Temperature control module of high-temperature reverse bias testing device

Abstract

The utility model relates to the technical field of temperature control devices, in particular to a temperature control module of a high-temperature reverse bias testing device, which comprises a box body, a temperature control module and a temperature control module, the temperature control module is fixedly mounted at the inner top of the box body, the temperature control module is used for providing constant-temperature airflow for the interior of the box body, and the airflow flows from top to bottom; and the exhaust module is fixedly installed at the inner bottom of the box body, and the exhaust module is used for guiding air flow in the box body from top to bottom to the outer side of the box body. By adopting the technical scheme, the constant-temperature airflow provided by the temperature control module for the interior of the box body is guided out of the box body when reaching the bottom of the box body, so that the airflow is prevented from disordering in the box body, and the temperature control in the box body is more convenient to stably control.

Description

Technical Field

[0001] This utility model relates to the field of temperature control device technology, and in particular to a temperature control module for a high-temperature reverse bias test device. Background Technology

[0002] High-Temperature Reverse Bias (HTRB) testing is a core step in semiconductor device reliability verification. It accelerates the device failure process by applying a reverse bias voltage to a high-temperature environment (typically 125°C-200°C). The stability of temperature control during testing directly affects the measurement accuracy of key parameters such as leakage current and breakdown voltage. Traditional temperature control schemes are mainly divided into two categories:

[0003] Direct heating: This method uses an integrated resistance wire or heating rod on the inner wall of the enclosure, and adjusts the power through a PID algorithm. This approach has significant drawbacks: thermal inertia leads to temperature overshoot, easily causing transient fluctuations of ±5℃ or more during the heating phase (experimental data shows a ±2℃ drift even at a steady state of 150℃); radiant heating is uneven, with temperature differences of 8-10℃ between devices at different locations from the heat source, failing to meet the ±1℃ uniformity requirement of the JEDEC JESD22-A108 standard.

[0004] Forced air circulation: Most existing technologies propose a vertical airflow structure with bottom air intake and top air return. However, in practical applications, it has been found that: the airflow path is uncontrolled, forming turbulence and local vortices within the chamber (CFD simulation confirms a temperature difference >7℃ in the vortex region); the heating wire is placed directly in the air duct for heating, and the airflow temperature is significantly affected by fan power fluctuations (±10% airflow change causes ±3℃ temperature drift); during low-temperature testing (below -40℃), the heating wire response is sluggish, making it difficult to maintain the set value. Research shows that the common defects of existing technologies stem from the dual deficiencies in heat transfer efficiency and airflow organization: direct heating leads to nonlinear energy transfer, creating an inherent contradiction between temperature control accuracy and response speed; disordered airflow disturbances disrupt the uniformity of the temperature field, especially prominent in high-density device testing; and the lack of an efficient heat exchange mechanism under low-temperature conditions makes it prone to frosting and blockage when relying on a compressor cold source.

[0005] There is an urgent need in this field for a temperature control solution that can achieve precise delivery of laminar constant-temperature airflow and orderly removal of waste heat, so as to fundamentally solve the technical bottlenecks of temperature gradient runaway and low energy efficiency. Utility Model Content

[0006] The purpose of this invention is to provide a temperature control module for a high-temperature reverse bias testing device to solve the problems existing in the prior art.

[0007] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0008] A temperature control module for a high-temperature reverse polarization testing device includes:

[0009] The box body has an inlet and an outlet on two opposite sides at the bottom end;

[0010] A temperature control module is fixedly installed on the inner top of the enclosure. The temperature control module is used to provide constant temperature airflow to the inside of the enclosure, and the airflow flows from top to bottom.

[0011] The exhaust module is fixedly installed at the bottom of the box and is used to guide the airflow from top to bottom inside the box to the outside of the box.

[0012] By adopting the above technical solution, the constant temperature airflow provided by the temperature control module to the inside of the chamber is guided out of the chamber when it reaches the bottom of the chamber, which avoids the airflow running around inside the chamber and makes the temperature control inside the chamber more convenient and stable.

[0013] In a further embodiment, the temperature control module includes a wind box, heat exchange pipelines, and a filter block. The wind box is fixedly installed at the top inner part of the housing, with its bottom completely open. The filter block is fixedly installed at the bottom inner part of the wind box, completely sealing the bottom of the wind box. The heat exchange pipelines are located at the top inner part of the wind box. A blower is provided on the outside of the housing, with its air outlet connected to the top inner part of the wind box via a flexible hose. The heat exchange pipelines have at least one medium inlet and at least one medium outlet. Both the medium inlet and outlet have extensions passing through the wind box and the housing. The extensions of the medium inlet and outlet located on the outside of the housing are connected to a heat exchanger, which provides a constant-temperature heat exchange medium to the inside of the heat exchange pipelines.

[0014] By adopting the above technical solution, the airflow sent into the air box by the blower is temporarily blocked by the filter plate during actual use, so the airflow moves around randomly inside the air box. When the pressure reaches the threshold, the airflow overflows through the filter plate to the outside of the air box and enters the box body. When the airflow is inside the air box, it fully exchanges heat energy with the heat exchange medium flowing inside the heat exchange tube to reach the set constant value. In this way, the temperature of the airflow is more stable and controllable than that of the airflow passing directly through the heating wire, especially in the low temperature field.

[0015] In a further embodiment, the exhaust module includes a collection box and an exhaust fan. The collection box is fixedly installed at the bottom of the box body, the top of the collection box is completely open, and an exhaust pipe is fixedly installed at the bottom of the collection box. The bottom end of the exhaust pipe passes through the box body and extends to the outside of the box body, the top end of the exhaust pipe communicates with the inside of the collection box, and the exhaust fan is located inside the exhaust pipe.

[0016] By adopting the above technical solution, the exhaust fan needs to rotate slowly during actual use, with the speed controlled at 10-20 revolutions per minute, to guide the airflow into the collection box.

[0017] In a further embodiment, the inner bottom of the collection box is configured as a sloping surface that is recessed downward at the center.

[0018] The above technical solution is used to guide and concentrate airflow into the exhaust pipe.

[0019] In a further embodiment, a temperature sensor is provided inside the temperature control module to monitor the internal temperature of the temperature control module.

[0020] In a further embodiment, both the inlet and outlet of the housing are provided with movable partitions.

[0021] In summary, this utility model has the following beneficial effects:

[0022] 1. The constant-temperature airflow provided to the chamber by the temperature control module is guided out of the chamber when it reaches the bottom, which avoids the airflow running around inside the chamber and makes the temperature control inside the chamber more stable. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0024] Figure 2 This is a schematic diagram illustrating the internal structure of the temperature control module and the exhaust module of this utility model.

[0025] In the diagram, 1 is the housing; 2 is the temperature control module; 3 is the exhaust module; 21 is the air box; 22 is the heat exchange pipeline; 23 is the filter block; 4 is the blower; 5 is the heat exchanger; 31 is the collection box; and 32 is the exhaust fan. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the accompanying drawings.

[0027] Identical parts are indicated by the same reference numerals. It should be noted that the terms "front," "rear," "left," "right," "upper," and "lower" used in the following description refer to the attached figures. Figure 1In this specification, the terms "bottom surface" and "top surface," "inner" and "outer" refer to the direction toward or away from the geometry of a specific component. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this specification, "a plurality of" means two or more, unless otherwise explicitly and specifically defined by the direction of the center.

[0028] Example 1:

[0029] like Figures 1-2 As shown, a temperature control module for a high-temperature reverse polarization testing device includes:

[0030] Box 1 has an inlet and an outlet on two opposite sides at the bottom; both the inlet and outlet of box 1 are equipped with movable partitions.

[0031] Temperature control module 2 is fixedly installed at the top inner wall of housing 1. Temperature control module 2 provides constant-temperature airflow to the interior of housing 1, with the airflow flowing from top to bottom. Temperature control module 2 includes a wind box 21, heat exchange pipes 22, and a filter block 23. The wind box 21 is fixedly installed at the top inner wall of housing 1, with its bottom completely open. The filter block 23 is fixedly installed at the bottom inner wall of wind box 21, completely sealing the bottom of wind box 21. The heat exchange pipes 22 are located at the top inner wall of wind box 21. The outer side of housing 1 is equipped with… Blower 4, the blower outlet of blower 4 is connected to the inner top of air box 21 through a hose. Heat exchange pipeline 22 is provided with at least one medium inlet and at least one medium outlet. Both medium inlet and medium outlet are provided with extensions that pass through air box 21 and housing 1. The extensions of medium inlet and medium outlet located outside housing 1 are connected to heat exchanger 5. Heat exchanger 5 is used to provide a constant temperature heat exchange medium inside heat exchange pipeline 22. Temperature control module 2 is provided with a temperature sensor inside. The temperature sensor is used to monitor the internal temperature of temperature control module 2.

[0032] The exhaust module 3 is fixedly installed at the bottom of the box 1. The exhaust module 3 is used to guide the airflow from top to bottom inside the box 1 to the outside of the box 1. The exhaust module 3 includes a collection box 31 and an exhaust fan 32. The collection box 31 is fixedly installed at the bottom of the box 1. The top of the collection box 31 is completely open. An exhaust pipe is fixedly installed at the bottom of the collection box 31. The bottom end of the exhaust pipe passes through the box 1 and extends to the outside of the box 1. The top end of the exhaust pipe communicates with the inside of the collection box 31. The exhaust fan 32 is located inside the exhaust pipe. The bottom of the collection box 31 is set as a sloping surface that is recessed downward at the center.

[0033] Specific implementation process: In actual use, the heat exchange medium at the set temperature is circulated inside the heat exchange pipes through the heat exchanger. The heat exchange medium is in liquid state. After the heat exchange medium has been flowing for 5 minutes, the blower is started to blow air into the air box, so that the airflow can fully contact the surface of the heat exchange pipes. At the same time, the exhaust fan inside the exhaust pipe is started to guide the airflow inside the exhaust pipe and prevent backflow. Components can be placed inside the box through the inlet and outlet of the box. When it is necessary to change the temperature, the temperature of the heat exchange medium must be changed first. If the temperature is increased, it is necessary to pause and wait for 5-10 minutes. If the temperature is decreased, the blower is accelerated so that the heat exchange pipes inside the air box follow the medium to decrease to the medium temperature before the blower speed is resumed and the waiting time is 5-10 minutes.

[0034] In the embodiments disclosed in this utility model, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; "linking" can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments disclosed in this utility model according to the specific circumstances.

[0035] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. A temperature control module (2) for a high-temperature reverse polarization testing device, characterized in that: include: The box (1) has an inlet and an outlet on two opposite sides at the bottom end; Temperature control module (2), the temperature control module (2) is fixedly installed on the inner top of the box (1), the temperature control module (2) is used to provide constant temperature airflow to the inside of the box (1), and the airflow flows from top to bottom; And an exhaust module (3), the exhaust module (3) is fixedly installed at the bottom of the box (1), the exhaust module (3) is used to guide the airflow from top to bottom inside the box (1) to the outside of the box (1).

2. The temperature control module (2) of the high-temperature reverse polarization testing device according to claim 1, characterized in that: The temperature control module (2) includes a blower box (21), a heat exchange pipeline (22), and a filter block (23). The blower box (21) is fixedly installed at the top inner part of the housing (1), with the bottom of the blower box (21) completely open. The filter block (23) is fixedly installed at the bottom inner part of the blower box (21), completely sealing the bottom of the blower box (21). The heat exchange pipeline (22) is located at the top inner part of the blower box (21). A blower is installed on the outside of the housing (1). 4) The blower (4) has its air outlet connected to the inner top of the air box (21) via a hose. The heat exchange pipeline (22) is provided with at least one medium inlet and at least one medium outlet. Both the medium inlet and the medium outlet are provided with extensions that pass through the air box (21) and the box body (1). The extensions of the medium inlet and the medium outlet located outside the box body (1) are connected to a heat exchanger (5). The heat exchanger (5) is used to provide a constant temperature heat exchange medium inside the heat exchange pipeline (22).

3. The temperature control module (2) of the high-temperature reverse polarization testing device according to claim 1, characterized in that: The exhaust module (3) includes a collection box (31) and an exhaust fan (32). The collection box (31) is fixedly installed at the bottom of the box body (1). The top of the collection box (31) is completely open. An exhaust pipe is fixedly installed at the bottom of the collection box (31). The bottom end of the exhaust pipe passes through the box body (1) and extends to the outside of the box body (1). The top end of the exhaust pipe communicates with the inside of the collection box (31). The exhaust fan (32) is located inside the exhaust pipe.

4. The temperature control module (2) of the high-temperature reverse bias testing device according to claim 3, characterized in that: The inner bottom of the collection box (31) is configured as a sloping surface that is recessed downward at the center.

5. The temperature control module (2) of the high-temperature reverse polarization testing device according to claim 1, characterized in that: The temperature control module (2) is equipped with a temperature sensor, which is used to monitor the internal temperature of the temperature control module (2).

6. The temperature control module (2) of the high-temperature reverse polarization testing device according to claim 1, characterized in that: The inlet and outlet of the box (1) are both equipped with movable partitions.

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