Laser optical path system
By using reflective light attenuation lenses and optical components in the laser annealing process, the reflected light path is changed and the beam is shaped, which solves the adverse effects of reflected laser on the laser source, improves process stability, and reduces modification costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-18
- Publication Date
- 2026-04-07
AI Technical Summary
In existing laser annealing processes, reflected laser light is reflected back to the laser source, affecting the accurate monitoring of laser output energy and the structure of the laser generator, leading to adverse effects.
A reflective light attenuation lens is used to change the reflected light path so that it deviates radially from the direction of light propagation. Combined with optical components, the laser is shaped and focused, and a protective lens is used to protect the optical components.
This reduces reflected laser light from the laser source, improves the stability of the laser annealing process, lowers modification costs, protects optical components, and ensures the performance of the laser source.
Smart Images
Figure CN224097187U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor device manufacturing technology, and more specifically, to a laser optical path system. Background Technology
[0002] In recent years, with the continuous development of semiconductor technology, the feature size of wafers has entered the nanometer era, posing new challenges to semiconductor manufacturing technology. To meet process requirements, laser annealing technology is widely used in semiconductor manufacturing. Laser annealing technology uses a laser pulser to provide a laser source, and through optical components (i.e., a series of lenses), the laser beam is processed into a long, narrow beam, which is then irradiated onto the wafer's film layers. Through laser annealing technology, purposes such as ion activation, defect repair, crystallization, conversion of amorphous materials into polycrystalline or monocrystalline states, and metal silicide bonding can be achieved, thereby improving the electrical properties of wafer chip cell materials.
[0003] In the laser annealing process of wafers, although most of the incident laser is absorbed by the wafer, a significant portion is reflected from the wafer surface. This reflected laser travels back to the laser generator through the incident optical path system. This reflected laser not only affects the accurate monitoring of the laser output energy throughout the laser annealing process, but it can also enter the laser generator cavity, adversely affecting the cavity resonator, frequency doubling crystal, and other structures. Utility Model Content
[0004] The purpose of this invention is to provide a laser optical path system to solve the technical problem that the laser optical path system used in the existing laser annealing process causes a large amount of reflected laser light to be reflected back to the laser source.
[0005] The laser optical path system provided by this utility model includes a laser source, an optical component, and a reflective light attenuating lens. The optical component is used to shape the laser emitted from the laser source. The reflective light attenuating lens is located between the laser source and the imaging plane and is used to change the reflected light path reflected by the imaging plane. The reflective light attenuating lens is configured to cause the reflected light path to deviate radially from the light path propagation direction.
[0006] Furthermore, along the direction of light propagation, the laser source, the optical components, and the light-reflecting reduction lens are arranged sequentially.
[0007] Furthermore, the light-reflecting reduction lens includes a lens body and a plurality of protrusions. The plurality of protrusions are disposed on the side of the lens body facing the laser source, and the cross-section of each protrusion gradually increases along the optical path propagation direction.
[0008] Furthermore, all of the protrusions have the same shape.
[0009] Further, the axial cross-sectional shape of the convex part is triangular.
[0010] Further, the axial cross-sectional shape of the convex part is semispherical.
[0011] Further, the reflected light weakening lens comprises a plurality of transmission sheets arranged in layers, and the refractive index of the plurality of transmission sheets gradually increases along the light path propagation direction.
[0012] Further, the reflected light weakening lens is provided with a plurality of convex parts, the plurality of convex parts are arranged on the transmission sheet closest to the laser source in the reflected light weakening lens, and the plurality of convex parts are located on the side of the transmission sheet facing the laser source.
[0013] Further, the optical assembly comprises an optical beam expanding module, an optical shaping module and an optical focusing module arranged in sequence along the light path propagation direction.
[0014] Further, the laser light path system further comprises a protective lens between the reflected light weakening lens and the imaging plane.
[0015] The laser light path system brings the beneficial effects that:
[0016] The laser light path system is provided as above, so that the laser emitted by the laser source can be shaped by the optical assembly to form a light beam meeting the process requirements and irradiate to the imaging plane; and the reflected laser reflected by the imaging plane deviates from the light path propagation direction under the action of the reflected light weakening lens, so as to reduce the reflected laser reflected to the laser source, thereby reducing the adverse effects on the laser source.
[0017] Therefore, the laser light path system can reduce the reflected laser reflected to the laser source by only setting the reflected light weakening lens, realizes the purpose of weakening the reflected laser on the basis of low cost and without affecting the incident amount of the laser source, improves the stability of the laser annealing process, and ensures the performance of the device for generating the laser source.
[0018] In addition, this form of reducing the reflected laser by increasing the reflected light weakening lens has low modification cost, is convenient for optimizing and improving the original laser light path system, and reduces the modification difficulty. BRIEF DESCRIPTION OF DRAWINGS
[0019] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed in the embodiment or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only embodiments of the present application, and those skilled in the art can obtain other drawings according to the provided drawings without creative labor.
[0020] Figure 1 A structure schematic diagram of the laser light path system provided by the embodiment one of the present application is shown in the figure.
[0021] Figure 2 An axial cross-section schematic diagram of the reflected light weakening lens of the laser light path system provided by the embodiment one of the present application is shown in the figure.
[0022] Figure 3 A principle schematic diagram of the reflected light weakening lens of the laser light path system provided by the embodiment one of the present application is shown in the figure.
[0023] Figure 4 An axial cross-section schematic diagram of the reflected light weakening lens of the laser light path system provided by the embodiment two of the present application is shown in the figure.
[0024] Figure 5 An axial cross-section schematic diagram of the reflected light weakening lens of the laser light path system provided by the embodiment three of the present application is shown in the figure.
[0025] Figure 6 An axial cross-section schematic diagram of the reflected light weakening lens of the laser light path system provided by the embodiment four of the present application is shown in the figure.
[0026] Figure 7 An axial cross-section schematic diagram of the reflected light weakening lens of the laser light path system provided by the embodiment four of the present application is shown in the figure.
[0027] Explanation of reference signs:
[0028] 100 - laser source; 200 - optical assembly; 300 - reflected light weakening lens; 400 - imaging plane; 500 - protective lens;
[0029] 210 - optical beam expansion module; 220 - optical shaping module; 230 - optical focusing module;
[0030] 310 - lens body; 320 - convex part; 331 - first transmission piece; 332 - second transmission piece; 333 - third transmission piece; 334 - fourth transmission piece; 335 - fifth transmission piece. DETAILED DESCRIPTION
[0031] In order to make the above object, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.
[0032] Embodiment one
[0033] Figure 1 A structure schematic diagram of the laser light path system provided by the embodiment one of the present application is shown in the figure.Figure 1 As shown in the embodiments, a laser light path system is provided, which comprises a laser source 100, an optical assembly 200 and a reflected light weakening lens 300. The optical assembly 200 is configured to shape the laser emitted by the laser source 100. The reflected light weakening lens 300 is located between the laser source 100 and an imaging plane 400, and is configured to change the reflected light path reflected by the imaging plane 400. The reflected light weakening lens 300 is configured to make the reflected light path deviate from the light path propagation direction in a radial direction.
[0034] The laser light path system is configured to shape the laser emitted by the laser source 100 through the optical assembly 200, so as to form a light beam meeting the process requirements and irradiate the imaging plane 400. The reflected laser reflected by the imaging plane 400 is deviated from the light path propagation direction by the reflected light weakening lens 300, so as to reduce the reflected laser reflected to the laser source 100, thereby reducing the adverse effects on the laser source 100.
[0035] Therefore, the laser light path system can reduce the reflected laser reflected to the laser source 100 by the reflected light weakening lens 300, achieve the purpose of weakening the reflected laser without affecting the incident amount of the laser source 100 at a low cost, improve the stability of the laser annealing process, and ensure the performance of the device for generating the laser source 100.
[0036] In addition, the form of reducing the reflected laser by adding the reflected light weakening lens 300 has low modification cost, and is convenient for optimizing and improving the original laser light path system, thereby reducing the modification difficulty.
[0037] Please continue to refer to Figure 1 In the embodiments, the laser source 100, the optical assembly 200 and the reflected light weakening lens 300 are sequentially arranged along the light path propagation direction.
[0038] The arrangement makes the reflected light weakening lens 300 closer to the imaging plane 400, so that the reflected laser reflected by the imaging plane 400 can be changed in time, thereby further reducing the adverse effects of the reflected laser on the laser source 100.
[0039] Figure 2 FIG. 3 is a schematic view of an axial cross section of the reflected light weakening lens 300 of the laser light path system provided in the first embodiment. As shown in the embodiments, the reflected light weakening lens 300 can comprise a lens body 310 and a plurality of protruding portions 320. The plurality of protruding portions 320 are arranged on the side of the lens body 310 facing the laser source 100, and the cross section of the protruding portion 320 gradually increases along the light path propagation direction. Figure 2
[0040] Figure 3 This is a schematic diagram illustrating the principle of the reflective light reduction lens 300 in the laser optical path system provided in this embodiment. Figure 3 As shown, when the incident laser light is incident from air onto the protrusion 320 on the surface of the light-reflecting attenuating lens 300, its incident angle is α. According to the law of refraction, its outgoing light angle β < α, and the light is converged and focused, so that the laser light emitted from the laser source 100 can reach the imaging plane 400 as much as possible. At the same time, the incident angle of the reflected laser light reflected by the imaging plane 400 is γ, and when it is emitted from the light-reflecting attenuating lens 300 into the air, according to the law of refraction, its outgoing angle δ > γ, and the light light is diverged and scattered, so that the reflected light path deviates radially from the direction of light path propagation, thereby reducing the amount of reflected laser light entering the laser source 100.
[0041] Please continue to refer to Figure 2 In this embodiment, all protrusions 320 have the same shape.
[0042] By setting the shape of each protrusion 320 to be the same, the processing difficulty of the light-reducing lens 300 can be reduced.
[0043] Please continue to refer to Figure 2 In this embodiment, the axial cross-sectional shape of the protrusion 320 is triangular.
[0044] This configuration increases the contact area of the protrusion 320 with the incident and reflected lasers, thereby improving the convergence effect of the incident laser and the divergence effect of the reflected laser.
[0045] Please continue to refer to Figure 1 In this embodiment, the optical component 200 may include an optical beam expander 210, an optical shaping module 220 and an optical focusing module 230 arranged sequentially along the optical path propagation direction.
[0046] The optical component 200, as described above, can effectively expand, shape, and focus the laser beam emitted from the laser source 100 to meet process requirements.
[0047] Please continue to refer to Figure 1 In this embodiment, the laser optical path system may further include a protective lens 500, wherein the protective lens 500 is located between the reflective light attenuating lens 300 and the imaging plane 400.
[0048] The aforementioned protective lens 500 can effectively protect the optical component 200, thereby reducing damage to the optical component 200.
[0049] Specifically, in this embodiment, the laser source 100 includes a laser generator.
[0050] The laser source 100 formed by the laser generator has a simple structure.
[0051] Embodiment Two
[0052] The embodiment provides another laser light path system, which is different from the laser light path system provided in the above embodiment one in the following aspects.
[0053] Figure 4 An axial cross-sectional view of the reflective light weakening lens 300 of the laser light path system provided in the embodiment two is shown in FIG. 3B. Figure 4 In the embodiment, the axial cross-sectional shape of the convex part 320 is hemispherical.
[0054] By setting the convex part 320 in the above form, the sharp edge caused by the setting of the convex part 320 can be reduced, and the risk of scratching the hands of the operator is reduced.
[0055] It should be noted that in the embodiment, the convex part 320 can be a spherical ball or an ellipsoidal shape.
[0056] Embodiment Three
[0057] The embodiment provides another laser light path system, which is different from the laser light path system provided in the above embodiment one in the following aspects.
[0058] Figure 5 An axial cross-sectional view of the reflective light weakening lens 300 of the laser light path system provided in the embodiment three is shown in FIG. 4B. Figure 5 As shown in the figure, the reflective light weakening lens 300 includes a plurality of transmission sheets stacked, and the refractive index of the plurality of transmission sheets gradually increases along the light path propagation direction.
[0059] The reflective light weakening lens 300 formed by stacking a plurality of transmission sheets with different refractive indexes has a simple structure and low manufacturing difficulty.
[0060] Specifically, in the embodiment, the reflective light weakening lens 300 includes five transmission sheets, which are a first transmission sheet 331, a second transmission sheet 332, a third transmission sheet 333, a fourth transmission sheet 334 and a fifth transmission sheet 335, wherein the refractive indexes of the first transmission sheet 331, the second transmission sheet 332, the third transmission sheet 333, the fourth transmission sheet 334 and the fifth transmission sheet 335 increase in turn, that is, the refractive indexes are n1
[0061] It can be understood that in other embodiments, the number of transmission sheets can also be other forms, such as three, four, six, etc., and the embodiment only takes five transmission sheets as an example.
[0062] Embodiment Four
[0063] This embodiment provides another laser light path system, which is different from the laser light path system provided in Embodiment Three as described below.
[0064] Figure 6 One of the axial cross-sectional schematic views of the reflective light weakening lens of the laser light path system provided in this embodiment Four; Figure 7 One of the axial cross-sectional schematic views of the reflective light weakening lens of the laser light path system provided in this embodiment Four. As shown in Figure 6 and Figure 7 As shown, the reflective light weakening lens is provided with a plurality of protruding portions 320, which are arranged in the transmissive lens closest to the laser source 100 in the reflective light weakening lens 300, and are located on the side of the transmissive lens facing the laser source 100.
[0065] This form of the reflective light weakening lens 300 formed by stacking a plurality of transmissive lenses with different refractive indexes and arranging protruding portions 320 in the transmissive lens closest to the laser source 100 can further reduce the reflected laser light reflected to the laser source.
[0066] It should be noted that in this embodiment, the number of transmissive lenses can also take other forms, and the axial cross-sectional shape of the protruding portion 320 is not limited to a triangle and a hemisphere, as long as it is a shape that can form the protruding portion 320.
[0067] It should also be noted that in the above embodiments, the laser light path system can be used for laser annealing process, or can be used for laser cutting or laser marking, etc.
[0068] Although the utility model discloses as above, the utility model is not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be limited to the range defined by the claims.
[0069] Finally, it should be noted that, in this document, the term "one" or "another" is used generically for a single reference to a thing or a group of things, without intent or implication to limit the amount to a single reference. In addition, the term "or" is used in the context as an inclusive disjunction, unless otherwise indicated (e.g., in a context seeking an exclusive disjunction "either / or"). Also, terms such as "first" and "second" are used merely as labels for the convenience of the reader and do not necessarily connote an ordering, or significance as to importance of interrelation of elements. Moreover, terms such as "comprising", "including", or "having" are intended to be open-ended and do not exclude additional, unrecited elements, or methods of practicing the application. Further, the term "including" is used to mean "comprising" or "consisting of," and the notation "A / B" means "A or B" unless otherwise indicated.
[0070] In the above embodiments, the orientation terms such as "side" are based on the figures shown.
[0071] The above description of disclosed embodiments provides examples, and is not intended to be limiting. Numerous modifications of those embodiments would be apparent to those of skill in the art, and the present application is intended to include all such modifications that fall within the scope of the application. Thus, the application is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A laser optical path system, characterized in that, The system includes a laser source (100), an optical component (200), and a reflective light-reducing lens (300). The optical component (200) is used to shape the laser emitted from the laser source (100). The reflective light-reducing lens (300) is located between the laser source (100) and an imaging plane (400) and is used to change the reflected light path reflected by the imaging plane (400). The reflective light-reducing lens (300) is configured to cause the reflected light path to deviate radially from the direction of light propagation.
2. The laser optical path system according to claim 1, characterized in that, Along the direction of light propagation, the laser source (100), the optical component (200), and the light-reflecting reduction lens (300) are arranged in sequence.
3. The laser optical path system according to claim 1, characterized in that, The light-reflecting reduction lens (300) includes a lens body (310) and a plurality of protrusions (320). The plurality of protrusions (320) are disposed on the side of the lens body (310) facing the laser source (100), and the cross-section of each protrusion (320) gradually increases along the optical path propagation direction.
4. The laser optical path system according to claim 3, characterized in that, Each of the protrusions (320) has the same shape.
5. The laser optical path system according to claim 4, characterized in that, The axial cross-sectional shape of the protrusion (320) is triangular.
6. The laser optical path system according to claim 4, characterized in that, The axial cross-sectional shape of the protrusion (320) is hemispherical.
7. The laser optical path system according to claim 1, characterized in that, The light-reflecting reduction lens (300) includes multiple transmissive sheets stacked together, with the refractive index of the multiple transmissive sheets gradually increasing along the light path propagation direction.
8. The laser optical path system according to claim 7, characterized in that, The light-reflecting reduction lens (300) is provided with a plurality of protrusions (320), the plurality of protrusions (320) are provided on the transmissive sheet of the light-reflecting reduction lens (300) that is closest to the laser source (100), and the plurality of protrusions (320) are located on the side of the transmissive sheet facing the laser source (100).
9. The laser optical path system according to any one of claims 1-8, characterized in that, The optical component (200) includes an optical beam expander (210), an optical shaping module (220), and an optical focusing module (230) arranged sequentially along the optical path propagation direction.
10. The laser optical path system according to any one of claims 1-8, characterized in that, The laser optical path system also includes a protective lens (500), which is located between the reflective light reducing lens (300) and the imaging plane (400).