Ultra-wide horizontal wet process equipment

Abstract

The utility model relates to ultra-wide horizontal wet process equipment, which comprises a working tank, the conveying assembly is arranged in the working groove, the conveying assembly comprises a shaft seat, a roller set and a supporting wheel, the roller set comprises a first roller and a second roller which are vertically and oppositely arranged, the first roller, the second roller and the supporting wheel are rotationally connected to the shaft seat, and the axis of the first roller, the axis of the second roller and the axis of the supporting wheel are parallel; the supporting wheel is arranged below the second roller and supports the middle of the second roller. By supporting the middle of the roller rotating shaft, the phenomenon that the middle of the roller rotating shaft swings up and down is eliminated, circuit boards are prevented from deviating in the conveying process, the yield of the circuit boards is further improved, and normal operation of wet process equipment is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to wet process equipment technical field especially is to point to a kind of super-wide horizontal wet process equipment. BACKGROUND

[0002] Wet process is indispensable process in semiconductor manufacturing industry, it is arranged conveying device in machine table work tank, carries out chemical liquid spraying, cleaning etc. to circuit board in the process that conveying device conveys circuit board, realizes the surface treatment and automation conveying of circuit board, in order to satisfy the needs of customer maximum production various circuit board and improve productivity, the original work tank is widened, effectively satisfy the production of high depth ratio circuit board, the pipe diameter of water inlet pipe is increased, effectively improve the water intake of work tank, increase the size matching of conveying device after widening work tank, satisfy the conveying of production 10mm above thickness circuit board, satisfy the production requirement of various high-precision computing circuit board.

[0003] Conveying device is usually composed of shaft seat, rotating shaft and roller, rotating shaft is rotatably connected with shaft seat, after roller is driven to roll by rotating shaft, circuit board conveying is realized, however, after the original conveying device is replaced by large conveying device, the length of original rotating shaft increases, when equipment runs, the middle part of rotating shaft exists up and down swing phenomenon, leading to possible deviation of circuit board in the process of conveying and colliding with machine table side wall, which not only causes circuit board damage, but also affects normal operation of equipment. SUMMARY

[0004] Therefore, the utility model wants to overcome the problem that the middle part of roller rotating shaft swings up and down after wet process equipment in prior art runs, leading to deviation of circuit board and colliding with machine table side wall, and further provide a kind of super-wide horizontal wet process equipment, the middle part of roller rotating shaft is supported, eliminate the up and down swing phenomenon of the middle part of roller rotating shaft, avoid deviation of circuit board in the process of conveying, and further improve the yield of circuit board, ensure the normal operation of wet process equipment.

[0005] To solve the above technical problems, the utility model provides a kind of super-wide horizontal wet process equipment, including,

[0006] Work tank;

[0007] Conveying assembly is arranged in the work tank, the conveying assembly includes shaft seat, roller group and support wheel, the roller group includes first roller and second roller that are arranged in an opposite direction, the first roller, the second roller and the support wheel are rotatably connected to the shaft seat, and the axis of the first roller, the axis of the second roller and the axis of the support wheel are parallel, the support wheel is arranged below the second roller and supports the middle part of the second roller.

[0008] In one embodiment of the utility model, the conveying assembly further includes a fixing base arranged on the shaft base, the fixing base is arranged opposite to the middle part of the second roller, and the supporting wheel is rotatably connected to the fixing base.

[0009] In one embodiment of the utility model, the fixing base is arranged on both sides of the supporting wheel along the axial direction.

[0010] In one embodiment of the utility model, the conveying assembly further includes a wheel group arranged along the direction of the circuit board conveying, the wheel group includes a plurality of first wheels and second wheels, the first wheels and the second wheels are rotatably connected to the shaft base, the first wheels and the second wheels are arranged opposite to each other, and the supporting wheel supports the middle part of the rotating shaft of the second wheel.

[0011] In one embodiment of the utility model, the liquid spraying assembly includes a first liquid inlet pipe and a second liquid inlet pipe arranged in the working groove, the first liquid inlet pipe and the second liquid inlet pipe are arranged above and below the conveying assembly respectively, and the first liquid inlet pipe and the second liquid inlet pipe are both provided with a spray port.

[0012] In one embodiment of the utility model, the liquid spraying assembly includes a reflux groove and a reflux pipe, and the bottom of the working groove is communicated with the reflux groove through the reflux pipe.

[0013] In one embodiment of the utility model, the liquid spraying assembly further includes a pump, the output end of the pump is communicated with the first liquid inlet pipe and the second liquid inlet pipe, and the input end of the pump is communicated with the bottom of the reflux groove.

[0014] In one embodiment of the utility model, the shell is provided with a window and a window cover, the window penetrates the inside of the shell, the window cover is rotatably connected to the shell and covers the window, and the working groove is arranged in the shell.

[0015] In one embodiment of the utility model, the mobile operation platform and a supporting steel frame are further included, the shell is arranged on the supporting steel frame, the supporting steel frame is provided with a guide rail extending along the conveying direction, the mobile operation platform is provided with a movable wheel and a guide wheel, the guide wheel moves along the guide rail, and the movable wheel supports the mobile operation platform.

[0016] In one embodiment of the utility model, the guide wheel is provided with a limiting disc at both ends, and the limiting disc abuts against both sides of the guide rail along the horizontal direction.

[0017] In one embodiment of the utility model, the bottom of the mobile operation platform is provided with an elastic element.

[0018] The above technical scheme of the utility model has the following beneficial effects compared with the prior art:

[0019] The super-wide horizontal wet process equipment, the first roller and the second roller contact the upper surface and the lower surface of the circuit board respectively, the first roller and the second roller are reversely rotated to push the circuit board to move by using friction force, the conveying of the circuit board is realized, the middle part of the second roller is supported and positioned by using the supporting wheel, the middle part of the second roller is prevented from swinging and vibrating up and down, the circuit board can be conveyed along the predetermined direction, the phenomenon that the circuit board deviates and collides with the side wall of the machine table is reduced, the supporting wheel can rotate along with the second roller, the friction force between the second roller and the supporting wheel is greatly reduced, and the conveying efficiency of the circuit board is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to make the content of the utility model more easily understood clearly, the utility model is further described in detail below according to the specific embodiment of the utility model and in combination with the drawings, wherein

[0021] Figure 1 It is a structural schematic view of the super-wide horizontal wet process equipment in the preferred embodiment of the utility model;

[0022] Figure 2 It is another structural schematic view of the super-wide horizontal wet process equipment in the preferred embodiment of the utility model;

[0023] Figure 3 It is a structural schematic view of the roller set shown in the figure; Figure 1

[0024] It is an enlarged view of A shown in the figure; Figure 4 Figure 3 It is a structural schematic view of the side view of the first roller, the second roller and the supporting wheel shown in the figure;

[0025] Figure 5 Figure 3 It is a structural schematic view of the wheel set shown in the figure;

[0026] Figure 6 It is a structural schematic view of the wheel set shown in the figure; Figure 1

[0027] It is an enlarged view of B shown in the figure. Figure 7 Figure 1

[0028] ​​​​The description of the drawings is as follows: 1, working groove; 21, roller set; 211, rotating shaft; 212, first roller; 213, second roller; 214, supporting wheel; 215, rotating shaft; 22, wheel set; 221, first wheel; 222, second wheel; 223, rotating shaft; 224, supporting wheel; 23, shaft seat; 24, fixed seat; 3, liquid spraying assembly; 31, first liquid inlet pipe; 32, second liquid inlet pipe; 33, return pipe; 34, return groove; 35, pump; 36, pipe; 37, pipe; 4, shell; 41, window; 42, window cover; 5, supporting steel frame; 6, movable operation platform; 61, movable wheel; 62, guide wheel; 63, limiting disc; 64, guide rail; 65, elastic element. DETAILED DESCRIPTION

[0029] The utility model will be further explained in connection with the drawings and specific embodiments, so that the person skilled in the art can better understand the utility model and can be implemented, but the embodiment is not as the limitation of the utility model.

[0030] Referring to Figure 1 , Figure 3 and Figure 4 , in an embodiment of the utility model, a kind of super-wide horizontal wet process equipment is disclosed, comprising,

[0031] working groove 1;

[0032] conveying assembly is set in the working groove 1, and the conveying assembly includes shaft seat 23, roller set 21 and supporting wheel 214, the roller set 21 includes first roller 212 and second roller 213 that are arranged opposite up and down, the first roller 212, the second roller 213 and the supporting wheel 214 are all rotationally connected to the shaft seat 23, and the axis of the first roller 212, the axis of the second roller 213 and the axis of the supporting wheel 214 are parallel, the supporting wheel 214 is arranged below the second roller 213 and supports the middle part of the second roller 213.

[0033] The super-wide horizontal wet process equipment described in the embodiment uses the wheel surface of supporting wheel 214 to support the middle part of second roller 213, strengthens the rigidity of second roller 213, eliminates the phenomenon that the middle part of second roller 213 swings and vibrates up and down due to gravity moment, ensures that the acting force between second roller 213 and circuit board is uniform and smooth, thereby reduce the risk that circuit board deviates and collides with the side wall of machine stand, supporting wheel 214 rotates along with second roller 213, converts sliding friction between the two into rolling friction, effectively reduces the friction between second roller 213 and supporting wheel 214, and improves the conveying efficiency of second roller 213.

[0034] Referring to Figure 5As shown in the utility model in an embodiment, the first roller 212 is located above the second roller 213.

[0035] In an embodiment of the utility model, it further includes a plurality of roller groups 21 distributed along the circuit board conveying direction.

[0036] In an embodiment of the utility model, the first roller 212 and the second roller 213 are both arranged as solid, which can improve wear resistance and inhibit vibration.

[0037] Referring to Figure 3 As shown in the utility model in an embodiment, the conveying assembly further includes a fixing seat 24 arranged on the shaft seat 23, the fixing seat 24 is arranged opposite to the middle part of the second roller 213, and the support wheel 214 is rotatably connected to the fixing seat 24; the fixing seat 24 is used for enhancing the structural reliability of the support wheel 214, and the fixing seat 24 also facilitates disassembly and maintenance of the support wheel 214, thereby reducing equipment maintenance complexity.

[0038] Referring to Figure 4 As shown in the utility model in an embodiment, the fixing seat 24 is provided with the support wheel 214 on both sides in the axial direction of the support wheel 214; when a unilateral support wheel 214 fails, the other side support wheel 214 can still provide partial support, thereby reducing downtime risk.

[0039] Referring to Figure 4 As shown in the utility model in an embodiment, the two support wheels 214 on both sides of the fixing seat 24 are symmetrically arranged, which ensures that the two support wheels 214 are strictly symmetrical according to the center line of the second roller 213, thereby avoiding stress concentration of the second roller 213.

[0040] Referring to Figure 4 As shown in the utility model in an embodiment, the fixing seat 24 is provided with a rotating shaft 215, and the two support wheels 214 are respectively connected to both ends of the rotating shaft 215.

[0041] Referring to Figure 6 As shown in the utility model in an embodiment, the conveying assembly further includes a wheel group 22 arranged along the circuit board conveying direction, the wheel group 22 includes a plurality of first wheel sheets 221 and second wheel sheets 222, the first wheel sheet 221 and the second wheel sheet 222 are both circular sheet-shaped, the first wheel sheet 221 and the second wheel sheet 222 are both rotatably connected to the shaft seat 23, and the first wheel sheet 221 and the second wheel sheet 222 are arranged opposite to each other in up and down directions; the support wheel 224 supports the middle part of the rotating shaft 223 of the second wheel sheet 222; the wheel group 22 and the roller group 21 are arranged in different stations and can be switched to convey the circuit board.

[0042] Referring to Figure 6As shown in the utility model in an embodiment, the first wheel piece 221 is above the second wheel piece 222.

[0043] Referring to Figure 6 As shown in the utility model in an embodiment, the first wheel piece 221 and the second wheel piece 222 are driven to rotate by the rotating shaft 223.

[0044] Further, it also comprises a plurality of wheel piece groups 22 distributed along the circuit board conveying direction.

[0045] In an embodiment of the utility model, the width of the working groove 1 is 1200cm, the diameter of the first liquid inlet pipe 31 and the second liquid inlet pipe 32 is 40mm, and the diameter of the first roller 212, the second roller 213, the first wheel piece 221 and the second wheel piece 222 is 50mm.

[0046] Referring to Figure 1 As shown in the utility model in an embodiment, it also comprises a liquid spraying assembly 3, the liquid spraying assembly 3 comprises a first liquid inlet pipe 31 and a second liquid inlet pipe 32 arranged in the working groove 1, the first liquid inlet pipe 31 and the second liquid inlet pipe 32 are arranged above and below the conveying assembly respectively, the first liquid inlet pipe 31 and the second liquid inlet pipe 32 are both provided with a spraying port, and the spraying ports of the first liquid inlet pipe 31 and the second liquid inlet pipe 32 spray out chemical liquid at the same time, so that the double sides of the circuit board on the conveying device are sprayed at the same time, and the efficiency of chemical liquid spraying is improved.

[0047] Referring to Figure 2 As shown in the utility model in an embodiment, the first liquid inlet pipe 31 and the second liquid inlet pipe 32 are horizontally arranged, so that the chemical liquid of the first liquid inlet pipe 31 and the second liquid inlet pipe 32 can uniformly cover the upper and lower surfaces of the circuit board, and the surface treatment consistency is improved.

[0048] Referring to Figure 2 As shown in the utility model in an embodiment, the liquid spraying assembly 3 comprises a backflow tank 34 and a backflow pipe 33, the bottom of the working groove 1 is communicated with the backflow tank 34 through the backflow pipe 33, the excess chemical liquid at the bottom of the working groove 1 is backflowed to the backflow tank 34 through the backflow pipe 33, the waste of chemical liquid can be reduced, the cost is lowered, and meanwhile, the pollution caused by the accumulation of excess chemical liquid at the bottom of the working groove 1 is avoided.

[0049] Referring to Figure 1 As shown in the utility model in an embodiment, the liquid spraying assembly 3 further comprises a pump 35, the output end of the pump 35 is communicated with the first liquid inlet pipe 31 and the second liquid inlet pipe 32, the input end of the pump 35 is communicated with the bottom of the backflow tank 34, the backflow tank 34, the pump 35 and the working groove 1 form a closed loop system, and automatic recycling of chemical liquid is realized.

[0050] Referring to Figure 1 As shown in the utility model in one embodiment, further comprising a housing 4, the working groove 1 is arranged in the housing 4, the housing 4 is used to isolate splashing chemical liquid, protects the safety of operator, the housing 4 is equipped with window 41 and window cover 42, the window 41 is through the inside of the housing 4, the window cover 42 is rotatably connected with the housing 4 and covers the window 41, after turning over the window cover 42, the inside of the housing 4 can be observed or maintained, and the process progress is grasped in time.

[0051] In one embodiment of the utility model, the window cover 42 is composed of transparent material, the visibility of the inside of the housing 4 is improved.

[0052] Referring to Figure 1 As shown in the utility model in one embodiment, further comprising a mobile operation platform 6 and a support steel frame 5, the housing 4 is arranged on the support steel frame 5, the support steel frame 5 is equipped with guide rail 64 extending along the conveying direction, the mobile operation platform 6 is equipped with movable wheel 61 and guide wheel 62, the guide wheel 62 moves along the guide rail 64, the movable wheel 61 is used to support the mobile operation platform 6, the mobile operation platform 6 is arranged lower than the working groove 1, when the operator stands on the mobile operation platform 6, the hands of the operator can just operate in the housing 4, the mobile operation platform 6 can automatically translate, the operator stands on the mobile operation platform 6 to realize fast movement, the working condition in the working groove 1 is monitored flexibly and quickly, the equipment production rhythm is matched, and the working strength is reduced.

[0053] Referring to Figure 7 As shown in the utility model in one embodiment, the both ends of the guide wheel 62 are equipped with limit disc 63, the limit disc 63 abuts on both sides of the guide rail 64 along the horizontal direction, the mobile operation platform 6 is constrained by using the limit disc 63, to prevent the mobile operation platform 6 from deviating from the guide rail 64 laterally.

[0054] Referring to Figure 7 As shown in the utility model in one embodiment, the bottom of the mobile operation platform 6 is equipped with elastic element 65, the elastic element 65 can reduce the vibration feeling of the mobile operation platform 6, improve the comfort degree of the operator, and the elastic element 65 is preferably spring.

[0055] Referring to Figure 1 As shown in the utility model in one embodiment, the output end of the pump is communicated with the first liquid inlet pipe 31 and the second liquid inlet pipe 31 through pipeline 37, and the input end of the pump 35 is communicated with the backflow groove 34 through pipeline 36.

[0056] The working principle of the ultra-wide horizontal wet process equipment is as follows:

[0057] After the device is operated, the rotating shaft 211 rotates to drive the first roller 212 and the second roller 213 to rotate, and the circuit board enters the gap between the first roller 212 and the second roller 213, and then the circuit board passes through the working groove 1 along a predetermined direction, the supporting wheel 214 supports the middle part of the second roller 213 and rotates with the second roller 213 to eliminate the up and down swing of the middle part of the second roller 213, in the process, the first liquid inlet pipe 31 and the second liquid inlet pipe 32 respectively spray chemical liquid on the circuit board from above and below, the excess chemical liquid is gathered at the bottom of the working groove 1 and is returned to the return groove 34 through the return pipe 33 to realize the recycling of the chemical liquid, the chemical liquid in the return groove 34 flows to the first liquid inlet pipe 31 and the second liquid inlet pipe 32 through the pipeline 36 / 37 under the pressure of the pump 35 to realize the recycling of the chemical liquid.

[0058] Obviously, the above embodiments are only examples for clearly illustrating, not limiting the embodiments. For those skilled in the art, based on the above description, other different forms of changes or variations can be made. Here, all the embodiments are not required and cannot be exhausted. The obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. An ultra-wide horizontal wet process apparatus, characterized by, The utility model relates to a circuit board conveying device, including, Work groove; Conveying assembly is arranged in the work groove, the conveying assembly includes axle seat, roller group and support wheel, the roller group includes first roller and second roller who are arranged in the upper and lower direction, the first roller, the second roller and the support wheel are all rotationally connected to the axle seat, and the axis of the first roller, the axis of the second roller and the axis of the support wheel are parallel, the support wheel is arranged below the second roller and supports the middle part of the second roller.

2. The ultra-wide horizontal wet process apparatus according to claim 1, wherein, The conveying assembly further includes a fixed seat arranged on the axle seat, the fixed seat is arranged opposite to the middle part of the second roller, and the support wheel is rotationally connected to the fixed seat.

3. An ultra-wide horizontal wet process apparatus according to claim 2, wherein, The fixed seat is provided with the support wheel on both sides of the support wheel in the axial direction.

4. The ultra-wide horizontal wet process apparatus according to claim 1, wherein The conveying assembly further includes a set of wheel segments arranged in the direction of circuit board conveying, the set of wheel segments includes a plurality of first wheel segments and second wheel segments, the first wheel segments and the second wheel segments are rotationally connected to the axle seat, and the first wheel segments and the second wheel segments are arranged in the upper and lower direction, the support wheel supports the middle part of the rotating shaft of the second wheel segments.

5. The ultra-wide horizontal wet process apparatus according to claim 1, wherein The spraying assembly further includes a first liquid inlet pipe and a second liquid inlet pipe arranged in the work groove, the first liquid inlet pipe and the second liquid inlet pipe are arranged above and below the conveying assembly respectively, and the first liquid inlet pipe and the second liquid inlet pipe are provided with spray nozzles.

6. An ultra-wide horizontal wet process apparatus according to claim 5, wherein, The spraying assembly further includes a return tank and a return pipe, the bottom of the work groove is communicated with the return tank through the return pipe.

7. An ultra-wide horizontal wet process apparatus according to claim 6, wherein The spraying assembly further includes a pump, the output end of the pump is communicated with the first liquid inlet pipe and the second liquid inlet pipe, and the input end of the pump is communicated with the bottom of the return tank.

8. The super-wide horizontal wet process apparatus according to claim 4, wherein The housing is provided with a window and a window cover, the window penetrates the interior of the housing, the window cover is rotationally connected to the housing and covers the window, and the work groove is arranged in the housing.

9. An ultra-wide horizontal wet process apparatus according to claim 8, wherein, The mobile operation platform and the support steel frame are further included, the housing is arranged on the support steel frame, the support steel frame is provided with a guide rail extending along the conveying direction, the mobile operation platform is provided with a movable wheel and a guide wheel, the guide wheel moves along the guide rail, and the movable wheel supports the mobile operation platform.

10. The ultra-wide horizontal wet process apparatus according to claim 9, wherein The guide wheel is provided with a limiting disc at both ends, and the limiting disc abuts against both sides of the guide rail in the horizontal direction.

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