Infrared reflection spectrum vacuum on-line testing device

Abstract

The utility model discloses an infrared reflection spectrum vacuum online testing device, and belongs to the technical field of material testing devices. The infrared reflection spectrum vacuum online test device comprises a light path system, an infrared light source, an infrared window, a vacuum test cavity, a parabolic mirror, a liquid nitrogen refrigeration detector, a fixed bottom plate, a sample or a standard plate to be tested, an infrared integrating sphere and a data processing system. Wherein the parabolic mirror, the liquid nitrogen refrigeration detector, the fixed bottom plate, the to-be-tested sample or standard plate and the infrared integrating sphere are arranged in the vacuum test cavity; the infrared reflection spectrum vacuum on-line testing device is mainly used in various factor space environment tests (such as ultraviolet radiation, atomic oxygen radiation, electron radiation, proton radiation, thermal cycle and other single-factor or multi-factor comprehensive environment tests under vacuum) carried out in a vacuum test cavity or other test processes needing to be carried out in a vacuum environment. And measuring the infrared reflection spectrum of the material on line.

Description

Technical Field

[0001] This utility model belongs to the technical field of material testing devices, specifically relating to an infrared reflectance spectroscopy vacuum online testing device. Background Technology

[0002] After spacecraft materials undergo simulation experiments in the space environment and return to atmospheric conditions from a vacuum state, their properties change to some extent, especially optical and thermal properties. Therefore, to accurately reflect the performance changes of test samples in orbit, it is necessary to conduct online testing and analysis of their performance under vacuum conditions using online testing equipment. Water vapor and carbon dioxide in the atmosphere can interfere with the measurement of infrared reflectance spectra of materials. Therefore, only vacuum online testing can more accurately characterize the impact of the space environment on materials, and existing commercial infrared reflectance spectroscopy measurement equipment cannot meet the requirements for online testing. Utility Model Content

[0003] The purpose of this invention is to provide an online vacuum testing device for infrared reflectance spectroscopy, so as to realize real-time online measurement of infrared reflectance spectrum during space environment simulation experiments, eliminate the interference of atmospheric environment on the measurement of infrared reflectance spectrum of materials, and truly and accurately reflect the changing trend of optical properties of materials during space environment simulation experiments.

[0004] This utility model provides an online vacuum infrared reflectance spectroscopy testing device, mainly used for online measurement of the infrared reflectance spectrum of materials during various spatial environment tests (such as single-factor or multi-factor comprehensive environmental tests under vacuum, such as ultraviolet irradiation, atomic oxygen irradiation, electron irradiation, proton irradiation, thermal cycling, etc.) or other tests that need to be conducted in a vacuum environment. The specific technical solution is as follows:

[0005] An online vacuum testing device for infrared reflectance spectroscopy includes: a light source system, a vacuum test chamber, and a data processing system;

[0006] The light source system is located in the atmospheric environment. The light source system includes an optical path system, an infrared light source, and an infrared window. The optical path system mainly consists of an interferometer and optical devices. The infrared light source is used to generate an infrared beam. The vacuum test chamber is located on one side of the vacuum test chamber. The infrared beam is converted into a parallel beam by Fourier transform modulation and shaping through the optical path system and passes through the infrared window to be projected into the vacuum test chamber.

[0007] The vacuum test chamber includes a parabolic mirror, a liquid nitrogen-cooled detector, a fixed base plate, a sample or standard plate to be tested, and an infrared integrating sphere. The parabolic mirror, liquid nitrogen-cooled detector, and infrared integrating sphere are fixed on the fixed base plate to maintain their relative positions. The fixed base plate is installed on the inner wall of the vacuum test chamber. The sample or standard plate to be tested is mechanically attached to the test hole below the infrared integrating sphere. The parallel light beam is reflected by the parabolic mirror and enters the infrared integrating sphere through the entrance hole on the front side, illuminating the sample or standard plate to be tested. The reflected light beam from the sample or standard plate is transmitted to the liquid nitrogen-cooled detector through the exit hole of the infrared integrating sphere. The reflected signal detected by the liquid nitrogen-cooled detector is transmitted to the data processing system.

[0008] The data processing system is located in the atmospheric environment outside the vacuum test chamber and is used for dynamic monitoring of the reflectivity of materials in specific wavelength bands during environmental testing.

[0009] Preferably, the infrared light source can be a silicon carbide rod.

[0010] Preferably, the infrared window can be made of zinc selenide or potassium bromide to ensure the vacuum test chamber is sealed while having high transmittance.

[0011] Preferably, a U-shaped structure is designed at the corresponding position of the fixed base plate and the test hole below the infrared integrating sphere to facilitate observation of the test status of the sample or standard plate during online testing.

[0012] Preferably, the liquid nitrogen-cooled detector can be a high signal-to-noise ratio liquid nitrogen-cooled mercury cadmium telluride detector.

[0013] Preferably, the vacuum test chamber has an opening, and a sealing element is used to seal the outer wall of the liquid nitrogen-cooled detector's Dewar into contact with the vacuum test chamber, thereby connecting the inside of the liquid nitrogen-cooled detector's Dewar with the outside of the chamber.

[0014] Preferably, the infrared integrating sphere can be a gold-plated integrating sphere.

[0015] Preferably, a baffle is provided in front of the exit hole of the infrared integrating sphere to prevent the light source signal from directly shining on the liquid nitrogen-cooled detector and interfering with the measurement of the reflected signal.

[0016] Preferably, the data processing system includes a computer and a circuit control board for performing data processing and Fourier transform to obtain infrared reflection curves.

[0017] The beneficial effects of this utility model are:

[0018] (1) The device of this utility model is generally divided into two parts: one part is in a vacuum environment and the other part is in an atmospheric environment. The infrared integrating sphere and liquid nitrogen-cooled detector are placed in the vacuum test chamber to ensure that the sample or standard plate is always in a vacuum environment during the test, thus avoiding the influence of the atmospheric environment on the test results of the material reflection curve after the test. The light source system and data processing system are placed in the atmospheric environment to avoid the vacuum environment affecting heat dissipation and causing component failure. This solves the technical problem that the existing commercial infrared reflection spectroscopy measurement devices are all integrated and cannot meet the requirements of online testing of infrared reflection spectra of samples in a vacuum environment after environmental testing.

[0019] (2) In this utility model, the optical path system modulates and shapes the infrared beam generated by the infrared light source using Fourier transform to convert it into a parallel beam that is incident on the vacuum test chamber. This eliminates the limitation imposed by the focal length of the infrared light source on the positions of the infrared integrating sphere, parabolic mirror, and liquid nitrogen-cooled detector, making the distance between each test component and the infrared light source in the vacuum test chamber adjustable and increasing the flexibility of the installation position of the test components in the vacuum test chamber.

[0020] (3) The present invention uses a liquid nitrogen-cooled detector to receive reflected signals with good uniformity, high sensitivity and signal-to-noise ratio, which can effectively reduce the interference of background signals on the test results.

[0021] (4) In this utility model, the fixed base plate keeps the relative positions of the infrared integrating sphere, the liquid nitrogen-cooled detector and the parabolic mirror unchanged. A U-shaped structure is designed at the corresponding position of the fixed base plate and the test hole below the infrared integrating sphere, so as to facilitate the observation of the test status of the sample or standard plate during the online test, such as whether the sample is in close contact with the integrating sphere, and avoid errors in the test results caused by abnormal test status of the sample or standard plate.

[0022] (5) In this utility model, during the online testing of the infrared reflection curve, the liquid nitrogen-cooled detector must always be in normal working condition. Therefore, it is necessary to ensure that there is enough liquid nitrogen in the detector Dewar. Since the liquid nitrogen-cooled detector is located in the vacuum test chamber and is in a vacuum environment, an opening is made in the vacuum test chamber, and the outer wall of the liquid nitrogen-cooled detector Dewar is sealed to the vacuum test chamber through a sealing component, so that the inside of the liquid nitrogen-cooled detector Dewar is connected to the outside of the chamber. This allows liquid nitrogen to be injected into the Dewar of the liquid nitrogen-cooled detector at any time during the test, ensuring the normal operation of the liquid nitrogen-cooled detector. Attached Figure Description

[0023] For ease of explanation, this utility model is described in detail below with reference to the specific embodiments and accompanying drawings.

[0024] Figure 1 This is a schematic diagram of the structure of this embodiment.

[0025] In the picture:

[0026] 1-Light source system; 1-1-Optical path system; 1-2-Infrared light source; 1-3-Infrared window; 2-Vacuum test chamber; 2-1-Parabolic mirror; 2-2-Liquid nitrogen-cooled detector; 2-3-Fixed base plate; 2-4-Sample or standard plate to be tested; 2-5-Infrared integrating sphere; 3-Data processing system. Detailed Implementation

[0027] The following are specific embodiments of the present invention described in conjunction with the accompanying drawings, further illustrating the technical solution of the present invention. However, the present invention is not limited to these embodiments. Specific details such as particular configurations and components are provided in the following description merely to aid in a comprehensive understanding of the embodiments of the present invention. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present invention. Furthermore, for clarity and brevity, descriptions of known functions and structures have been omitted.

[0028] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other.

[0029] like Figure 1 As shown in this embodiment, an online vacuum testing device for infrared reflectance spectroscopy is provided. This device is suitable for applications where samples need to be kept in a vacuum environment during testing, such as after space environment experiments. Water vapor and carbon dioxide in the atmosphere can interfere with the infrared reflectance spectroscopy testing of materials; therefore, online testing of the material's optical properties is necessary in a vacuum environment.

[0030] The testing apparatus in this embodiment includes: a light source system 1, a vacuum test chamber 2, and a data processing system 3;

[0031] The light source system 1 is located in the atmospheric environment. The light source system 1 includes an optical path system 1-1, an infrared light source 1-2, and an infrared window 1-3. The optical path system 1-1 mainly consists of an interferometer and optical devices. The infrared light source 1-2 is used to generate an infrared beam. The vacuum test chamber 2 is located on one side of the vacuum test chamber 2. The infrared beam is converted into a parallel beam by Fourier transform modulation and shaping through the optical path system 1-1 and passes through the infrared window 1-3 to enter the vacuum test chamber 2.

[0032] Specifically, the parallel beam incident method can eliminate the limitation imposed by the focal length of the infrared light source 1-2 on the position of components such as the parabolic mirror 2-1 and the infrared integrating sphere 2-5 inside the vacuum test chamber 2, making the distance between each test component inside the vacuum test chamber 2 and the infrared light source 1-2 adjustable, and increasing the flexibility of the installation position of the test components inside the vacuum test chamber 2.

[0033] The vacuum test chamber 2 includes a parabolic mirror 2-1, a liquid nitrogen-cooled detector 2-2, a fixed base plate 2-3, a sample or standard plate 2-4 to be tested, and an infrared integrating sphere 2-5. The parabolic mirror 2-1, the liquid nitrogen-cooled detector 2-2, and the infrared integrating sphere 2-5 are fixed on the fixed base plate 2-3, ensuring that their relative positions remain unchanged. The fixed base plate 2-3 is installed on the inner wall of the vacuum test chamber 2, ensuring that its position remains unchanged during the test and guaranteeing good test stability. The sample or standard plate 2-4 to be tested is mechanically attached to the test hole below the infrared integrating sphere 2-5. A parallel light beam is reflected by the parabolic mirror 2-1 and enters the infrared integrating sphere 2-5 through the entrance hole on the front side of the infrared integrating sphere 2-5. After being homogenized by the infrared integrating sphere 2-5, it illuminates the sample or standard plate 2-4 to be tested. The reflected light beam from the sample or standard plate 2-4 is transmitted to the liquid nitrogen-cooled detector 2-2 through the exit hole of the infrared integrating sphere 2-5. The reflected signal detected by the liquid nitrogen-cooled detector 2-2 is transmitted to the data processing system 3.

[0034] The data processing system 3 is located in the atmospheric environment outside the vacuum test chamber 2. The data processing system 3 includes a computer and a circuit control board, which are used to perform data processing and Fourier transform to obtain infrared reflection curves. Ultimately, the data processing system 3 can dynamically monitor the reflectivity of materials in specific bands during environmental testing.

[0035] Furthermore, the infrared light source 1-2 mainly generates infrared beams and can be made of silicon carbide rods.

[0036] Furthermore, the infrared windows 1-3 can be made of zinc selenide or potassium bromide to ensure the vacuum test chamber 2 is sealed while having high transmittance.

[0037] Furthermore, a U-shaped structure is designed at the corresponding position of the test hole below the fixed base plate 2-3 and the infrared integrating sphere 2-5 to facilitate observation of the test status of the sample or standard plate 2-4 during online testing, and to avoid errors in the test results caused by abnormal test status of the sample or standard plate 2-4.

[0038] Furthermore, the liquid nitrogen-cooled detector 2-2 can be a high signal-to-noise ratio liquid nitrogen-cooled mercury cadmium telluride detector, which can reduce the interference of background signals on the test results, improve the uniformity of the detection signal, and have higher sensitivity and signal-to-noise ratio, ensuring high-quality reflection signal testing.

[0039] Furthermore, during the online infrared reflectance curve testing, the liquid nitrogen-cooled detector 2-2 must be kept in normal working condition at all times. Therefore, it is necessary to ensure that there is sufficient liquid nitrogen in the Dewar of the liquid nitrogen-cooled detector 2-2. Since the liquid nitrogen-cooled detector 2-2 is located in the vacuum test chamber 2 and is in a vacuum environment, an opening is made in the vacuum test chamber 2, and a sealing element is used to make the outer wall of the Dewar of the liquid nitrogen-cooled detector 2-2 in sealed contact with the vacuum test chamber 2. This allows the interior of the Dewar of the liquid nitrogen-cooled detector 2-2 to communicate with the outside of the chamber, enabling the injection of liquid nitrogen into the Dewar of the liquid nitrogen-cooled detector 2-2 at any time during the testing process, ensuring the normal operation of the liquid nitrogen-cooled detector 2-2.

[0040] Furthermore, the infrared integrating sphere 2-5 can be a gold-plated integrating sphere.

[0041] Furthermore, a baffle is installed in front of the exit hole of the infrared integrating sphere 2-5 to prevent the light source signal from directly shining on the liquid nitrogen-cooled detector 2-2 and interfering with the measurement of the reflected signal.

[0042] The working principle of the infrared reflectance spectroscopy vacuum online testing device in this embodiment is as follows:

[0043] Infrared light source 1-2 generates an infrared beam, which is shaped into parallel light by optical path system 1-1 and enters vacuum test chamber 2 through infrared window 1-3. The parallel beam is converted into converging light by parabolic mirror 2-1 and incident on infrared integrating sphere 2-5. The test sample or standard plate 2-4 is tightly attached to the test hole of infrared integrating sphere 2-5 using a mechanical structure, and the test hole is completely covered. The incident beam is homogenized by infrared integrating sphere 2-5 and reaches the test sample or standard plate 2-4. The infrared reflection signal of the test sample or standard plate 2-4 reaches liquid nitrogen-cooled detector 2-2 through the exit hole. The signal received by liquid nitrogen-cooled detector 2-2 is processed by data processing system 3 to obtain online infrared reflection spectrum test data. The changes in material structure and optical properties during the test can be analyzed by infrared spectroscopy, and the online emissivity test data of the material can be further calculated. The test wavelength range of the infrared reflection spectrum vacuum online test device is 2.5~18μm.

[0044] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0045] In the description of this application, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0046] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

Claims

1. A vacuum online testing device for infrared reflectance spectroscopy, characterized in that, include: Light source system (1), vacuum test chamber (2) and data processing system (3); The light source system (1) is located in the atmospheric environment. The light source system (1) includes an optical path system (1-1), an infrared light source (1-2), and an infrared window (1-3). The optical path system (1-1) mainly consists of an interferometer and optical devices. The infrared light source (1-2) is used to generate an infrared beam. The vacuum test chamber (2) is located on one side of the light source system (1). The infrared beam is converted into a parallel beam by Fourier transform modulation and shaping through the optical path system (1-1) and passes through the infrared window (1-3) into the vacuum test chamber (2). The vacuum test chamber (2) includes a parabolic mirror (2-1), a liquid nitrogen-cooled detector (2-2), a fixed base plate (2-3), a sample or standard plate to be tested (2-4), and an infrared integrating sphere (2-5). The parabolic mirror (2-1), the liquid nitrogen-cooled detector (2-2), and the infrared integrating sphere (2-5) are fixed on the fixed base plate (2-3) to keep their relative positions unchanged. The fixed base plate (2-3) is installed on the inner wall of the vacuum test chamber (2). The sample or standard plate to be tested (2-4) is... The mechanical device is placed close to the test hole below the infrared integrating sphere (2-5); the parallel beam is reflected by the parabolic mirror (2-1) and enters the infrared integrating sphere (2-5) through the entrance hole on the front side of the infrared integrating sphere (2-5), irradiating the sample to be tested or the standard plate (2-4). The beam reflected by the sample to be tested or the standard plate (2-4) is transmitted to the liquid nitrogen-cooled detector (2-2) through the exit hole of the infrared integrating sphere (2-5). The reflected signal detected by the liquid nitrogen-cooled detector (2-2) is transmitted to the data processing system (3). The data processing system (3) is located in the atmospheric environment outside the vacuum test chamber (2) and is used for dynamic monitoring of the reflectivity of materials in a specific band during environmental testing.

2. The infrared reflectance spectroscopy vacuum online testing device according to claim 1, characterized in that, The infrared light source (1-2) is a silicon carbide rod.

3. The infrared reflectance spectroscopy vacuum online testing device according to claim 1, characterized in that, The infrared window (1-3) is made of zinc selenide or potassium bromide to ensure the vacuum test chamber (2) is sealed, while having high transmittance.

4. The infrared reflectance spectroscopy vacuum online testing device according to claim 1, characterized in that, The fixed base plate (2-3) and the test hole below the infrared integrating sphere (2-5) are designed with a U-shaped structure to facilitate observation of the test status of the sample or standard plate (2-4) during online testing.

5. The infrared reflectance spectroscopy vacuum online testing device according to claim 1, characterized in that, The liquid nitrogen-cooled detector (2-2) is selected as a high signal-to-noise ratio liquid nitrogen-cooled mercury cadmium telluride detector.

6. The infrared reflectance spectroscopy vacuum online testing device according to claim 1, characterized in that, The vacuum test chamber (2) has an opening, and the outer wall of the Dewar of the liquid nitrogen-cooled detector (2-2) is sealed to the vacuum test chamber (2) through a sealing element, so that the inside of the Dewar of the liquid nitrogen-cooled detector (2-2) is connected to the outside of the chamber.

7. The infrared reflectance spectroscopy vacuum online testing device according to claim 1, characterized in that, The infrared integrating sphere (2-5) is a gold-plated integrating sphere.

8. The infrared reflectance spectroscopy vacuum online testing device according to claim 1, characterized in that, A baffle is provided in front of the exit hole of the infrared integrating sphere (2-5) to prevent the light source signal from directly shining on the liquid nitrogen-cooled detector (2-2) and interfering with the measurement of the reflected signal.

9. The infrared reflectance spectroscopy vacuum online testing device according to claim 8, characterized in that, The data processing system (3) includes a computer and a circuit control board, which are used to perform data processing and Fourier transform to obtain infrared reflection curves.

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