming.

[0054] To address the aforementioned issues, this application proposes a novel structure that employs two different auxiliary furnace bodies 200 to perform crystal pulling and re-firing operations respectively, while simultaneously using a furnace body drive device 300 to switch and install the first auxiliary furnace body 210 and the second auxiliary furnace body 220.

[0055] Specifically, in one embodiment, the auxiliary furnace body 200 includes a first auxiliary furnace body 210 and a second auxiliary furnace body 220. The first auxiliary furnace body 210 and the second auxiliary furnace body 220 can be detachably connected to the main furnace body 100. When the first auxiliary furnace body 210 is connected to the main furnace body 100, the furnace chamber of the first auxiliary furnace body 210 and the furnace chamber of the main furnace body 100 are connected to form a crystal pulling channel 210a, which is used for pulling silicon cores. The second auxiliary furnace body 220 is used to form a refilling channel 220a extending from the second auxiliary furnace body 220 to the main furnace body 100, which is used for refilling silicon material. By setting up a furnace body drive device 300 to control the first auxiliary furnace body 210 and the second auxiliary furnace body 220 respectively, the first auxiliary furnace body 210 and the second auxiliary furnace body 220 can be connected to the main furnace body 100 respectively. Furthermore, without changing the internal arrangement of the auxiliary furnace body 200, the processing state of the silicon core growth furnace can be changed, achieving the effects of simplifying the re-feeding steps, saving re-feeding time, improving silicon core pulling efficiency, and reducing the pulling cost of a single silicon core. It is conceivable that, depending on the actual requirements of the processing, the auxiliary furnace body 200 can also contain more parts, such as a third auxiliary furnace body, a fourth auxiliary furnace body, etc., to complete different operating steps.

[0056] For further details, please refer to... Figure 2The first auxiliary furnace body 210 includes a first part 211 and a second part 212. The bottom end of the first part 211 is connected to the top end of the main furnace body 100, and the first part 211 is provided with at least one switch door. The bottom end of the second part 212 is connected to the top end of the first part 211, and the second part 212 is provided with a cooling water channel 2121. Specifically, the first auxiliary furnace body 210 includes a first part 211 and a second part 212. The first part 211 is connected to the main furnace body 100, and the first part 211 is provided with a switch door. The position of the switch door depends on the position of the lifting device 400. In this application, the position of the lifting device 400 can be adjusted by opening and closing the switch door. In one embodiment, after the crystal pulling process is completed, the switch door can be opened directly, and the lifting device 400 located in the first auxiliary furnace body 210 can be adjusted. The door frame of the switch door is fixedly connected to the main body of the first part 211, and the switch door is locked and opened via a linkage 422 mechanism. When needed, the switch door can be opened or closed by rotating the linkage 422 connected to the linkage 422 mechanism. By setting the first auxiliary furnace body 210 as a detachable connection between the first part 211 and the second part 212, it is not necessary to replace the entire furnace body at once when processing different types of silicon core rods, and the installation and transportation efficiency of the furnace body can be greatly improved. The second part 212 is set above the first part 211. The second part 212 is a barrel-shaped furnace body, and the top of the second part 212 is also provided with a cooling water channel 2121, which is used to cool the silicon core rod located in the crystal pulling channel 210a.

[0057] For further details, please refer to... Figures 2 to 9 The second auxiliary furnace body 220 includes: a first flange 221, a water-cooled layer 222, a second flange 223, and a guide plate 224. The water-cooled layer 222 is located below the first flange 221; the second flange 223 is located at the bottom of the second auxiliary furnace body 220; and the guide plate 224 is disposed on the outer wall of the water-cooled layer 222.

[0058] Specifically, the second auxiliary furnace body 220 is divided into upper and lower parts. The lower part is equipped with a water-cooling layer 222, which is used to prevent the second auxiliary furnace body 220 from overheating due to prolonged re-injection. A first flange 221 is provided between the upper and lower parts, protruding from the furnace body surface of the second auxiliary furnace body 220. A second flange 223 is located near the bottom of the second auxiliary furnace body 220. The second auxiliary furnace body 220 is used to cooperate with the main furnace body 100 to complete the connection, which is a pin connection. The guide plate 224 is provided with a guide channel, and the guide plate 224 is easy to disassemble, realizing the use of the auxiliary injection furnace chamber and the silicon core growth furnace in one unit, reducing the cost of silicon core pulling. The second auxiliary furnace body 220 is equipped with a first flange 221, which is located in the middle of the second auxiliary furnace body 220. The first flange 221 has a positioning pin hole for positioning. In one embodiment, the second driving component 330 in the furnace body drive device 300 adopts an irregular structure and is connected to the first flange 221 pin hole on the second auxiliary furnace body 220 for lifting the second auxiliary furnace body 220. The irregular structure is preferably "V" shaped, and the outer contour of the second auxiliary furnace body 220 is circular, so that the second auxiliary furnace body 220 can be locked in the "V" shaped irregular structure. At the same time, an electrical mounting plate 1030 is provided on the second auxiliary furnace body 220 to install electrical components and control the lifting and lowering of the quartz re-feeding cylinder. In addition, a guide seat is provided at the lower part of the second auxiliary furnace body 220, which can play a guiding role when the second auxiliary furnace body 220 is placed on the isolation valve 130.

[0059] Please refer to Figure 9The furnace body drive device 300 includes: a rotating shaft 310, a first drive member 320, and a second drive member 330. The rotating shaft 310 is located above the main furnace body 100. The first drive member 320 is movably sleeved on the rotating shaft 310 and has at least one degree of rotational freedom. The first drive member 320 is connected to the first auxiliary furnace body 210. The second drive member 330 is movably sleeved on the rotating shaft 310 and has at least one degree of rotational freedom. The second drive member 330 is connected to the second auxiliary furnace body 220. The first drive member 320 and the second drive member 330 can rotate alternately above the main furnace body 100. Specifically, the furnace body drive device 300 in this application also includes a mounting bracket, which is located above the main furnace body 100. The rotating shaft 310 is mounted on the mounting bracket and can rotate around its axis. The first drive member 320 and the second drive member 330 are respectively sleeved on the rotating shaft 310, so both the first drive member 320 and the second drive member 330 have rotational freedom. The first drive member 320 is connected to the first auxiliary furnace body 210 by bolts. At least two first connecting parts are provided at intervals on the first drive member 320. The first connecting parts are protrusions protruding from the drive plane and are also provided with threaded holes through which bolts can pass. In this embodiment, the first part 211 and the second part 212 are respectively provided with second connecting parts, and the first connecting parts and the second connecting parts are fixedly connected by bolts.

[0060] This application also provides a control method for a silicon core growth furnace, comprising the following steps: controlling the first auxiliary furnace body 210 to connect with the main furnace body and performing crystal pulling operation; acquiring the silicon core growth status; determining the processing state of the silicon core growth furnace based on the silicon core growth status, including crystal pulling state and re-starting state; when it is determined that the silicon core growth furnace is in the processing state, keeping the connection between the first auxiliary furnace body 210 and the main furnace body 100 unchanged; when it is determined that the silicon core growth furnace is in the re-starting state, separating the first auxiliary furnace body 210 from the main furnace body 100, controlling the first auxiliary furnace body 210 to move away from the main furnace body 100, and controlling the second auxiliary furnace body 220 to connect with the main furnace body 100; repeating the above steps until crystal growth is completed.

[0061] Preferably, determining the state of the silicon core growth furnace further includes the following steps: obtaining the silicon core growth state, including the number, diameter, weight, and length of the silicon cores; and obtaining the position of the water-cooled heat shield device within the first auxiliary furnace body. Specifically;

[0062] S100, the furnace body drive device 300 controls the first auxiliary furnace body 210 to connect with the main furnace body 100 and perform crystal pulling operation; first, the first drive component 320 of the furnace body drive device 300 connects with the connecting part on the first auxiliary furnace body 210, controls the first auxiliary furnace body 210 to move above the main furnace body 100, then controls the first auxiliary furnace body 210 to move down, and completes the positioning and docking of the first auxiliary furnace body 210 through multiple docking parts set in the main furnace body 100; then, the crystal pulling device in the first auxiliary furnace body 210 is started to complete the crystal pulling operation.

[0063] S200, the first auxiliary furnace body 210 is separated from the main furnace body 100, and the first auxiliary furnace body 210 is controlled to move away from the main furnace body 100. The crystal pulling state in the first auxiliary furnace body 210 is detected by a detection device. The crystal pulling detection includes the number, diameter, weight, and length of silicon cores. Taking weight detection as an example, in one embodiment, the weight of the silicon core rods grown in the main furnace body 100 is detected by a weight detection device located on the main furnace body 100. When the weight reaches a certain position, the isolation valve between the main furnace body 100 and the first auxiliary furnace body 210 is closed, and all water and electricity connections between the main furnace body 100 and the first auxiliary furnace body 210 are disconnected. Other detection methods are similar, and only the corresponding detection devices need to be added.

[0064] S210, in this embodiment, further includes obtaining the position of the water-cooled heat shield device in the first auxiliary furnace body 210. Specifically, it includes the following steps: obtaining the real-time position of the water-cooled heat shield device 500, comparing the real-time position of the water-cooled heat shield device 500 with the preset position of the water-cooled heat shield device 500, and when the position of the water-cooled heat shield device 500 deviates by a certain range, determining that the crystal pulling state should be ended, and moving the first auxiliary furnace body 210 to the designated position to adjust the water-cooled heat shield device 500.

[0065] S300, the second auxiliary furnace body 220 is connected to the main furnace body 100 and a re-start operation is performed. In this application, during normal crystal pulling, the first part 211 and the second part 212 of the first auxiliary furnace body 210 are combined and placed on the isolation valve 130, while the second auxiliary furnace body 220 is placed at the installation station, which can be equipped with a support device such as a tooling trolley. When a re-start operation is required, the isolation valve 130 is closed, and then the connection between the first auxiliary furnace body 210 and the main furnace body 100 is disconnected. Then, the first auxiliary furnace body 210 is unscrewed. Afterward, the tooling trolley used to temporarily accommodate the second auxiliary furnace body 220 is placed below the furnace body drive device 300. After the second drive component 330 in the furnace body drive device 300 is lowered to below the first flange 221 on the second auxiliary furnace body 220, the second drive component 330 is raised. The connecting structure and irregular structure in the second driving component 330 engage with the holes on the first flange 221 via positioning pins to position and fix the second auxiliary furnace body 220. Next, the second driving component 330 in the furnace body driving device 300 moves the second auxiliary furnace body 220 and places it onto the isolation valve 130. The guide plate 224 at the bottom of the second auxiliary furnace body 220 engages with the guide portion on the main furnace body 100 to ensure a smooth placement of the second auxiliary furnace body 220. After the second auxiliary furnace body 220 is in place, the electrical components on the electrical mounting plate 1030 are energized to control the raising and lowering of the quartz re-feeding cylinder inside the second auxiliary furnace body 220, thus enabling the re-feeding of silicon material.

[0066] Furthermore, the silicon core growth furnace also includes a position adjustment device 700, which is used to adjust the position of the water-cooled hot plate.

[0067] Specifically, the position adjustment device 700 is used to adjust the position of the water-cooled hot plate device 500 in the crystal pulling channel 210a. The position of the water-cooled hot plate specifically includes: the deflection angle of the water-cooled hot plate body 510 relative to the axial direction of the crystal pulling channel 210a and the position of the water-cooled hot plate body 510 in the vertical or horizontal direction. The position adjustment device 700 in this application includes at least one adjustment member, which has multiple degrees of freedom of movement in multiple directions. That is, the adjustment member can move in multiple directions. While the adjustment member is moving, it can drive the water-cooled hot plate device 500 to move synchronously. The movement of the water-cooled hot plate device 500 can adjust the temperature of the liquid surface inside and outside the crucible 110, so that the growth of the silicon core rod tends to be uniform, reducing the large diameter difference between the inner and outer rings during the growth of the silicon core rod and improving the yield.

[0068] Please refer to Figures 10 to 15In one embodiment, the position adjustment device 700 includes a built-in drive block 710 and an external drive component 720. The built-in drive block 710 is disposed in the crystal pulling channel 210a and is connected to the outer wall of the water-cooled hot screen body 510. The built-in drive block 710 has at least a horizontal degree of freedom of movement and is used to drive the horizontal displacement of the water-cooled hot screen. The built-in drive block 710 is used to form an adjustment component. There are multiple external drive components 720, which are arranged around the outer wall of the auxiliary furnace body 200. The output end of the drive component passes through the auxiliary furnace body 200 and is connected to the built-in drive block 710.

[0069] For details, please refer to: Figures 12-13 The adjustment device includes a built-in drive block 710 and an external drive component 720. The output end of the external drive component 720 is connected to the built-in drive block 710. The external drive component 720 is installed on the outer surface of the auxiliary furnace body 200. The external drive component 720 includes a movable drive rod (the drive part of the external drive component 720 is preferably a motor, and the external drive component 720 can perform precise control operation according to the electrical signal). In this embodiment, the auxiliary furnace body 200 has a mounting hole for the drive rod to pass through, and a sealing ring is provided on the mounting hole to seal the output end passing through the mounting hole. An internal drive block 710 is disposed within the crystal pulling channel 210a and is connected to an external drive component 720. Under the action of the external drive component 720, the internal drive block 710 moves closer to or further away from the water-cooled heatsink body 510 located within the crystal pulling channel 210a. Preferably, the portion of the internal drive block 710 approaching the water-cooled heatsink body 510 is an arc-shaped abutment portion, the contour of which matches the contour of the outer wall of the water-cooled heatsink, to better clamp the water-cooled heatsink body 510. In one embodiment, four internal drive blocks 710 are disposed at the same height and evenly distributed along the outer circumference of the water-cooled heatsink body 510, allowing them to alternately approach the water-cooled heatsink body 510. By using the internal drive block 710 and the external drive component 720 to drive the water-cooled heatsink body 510, the adjustment accuracy is higher and the adjustment speed is faster compared to the manual adjustment method in the prior art. Meanwhile, the built-in drive block 710 can clamp the water-cooled heat shield body 510 during processing, increasing the stability of the water-cooled heat shield body 510 and the temperature gradient affected by it, and reducing the impact of vibration during processing.

[0070] For further details, please refer to... Figures 10 to 11The position adjustment device 700 includes a first drive component 730, which is installed on the outer wall of the auxiliary furnace body 200. The output end of the first drive component 730 is connected to the lifting member, and the output end of the external drive component has at least one degree of freedom of movement along a first direction and / or a second direction. Specifically, in this application, the adjustment device includes a first drive component 730, which is installed on the outer wall of the auxiliary furnace body 200. At the same time, the output end of the first drive component 730 is fixedly connected to the water-cooled hot screen body 510 by means of screwing or welding. The movement of the output end of the first drive component 730 can drive the movement of the water-cooled hot screen body 510. Preferably, in this embodiment, the output end of the first drive component 730 acts on the lifting member, and then the lifting member acts on the entire water-cooled hot screen body 510 to control the temperature gradient in the crystal pulling channel 210a.

[0071] Furthermore, the first drive assembly 730 includes: a mounting ring 731, a first moving member 732, and a second moving member 733. The mounting ring 731 is connected to the auxiliary furnace body 200. The first moving member 732 is slidably connected to the mounting ring 731 and has a degree of freedom of movement along a first direction. The first end of the second moving member 733 is fixedly connected to the lifting member, and the second end of the second moving member 733 is slidably connected to the first moving member 732 and has a degree of freedom of movement along a second direction. Specifically: In one embodiment, the mounting ring 731 is sleeved on the outside of the auxiliary furnace body 200, and the mounting ring 731 is set at the position where the lifting component 520 and the water-cooled heat shield body 510 are connected in the water-cooled heat shield device 500. The mounting ring 731 and the auxiliary furnace body 200 are fixedly connected, and the connection method is one of welding, screwing, snapping, and bonding. The first moving part 732 and the mounting ring 731 are slidably connected. The sliding connection method is preferably through the cooperation of a slider and sliding, that is, the first moving part 732 can slide relative to the mounting ring 731, and the sliding direction depends on the design of the track. In this embodiment, the sliding track of the first moving part 732 is configured to face the first direction, and the first moving part 732 is connected to an external drive motor, so that it can move in the first direction under the drive of the external drive motor. The mounting ring 731, the first moving member 732, and the second moving member 733 are arranged vertically in sequence. One end of the second moving member 733 is slidably connected to the first moving member 732, and the connection method is the same as that between the first moving member 732 and the mounting ring 731. The second moving member 733 can move relative to the first moving member 732 in a second direction. The first and second directions are two mutually perpendicular directions on the horizontal plane. By connecting the other end of the second moving member 733 to the lifting member in the water-cooled heat shield device 500, the second moving member 733 can drive the water-cooled heat shield body 510 to move in multiple directions in the horizontal plane. In one embodiment, a sealing telescopic member is also provided. The sealing telescopic member can prevent the lifting member from contacting the outside, so that when the second moving member 733 is set outside the auxiliary furnace body 200, it can protect the part of the lifting member that needs to extend out of the auxiliary furnace body 200 and is connected to the second moving member 733.

[0072] Please refer to Figures 14 to 15 This application also provides a guiding device 800, which includes at least one third guiding rod 810. The third guiding rod 810 is disposed in the crystal pulling channel 210a and is used to limit the moving direction of the water-cooled hot plate. The third guiding rod 810 includes a first rod body 811 and a second rod body 812. The first end of the first rod body 811 is fixedly connected to the auxiliary furnace body 200. The second end of the first rod body 811 and the first end of the second rod body 812 are hinged together. The second rod body 812 has a rotational degree of freedom to rotate about the hinge point.

[0073] Specifically, when the water-cooled heat shield device 500 moves along the crystal pulling channel 210a, it needs to move at a certain angle; or when the lifting device moves, it also needs to move at a certain angle. In this application, a guiding mechanism is provided to guide the water-cooled heat shield device 500 or the lifting mechanism, so that the water-cooled heat shield body 510 can deflect at a certain angle. In one embodiment, a third guide rod 810 is provided in the crystal pulling channel 210a. The third guide rod 810 abuts against the water-cooled heat shield body 510. The third guide rod 810 passes through or partially passes through the water-cooled heat shield body 510. When the water-cooled heat shield body 510 is lifted, it can move along the axis of the third guide rod 810. One end of the third guide rod 810 is hinged to the inner wall of the auxiliary furnace body 200, and the other end of the third guide rod 810 has a degree of rotational freedom. When the third guide rod 810 is subjected to an external force, it can deflect at a certain angle.

[0074] In another embodiment, the third guide rod 810 has a first rod body 811 and a second rod body 812. The first end of the first rod body 811 is fixedly connected to the inner wall of the auxiliary furnace body 200, and the connection method is one or more of welding, pinning, screwing, and snap-fitting. The second rod body 812 is hinged to the first rod body 811, preferably by means of a universal joint, and the second rod body 812 can rotate relative to the first rod body 811. By setting the first rod body 811 and the second rod body 812, the third guide rod 810 as a whole can deflect at a certain angle within the crystal pulling channel 210a, further causing the water-cooled heat shield body 510 to move accordingly. The second rod body 812 is preferably located near the top of the auxiliary furnace body 200. By changing the position of the connection point between the second rod body 812 and the first rod body 811, the deflection angle of the second rod body 812 can be better controlled. The closer the universal joint is to the water-cooled heat shield body 510, the larger the adjustable angle range, and the better the load-bearing capacity. It is conceivable that the third guide rod 810 could also be designed as a multi-section structure, with three or even more sections based on the two-section rod. Furthermore, the connection between adjacent rods does not necessarily have to be a universal joint; other connection methods can be used, as long as relative rotation can be maintained.

[0075] Furthermore, in one embodiment, the length of the first rod 811 is greater than the length of the second rod 812. By setting the length of the first rod 811 to be greater than the length of the second rod 812, and the second rod 812 being relatively closer to the bottom of the auxiliary furnace body 200, the movement range of the third guide rod 810 is made larger. In this application, as the lifting head 430 and the water-cooled hot screen body 510 move, the offset between the two will become larger and larger. By setting the third guide rod 810 to guide the lifting head 430, when the lifting head 430 moves from the bottom to the top in the crystal pulling channel 210a, the first rod 811, which is longer than the second rod 812, can adjust the deflection back through a larger swing amplitude.

[0076] Furthermore, the guide device 800 also includes a mounting flange 820, which is mounted on the top of the auxiliary furnace body 200. The mounting flange 820 has multiple degrees of freedom of movement in multiple directions. The mounting flange 820 is connected to the second end of the first rod 811 to drive the rotation of the first rod 811. Specifically, the mounting flange 820 is snapped onto the outside of the auxiliary furnace body 200 by a clamping device, and the mounting flange 820 is provided with at least one adjusting device. Through the adjusting action of the adjusting device, the relative position of the mounting flange 820 can be changed. The adjusting device is preferably a threaded adjusting device. When the threaded adjusting device rotates, the adjusting rod abuts against the outer wall of the auxiliary furnace body 200, and under the action of the reaction force, it can push the mounting flange 820 to move away from the auxiliary furnace body 200. At the same time, the mounting flange 820 is connected to the first rod 811, which can drive the first rod 811 to move. In one embodiment, there are multiple first rods 811, which are arranged in a ring around the outside of the water-cooled heat shield body 510. All the first rods 811 are connected to the mounting flange 820 and can move the first rods 811 under the action of the mounting flange 820, thereby further moving the water-cooled heat shield body 510.

[0077] This application also provides a crystal pulling method, including the following steps: dividing the silicon core rods into regions and labeling them sequentially; obtaining the length, diameter, and weight of the silicon core rods in different regions; obtaining the average growth of the silicon cores in each region; comparing the average growth of the silicon cores in different regions, and controlling the position of the water-cooled heatsink based on the comparison results.

[0078] Specifically, in one embodiment, the following steps are included:

[0079] S400, the silicon core rods are divided according to the region and numbered sequentially. In this embodiment, the silicon core rod groups are nested inside and out, with three or more rings. During processing, the silicon core rod groups are first divided according to the number of rings, and the data of the three silicon core rod groups are obtained sequentially. At the same time, the silicon core rod groups in this embodiment are arranged in a ring, and the silicon core rod groups are divided into four identical silicon core rod groups according to the center line. Then, the silicon core rod groups are numbered sequentially.

[0080] S500 acquires the length, diameter, and weight of silicon core rods in different regions. It then uses external optical and weight detection devices to measure the divided silicon core rod groups in sequence and transmits the measured data to the storage and judgment unit.

[0081] S600: Obtain the average growth of silicon cores in each region. Calculate the average length, diameter, and weight of silicon core rods in different components based on the data obtained in step S500.

[0082] S700 compares the average growth of silicon cores in different areas and controls the position of the water-cooled heat shield device 510 based on the comparison results. It compares the average value with a preset value to determine the growth of the silicon core rod. If any average value exceeds the preset value, the growth of the silicon core rod is considered abnormal. Specifically, it first obtains the average value of the inner and outer rings in the silicon core rod group. If any one or more of the three average values ​​exceeds the preset value, it is determined that the growth of the inner and outer rings is unbalanced. The lifting device 400 adjusts the lifting heads of the inner and outer rings to different heights to make the growth of the silicon core rod group in the inner and outer rings more consistent. Secondly, it obtains the average quantity at different positions within the same annular plane in the silicon core rod group. If the average value of the silicon core rod group at any position deviates, it determines the specific deviation and adjusts the position of the water-cooled heat shield body 510 based on the deviation using the position adjustment device 700.

[0083] Specifically, in one embodiment, the silicon cores are divided according to their positions. Specifically, based on the position of the silicon core rods within the crystal pulling channel 210a, the annularly arranged silicon core rod group is sequentially divided into four groups (S1, S2, S3, and S4) along the center line. The growth of the silicon core rods in each group is monitored, and the obtained growth information is sent to the judgment unit. The growth information of the silicon core rods obtained in the previous step is acquired, and the position of the water-cooled heatsink is determined based on the growth information. In one embodiment, when the growth conditions of the silicon core rods in S1, S2, S3, and S4 are similar and generally meet the requirements, the position of the water-cooled heatsink does not need to be adjusted. When at least one of S1, S2, S3, and S4 shows an abnormality, the abnormality is analyzed, and the problem with the water-cooled heatsink at that moment is determined based on the pre-stored information in the judgment unit.

[0084] In existing technologies, when multiple silicon core rods are drawn at once, the silicon core rods are generally divided into inner and outer rings. The hot zone 1100 is set on the outer side of the outermost silicon core rod. This results in different growth states of the inner and outer rings of silicon core rods during the drawing process, leading to differences in the diameter of the silicon core rods. This poses a risk of jamming and reduces the productivity and yield of silicon core drawing.

[0085] This application provides a silicon core growth furnace, including a pulling device 400, wherein the pulling device 400 includes at least a first mounting member 410 and a second mounting member 420 that can move vertically relative to the first mounting member 410. A plurality of pulling heads 430 are respectively mounted on the first mounting member 410 and the second mounting member 420. This allows the second mounting member 420 to move relative to the first mounting member 410 along the axial direction of the crystal pulling channel 210a during the crystal pulling process, so that silicon core rods at different positions are in the same crystal growth state, reducing the diameter difference between the inner and outer rings during the growth of the silicon core rod, reducing the risk of jamming, and improving the productivity and yield of silicon core pulling.

[0086] To ensure consistency among silicon cores, it is necessary to ensure that multiple silicon core rods are in the same growth environment as much as possible when pulling multiple silicon cores. This application provides a new lifting device 400. The lifting device 400 is disposed within the crystal pulling channel 210a and has the freedom of movement to move along the crystal pulling channel 210a. It includes: a first mounting member 410, a second mounting member 420, and lifting heads 430. The second mounting member 420 and the first mounting member 410 are disposed along the axial direction of the crystal pulling channel 210a and are movably connected to each other. There are multiple lifting heads 430, and the multiple lifting heads 430 are respectively connected to the first mounting member 410 and the second mounting member 420.

[0087] Please refer to Figure 16 and Figure 17 Specifically, the lifting device 400 is used to pull silicon core rods. The lifting head 430, in conjunction with the seed crystal, completes the silicon core rod pulling process. Under the action of the lifting rope, the lifting device 400 can move along the axial direction of the pulling channel 210a. The lifting device 400 includes a first mounting member 410 and a second mounting member 420 that are movably connected. The second mounting member 420 can move relative to the first mounting member 410 along the axial direction of the pulling channel 210a. By connecting multiple lifting heads 430 to the first mounting member 410 and the second mounting member 420 respectively, different lifting heads 430 can move at different speeds within the pulling channel 210a, enabling directional adjustment of the growth state of the silicon core rod at different positions. This ensures that the silicon core rods at different positions are in the same crystal growth state, reducing the diameter difference between the inner and outer rings during the silicon core rod growth process, lowering the risk of jamming, and improving the productivity and yield of silicon core pulling.

[0088] Please refer to Figure 18 The lifting head 430 has multiple sets, arranged sequentially from the inside out. Each set of lifting heads 430 is arranged in a ring or a regular polygon shape. The number of lifting heads 430 is two or more, preferably more than thirty-two. The lifting heads 430 can be arranged in a ring or a regular polygon on the first mounting member 410 and the second mounting member 420. In one embodiment, the lifting heads 430 on the first mounting member 410 are arranged in a ring, and include at least two nested rings of lifting heads 430; the lifting heads 430 on the second mounting member 420 are located in the innermost ring. During processing, the multiple lifting heads 430 in the inner ring can be raised and lowered synchronously. It is conceivable that the lifting device 400 can also include more mounting members. By setting more mounting members, the positions of the lifting heads 430 become more diverse, which can better improve the productivity and yield of silicon core pulling.

[0089] For further details, please refer to... Figure 19 The first mounting member 410 is provided with a movable channel 410a, which extends through the first mounting member 410 along the axial direction of the crystal pulling channel 210a. The movable channel 410a is used to allow the second mounting member 420 to move. Specifically, by providing a movable channel in the first mounting member 410, the second mounting member 420 can move relative to the first mounting member 410. In one embodiment, the movable channel is a plurality of through holes penetrating the first mounting member 410. The second mounting body includes a connecting rod that can pass through the aforementioned through holes, and the bottom of the connecting rod is connected to the lifting head 430, so that the lifting head 430 connected to the second mounting body can move to different positions of the lifting head 430 connected to the first mounting member 410.

[0090] For further details, please refer to... Figures 16 to 19 The first mounting component 410 includes: an upper plate 411, a lower plate 412, and a second guide rod 413. The lower plate 412 is spaced below the upper plate 411 and has a movable channel 410a. The second guide rod 413 is disposed between the upper plate 411 and the lower plate 412, and its first and second ends are fixedly connected to the upper plate 411 and the lower plate 412, respectively. Specifically, in one embodiment, the upper plate 411 and the lower plate 412 are spaced apart, and the second guide rod 413 is fixedly disposed between them. The second guide rod 413 supports the upper plate 411 and the lower plate 412. The upper plate 411 and the lower plate 412 are connected to the second guide rod 413 by screws. Preferably, the mounting position of the upper plate 411 relative to the second guide rod 413 is adjustable and can be adjusted according to actual needs.

[0091] Furthermore, the second mounting component 420 includes a movable plate 421 and a connecting rod 422. The movable plate 421 is movably connected to the second guide rod 413 and is configured to reciprocate along the axial direction of the second guide rod 413. The first end of the connecting rod 422 is connected to the movable plate, and the second end of the connecting rod 422 is connected to the lifting head 430. The connecting rod 422 is configured to reciprocate vertically within the movable channel 410a. The movable plate 421 is disposed between the upper plate 411 and the lower plate 412, and is movably connected to the second guide rod 413, with the movable plate 421 and the second guide rod 413 slidingly engaged. In one embodiment, the second guide rod 413 passes through the movable plate 421, and the movable plate 421 can move along the axial direction of the second guide rod 413.

[0092] Please refer to Figure 17 and Figure 18 The lifting device 400 also includes a rotary drive assembly 440, which is mounted on the movable plate. The rotary drive assembly 440 includes an output component 441 and a transmission component 442. The output component 441 is located at the center of the movable plate 421. Multiple transmission components 442 are arranged around the output component 441, and each transmission component 442 corresponds to a lifting head 430. Specifically, in one embodiment, the rotary drive assembly 440 includes an output shaft and multiple gears. The gears are mounted on the lower plate 412 and are movably connected to the lower plate 412 via bearings. Any gear can rotate independently. Simultaneously, the gears are fixedly connected to the lifting head 430, and when the gears rotate, they can drive the lifting head 430 to rotate synchronously. Multiple gears are arranged to cooperate with the lifting head 430, and each lifting head 430 has a corresponding independent gear.

[0093] Please refer to Figure 16 The lifting device 400 also includes a lifting drive assembly 450, which is mounted on the upper plate 411. The lifting drive assembly includes at least one movable end with a vertical degree of freedom of movement. The movable end is connected to a movable plate to drive the movement of the movable plate. The lifting drive unit includes a drive motor and a lead screw assembly. The lead screw in the lead screw assembly is mounted on the first mounting member 410, preferably between the upper plate 411 and the lower plate 412. The rotating nut in the lead screw assembly is connected to the movable plate 421. As the nut moves up and down along the lead screw, it drives the movable plate 421 to move synchronously. The drive motor is mounted on the top of the first mounting member 410, that is, the drive motor is mounted on the upper end face of the upper plate 411. The lead screw passes through the upper plate 411 and is connected to the movable plate 421.

[0094] It also includes a limiting unit 900, which is connected to the movable plate and is used to limit the movement of the movable plate. For details, please refer to [link / reference needed]. Figure 16The limiting unit 900 is installed and connected to the movable plate 421. The limiting unit 900 is positioned between the upper plate 411 and the lower plate 412, protruding from the protrusion on the movable plate 421. The limiting unit 900 can contact the first mounting member 410 before the movable plate 421, thereby limiting the movement distance of the movable plate 421. It is conceivable that the limiting unit 900 could also employ other limiting elements, such as an optical limiting unit 900.

[0095] During the silicon core pulling process, the liquid level in the crucible 110 drops as the silicon core is pulled. To maintain the distance between the liquid surface and the silicon core, the crucible 110 needs to be continuously raised. In the prior art, as the crucible 110 rises, the distance between the fixed hot zone 1100 and the crucible also changes. This leads to a reduction in the heat supplied by the hot zone 1100 to the molten silicon, causing a change in the temperature of the liquid surface in the crucible 110. In the prior art, if a drop in liquid temperature is detected during operation, it is generally compensated by increasing the liquid temperature and increasing the power of the hot zone 1100. However, due to the lag in increasing the liquid temperature, the hot zone can cause crystallization at the center of the molten silicon surface in the crucible, leading to silicon core pulling failure and reducing the yield and production efficiency of the silicon core.

[0096] In this application, by setting a synchronous lifting device 1000, the crucible 110 and the hot zone 1100 can be moved synchronously, so that during the silicon core rod pulling process, the distance between the heater 1110 in the hot zone 1100 and the crucible 110 remains constant, eliminating the lag when the liquid surface temperature increases, avoiding silicon core pulling failure, and improving the yield and production efficiency of silicon cores.

[0097] Furthermore, the silicon core growth furnace also includes a synchronous lifting device 1000 and a hot zone 1100. The synchronous lifting device 1000 is located below the crucible 110. Please refer to [reference needed]. Figure 20The synchronous lifting device 1000 includes a lifting end with a vertical degree of freedom of movement; a heating field 1100 is arranged around the crucible 110 and connected to the lifting end. The heating field 1100 can move synchronously with the crucible 110 under the action of the synchronous lifting device 1000. Specifically, the synchronous lifting device 1000 is located below the crucible 110 to drive the heating field 1100 to move up and down together with the crucible 110. The heating field 1100 mainly includes a heater 1110 located at the bottom of the crucible 110. Since the distance between the heaters 1110 around the crucible 110 and the crucible 110 remains stable during the crucible 110's ascent, while the distance between the heater 1110 at the bottom and the crucible 110 changes, the synchronous lifting device 1000 in this application mainly drives the bottom heater 1110 to move together. In some embodiments, the heater 1110 also includes heaters 1110 disposed around the crucible 110. This arrangement avoids changes in the distance between the crucible 110 and the hot zone 1100 due to excessive rise of the crucible 110, which could lead to further temperature changes. The synchronous lifting device 1000 includes at least one movable end with a vertical degree of freedom of movement. The movable end is connected to the crucible 110 via bolts and magnetohydrodynamic connection, ensuring that the crucible 110 rotates while being synchronously raised and lowered. By setting up the synchronous lifting device 1000, the crucible 110 and the hot zone 1100 can be moved synchronously, ensuring that the distance between the heaters 1110 in the hot zone 1100 and the crucible 110 remains constant during the silicon core rod pulling process. This eliminates the lag when the liquid surface temperature increases, avoids silicon core pulling failures, and improves the yield and production efficiency of silicon cores.

[0098] For further details, please refer to... Figures 20 to 22 The synchronous lifting device 1000 includes a first motor 1010 and a motor water-cooling section 1020. The first motor 1010 is connected to the hot zone 1100; the motor water-cooling section 1020 is sleeved on the outside of the first motor 1010. Specifically, the heater 1110 in this application is powered and heated by the first motor 1010. The first motor 1010 is installed through the mounting plate 1030 at the bottom of the main furnace body 100. During the heating process, the first motor 1010 may be affected by the heat from the hot zone 1100 and its own self-heating, thereby affecting the service life of the first motor 1010. In this application, the motor water-cooling section 1020 is located between the first motor 1010 and the crucible 110. When the first motor 1010 is raised and lowered with the synchronous lifting device 1000, it will pass through the motor water-cooling section 1020. The motor water-cooling section 1020 can cool the first motor 1010 to ensure the service life of the first motor 1010.

[0099] Please refer to Figures 20 to 22The synchronous lifting device 1000 includes a mounting plate 1030 and a support frame 1040. The mounting plate 1030 has at least one mounting channel for mounting the rotating shaft of the crucible 110. Multiple support frames 1040 are mounted on the mounting plate 1030 and are evenly distributed on the mounting plate 1030, forming a lifting end. Specifically, the rotating shaft of the crucible 110 is preferably a crucible 110 rotating body, which can drive the crucible 110 to rotate. In one embodiment, the crucible 110 rotating body passes through the mounting channel on the mounting plate 1030 and connects to the crucible 110 to drive the crucible 110 to rotate and lift. The support frame 1040 is mounted on the mounting plate 1030 and is fixedly connected to the mounting plate 1030 by bolts. There are multiple support components, which are two or more. Multiple support frames 1040 are set to install the second motor 1120 respectively. The multiple second motors are set one-to-one with the first motor 1010 to complete the connection and support with the bottom hot field part in the hot field 1100.

[0100] The synchronous lifting device 1000 also includes a mounting base plate, which is used to mount the crucible 110. The crucible 110 is connected to the mounting base plate by bolts and flanges. The mounting base plate is also connected to the mounting frame. When the mounting frame is lifted and lowered under the drive of an external drive device, it can drive the mounting base plate to lift and lower, and synchronously drive the crucible 110 to lift and lower.

[0101] Please continue to refer to this. Figure 20 and Figure 22 The support frame 1040 includes: an upper frame 1041 and a lower frame 1042, the upper frame 1041 being connected to the motor unit; the lower frame 1042 being disposed below the upper frame 1041 and connected to the mounting plate 1030; and a flexible connector 1043 being disposed between the upper frame 1041 and the lower frame 1042, the flexible connector 1043 abutting against the upper frame 1041 and the lower frame 1042 respectively. Specifically, the upper frame 1041 and the lower frame 1042 are spaced apart and connected by a flexible connector 1043. In one embodiment, the upper frame 1041 and the lower frame 1042 are provided with mounting holes, and the guide rod can pass through the mounting holes to connect the upper frame 1041 and the lower frame 1042. At least one mounting groove is provided on the upper frame 1041 or the lower frame 1042, and the flexible connector 1043 is installed in the mounting groove to ensure that the first motor 1010 can move up and down smoothly during lifting.

[0102] Please refer to Figure 21The thermal field 1100 includes at least one heater 1110, which is spaced apart at the bottom of the crucible 110. Specifically, the bottom heater 1110 is preferably a heating coil, which can self-heat under the action of an external power supply, and can heat the silicon solution inside the crucible 110 through self-heating. In this embodiment, the heater 1110 is preferably flat and is disposed at the bottom of the crucible 110, spaced apart from the bottom of the crucible 110.

[0103] For further information, please refer to the following: Figure 21 The heating field 1100 also includes a second motor 1120, which is coaxially arranged with the first motor 1010 and detachably connected to the first motor 1010. The second motor 1120 is connected to the bottom heating element and is used to supply power to the bottom heater 1110. One end of the second motor 1120 is fixedly connected to the heater 1110, and together with the bottom heating element, they form part of the heating field 1100. At the same time, the other end of the second motor 1120 is detachably connected to the first motor 1010, and the first motor 1010 can drive the second motor 1120 to move up and down synchronously when it is lifting. When it is needed to work, the first motor 1010 and the second motor 1120 are in contact with each other, and when it is not needed to work, they can simply be disconnected.

[0104] Please refer to Figure 22 The synchronous lifting device 1000 also includes a corrugated pipe 1050, which is disposed between the support frame 1040 and the motor water-cooling section 1020, and is sleeved on the outside of the first motor 1010. In one embodiment, the first motor 1010 includes a ceramic protective sleeve and a motor body disposed within the ceramic protective sleeve. The corrugated pipe 1050 protects the first motor 1010 to improve its service life and prevent high temperatures from affecting it. The corrugated pipe 1050 is preferably installed on the upper end face of the upper frame 1041 by screwing, and can extend and retract synchronously with the lifting of the synchronous lifting device 1000.

[0105] Technical effects:

[0106] 1. This application provides a silicon core growth furnace, wherein the furnace body drive device 300 is connected to the first auxiliary furnace body 210 and the second auxiliary furnace body 220 respectively, and is used to control the first auxiliary furnace body 210 and the second auxiliary furnace body 220 to be connected to the main furnace body 100 respectively. It can directly change the state of the silicon core growth furnace without changing the internal arrangement of the auxiliary furnace body 200, thereby simplifying the re-feeding steps, saving re-feeding time, improving silicon core pulling efficiency, and reducing silicon core pulling cost.

[0107] 2. This application provides a silicon core growth furnace. The position adjustment device 700 includes at least one adjustment component. Since the adjustment component has multiple degrees of freedom of movement in multiple directions, it can move in multiple directions. By setting the position adjustment device 700 to drive the water-cooled hot screen device 500 to move synchronously, the water-cooled hot screen device 500 can adjust the temperature of the liquid surface inside and outside the crucible accordingly, so that the crystal growth state corresponding to the lifting heads of different heights is close to the same when pulling the silicon core rod, reducing the diameter difference between the inner and outer rings during the silicon core rod growth process and improving the yield.

[0108] 3. This application provides a silicon core growth furnace, including a pulling device 400, wherein the pulling device 400 includes at least a first mounting member 410 and a second mounting member 420 that can move vertically relative to the first mounting member 410. A plurality of pulling heads 430 are respectively mounted on the first mounting member 410 and the second mounting member 420. This allows the second mounting member 420 to move relative to the first mounting member 410 along the axial direction of the crystal pulling channel 210a during the crystal pulling process, so that silicon core rods at different positions are in the same crystal growth state, reducing the diameter difference between the inner and outer rings during the growth of the silicon core rod, reducing the risk of jamming, and improving the productivity and yield of silicon core pulling.

[0109] 4. This application provides a silicon core growth furnace. By setting a synchronous lifting device 1000, the crucible 110 and the hot zone 1100 can be moved synchronously. This ensures that during the silicon core rod pulling process, the distance between the heater 1110 in the hot zone 1100 and the crucible 110 remains constant. This eliminates the lag when the liquid surface temperature increases, avoids silicon core pulling failure, and improves the yield and production efficiency of silicon cores.

Claims

1. A silicon core growth furnace, characterized in that, include: The main furnace body (100) is provided with a crucible (110) inside the main furnace body (100); A secondary furnace body (200) is disposed above the main furnace body (100), and the secondary furnace body (200) is connected to the main furnace body (100) to form a crystal pulling channel located above the crucible (110); A pulling device (400) is disposed within the crystal pulling channel, and the pulling device (400) has a degree of freedom of movement along the axial direction of the crystal pulling channel, including: First mounting component (410); The second mounting member (420) is configured to be movable relative to the first mounting member (410) within the crystal pulling channel along the axial direction of the crystal pulling channel; and A lifting head (430) is provided, and multiple lifting heads (430) are respectively connected to the first mounting member (410) and the second mounting member (420) to drive relative movement between the multiple lifting heads.

2. The silicon core growth furnace according to claim 1, characterized in that, The lifting head (430) has multiple sets, and the multiple sets of lifting heads (430) are arranged sequentially from the inside to the outside. The shape of each set of lifting heads (430) is either a ring or a regular polygon.

3. The silicon core growth furnace according to claim 1, characterized in that, The first mounting component (410) is provided with a movable channel, which passes through the first mounting component (410) along the axial direction of the crystal pulling channel, and the movable channel is used for the movement of the second mounting component (420).

4. The silicon core growth furnace according to claim 3, characterized in that, The first mounting component (410) includes: Upper plate body(411); A lower plate (412) is spaced below the upper plate (411) and has a movable channel on it; and The third guide rod (413) is disposed between the upper plate (411) and the lower plate (412), and the first end and the second end of the third guide rod (413) are fixedly connected to the upper plate (411) and the lower plate (412) respectively.

5. The silicon core growth furnace according to claim 4, characterized in that, The second mounting component (420) includes: A movable plate (421) is movably connected to the third guide rod (413), and the movable plate (421) is configured to reciprocate along the axial direction of the third guide rod (413); A connecting rod (422), the first end of which is connected to the movable plate (421), and the second end of which is connected to the lifting head (430), the connecting rod (422) being configured to reciprocate vertically within the movable channel.

6. The silicon core growth furnace according to claim 5, characterized in that, The lifting device (400) further includes a rotary drive assembly (440), which is mounted on the movable plate (421). The rotary drive assembly (440) includes: Output component (441), the output component (441) is located at the center of the movable plate (421); A transmission component (442) is provided, and multiple transmission components (442) are arranged around the output component (441). The transmission components (442) are correspondingly arranged with the lifting head (430).

7. The silicon core growth furnace according to claim 5, characterized in that, The lifting device (400) further includes a lifting drive assembly (450), which is installed on the upper plate (411). The lifting drive assembly (450) includes at least one movable end, which has a vertical degree of freedom of movement. The movable end is connected to the movable plate (421) and is used to drive the movement of the movable plate (421).

8. The silicon core growth furnace according to claim 6, characterized in that, The rotary drive assembly (440) includes an output shaft and a plurality of gears. The gears are mounted on the lower plate (412) and are movably connected to the lower plate (412). The gears have rotational freedom to rotate along their axis. The gears are fixedly connected to the lifting head (430) and are used to drive the lifting head (430) to rotate synchronously.

9. The silicon core growth furnace according to claim 1, characterized in that, The lifting head (430) includes a graphite connecting section and a counterweight arranged sequentially in the vertical direction. The graphite connecting section is used for the installation of the seed material, which is used to enter the crucible to grow silicon core rods.

10. The silicon core growth furnace according to claim 5, characterized in that, It also includes a limiting unit (900), which is connected to the movable plate (421) and is used to limit the movement of the movable plate (421).

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