Tool setting gauge and wafer thinning device

Abstract

The embodiment of the utility model provides a tool setting gauge and a wafer thinning device, and relates to the technical field of wafer processing. The tool setting gauge comprises an air nozzle assembly, a first air guide pipe and a sensor. The air nozzle assembly comprises an air nozzle, a connecting piece and a driving device. The connecting piece is connected with the air nozzle and the driving device, the driving device drives the connecting piece to move, and the connecting piece drives the air nozzle to move. The connecting piece comprises a body part and a moving part, and when the moving part is subjected to acting force in the first direction, the air nozzle can be driven to move in the first direction. The first gas guide pipe is connected with the gas nozzle, and the sensor is arranged on the first gas guide pipe and used for detecting the pressure intensity of gas in the first gas guide pipe. According to the embodiment of the invention, the distance between the air nozzle and the table disc can be determined through the pressure intensity of the air in the first air guide pipe, so that the distance between the grinding wheel and the table disc can be obtained, non-contact tool setting is realized, and the situation that the tool setting gauge and the table disc are damaged due to collision between the tool setting gauge and the table disc is avoided.

Description

Technical Field

[0001] This application relates to the technical field of wafer processing, and more particularly to a wafer setting device and a wafer thinning apparatus. Background Technology

[0002] Before thinning the wafer, it is necessary to obtain the distance between the grinding wheel and the slab. In existing technologies, this distance is usually measured manually, which results in poor measurement accuracy and low measurement efficiency. Utility Model Content

[0003] This application discloses a tool setter and a wafer thinning device, which can achieve non-contact tool setting, prevent damage to the tool setter and the wafer due to collisions, and improve the measurement accuracy and efficiency of the distance between the grinding wheel and the wafer.

[0004] To achieve the above objectives, this application discloses a tool setting device. The tool setting device is used to set the grinding wheels of a wafer thinning apparatus. The tool setting device includes an air nozzle assembly, a first air guide tube, and a sensor. The air nozzle assembly includes an air nozzle, a connector, and a drive device. The connector connects the air nozzle and the drive device, and the drive device drives the connector to move, causing the air nozzle to move between a first position and a second position. The connector includes a body and a moving part, and the air nozzle is connected to the body via the moving part. When the moving part is subjected to a force along a first direction, it can move in the first direction to drive the air nozzle to move along the first direction. The first air guide tube is connected to the air nozzle and is used to connect to an air source to supply air to the air nozzle. A sensor is disposed on the first air guide tube and is used to detect the pressure of the gas inside the first air guide tube.

[0005] In some possible implementations, the moving part includes an elastic element that can deform in the first direction when the moving part is subjected to a force along the first direction, thereby driving the nozzle to move along the first direction.

[0006] In some possible implementations, the elastic element includes a spring sheet. The moving part includes a first fixing plate and a second fixing plate, which are located on both sides of the spring sheet along a first direction and are respectively connected to the spring sheet. Both ends of the spring sheet protrude from the first fixing plate and the second fixing plate.

[0007] In some possible implementations, there are two springs, which are positioned opposite each other along a first direction.

[0008] In some possible implementations, the moving part includes a first mounting plate and a second mounting plate, with an elastic member located between and connected to both plates. The first mounting plate is connected to the main body, and the second mounting plate is connected to the nozzle. When the second mounting plate is subjected to a force along a first direction, the elastic member can elastically deform in the first direction to drive the second mounting plate and the nozzle to move along the first direction.

[0009] In some possible implementations, the connector further includes an extension that is connected to the body via a movable portion. Along a first direction, the extension and the nozzle are disposed opposite to each other, and the extension is away from the bearing surface of the wafer thinning device relative to the nozzle.

[0010] In some possible implementations, the nozzle material includes non-metallic materials.

[0011] On the other hand, embodiments of this application provide a wafer thinning apparatus. The wafer thinning apparatus includes a tray, a grinding wheel, a tool setter as described above, and a controller. The tray includes a bearing surface for supporting the wafer. The grinding wheel is disposed opposite to the bearing surface along a first direction and is movable relative to the bearing surface along the first direction to move closer to or away from the bearing surface. When the air nozzle is in a first position, the air nozzle is located between the grinding wheel and the tray, and the air outlet direction of the air nozzle is towards the bearing surface. When the grinding wheel moves closer to the bearing surface along the first direction, it can press against a connector, so that the connector can drive the air nozzle to move closer to the bearing surface along the first direction. When the air nozzle is in a second position, the air nozzle is offset from the grinding wheel and the tray in the first direction. The controller is electrically connected to a sensor for acquiring sensor detection data and determining the distance between the grinding wheel and the bearing surface in the first direction based on the sensor detection data.

[0012] In some possible implementations, there are multiple grinding wheels. There are also multiple air nozzle assemblies, with a first air duct connected to each of the multiple air nozzles. Each air nozzle assembly is used to set the corresponding grinding wheel.

[0013] In some possible implementations, the first air guide tube includes a first main air guide tube and multiple first branch air guide tubes. The first main air guide tube is used to connect to an air source, and the sensor is mounted on the first main air guide tube. The multiple branch air guide tubes are respectively connected to the first main air guide tube, and the multiple branch air guide tubes are connected one-to-one with the nozzles of multiple nozzle assemblies. The tool setter also includes multiple pneumatic control valves, which are mounted one-to-one on the multiple first branch air guide tubes.

[0014] In some possible implementations, the tool setter also includes a second air guide tube and a solenoid valve, the second air guide tube being connected to the pneumatic control valve. The solenoid valve is located on the second air guide tube and is used to control the flow rate of gas within the second air guide tube, thereby controlling the pneumatic control valve to open or close.

[0015] In some possible implementations, the second air guide tube includes a second main air guide tube and multiple second branch air guide tubes. The second main air guide tube is used to connect to an air source, and the multiple branch air guide tubes are respectively connected to the second main air guide tube, with each branch air guide tube corresponding to a multiple pneumatic control valve. Multiple solenoid valves are provided, each corresponding to one of the multiple branch air guide tubes.

[0016] In some possible implementations, the tool setter also includes a first filter and a second filter. The first filter is disposed on the first gas guide pipe and is used to filter the gas within the first gas guide pipe. The second filter is disposed on the second gas guide pipe and is used to filter the gas within the second gas guide pipe.

[0017] In some possible implementations, the tool setter also includes a first pressure regulating valve and a second pressure regulating valve. The first pressure regulating valve is located on the first main gas pipe and is used to regulate the gas pressure inside the first main gas pipe. The second pressure regulating valve is located on the second main gas pipe and is used to regulate the gas pressure inside the second main gas pipe.

[0018] The embodiments of this application have at least the following beneficial effects:

[0019] In the embodiments of this application, a connecting member is provided to drive the jet nozzle to a first position, allowing the jet nozzle to be positioned between the grinding wheel and the table. When the jet nozzle is positioned between the grinding wheel and the table, the air outlet direction of the jet nozzle is towards the bearing surface, allowing the gas ejected from the jet nozzle to flow towards the bearing surface, which in turn obstructs the airflow. This allows the distance between the jet nozzle and the bearing surface to affect the gas pressure within the first air guide tube, thus enabling the determination of the distance between the jet nozzle and the bearing surface in the first direction based on the gas pressure within the first air guide tube.

[0020] When the pressure of the gas in the first air guide tube reaches a set value, or when the pressure of the gas in the first air guide tube and the initial pressure difference of the gas in the first air guide tube reach a set value, the distance between the jet nozzle and the bearing surface in the first direction can be determined as a set value, thereby determining the distance between the grinding wheel and the bearing surface in the first direction as a first set distance, and the grinding wheel tool setting is completed.

[0021] By adopting the above setting method, non-contact tool setting can be achieved, preventing damage to the air nozzle and the table due to collisions during tool setting. It also improves the measurement accuracy and efficiency of the distance between the bearing surfaces of the grinding wheel and the table.

[0022] Furthermore, after the grinding wheel tool setting is completed, the connecting piece can drive the air nozzle to the second position. The air nozzle is offset from the grinding wheel and the table, which reduces the impact of the air nozzle on the subsequent processing.

[0023] Furthermore, the sensor is positioned on the first air guide tube, eliminating the need to be located between the grinding wheel and the table, thus reducing the impact of subsequent processing on the sensor. Additionally, the sensor does not need to follow the movement of the air nozzle, minimizing the impact of motion on the sensor. For example, the sensor can be mounted outside the water tank of the wafer thinning apparatus. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of a wafer thinning apparatus provided in some embodiments of this application;

[0026] Figure 2 A schematic diagram showing the positional relationship between the tool setter, grinding wheel, and table provided in some embodiments of this application;

[0027] Figure 3 This is a schematic diagram showing the positional relationship between the tool setter, grinding wheel, and table in some other embodiments of this application;

[0028] Figure 4 This is an exploded structural diagram of the moving part provided in some embodiments of this application;

[0029] Figure 5 This is a schematic diagram of the air path structure of the tool setting device provided in some embodiments of this application.

[0030] Explanation of reference numerals in the attached figures:

[0031] 300-Air source, 200-Wafer thinning device, 210-Grinding wheel, 220-Tray, 230-Frame, 240-Grinding wheel connection assembly, 250-Indexing turntable, 260-Clamping part, 100-Tool setter, 101-First pressure gauge, 102-Second pressure gauge, 103-Pneumatic control valve, 103a-First pneumatic control valve, 103b-Second pneumatic control valve, 103c-Third pneumatic control valve, 104-Solenoid valve 104a - First solenoid valve, 104b - Second solenoid valve, 104c - Third solenoid valve, 105 - First filter, 106 - Second filter, 107 - First pressure regulating valve, 108 - Second pressure regulating valve, 110 - First air guide pipe, 111 - First main air guide pipe, 112 - First branch air guide pipe, 112a - First branch air guide pipe, 112b - Second branch air guide pipe, 112c - Third 120-Air nozzle, 120a-First air nozzle, 120b-Second air nozzle, 120c-Third air nozzle, 121-Connecting part, 122-Air jet part, 130-Connecting piece, 131-Main body, 1311-First sub-arm, 1312-Second sub-arm, 132-Moving part, 1321-Elastic element, 1322-First fixing plate, 1323-Second fixing plate, 1324-First mounting plate, 1325-Second mounting plate, 133-Extension part, 140-Sensor, 150-Drive device, 160-Second air pipe, 161-Second main air pipe, 162-Second air branch pipe, 162a-First second air branch pipe, 162b-Second second air branch pipe, 162c-Third second air branch pipe, 170-Air nozzle assembly, X-First direction, P-Bearing surface. Detailed Implementation

[0032] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] In this application, the terms "upper," "left," "right," "front," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0034] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0035] Furthermore, the terms "installation," "setup," "equipped with," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0036] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0037] Figure 1 This is a schematic diagram of the structure of a wafer thinning apparatus provided in some embodiments of this application. For example... Figure 1 As shown, some embodiments of this application provide a wafer thinning apparatus 200.

[0038] Understandably, the wafer thinning apparatus 200 is used to grind the wafer to reduce its thickness. In some examples, such as Figure 1 As shown, the wafer thinning apparatus 200 may include a rack 230 and a tray 220. The tray 220 is mounted on the rack 230, and the rack 230 can support and bear the tray 220.

[0039] The tray 220 includes a support surface P, which can be a smooth plane and is used to support the wafer. The shape of the support surface P can be circular, or it can be hexagonal, octagonal, or other regular and irregular shapes.

[0040] In some examples, the wafer thinning apparatus 200 may include multiple trays 220, which may be the same or different in size. Figure 1 As shown, the wafer thinning apparatus 200 may include an indexing turntable 250, which is mounted on a frame 230. Multiple trays 220 may be mounted on the indexing turntable 250. The indexing turntable 250 is rotatable about a first direction X, thereby causing the multiple trays 220 to rotate about the first direction.

[0041] The first direction X can be perpendicular or approximately perpendicular to the bearing surface P. That is, the angle between the first direction X and the bearing surface P can be 90°, or it can be 89°, 88°, or 91°, etc.

[0042] Continue to refer to Figure 1 In some examples, the wafer thinning apparatus 200 may also include a grinding wheel 210 for grinding and thinning the wafer.

[0043] Understandably, the grinding wheel 210 is disposed opposite to the bearing surface P along the first direction X, and the grinding wheel 210 is movable relative to the bearing surface P along the first direction X to move closer to or away from the bearing surface P, thereby being able to move closer to or away from the wafer disposed on the bearing surface P, and realize the grinding and thinning process of the wafer.

[0044] In some examples, such as Figure 1 As shown, the wafer thinning apparatus 200 may include a plurality of grinding wheels 210, the number of which may be less than the number of trays 220. It is understood that the embodiments of this application do not further limit the number of grinding wheels 210 and trays 220.

[0045] Continue to refer to Figure 1 The wafer thinning apparatus 200 may include a clamping part 260, which can clamp the wafer and place it on a tray 220. As the indexing turntable 250 rotates, the tray 220 and the wafer on the tray 220 can move under different grinding wheels 210, so that the different grinding wheels 210 can perform grinding and thinning processing on the wafer.

[0046] Continue to refer to Figure 1 The wafer thinning device 200 may include a grinding wheel connecting assembly 240, which is connected to the grinding wheel 210 and can drive the grinding wheel 210 to move relative to the bearing surface P along the first direction X, so that the grinding wheel 210 can move closer to or further away from the bearing surface P.

[0047] For example, the grinding wheel connection assembly 240 may include a lead screw and a rotating part. The lead screw extends along a first direction X, and the rotating part is rotatably mounted on the lead screw and is rotatable relative to the lead screw, so that the rotating part can move relative to the lead screw along the first direction X. The grinding wheel 210 is connected to the rotating part, so that rotation can drive the grinding wheel 210 to move along the first direction X.

[0048] For example, the grinding wheel 210 and the rotating part can be detachably connected, so that different grinding wheels 210 can be replaced as needed, thereby improving the applicability of the wafer thinning device 200.

[0049] Figure 2 This is a schematic diagram showing the positional relationship between the tool setter, grinding wheel, and table provided in some embodiments of this application. Figure 3This is a schematic diagram showing the positional relationship of the tool setter, grinding wheel, and table provided for other embodiments of this application.

[0050] In some examples, such as Figure 2 and Figure 3 As shown, the wafer thinning apparatus 200 includes a tool setter 100, which is used to set the grinding wheel 210. That is, the tool setter 100 can make the grinding wheel 210 be in a set position in the first direction X, so that the distance between the grinding wheel 210 and the bearing surface P of the tray 220 in the first direction X is a first set distance.

[0051] Understandably, the value of the first preset distance can be determined based on the thickness of the wafer, and the embodiments of this application do not further limit the value of the first preset distance. The structure of the tool setting device 100 is illustrated below.

[0052] In some examples, such as Figure 2 and Figure 3 As shown, the tool setting device 100 includes an air nozzle assembly 170, a first air duct 110, and a sensor 140.

[0053] In some examples, such as Figure 2 and Figure 3 As shown, the jet nozzle assembly 170 includes a jet nozzle 120, a connector 130, and a drive device 150. The connector 130 connects the jet nozzle 120 and the drive device 150. The drive device 150 drives the connector 130 to move, and the connector 130 drives the jet nozzle 120 to move between a first position and a second position.

[0054] For example, the drive unit 150 can drive the connector 130 to rotate about a first direction X, and the connector 130 can drive the nozzle 120 to rotate about the first direction X, so that the nozzle 120 can move between a first position and a second position.

[0055] The drive device 150 can be a rotary cylinder, or it can be a motor or other power device. The embodiments of this application do not further limit the specific form of the drive device 150.

[0056] In some examples, when the nozzle 120 is in the first position, the nozzle 120 is located between the grinding wheel 210 and the table 220, and the exhaust direction of the nozzle 120 is towards the bearing surface P (see...). Figure 2 This allows the gas ejected from the nozzle 120 to flow towards the bearing surface P. When the nozzle 120 is in the second position, it is offset from the grinding wheel 210 and the platform 220 in the first direction X.

[0057] When tool setting is required, the connector 130 can move the air nozzle 120 to a first position, where the air nozzle 120 is positioned between the grinding wheel 210 and the table 220, enabling the air nozzle 120 to set the grinding wheel 210. When tool setting is not required, the connector 130 can move the air nozzle 120 to a second position, where the air nozzle 120 is offset from the grinding wheel 210 and the table 220 to reduce the impact of the air nozzle 120 on other machining processes.

[0058] Understandably, the first position is any position between the grinding wheel 210 and the table 220, and the second position is any position offset from the grinding wheel 210 and the table 220.

[0059] Continue to refer to Figure 2 and Figure 3 In some examples, the connector 130 includes a body portion 131 and a moving portion 132, with the nozzle 120 connected to the body portion 131 via the moving portion 132.

[0060] The nozzle 120 and the moving part 132 can be fixedly connected to improve the reliability of their connection. Alternatively, the nozzle 120 and the moving part 132 can be detachably connected to improve their connection flexibility.

[0061] The movable part 132 and the main body 131 can be fixedly connected to improve the reliability of their connection. Alternatively, the movable part 132 and the main body 131 can be detachably connected to improve their connection flexibility.

[0062] In some examples, the moving part 132 can move in the first direction X when it is subjected to a force along the first direction X, so as to drive the nozzle 120 to move in the first direction X.

[0063] For example, the moving part 132 may include an elastic structure. When the moving part 132 is not subjected to a force along the first direction X, the elastic structure does not deform, and the nozzle 120 remains stationary relative to the body part 131 in the first direction X. When the moving part 132 is subjected to a force along the first direction X, the elastic structure deforms, enabling the moving part 132 to drive the nozzle 120 to move along the first direction X.

[0064] Alternatively, the movable part 132 can be slidably connected to the main body 131. When the movable part 132 is not subjected to a force along the first direction X, the movable part 132 can remain relatively stationary with respect to the main body 131 under the action of friction, so that the nozzle 120 remains stationary relative to the main body 131 in the first direction X. When the movable part 132 is subjected to a force along the first direction X, the movable part 132 can overcome the friction and slide relative to the main body 131, so that the movable part 132 can drive the nozzle 120 to move along the first direction X.

[0065] Alternatively, the moving part 132 can be connected to the main body 131 via a magnetic structure. When the moving part 132 is not subjected to a force along the first direction X, it can remain stationary relative to the main body 131 under the influence of magnetic force, causing the nozzle 120 to remain stationary relative to the main body 131 in the first direction X. When the moving part 132 is subjected to a force along the first direction X, it can overcome the magnetic force and move relative to the main body 131, allowing the moving part 132 to drive the nozzle 120 to move along the first direction X.

[0066] In some examples, when the grinding wheel 210 moves toward the bearing surface P in the first direction X, it can squeeze the connector 130 so that the connector 130 can drive the nozzle 120 to move toward the bearing surface P in the first direction X.

[0067] For example, when the grinding wheel 210 moves toward the bearing surface P along the first direction X, it can squeeze the moving part 132, so that the moving part 132 can be subjected to a force along the first direction X, thereby driving the air nozzle 120 to move toward the bearing surface P along the first direction X.

[0068] In some examples, continue to refer to Figure 2 The connector 130 also includes an extension 133, which is connected to the main body 131 via a movable part 132. Along the first direction X, the extension 133 and the nozzle 120 are disposed opposite to each other, and the extension 133 is away from the bearing surface P relative to the nozzle 120.

[0069] Understandably, the extension 133 and the movable part 132 can be either fixedly connected or detachably connected.

[0070] Along the first direction X, the extension 133 and the nozzle 120 are arranged opposite to each other, and the extension 133 is far away from the bearing surface P relative to the nozzle 120, so that when the grinding wheel 210 moves close to the bearing surface P along the first direction X, it can squeeze the extension 133. The extension 133 applies a force along the first direction X to the moving part 132, so that the moving part 132 can drive the nozzle 120 to move close to the bearing surface P along the first direction X.

[0071] By adopting the above-mentioned arrangement, the grinding wheel 210 does not need to directly squeeze the moving part 132 or the air nozzle 120 when it moves close to the bearing surface P along the first direction X, thus protecting the air nozzle 120 and the moving part 132.

[0072] The structure of the moving part 132 will be described below as an example. It can be understood that the moving part 132 may also be other structures besides those described below.

[0073] Figure 4This is an exploded structural diagram of a movable part provided in some embodiments of this application. In some examples, such as... Figure 4 As shown, the moving part 132 includes an elastic member 1321. When the moving part 132 is subjected to a force along the first direction X, the elastic member 1321 can deform in the first direction X to drive the jet nozzle 120 to move along the first direction X.

[0074] For example, the elastic element 1321 can be a sheet or a spring. The deformation direction of the elastic element 1321 is the first direction X. In this way, when the moving part 132 is subjected to a force along the first direction X, the elastic element 1321 can deform in the first direction X, so that the moving part 132 can drive the nozzle 120 to move along the first direction X.

[0075] Understandably, by setting the elastic element 1321 to deform and drive the jet nozzle 120 to move along the first direction X, the structure of the moving part 132 can be simplified and the cost of the tool setter 100 can be reduced.

[0076] Continue to refer to Figure 4 In some examples, the elastic element 1321 includes a spring sheet to reduce the space occupied by the elastic element 1321 in the first direction X.

[0077] The movable part 132 includes a first fixing plate 1322 and a second fixing plate 1323, which are located on both sides of the spring piece along a first direction X and are respectively connected to the spring piece. The two ends of the spring piece protrude from the first fixing plate 1322 and the second fixing plate 1323.

[0078] Understandably, the first fixing plate 1322 and the second fixing plate 1323 can restrict the deformation of the spring piece, so that the end of the spring piece protruding from the first fixing plate 1322 and the second fixing plate 1323 can undergo elastic deformation in the first direction X, while the part of the spring piece located between the first fixing plate 1322 and the second fixing plate 1323 cannot undergo elastic deformation in the first direction X.

[0079] In this way, when the spring is subjected to a force along the first direction X, the end of the spring protruding from the first fixing plate 1322 and the second fixing plate 1323 deforms along the first direction X, driving the nozzle 120 to move along the first direction X. This avoids deformation at other positions of the spring, which would cause the nozzle 120 to move in directions other than the first direction X, thus improving the reliability of the spring driving the nozzle 120 to move along the first direction X.

[0080] In some examples, there are two springs, which are positioned opposite each other along the first direction X.

[0081] Understandably, setting two springs opposite each other along the first direction X can improve the stability of the springs when they deform and drive the jet nozzle 120 to move, that is, improve the stability of the jet nozzle 120 when it moves along the first direction X.

[0082] Continue to refer to Figure 4 In some examples, the movable part 132 includes a first mounting plate 1324 and a second mounting plate 1325, with an elastic member 1321 located between and connected to the first mounting plate 1324 and the second mounting plate 1325. The first mounting plate 1324 is connected to the body part 131, and the second mounting plate 1325 is connected to the nozzle 120.

[0083] When the second mounting plate 1325 is subjected to a force along the first direction X, the elastic element 1321 can undergo elastic deformation in the first direction X, thereby driving the second mounting plate 1325 and the nozzle 120 to move along the first direction X.

[0084] Understandably, the first mounting plate 1324 and the second mounting plate 1325 can support and protect the elastic element 1321. When the second mounting plate 1325 is subjected to a force along the first direction X, it can transmit the force to the elastic element 1321, causing the elastic element 1321 to undergo elastic deformation under the force, thereby driving the second mounting plate 1325 and the nozzle 120 to move along the first direction.

[0085] The following example illustrates the connection method between the first mounting plate 1324 and the second mounting plate 1325 and the main body 131 and the nozzle 120.

[0086] For example, see again Figure 2 and Figure 3 The main body 131 may include a first sub-arm 1311 and a second sub-arm 1312, which are connected together.

[0087] The first sub-arm 1311 and the second sub-arm 1312 can be fixedly connected or detachably connected. The extension direction of the first sub-arm 1311 is perpendicular or approximately perpendicular to the extension direction of the second sub-arm 1312. That is, the included angle between the first sub-arm 1311 and the second sub-arm 1312 can be 90°, or it can be 89°, 88° or 91°, etc.

[0088] The second sub-arm 1312 can extend along the first direction X. The end of the second sub-arm 1312 away from the first sub-arm 1311 can be connected to the drive unit 150. For example, the end of the second sub-arm 1312 away from the first sub-arm 1311 can be detachably connected to the drive unit 150, thereby allowing for the replacement of different drive units 150 as needed, improving the flexibility of the tool setter 100. Alternatively, the end of the second sub-arm 1312 away from the first sub-arm 1311 can also be fixedly connected to the drive unit 150 to improve the reliability of the connection.

[0089] The end of the first sub-arm 1311 away from the second sub-arm 1312 can be connected to the first mounting plate 1324. For example, the end of the first sub-arm 1311 away from the second sub-arm 1312 can be fixedly connected to the first mounting plate 1324 to improve the reliability of the connection. Alternatively, the end of the first sub-arm 1311 away from the second sub-arm 1312 can also be detachably connected to the first mounting plate 1324.

[0090] Continue to refer to Figure 2 The nozzle 120 may include a connecting portion 121 and a jet portion 122, which are connected. For example, the connecting portion 121 and the jet portion 122 may be integrally formed to improve the reliability of their connection. The jet portion 122 may be connected to a second mounting plate 1325.

[0091] Reference Figure 2 and Figure 3 In some examples, the first air duct 110 is connected to the nozzle 120, and the first air duct 110 is used to connect the air source 300 to supply air to the nozzle 120. For example, the first air duct 110 may be connected to the connector 121, so that the gas supplied by the air source 300 can flow to the nozzle 122 via the first air duct 110 and the connector 121.

[0092] For example, gas source 300 can provide air, or it can provide other inert gases. In some examples, gas source 300 is capable of providing compressed air.

[0093] Continue to refer to Figure 2 For example, the jet section 122 extends along the first direction X, and the extension direction of the connecting section 121 is perpendicular to the first direction X.

[0094] Understandably, the jet section 122 extends along the first direction X, such that when the jet nozzle 120 is located between the grinding wheel 210 and the table 220, the air outlet direction of the jet nozzle 120 can be towards the bearing surface P. The extension direction of the connecting section 121 is perpendicular to the first direction X, which can improve the convenience of connecting the connecting section 121 to the first air guide pipe 110.

[0095] The extension direction of the connecting part 121 can be perpendicular or approximately perpendicular to the first direction X. That is, the angle between the extension direction of the connecting part 121 and the first direction X can be 90°, or it can be 89°, 88° or 91°, etc.

[0096] For example, the connecting part 121 may include a connecting port and a locking member. The first air guide tube 110 may be sleeved on the connecting port and located between the connecting port and the locking member. The locking member is used to fix the first air guide tube 110 and the connecting port to prevent the first air guide tube 110 from falling off relative to the connecting port.

[0097] When the nozzle 120 is in the first position, the bearing surface P can obstruct the airflow ejected from the nozzle 120. Understandably, in the first direction X, the greater the distance between the nozzle 120 and the bearing surface P, the smaller the obstruction effect of the bearing surface P on the airflow ejected from the nozzle 120, and the lower the gas pressure in the first air guide tube 110.

[0098] Conversely, in the first direction X, the smaller the distance between the nozzle 120 and the bearing surface P, the greater the obstruction effect of the bearing surface P on the airflow ejected from the nozzle 120, and the greater the gas pressure inside the first air guide tube 110. Therefore, the distance between the nozzle 120 and the bearing surface P can be determined based on the gas pressure inside the first air guide tube 110.

[0099] In some examples, such as Figure 2 and Figure 3 As shown, sensor 140 is mounted on the first air guide tube 110 to detect the pressure of the gas inside the first air guide tube 110. In this way, the distance between the nozzle 120 and the bearing surface P in the first direction can be determined based on the detection data from sensor 140.

[0100] like Figure 2 As shown, the distance between the grinding wheel 210 and the air nozzle 120 in the first direction X is the second distance H2, which can be obtained by measurement. The distance between the air nozzle 120 and the bearing surface P in the first direction X is the first distance H1. When the first distance H1 reaches a set value, the distance between the grinding wheel 210 and the bearing surface P (i.e., the sum of the first distance H1 and the second distance H2) can be the first set distance.

[0101] In some examples, the wafer thinning apparatus 200 also includes a controller, for example, a programmable logic controller (PLC). Alternatively, the controller may be other processors, such as a central processing unit. The embodiments of this application do not further limit the specific form of the controller.

[0102] The controller is electrically connected to the sensor 140 to acquire the detection data of the sensor 140 and to determine the distance between the grinding wheel 210 and the bearing surface P in the first direction X based on the detection data of the sensor 140.

[0103] Understandably, the controller can determine the first distance H1 between the nozzle 120 and the bearing surface P in the first direction X based on the detection data of the sensor 140. The second distance H2 between the grinding wheel 210 and the nozzle 120 in the first direction X is known (and can be obtained by measurement). Therefore, the controller can determine the distance between the grinding wheel 210 and the bearing surface P in the first direction X based on the detection data of the sensor 140.

[0104] For example, when the gas pressure in the first air duct 110 reaches a set value, the controller can determine that the distance between the nozzle 120 and the bearing surface P in the first direction X has reached a set value. Alternatively, when the difference between the gas pressure in the first air duct 110 and the initial gas pressure in the first air duct 110 reaches a set value, the controller can determine that the distance between the nozzle 120 and the bearing surface P in the first direction X has reached a set value.

[0105] Understandably, the initial pressure of the gas in the first air guide tube 110 can be the pressure of the gas in the first air guide tube 110 when the jet nozzle 120 is located at a position offset from the platform 220.

[0106] The following example illustrates the tool setting process. For instance, when tool setting is required, the connector 130 moves the air nozzle 120 to a first position, where the air nozzle 120 is located between the grinding wheel 210 and the table 220. At this point, the distance between the air nozzle 120 and the bearing surface P is relatively large. The grinding wheel 210 can move closer to the bearing surface P along the first direction X, and the grinding wheel 210 can press against the connector 130, causing the connector 130 to move the air nozzle 120 closer to the bearing surface P along the first direction X. This increases the gas pressure inside the first air guide tube 110, meaning the difference between the gas pressure inside the first air guide tube 110 and its initial pressure increases.

[0107] When the pressure of the gas in the first gas guide tube 110 reaches the set value, or when the difference between the pressure of the gas in the first gas guide tube 110 and the initial pressure of the gas in the first gas guide tube 110 reaches the set value, the first distance H1 reaches the set value, the sum of the first distance H1 and the second distance H2 is the first set distance, the grinding wheel 210 is in the set position in the first direction X, and the grinding wheel 210 completes the tool setting.

[0108] After tool setting is completed, the controller can control the connector 130 to move the air nozzle 120 to a second position. The air nozzle 120 is offset from the grinding wheel 210 and the table 220 to reduce the impact of the air nozzle 120 on subsequent processing. For example, after tool setting is completed, the connector 130 can move the air nozzle 120 to the side wall of the water tank of the wafer thinning device 200.

[0109] Then, the indexing turntable 250 rotates so that the wafer can be positioned below the grinding wheel 210. The controller can control the grinding wheel 210 to move a second distance along the first direction X towards the bearing surface P. The second distance is the difference between the first distance and the wafer thickness, so that the grinding wheel 210 can contact the side of the wafer away from the bearing surface P, thereby enabling the grinding wheel 210 to perform grinding and thinning processing on the wafer.

[0110] In the embodiments of this application, the connecting member 130 drives the nozzle 120 to move to a first position, so that the nozzle 120 can be located between the grinding wheel 210 and the platform 220. When the nozzle 120 is located between the grinding wheel 210 and the platform 220, the air outlet direction of the nozzle 120 is towards the bearing surface P, so that the gas ejected by the nozzle 120 can flow towards the bearing surface P. The bearing surface P obstructs the airflow ejected by the nozzle 120. In this way, the distance between the nozzle 120 and the bearing surface P can affect the gas pressure in the first air guide tube 110, so the distance between the nozzle 120 and the bearing surface P in the first direction X can be obtained according to the gas pressure in the first air guide tube 110.

[0111] When the pressure of the gas in the first air guide tube 110 reaches a set value, or when the difference between the pressure of the gas in the first air guide tube 110 and the initial pressure of the gas in the first air guide tube 110 reaches a set value, the distance between the jet nozzle 120 and the bearing surface P in the first direction X can be determined as a set value, thereby determining the distance between the grinding wheel 210 and the bearing surface P in the first direction X as a first set distance, and the grinding wheel 210 completes tool setting.

[0112] By adopting the above setting method, non-contact tool setting can be achieved, and the air nozzle 120 and the table 220 will not be damaged due to collision during the tool setting process. Furthermore, the measurement accuracy and efficiency of the distance between the bearing surface P of the grinding wheel 210 and the table 220 are improved.

[0113] Furthermore, after the grinding wheel 210 completes the tool setting, the connecting piece 130 can drive the air nozzle 120 to move to the second position. The air nozzle 120 is staggered from the grinding wheel 210 and the table 220, which reduces the impact of the air nozzle 120 on the subsequent processing.

[0114] Furthermore, since the sensor 140 is located on the first air duct 110 and does not need to be situated between the grinding wheel 210 and the table 220, the impact of subsequent processing on the sensor 140 is reduced. Also, the sensor 140 does not need to move with the air nozzle 120, further reducing the impact of movement on the sensor 140. For example, the sensor 140 can be mounted outside the water tank of the wafer thinning apparatus 200.

[0115] By setting up a controller, the wafer grinding and thinning process was automated, thereby improving wafer processing efficiency.

[0116] In some examples, the nozzle 120 is made of non-metallic materials, so that the nozzle 120 and the platform 220 will not be damaged by collision.

[0117] For example, the material of the nozzle 120 may include a flexible non-metallic material, such as at least one of rubber, plastic, and silicone. Alternatively, the material of the nozzle 120 may also include other flexible non-metallic materials. The embodiments of this application do not further limit the material of the nozzle 120.

[0118] In some examples, there are multiple nozzle assemblies 170, with the first air guide 110 connected to multiple nozzles 120 respectively. This allows the gas supplied by the air source 300 to be transmitted to the multiple nozzles 120 via the first air guide 110, enabling each nozzle 120 to eject gas outwards. Each nozzle assembly 170 is used to align the corresponding grinding wheel 210.

[0119] Understandably, when the connector 130 drives the jet nozzle 120 to the first position, a jet nozzle 120 can be positioned between a grinding wheel 210 and a table 220 that are arranged opposite each other, so that each jet nozzle assembly 170 can align the corresponding grinding wheel 210, realizing the separate alignment of multiple grinding wheels 210 and reducing the mutual influence of different grinding wheels 210 during the alignment process.

[0120] Figure 5 This is a schematic diagram of the air path structure of a tool setter provided in some embodiments of this application. In some examples, such as... Figure 5 As shown, the first air guide tube 110 includes a first air guide main tube 111 and a plurality of first air guide branch tubes 112. The first air guide main tube 111 is used to connect to the air source 300, and the sensor 140 is disposed on the first air guide main tube 111.

[0121] Multiple first air guide branches 112 are respectively connected to the first air guide main 111, and multiple first air guide branches 112 are connected to the nozzles 120 of multiple nozzle assemblies 170 in a one-to-one correspondence.

[0122] For example, such as Figure 5 As shown, the plurality of nozzle assemblies 170 may include a first nozzle 120a, a second nozzle 120b, and a third nozzle 120c. The plurality of first air guide tubes 112 may include a first first air guide tube 112a, a second first air guide tube 112b, and a third first air guide tube 112c.

[0123] The first jet nozzle 120a is connected to the first first air guide branch 112a, the second jet nozzle 120b is connected to the second first air guide branch 112b, and the third jet nozzle 120c is connected to the third first air guide branch 112c.

[0124] In this way, the gas can flow through the first main gas pipe 111 and different first gas branch pipes 112 to different nozzles 120, thereby enabling multiple nozzle assemblies 170 to align multiple grinding wheels 210 respectively.

[0125] The tool setting device 100 also includes multiple pneumatic control valves 103, which are respectively installed on multiple first air guide pipes 112, thereby enabling the first air guide pipes 112 to be opened or closed.

[0126] For example, the multiple pneumatic control valves 103 may include a first pneumatic control valve 103a, a second pneumatic control valve 103b, and a third pneumatic control valve 103c. The first pneumatic control valve 103a may be disposed on a first first air guide branch 112a, and is used to control the opening or closing of the first first air guide branch 112a. The second pneumatic control valve 103b may be disposed on a second first air guide branch 112b, and is used to control the opening or closing of the second first air guide branch 112b. The third pneumatic control valve 103c may be disposed on a third first air guide branch 112c, and is used to control the opening or closing of the third first air guide branch 112c.

[0127] When it is necessary to perform tool setting on the grinding wheel 210, the first air guide pipe 112 connected to the air nozzle 120 that needs to be set can be turned on, and the first air guide pipe 112 connected to the other air nozzles 120 can be turned off.

[0128] For example, when the first air nozzle 120a needs to align the grinding wheel 210, the first pneumatic control valve 103a can control the first first air guide branch pipe 112a to open, and the second pneumatic control valve 103b and the third pneumatic control valve 103c control the second first air guide branch pipe 112b and the third first air guide branch pipe 112c to close. After the gas flows through the first air guide main pipe 111 and the first first air guide branch pipe 112a, it is ejected through the first air nozzle 120a. The sensor 140 is installed on the first air guide main pipe 111 to obtain the pressure of the gas in the first air guide main pipe 111 in order to align the grinding wheel 210 and the table 220.

[0129] When the second air nozzle 120b needs to align the grinding wheel 210, the second pneumatic control valve 103b can control the second first air guide branch pipe 112b to open, and the first pneumatic control valve 103a and the third pneumatic control valve 103c control the first first air guide branch pipe 112a and the third first air guide branch pipe 112c to close. After the gas flows through the first air guide main pipe 111 and the second first air guide branch pipe 112b, it is ejected through the second air nozzle 120b. The sensor 140 is installed on the first air guide main pipe 111 to obtain the pressure of the gas in the first air guide main pipe 111 in order to align the grinding wheel 210 and the table 220.

[0130] When the third air nozzle 120c needs to align the grinding wheel 210, the third pneumatic control valve 103c can control the third first air guide branch pipe 112c to open, and the first pneumatic control valve 103a and the second pneumatic control valve 103b control the first first air guide branch pipe 112a and the second first air guide branch pipe 112b to close. After the gas flows through the first air guide main pipe 111 and the third first air guide branch pipe 112c, it is ejected through the third air nozzle 120c. The sensor 140 is installed on the first air guide main pipe 111 to obtain the pressure of the gas in the first air guide main pipe 111 in order to align the grinding wheel 210 and the table 220.

[0131] Understandably, multiple pneumatic control valves 103 are installed one-to-one on multiple first air guide pipes 112. Different pneumatic control valves 103 can control the opening or closing of different first air guide pipes 112, thereby enabling multiple air nozzles 120 to set multiple grinding wheels 210 separately, reducing the mutual influence between different air nozzles 120 during the tool setting process.

[0132] The pneumatic control valve 103 has better airtightness. By placing the pneumatic control valve 103 on the first air guide branch pipe 112, the impact of the valve on the airtightness of the first air guide pipe 110 can be reduced, and the impact of the valve on the gas pressure inside the first air guide pipe 110 can also be reduced in a timely manner, thereby improving the accuracy of the tool setting process.

[0133] Furthermore, the sensor 140 is installed on the first air guide pipe 111. When different first air guide branches 112 are connected, the sensor 140 can obtain the pressure of the gas in the first air guide pipe 111 and determine the distance between the jet nozzle 120 being set and the bearing surface P based on the pressure of the gas in the first air guide pipe 111. This eliminates the need to install the sensor 140 on multiple first air guide branches 112, reducing the cost of the tool setter 100.

[0134] In some examples, such as Figure 5 As shown, the tool setting device 100 also includes a second air guide tube 160 and a solenoid valve 104, with the second air guide tube 160 connected to the pneumatic control valve 103.

[0135] Solenoid valve 104 is installed on the second air guide pipe 160 to control the flow rate of gas in the second air guide pipe 160, so as to control the pneumatic control valve 103 to open or close.

[0136] Understandably, the second air guide tube 160 is connected to the pneumatic control valve 103, and a solenoid valve 104 is installed on the second air guide tube 160 so that the solenoid valve 104 can control the flow rate of gas in the second air guide tube 160, thereby controlling the pneumatic control valve 103 to open or close.

[0137] Continue to refer to Figure 5 In some examples, the second air guide tube 160 includes a second air guide main tube 161 and a plurality of second air guide branch tubes 162. The second air guide main tube 161 is used to connect to the air source 300. The plurality of second air guide branch tubes 162 are respectively connected to the second air guide main tube 161, and the plurality of second air guide branch tubes 162 are connected to a plurality of air control valves 103 in a one-to-one correspondence.

[0138] There are multiple solenoid valves 104, and the multiple solenoid valves 104 are respectively installed on multiple second air guide branches 162.

[0139] Understandably, the second gas guide pipe 161 is connected to the gas source 300, and multiple second gas guide branches 162 are connected to the second gas guide pipe 161 and multiple second gas guide branches 162 are connected to multiple gas control valves 103, so that gas can flow to the gas control valves 103 via the second gas guide pipe 161 and the second gas guide branches 162.

[0140] For example, the plurality of solenoid valves 104 may include a first solenoid valve 104a, a second solenoid valve 104b, and a third solenoid valve 104c. The plurality of second air guide pipes 162 may include a first second air guide pipe 162a, a second second air guide pipe 162b, and a third second air guide pipe 162c.

[0141] The first second gas guide branch 162a can be connected to the first gas control valve 103a. The first solenoid valve 104a can be installed on the first second gas guide branch 162a. The first solenoid valve 104a can control the flow rate of the gas in the first second gas guide branch 162a. The flow rate of the gas in the first second gas guide branch 162a can control the first gas control valve 103a to open or close, thereby controlling the first first gas guide branch 112a to open or close.

[0142] The second second air guide branch 162b can be connected to the second air control valve 103b. The second solenoid valve 104b can be installed on the second second air guide branch 162b. The second solenoid valve 104b can control the flow rate of the gas in the second second air guide branch 162b. The flow rate of the gas in the second second air guide branch 162b can control the second air control valve 103b to open or close, thereby controlling the second first air guide branch 112b to open or close.

[0143] The third second air guide branch 162c can be connected to the third air control valve 103c. The third solenoid valve 104c can be installed on the third second air guide branch 162c. The third solenoid valve 104c can control the flow rate of the gas in the third second air guide branch 162c. The flow rate of the gas in the third second air guide branch 162c can control the third air control valve 103c to open or close, thereby controlling the opening or closing of the third first air guide branch 112c.

[0144] By adopting the above configuration, multiple solenoid valves 104 can control multiple pneumatic control valves 103 to open or close respectively.

[0145] Continue to refer to Figure 5 In some examples, the tool setter 100 may also include a first filter 105 and a second filter 106, with the first filter 105 disposed on the first air guide pipe 111 and the second filter 106 disposed on the second air guide pipe 161.

[0146] Understandably, the first filter 105 can filter the gas flowing through the first gas guide pipe 111, and the second filter 106 can filter the gas flowing through the second gas guide pipe 161, so as to prevent impurities in the gas from causing blockage of the first gas guide pipe 110 and the second gas guide pipe 160.

[0147] For example, the first filter 105 can be a fine filter to reduce the impact of impurities in the gas on the sensor 140. The second filter 106 can be a general filter to reduce the cost of the tool setter 100.

[0148] Continue to refer to Figure 5 In some examples, the tool setter 100 may also include a first pressure regulating valve 107 and a second pressure regulating valve 108, with the first pressure regulating valve 107 disposed on the first air guide pipe 111 and the second pressure regulating valve 108 disposed on the second air guide pipe 161.

[0149] Understandably, the first pressure regulating valve 107 can regulate the pressure of the gas in the first gas guide pipe 111, and the second pressure regulating valve 108 can regulate the pressure of the gas in the second gas guide pipe 161.

[0150] For example, the first pressure regulating valve 107 can be a precision pressure regulating valve to reduce the impact of the first pressure regulating valve 107 on the sensor 140. The second pressure regulating valve 108 can be a general pressure regulating valve to reduce the cost of the tool setter 100.

[0151] For example, such as Figure 5 As shown, the tool setting device 100 may further include a first pressure gauge 101 and a second pressure gauge 102. The first pressure gauge 101 may be installed on the first air guide pipe 111 to display the pressure of the first air guide pipe 110. The second pressure gauge 102 may be installed on the second air guide pipe 161 to display the pressure of the second air guide pipe 160.

[0152] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A tool setting device for setting the grinding wheels of a wafer thinning apparatus, characterized in that, The tool setting device includes: A jet nozzle assembly includes a jet nozzle, a connector, and a drive device; the connector connects the jet nozzle and the drive device, the drive device drives the connector to move, and the connector drives the jet nozzle to move between a first position and a second position; the connector includes a body portion and a movable portion, and the jet nozzle is connected to the body portion through the movable portion; when the movable portion is subjected to a force along a first direction, it can move in the first direction to drive the jet nozzle to move along the first direction; A first air guide tube, connected to the nozzle, is used to connect to an air source to supply air to the nozzle; and... A sensor is installed on the first gas guide tube to detect the pressure of the gas inside the first gas guide tube.

2. The tool setting device according to claim 1, characterized in that, The moving part includes an elastic element. When the moving part is subjected to a force along the first direction, the elastic element can deform in the first direction to drive the jet nozzle to move along the first direction.

3. The tool setting device according to claim 2, characterized in that, The elastic element includes a spring sheet; The movable part includes a first fixing plate and a second fixing plate, which are located on both sides of the spring piece along the first direction and are respectively connected to the spring piece; both ends of the spring piece protrude from the first fixing plate and the second fixing plate.

4. The tool setting device according to claim 2, characterized in that, The movable part includes a first mounting plate and a second mounting plate, and the elastic element is located between the first mounting plate and the second mounting plate and is connected to the first mounting plate and the second mounting plate; the first mounting plate is connected to the main body, and the second mounting plate is connected to the jet nozzle; When the second mounting plate is subjected to a force along the first direction, the elastic element can undergo elastic deformation in the first direction to drive the second mounting plate and the jet nozzle to move along the first direction.

5. The tool setting device according to claim 2, characterized in that, The connector further includes an extension portion, which is connected to the main body portion via the movable portion. Along the first direction, the extension portion and the jet nozzle are disposed opposite to each other, and the extension portion is away from the bearing surface of the wafer thinning device relative to the jet nozzle.

6. A wafer thinning apparatus, characterized in that, include: A tray, including a support surface for supporting a wafer; A grinding wheel is disposed opposite to the bearing surface along a first direction, and the grinding wheel is movable relative to the bearing surface along the first direction to move closer to or away from the bearing surface; The tool setting device as described in any one of claims 1 to 5; when the air nozzle is in the first position, the air nozzle is located between the grinding wheel and the table, and the air outlet direction of the air nozzle is towards the bearing surface; when the grinding wheel moves closer to the bearing surface along the first direction, it can squeeze the connecting member, so that the connecting member can drive the air nozzle to move closer to the bearing surface along the first direction; When the air nozzle is in the second position, the air nozzle is offset from the grinding wheel and the table in the first direction; as well as, The controller, electrically connected to the sensor, is used to acquire the detection data of the sensor and determine the distance between the grinding wheel and the bearing surface in the first direction based on the detection data of the sensor.

7. The wafer thinning apparatus according to claim 6, characterized in that, The number of grinding wheels is multiple; The number of jet nozzle assemblies is multiple, and the first air guide pipe is connected to multiple jet nozzles respectively; each jet nozzle assembly is used to set the corresponding grinding wheel.

8. The wafer thinning apparatus according to claim 7, characterized in that, The first air guide tube includes a first air guide main tube and a plurality of first air guide branch tubes; The first gas guide pipe is used to connect to a gas source, and the sensor is installed on the first gas guide pipe; Multiple first air guide branches are respectively connected to the first air guide main, and the multiple first air guide branches are connected one-to-one with the nozzles of the multiple nozzle assemblies. The tool setting device also includes multiple pneumatic control valves, which are respectively installed on multiple first air guide branches.

9. The wafer thinning apparatus according to claim 8, characterized in that, The tool setting device also includes a second air guide tube and a solenoid valve, wherein the second air guide tube is connected to the pneumatic control valve; The solenoid valve is installed on the second air guide pipe and is used to control the flow rate of gas in the second air guide pipe, so as to control the air control valve to open or close.

10. The wafer thinning apparatus according to claim 9, characterized in that, The second air guide tube includes a second air guide main tube and a plurality of second air guide branch tubes. The second air guide main tube is used to connect to an air source. The plurality of second air guide branch tubes are respectively connected to the second air guide main tube, and the plurality of second air guide branch tubes are connected to the plurality of air control valves in a one-to-one correspondence. The number of solenoid valves is multiple, and each of the multiple solenoid valves is installed on a multiple second air guide branch pipe in a one-to-one correspondence.

11. The wafer thinning apparatus according to claim 10, characterized in that, The tool setting device also includes: A first pressure regulating valve is installed on the first gas guide pipe and is used to regulate the pressure of the gas in the first gas guide pipe. The second pressure regulating valve is installed on the second gas guide pipe and is used to regulate the pressure of the gas in the second gas guide pipe.

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