Energy-saving liquid cooling intelligent temperature control system

Abstract

An energy-saving liquid cooling intelligent temperature control system is used for being installed between processing equipment and liquid cooling equipment and comprises temperature control equipment, a processing pipeline, a liquid cooling pipeline, a sensing unit and a regulation and control unit. The temperature control device comprises a heat exchanger and an intelligent temperature control unit. And the processing pipeline is connected in series with the processing equipment, the heat exchanger and the liquid cooling equipment and is used for circulation of processing fluid. The liquid cooling pipeline is connected with the heat exchanger and used for circulation of cooling fluid. The sensing unit is arranged on the process pipeline and comprises an outlet temperature sensor, an inlet temperature sensor and a flow sensor. The regulation and control unit is arranged on the liquid cooling pipeline and comprises an intelligent control module. The intelligent temperature control unit can judge and control the regulation and control unit to adjust the efficiency of the heat exchanger according to the information sent by the sensing unit, so that the temperature, sensed by the inlet temperature sensor, of the process fluid meets the requirement, the precision and the efficiency can be improved, and the energy consumption can be reduced.

Description

Technical Field

[0001] This utility model relates to a semiconductor manufacturing process equipment, and more particularly to an energy-saving liquid-cooled intelligent temperature control system that can be used to control the temperature of the process fluid. Background Technology

[0002] With the continuous advancement of semiconductor technology, the power requirements of semiconductor manufacturing equipment are gradually increasing, generating more and more heat, which may affect the performance and stability of the equipment. Therefore, heat dissipation is essential. Existing heat dissipation methods, such as air cooling, have low efficiency and poor energy efficiency, easily leading to overheating of the equipment and consequently a significant reduction in production efficiency and product quality.

[0003] Currently, manufacturers have developed an existing liquid cooling system that connects a liquid cooling device in series with the process equipment via process piping, through which a process fluid circulates to remove heat from the process equipment. The liquid cooling device includes a compressor, condenser, expansion valve, and evaporator for circulating the cooling fluid, which can significantly cool the process fluid passing through the evaporator. However, regardless of the operating state of the process equipment—idle, low-load, or overload—and the actual temperature change, the liquid cooling device performs the same steps and produces the same cooling capacity, failing to adjust the cooling intensity according to the operating state of the process equipment. Furthermore, the compressor is very power-intensive, further increasing overall energy consumption and resulting in significant waste. Therefore, the design of this existing liquid cooling system still needs improvement. Utility Model Content

[0004] The purpose of this invention is to provide an energy-saving liquid-cooled intelligent temperature control system that can at least overcome the shortcomings of the prior art.

[0005] The present invention relates to an energy-saving liquid-cooled intelligent temperature control system, which is suitable for installation between process equipment and liquid-cooling equipment, and includes a temperature control device, process pipeline, liquid-cooling pipeline, sensing unit, and control unit.

[0006] The temperature control device includes a heat exchanger and an intelligent temperature control unit.

[0007] The process piping allows process fluid to flow and removes heat generated during the operation of the process equipment. The process piping includes an output pipe connecting the process equipment and the heat exchanger for the process fluid to flow from the process equipment to the heat exchanger, a connecting pipe connecting the heat exchanger and the liquid cooling equipment for the process fluid to flow from the heat exchanger to the liquid cooling equipment, and an input pipe connecting the liquid cooling equipment and the process equipment for the process fluid to flow from the liquid cooling equipment back to the process equipment.

[0008] The liquid cooling pipeline allows cooling fluid to flow and is used to cool the heat exchanger. The liquid cooling pipeline includes an inlet pipe connected to the heat exchanger and allowing the cooling fluid to flow into the heat exchanger, and an outlet pipe connected to the heat exchanger and allowing the cooling fluid to flow out of the heat exchanger.

[0009] The sensing unit is disposed in the process pipeline and signal-connected to the intelligent temperature control unit, and includes an outlet temperature sensor, an inlet temperature sensor, and a flow sensor. The outlet temperature sensor is used to sense the temperature of the process fluid in the outlet pipe and send information. The inlet temperature sensor is used to sense the temperature of the process fluid in the connecting pipe and send information. The flow sensor is used to sense the flow rate of the process fluid in the process pipeline and send information.

[0010] The control unit is located in the liquid cooling pipeline and is signal-connected to the intelligent temperature control unit. It includes an intelligent control module for adjusting the efficiency of the heat exchanger. The intelligent control module is located on one of the inlet pipe and the outlet pipe.

[0011] The intelligent temperature control unit is used to control the regulation unit to adjust the heat exchanger performance when it determines that the temperature of the process fluid is higher than the temperature range based on the information sent by the sensing unit, so that the temperature of the process fluid sensed by the inlet temperature sensor meets the control requirements.

[0012] The energy-saving liquid-cooled intelligent temperature control system of this utility model further includes an intelligent distribution module for adjusting the efficiency of the heat exchanger in the control unit.

[0013] In the energy-saving liquid-cooled intelligent temperature control system of this utility model, the intelligent distribution module is located upstream of the intelligent control module.

[0014] In the energy-saving liquid-cooled intelligent temperature control system of this utility model, both the intelligent distribution module and the intelligent control module are located in the inflow pipe.

[0015] In the energy-saving liquid-cooled intelligent temperature control system of this utility model, both the intelligent distribution module and the intelligent control module are located in the outflow pipe.

[0016] The energy-saving liquid-cooled intelligent temperature control system of this utility model has an intelligent distribution module disposed in the inflow pipe and an intelligent control module disposed in the outflow pipe.

[0017] The energy-saving liquid-cooled intelligent temperature control system of this utility model has an outlet temperature sensor installed on the output pipe, an inlet temperature sensor installed on the connecting pipe, and a flow sensor installed on the output pipe.

[0018] The energy-saving liquid-cooled intelligent temperature control system of this utility model has an outlet temperature sensor installed on the output pipe, an inlet temperature sensor installed on the connecting pipe, and a flow sensor installed on the connecting pipe.

[0019] The energy-saving liquid-cooled intelligent temperature control system of this utility model includes an intelligent temperature control unit that, based on the information sent by the sensing unit, determines that when the temperature of the process fluid is higher than the temperature range, it can activate the liquid cooling equipment to cool the process fluid.

[0020] The energy-saving liquid-cooled intelligent temperature control system of this utility model has a temperature control device that can be detachably mounted externally on the process equipment.

[0021] The beneficial effects of this utility model are as follows: by setting the sensing unit and the control unit, the flow rate of the cooling fluid can be dynamically adjusted so that the temperature of the process fluid sensed by the inlet temperature sensor meets the control requirements, thus improving accuracy and reducing energy consumption. Attached Figure Description

[0022] Other features and effects of this utility model will be clearly presented in the embodiments with reference to the accompanying drawings, wherein:

[0023] Figure 1 This is a system block diagram illustrating the state of the first embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model connected between the process equipment and the liquid-cooling equipment;

[0024] Figure 2 This is a partial system block diagram illustrating the structure of the second embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model, which is installed on the process pipeline.

[0025] Figure 3 This is a partial system block diagram illustrating the structure of the third embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model on the process pipeline;

[0026] Figure 4 This is a partial system block diagram illustrating the structure of the fourth embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model on the process pipeline;

[0027] Figure 5 This is a partial system block diagram illustrating the structure of the fifth embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model, which is installed on the liquid-cooling pipeline.

[0028] Figure 6 This is a partial system block diagram illustrating the structure of the sixth embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model on the liquid-cooling pipeline;

[0029] Figure 7This is a partial system block diagram illustrating the structure of the seventh embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model on the liquid-cooling pipeline;

[0030] Figure 8 This is a partial system block diagram illustrating the structure of the eighth embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model on the liquid-cooling pipeline. Detailed Implementation

[0031] Before this utility model is described in detail, it should be noted that similar elements are represented by the same reference numerals in the following description.

[0032] See Figure 1 The first embodiment of this utility model's energy-saving liquid-cooled intelligent temperature control system is suitable for installation between a process equipment 1 and a liquid-cooling device 2. The process equipment 1 can be a semiconductor device or an optoelectronic device, such as, but not limited to, an exposure machine, a thin film deposition machine, an etching machine, etc., which generates heat during operation. However, its structure is not the focus of this utility model and will not be described in detail. The liquid-cooling device 2 is installed on the process equipment 1 and can be controlled to start and cool. The liquid-cooling device 2 includes a compressor, a condenser, an expansion valve, and an evaporator (not shown in the figure), but these are common existing structures and not the focus of this utility model, so they will not be described in detail.

[0033] The energy-saving liquid-cooled intelligent temperature control system includes a temperature control device 3, a process pipeline 4, a liquid cooling pipeline 5, a sensing unit 6, and a control unit 7.

[0034] The temperature control device 3 is detachably mounted externally on the process equipment 1 and includes a heat exchanger 31 and an intelligent temperature control unit 32. The heat exchanger 31 is used to transfer heat from a hot fluid to a cold fluid. The intelligent temperature control unit 32 is signal-connected to the liquid cooling device 2 and can selectively provide a compressor shield signal or power supply, that is, it can switch to control whether the liquid cooling device 2 is started or not.

[0035] The process piping 4 connects the process equipment 1, the heat exchanger 31, and the liquid cooling equipment 2 in series. It allows a process fluid (not shown) to flow through and carries away the heat generated during the operation of the process equipment 1. The process fluid can be the original cooling water of the process equipment 1. The process piping 4 includes an output pipe 41 connecting the process equipment 1 and the heat exchanger 31, a connecting pipe 42 connecting the heat exchanger 31 and the liquid cooling equipment 2, and an input pipe 43 connecting the liquid cooling equipment 2 and the process equipment 1. The output pipe 41 allows the process fluid carrying heat from the process equipment 1 to flow from the process equipment 1 to the heat exchanger 31. The connecting pipe 42 allows the process fluid cooled by the heat exchanger 31 to flow from the heat exchanger 31 to the liquid cooling equipment 2. The input pipe 43 returns the process fluid that has passed through the liquid cooling equipment 2 to the process equipment 1.

[0036] The liquid cooling pipeline 5 allows a cooling fluid (not shown) to flow through and is used to cool the heat exchanger 31. The cooling fluid may be, for example, but not limited to, the plant's existing cooling water, with a temperature of 14°C to 20°C. The liquid cooling pipeline 5 includes an inlet pipe 51 connected to the heat exchanger 31 for the cooling fluid to flow into the heat exchanger 31, and an outlet pipe 52 connected to the heat exchanger 31 for the cooling fluid to flow out of the heat exchanger 31.

[0037] The sensing unit 6 is disposed in the process pipeline 4 and signal-connected to the intelligent temperature control unit 32, and includes an outlet temperature sensor 61, an inlet temperature sensor 62, and a flow sensor 63. The outlet temperature sensor 61 is disposed in the output pipe 41 and is used to sense the temperature of the process fluid within the output pipe 41 and transmit information. The inlet temperature sensor 62 is disposed in the connecting pipe 42 and is used to sense the temperature of the process fluid within the connecting pipe 42 and transmit information. The flow sensor 63 is used to sense the flow rate of the process fluid within the process pipeline 4 and transmit information. In this first embodiment, the flow sensor 63 is disposed in the output pipe 41 and located downstream of the outlet temperature sensor 61. It should be noted that the number of the outlet temperature sensor 61, the inlet temperature sensor 62, and the flow sensor 63 is not limited to one and can be varied according to actual needs, and their locations are not limited to inside or outside the aforementioned equipment.

[0038] The control unit 7 is disposed on the liquid cooling pipeline 5 and signal-connected to the intelligent temperature control unit 32, and includes an intelligent control module 71 and an intelligent distribution module 72 for adjusting the performance of the heat exchanger 31. The intelligent control module 71 is disposed on one of the inflow pipe 51 and the outflow pipe 52, and the intelligent distribution module 72 is located upstream of the intelligent control module 71. In this first embodiment, the intelligent distribution module 72 is disposed on the inflow pipe 51, and the intelligent control module 71 is disposed on the outflow pipe 52.

[0039] The intelligent control module 71 is used to adjust the valve opening and precisely control the flow rate or pressure of the cooling fluid through the heat exchanger 31. It can adjust the heat control range that removes heat energy from the heat exchanger 31. For example, when the required heat control range is small, the opening can be set to 0% to 25% so that the flow rate is 0% to 2.5%. When the required heat control range is in the middle, the opening can be set to 25% to 50% so that the flow rate is 2.5% to 12.5%. When the required heat control range is large, the opening can be set to 50% to 75% so that the flow rate is 12.5% ​​to 37.5%, or the opening can be set to 75% to 100% so that the flow rate is 37.5% to 100%. The intelligent control module 71 in this first embodiment mainly adjusts the opening between 25% and 50% to achieve precise control. The intelligent distribution module 72 (CDU) is used to regulate and distribute different flow rates or multiple channels of different types of cooling fluid into the heat exchanger 31 to achieve a more effective and precise cooling effect. It can also be used to adjust the maximum flow rate of the cooling fluid. It is worth noting that when the controlled temperature range is small, the intelligent distribution module 72 can be omitted.

[0040] In use, the process fluid carrying heat flows out of the process equipment 1 to the heat exchanger 31 for heat exchange. After being cooled by the heat exchanger 31, the process fluid flows back to the process equipment 1 through the liquid cooling device 2 to cool the process equipment 1.

[0041] During this process, when the process equipment 1 is in normal condition, the intelligent temperature control unit 32 receives the information sent by the sensing unit 6, and when it determines that the temperature of the process fluid is within the temperature range, it will not control the control unit 7 to adjust the efficiency of the heat exchanger 31, but will provide the compressor shielding signal so that the liquid cooling equipment 2 does not cool, thereby reducing energy consumption.

[0042] When the process equipment 1 is under low load or idle, the intelligent temperature control unit 32 receives and analyzes the information sent by the sensing unit 6. If it determines that the temperature of the process fluid is below the specified temperature range, it controls the regulating unit 7 to adjust and reduce the flow rate of the cooling fluid into the heat exchanger 31 until the temperature of the process fluid sensed by the inlet temperature sensor 62 meets the control requirements, thereby reducing energy consumption. At this time, the intelligent temperature control unit 32 also provides a compressor shielding signal, preventing the liquid cooling device 2 from cooling.

[0043] When the process equipment 1 is under high load or generates high heat, the intelligent temperature control unit 32, based on the information from the outlet temperature sensor 61, inlet temperature sensor 62, and flow sensor 63 of the sensing unit 6, determines that the temperature of the process fluid is higher than the specified temperature range. In this case, it controls the intelligent control module 71 and intelligent distribution module 72 of the regulation unit 7 to adjust and increase the efficiency of the heat exchanger 31 until the temperature of the process fluid sensed by the inlet temperature sensor 62 meets the control requirements. The adjustment ratio during control is, for example, when the flow information from the flow sensor 63 is determined, the heat required by the process pipeline 4 is: the process fluid flow rate Q. H (Flow rate sensed by the flow sensor 63) * Process fluid density ρ H *Specific heat of the process fluid C H *(Temperature sensed by inlet temperature sensor 62 - Temperature sensed by outlet temperature sensor 61) = Heat carried by liquid cooling pipe 5 = Cooling fluid flow rate Q C *The density of the cooling fluid ρ C *The specific heat of the cooling fluid C C The cooling fluid flow rate Q C The temperature is proportional to the heat carried by the liquid cooling pipeline 5. It should be noted that the intelligent temperature control unit 32 can also set the physical quantities of the cooling fluid and the process fluid, or select the types of the cooling fluid and the process fluid, enabling the system to perform temperature control more quickly and effectively.

[0044] Alternatively, when the process equipment 1 is under high load or generates high heat, the intelligent temperature control unit 32 can receive the information and determine that the temperature of the process fluid is higher than the temperature range. In this case, it can also switch to start the liquid cooling equipment 2 to cool the process fluid. However, this is only applicable when the temperature control temperature change is small or the ambient temperature change is small.

[0045] In addition, the intelligent temperature control unit 32 can also determine whether the process equipment 1 is overloaded by the information. If it is overloaded, it will send a message to an alarm device (not shown) or mobile phone, tablet, etc., and issue an alarm such as, but not limited to, sound or light, to notify a monitoring person.

[0046] See Figure 2 The second embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model is constructed in a manner similar to that of the first embodiment, except that the flow sensor 63 is disposed on the output pipe 41 and located upstream of the outlet temperature sensor 61.

[0047] See Figure 3 The third embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model is constructed in a manner similar to that of the first embodiment, except that the flow sensor 63 is disposed on the connecting pipe 42 and located upstream of the inlet temperature sensor 62.

[0048] See Figure 4 The fourth embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model is generally the same as the first embodiment, except that the flow sensor 63 is disposed on the connecting pipe 42 and is located downstream of the inlet temperature sensor 62.

[0049] See Figure 5 The fifth embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model is constructed in a manner similar to that of the first embodiment, except that: both the intelligent control module 71 and the intelligent distribution module 72 are located on the inflow pipe 51, and the intelligent distribution module 72 is located upstream of the intelligent control module 71.

[0050] See Figure 6 The sixth embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model is constructed in a manner similar to that of the first embodiment, except that: both the intelligent control module 71 and the intelligent distribution module 72 are located on the outflow pipe 52, and the intelligent distribution module 72 is located upstream of the intelligent control module 71.

[0051] See Figure 7 The seventh embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model is substantially the same as the first embodiment, except that the control unit 7 omits the intelligent distribution module (see Figure 1 (Number 72), and the intelligent control module 71 is disposed on the outflow pipe 52.

[0052] See Figure 8 The eighth embodiment of the energy-saving liquid-cooled intelligent temperature control system of this utility model is substantially the same as the first embodiment, except that the control unit 7 omits the intelligent distribution module (see Figure 1 (Number 72), and the intelligent control module 71 is disposed in the inflow pipe 51.

[0053] In summary, the energy-saving liquid-cooled intelligent temperature control system of this utility model can be externally installed between the existing process equipment 1 and the liquid cooling equipment 2 without requiring significant modifications to the existing process equipment 1 and the liquid cooling equipment 2 or the purchase of new equipment. Therefore, it is quite convenient, practical, and reduces costs. Moreover, the intelligent temperature control unit 32, through the setting of the sensing unit 6 and the regulating unit 7, can have multiple adjustment modes to be applied under different operating conditions. It can dynamically adjust the flow rate of the cooling fluid so that the temperature of the process fluid sensed by the inlet temperature sensor 62 meets the control requirements, thereby achieving the temperature control effect. Therefore, it can stably maintain high precision and high efficiency while reducing energy consumption, thus truly achieving the purpose of this utility model.

[0054] The above description is merely a specific embodiment of this utility model and should not be construed as limiting the scope of the claims of this utility model. Equivalent variations made based on the contents of the claims and description of this utility model should also be covered by the scope of the claims of this utility model.

Claims

1. An energy-saving liquid-cooled intelligent temperature control system, suitable for installation between process equipment and liquid-cooling equipment, characterized in that: Include: Temperature control equipment, including heat exchangers and intelligent temperature control units; A process piping system is provided for the flow of process fluids and for removing heat generated during the operation of the process equipment. The process piping system includes an output pipe connecting the process equipment and the heat exchanger for the process fluid to flow from the process equipment to the heat exchanger, a connecting pipe connecting the heat exchanger and the liquid cooling equipment for the process fluid to flow from the heat exchanger to the liquid cooling equipment, and an input pipe connecting the liquid cooling equipment and the process equipment for the process fluid to flow from the liquid cooling equipment back to the process equipment. A liquid cooling pipeline is provided for the flow of cooling fluid and for cooling the heat exchanger. The liquid cooling pipeline includes an inlet pipe connected to the heat exchanger for the flow of cooling fluid into the heat exchanger, and an outlet pipe connected to the heat exchanger for the flow of cooling fluid out of the heat exchanger. A sensing unit is disposed in the process pipeline and signal-connected to the intelligent temperature control unit, and includes an outlet temperature sensor, an inlet temperature sensor, and a flow sensor. The outlet temperature sensor is used to sense the temperature of the process fluid in the outlet pipe and send information. The inlet temperature sensor is used to sense the temperature of the process fluid in the connecting pipe and send information. The flow sensor is used to sense the flow rate of the process fluid in the process pipeline and send information. and The control unit is located in the liquid cooling pipeline and is signal-connected to the intelligent temperature control unit, and includes an intelligent control module for adjusting the performance of the heat exchanger. The intelligent control module is located on one of the inlet pipe and the outlet pipe. The intelligent temperature control unit is used to control the regulation unit to adjust the heat exchanger performance when it determines that the temperature of the process fluid is higher than the temperature range based on the information sent by the sensing unit, so that the temperature of the process fluid sensed by the inlet temperature sensor meets the control requirements.

2. The energy-saving liquid-cooled intelligent temperature control system according to claim 1, characterized in that: The control unit also includes an intelligent allocation module for adjusting the efficiency of the heat exchanger.

3. The energy-saving liquid-cooled intelligent temperature control system according to claim 2, characterized in that: The intelligent allocation module is located upstream of the intelligent control module.

4. The energy-saving liquid-cooled intelligent temperature control system according to claim 3, characterized in that: Both the intelligent distribution module and the intelligent control module are located in the inflow pipe.

5. The energy-saving liquid-cooled intelligent temperature control system according to claim 3, characterized in that: Both the intelligent distribution module and the intelligent control module are located in the outflow pipe.

6. The energy-saving liquid-cooled intelligent temperature control system according to claim 3, characterized in that: The intelligent distribution module is located in the inflow pipe, and the intelligent control module is located in the outflow pipe.

7. The energy-saving liquid-cooled intelligent temperature control system according to any one of claims 1 to 6, characterized in that: The outlet temperature sensor is located on the output pipe, the inlet temperature sensor is located on the connecting pipe, and the flow sensor is located on the output pipe.

8. The energy-saving liquid-cooled intelligent temperature control system according to any one of claims 1 to 6, characterized in that: The outlet temperature sensor is located on the output pipe, the inlet temperature sensor is located on the connecting pipe, and the flow sensor is located on the connecting pipe.

9. The energy-saving liquid-cooled intelligent temperature control system according to claim 1, characterized in that: The intelligent temperature control unit is used to determine, based on the information sent by the sensing unit, that when the temperature of the process fluid is higher than the temperature range, it can activate the liquid cooling equipment to cool the process fluid.

10. The energy-saving liquid-cooled intelligent temperature control system according to claim 1, characterized in that: The temperature control device can be detached and externally mounted on the process equipment.

Images